by evaporation without using carrier gas in contact with the source material

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CPC
C23C16/4485

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4485by evaporation without using carrier gas in contact with the source material

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Low temperature growth of transition metal chalcogenides
- Patent number 12,110,584
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Chandan Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor source arrangement and atomic layer deposition apparatus
- Patent number 12,000,043
- Issue date Jun 4, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus and a method of forming...
- Patent number 12,000,042
- Issue date Jun 4, 2024
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical supply apparatus, method for removing particles from chemi...
- Patent number 11,981,995
- Issue date May 14, 2024
- Semes Co., Ltd.
- Yong Hoon Hong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor supply unit, substrate processing system, and method of f...
- Patent number 11,959,170
- Issue date Apr 16, 2024
- Samsung Electronics Co., Ltd.
- Soyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and associated accessories, methods and uses for visualis...
- Patent number 11,937,919
- Issue date Mar 26, 2024
- The Secretary of State for Defence
- Roberto Stefano Pasquale King
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Graphene synthesis
- Patent number 11,885,012
- Issue date Jan 30, 2024
- Commonwealth Scientific and Industrial Research Organization
- Dong Han Seo
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 11,869,764
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus, and method of manufactur...
- Patent number 11,866,822
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus and a method of forming...
- Patent number 11,851,755
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite coating and fabrication method thereof
- Patent number 11,814,542
- Issue date Nov 14, 2023
- Nano and Advanced Materials Institute Limited
- Song Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source sublimator
- Patent number 11,773,486
- Issue date Oct 3, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of thick inorganic coating on a polarizer
- Patent number 11,746,418
- Issue date Sep 5, 2023
- Moxtek, Inc.
- Matthew R. Linford
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporator, deposition arrangement, deposition apparatus and method...
- Patent number 11,713,506
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Stefan Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source sublimator
- Patent number 11,634,812
- Issue date Apr 25, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating zone separation for reactant evaporation system
- Patent number 11,624,113
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid vaporization/supply system of metal halide for thin film depo...
- Patent number 11,613,809
- Issue date Mar 28, 2023
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Atsushi Itsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,581,186
- Issue date Feb 14, 2023
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing display apparatus
- Patent number 11,534,790
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Sangjin Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,476,112
- Issue date Oct 18, 2022
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential infiltration synthesis apparatus and a method of forming...
- Patent number 11,447,861
- Issue date Sep 20, 2022
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus and gas supply method
- Patent number 11,427,907
- Issue date Aug 30, 2022
- Showa Denko K.K.
- Takanori Aoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlling a flow process material to a d...
- Patent number 11,393,703
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for treating superconducting cavities
- Patent number 11,266,005
- Issue date Mar 1, 2022
- Fermi Research Alliance, LLC
- Sam Posen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for generating process gases
- Patent number 11,154,792
- Issue date Oct 26, 2021
- RASIRC, Inc.
- Jeffrey Spiegelman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical delivery chamber for self-assembled monolayer processes
- Patent number 11,066,747
- Issue date Jul 20, 2021
- APPLIED MATERIALS, INC.
- Qiwei Liang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid material vaporization and supply device, and control program
- Patent number 11,066,746
- Issue date Jul 20, 2021
- Horiba Stec, Co., Ltd.
- Hideaki Miyamoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Graphene synthesis
- Patent number 11,060,185
- Issue date Jul 13, 2021
- Commonwealth Scientific and Industrial Research Organisation
- Dong Han Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor supply unit, substrate processing system, and method of f...
- Patent number 11,047,045
- Issue date Jun 29, 2021
- Samsung Electronics Co., Ltd.
- Soyoung Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
METAL GETTERS IN VAPORIZERS FOR IMPURITY REMOVAL
- Publication number 20250019822
- Publication date Jan 16, 2025
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PROCESS FOR PRODUCING COATED SUBSTRATES AND COATED SUBSTRATE AND US...
- Publication number 20250003080
- Publication date Jan 2, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Kevin SCHUCK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...
- Publication number 20240425975
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- ADEKA CORPORATION
- Masako HATASE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SELECTIVE RUTHENIUM DEPOSITION AND RELATED SYSTEMS AND METHODS
- Publication number 20240412981
- Publication date Dec 12, 2024
- Entegris, Inc.
- Phil S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL
- Publication number 20240401194
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Shuaidi Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COBALT COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND MET...
- Publication number 20240337014
- Publication date Oct 10, 2024
- ADEKA CORPORATION
- Tomoharu YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...
- Publication number 20240327979
- Publication date Oct 3, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING COATED SUBSTRATES, COATED SUBSTRATE, AND USE T...
- Publication number 20240327309
- Publication date Oct 3, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Kevin SCHUCK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE
- Publication number 20240295021
- Publication date Sep 5, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Thomas KLOTZBÜCHER
- G02 - OPTICS
Information Patent Application
APPARATUS AND ASSOCIATED ACCESSORIES, METHODS AND USES FOR VISUALIS...
- Publication number 20240245322
- Publication date Jul 25, 2024
- The Secretary of State for Defence
- ROBERTO STEFANO PASQUALE KING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF PRODUCING SINGLE-LAYER TRANSITION METAL SELENIDE
- Publication number 20240218507
- Publication date Jul 4, 2024
- City University of Hong Kong
- Thuc Hue LY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SOLID SOURCE REFILL
- Publication number 20240191352
- Publication date Jun 13, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, METHOD FOR...
- Publication number 20240167155
- Publication date May 23, 2024
- ADEKA CORPORATION
- Tomoharu YOSHINO
- C07 - ORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
- Publication number 20240096615
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Akinori TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
- Publication number 20240052484
- Publication date Feb 15, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...
- Publication number 20230407520
- Publication date Dec 21, 2023
- Regents of the University of Minnesota
- Bharat Jalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230383402
- Publication date Nov 30, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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TRAY ASSEMBLIES FOR PRECURSOR DELIVERY SYSTEMS AND RELATED METHODS
- Publication number 20230366085
- Publication date Nov 16, 2023
- Entegris, Inc.
- Benjamin Harrison Olson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230313370
- Publication date Oct 5, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method of Manufacturing Oxide Film and Display Appara...
- Publication number 20230220547
- Publication date Jul 13, 2023
- LG Display Co., Ltd.
- Jaeyoon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230183861
- Publication date Jun 15, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS
- Publication number 20230183856
- Publication date Jun 15, 2023
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS
- Publication number 20230175128
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Davinder Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230077197
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Akinori TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PRECURSOR DELIVERY SYSTEMS, PRECURSOR SUPPLY PACKAGES, AND RELATED...
- Publication number 20230068384
- Publication date Mar 2, 2023
- Entegris, Inc.
- Paolo Moreschini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE COATING AND FABRICATION METHOD THEREOF
- Publication number 20230027265
- Publication date Jan 26, 2023
- NANO AND ADVANCED MATERIALS INSTITUTE LIMITED
- Song WANG
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Information Patent Application
LOW TEMPERATURE GROWTH OF TRANSITION METAL CHALCOGENIDES
- Publication number 20220411918
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Chandan Das
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SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS AND A METHOD OF FORMING...
- Publication number 20220389578
- Publication date Dec 8, 2022
- ASM IP HOLDING B.V.
- Jan Willem Maes
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APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...
- Publication number 20220351988
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- ALEXANDER LERNER
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Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20220307130
- Publication date Sep 29, 2022
- SCREEN Holdings Co., Ltd.
- Shogo Kunieda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by evaporation without using carrier gas in contact with the source material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Low temperature growth of transition metal chalcogenides

