Number | Date | Country | Kind |
---|---|---|---|
46015/78 | Nov 1978 | GBX |
Number | Name | Date | Kind |
---|---|---|---|
3958188 | Fletcher et al. | May 1976 | |
4002896 | Davies et al. | Jan 1977 | |
4011403 | Epstein et al. | Mar 1977 | |
4063106 | Ashkin et al. | Dec 1977 | |
4107628 | Hill et al. | Aug 1978 | |
4161944 | Muckerheide | Jul 1979 |
Entry |
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Gat et al., "A Laser-Scanning Apparatus For Annealing . . . ", Appl. Phys. Lett., vol. 32, No. 3, Feb. 1978, pp. 142-144. |
Robinson, "Laser Annealing: Processing Semiconductors . . . ", Science, vol. 201, No. 4353, Jul. 1978, pp. 333-335. |
Gatet al., "CW Laser Anneal Of Polycrystalline Silicon: . . . ", Appl. Phys. Lett., vol. 33, No. 8, Oct. 1978, pp. 775-778. |
Bertolotti et al., "Structure Transitions In Amorphous Silicon . . . ", J. Appl. Phys., vol. 50, No. 1, Jan. 1979, pp. 259-265. |