Claims
- 1. An integrated precursor delivery system apparatus which integrates a precursor delivery system with a processing chamber, the apparatus comprising:
a hollow processing chamber comprising a removable chamber lid for allowing manual access to the inside of the processing chamber; a liquid precursor container mounted on the chamber lid for storing the precursor in bulk liquid form; a carrier gas system connected to an inlet of the liquid precursor container; and a precursor delivery line communicated with the liquid precursor container and the processing chamber; whereby the precursor delivery line delivers vaporized precursor and carrier gas from the liquid precursor container to the processing chamber with the precursor delivery line remaining intact during the removal of the chamber lid.
- 2. An apparatus as in claim 23 further comprising a precursor heater to heat the precursor container.
- 3. An apparatus as in claim 23 in which the precursor delivery system further comprises a delivery line heater to heat the precursor delivery line.
- 4. An apparatus as in claim 23 in which the precursor delivery system further comprises a precursor metering device to control the flow rate of the vaporized precursor and carrier gas.
- 5. An apparatus as in claim 26 in which the precursor metering device is a mass flow controller.
- 6. An apparatus as in claim 23 further comprising a precursor refilling system for refilling the liquid precursor container.
- 7. An apparatus as in claim 28 in which the precursor refilling system comprising flexible refilling lines to accommodate the movement of the chamber lid.
- 8. An apparatus as in claim 23 further comprising a plurality of integrated precursor delivery systems.
- 9. An apparatus as in claim 23 further comprising a remote precursor delivery system.
- 10. An apparatus as in claim 31 in which the remote precursor delivery system provides gaseous precursor.
- 11. An apparatus as in claim 31 in which the remote precursor delivery system comprises flexible lines to accommodate the movement of the chamber lid.
- 12. An apparatus as in claim 31 in which the remote precursor delivery system comprises an o-ring seal between the chamber lid and the rest of the hollow processing chamber to accommodate the movement of the chamber lid.
Parent Case Info
[0001] This application is a continuation-in-part of application Ser. No. 09/596,517, filed Jun. 19, 2000.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09596517 |
Jun 2000 |
US |
Child |
10434376 |
May 2003 |
US |