Precursor source arrangement and atomic layer deposition apparatus

Sequential infiltration synthesis apparatus and a method of forming...

Chemical supply apparatus, method for removing particles from chemi...

Sequential infiltration synthesis apparatus

Precursor supply unit, substrate processing system, and method of f...

Apparatus and associated accessories, methods and uses for visualis...

Graphene synthesis

Substrate processing apparatus, substrate processing method and non...

Vaporizer, substrate processing apparatus, and method of manufactur...

Sequential infiltration synthesis apparatus and a method of forming...

Composite coating and fabrication method thereof

Solid source sublimator

Chemical vapor deposition of thick inorganic coating on a polarizer

Evaporator, deposition arrangement, deposition apparatus and method...

Solid source sublimator

Heating zone separation for reactant evaporation system

Solid vaporization/supply system of metal halide for thin film depo...

Sequential infiltration synthesis apparatus

Apparatus and method of manufacturing display apparatus

Substrate processing apparatus

Sequential infiltration synthesis apparatus and a method of forming...

Gas supply apparatus and gas supply method

Apparatus and method for controlling a flow process material to a d...

Methods for treating superconducting cavities

Methods and systems for generating process gases

Chemical delivery chamber for self-assembled monolayer processes

Liquid material vaporization and supply device, and control program

Graphene synthesis

Precursor supply unit, substrate processing system, and method of f...

Patents Applicationslast 30 patents

METAL GETTERS IN VAPORIZERS FOR IMPURITY REMOVAL

PROCESS FOR PRODUCING COATED SUBSTRATES AND COATED SUBSTRATE AND US...

THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...

SELECTIVE RUTHENIUM DEPOSITION AND RELATED SYSTEMS AND METHODS

METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL

COBALT COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND MET...

METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...

METHOD FOR PRODUCING COATED SUBSTRATES, COATED SUBSTRATE, AND USE T...

METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE

APPARATUS AND ASSOCIATED ACCESSORIES, METHODS AND USES FOR VISUALIS...

METHODS OF PRODUCING SINGLE-LAYER TRANSITION METAL SELENIDE

METHODS AND APPARATUS FOR SOLID SOURCE REFILL

TIN COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, METHOD FOR...

SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...

SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS

SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...

SOLID SOURCE SUBLIMATOR

TRAY ASSEMBLIES FOR PRECURSOR DELIVERY SYSTEMS AND RELATED METHODS

SOLID SOURCE SUBLIMATOR

Apparatus and Method of Manufacturing Oxide Film and Display Appara...

SOLID SOURCE SUBLIMATOR

SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS

HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

PRECURSOR DELIVERY SYSTEMS, PRECURSOR SUPPLY PACKAGES, AND RELATED...

COMPOSITE COATING AND FABRICATION METHOD THEREOF

LOW TEMPERATURE GROWTH OF TRANSITION METAL CHALCOGENIDES

SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS AND A METHOD OF FORMING...

APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...

SUBSTRATE TREATING METHOD