| Number | Name | Date | Kind |
|---|---|---|---|
| 3787873 | Sato et al. | Jan 1974 | |
| 4245003 | Oransky et al. | Jan 1981 | |
| 4496957 | Smith et al. | Jan 1985 | |
| 5028467 | Maruyama et al. | Jul 1991 | |
| 5104767 | Nakamura | Apr 1992 | |
| 5156938 | Foley et al. | Oct 1992 | |
| 5326619 | Dower et al. | Jul 1994 |
| Number | Date | Country |
|---|---|---|
| 62-151394 | Jul 1987 | JPX |
| 64-45689 | Feb 1989 | JPX |
| 3-53984 | Mar 1991 | JPX |
| Entry |
|---|
| The CRC Handbook of Chemistry and Physics (1982-83) p. B-99. |
| Kirk-Othmer Encyclopedia of Chamical Technology, Third Ed., vol. 17, pp. 375-398 .COPYRGT.1982. |