This application claims priority to Korean Patent Application No. 10-2013-0136302, filed on Nov. 11, 2013, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein in its entirety by reference.
1. Field
The exemplary embodiments relate to laser-induced ultrasound generators and methods of manufacturing the same.
2. Description of the Related Art
When a laser is irradiated onto a material such as a liquid or a solid, the irradiated material absorbs light energy to generate instant thermal energy, and the thermal energy generates an acoustic wave due to thermoelasticity of the material.
As an absorption ratio and a thermoelastic coefficient of materials vary according to a light wavelength of the materials, ultrasound waves generated by different materials differ in amplitude in response to the same light energy. The generated ultrasound waves are used in an analyzer of materials, a non-destructive tester, and a photoacoustic tomography, or the like.
A laser-induced ultrasound generator (hereinafter referred to as an ultrasound generator) is an apparatus for generating an ultrasound wave by using a laser. By using the ultrasound wave, it may be diagnosed as to whether, for example, tumors are formed in the body of a patient, that is, in an object. The ultrasound wave is generated based on the principle that energy of absorbed light is converted into pressure.
A conventional laser-induced ultrasound generator uses a thermoelastic material layer having a low light absorption ratio, and thus, a low ultrasound generation efficiency.
Provided are laser-induced ultrasound generators with an increased ultrasound generation efficiency.
Provided are methods of manufacturing the laser-induced ultrasound generators.
Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented exemplary embodiments.
According to an aspect of an exemplary embodiment, there is provided a laser-induced ultrasound generator including: a substrate including a plurality of nanostructures provided on a first surface of the substrate; and a thermoelastic layer provided on the first surface of the substrate, the thermoelastic layer being configured to generate an ultrasound by absorbing a laser beam incident onto a second surface of the substrate, the second surface facing the first surface.
The plurality of nanostructures may include a plurality of cylinder-shaped nanopillars.
Each of the plurality of nanopillars may have a diameter of about 10 nm to about 1000 nm.
A gap between adjacent nanopillars may be about 10 nm to about 1000 nm.
The thermoelastic layer may include a metal or a polymer material.
The substrate may include a laser beam-transmitting material.
The laser-induced ultrasound generator may further include a matching layer provided on the thermoelastic layer, wherein a surface of the matching layer faces the first surface of the substrate.
The matching layer may include a polymer.
The laser-induced ultrasound generator may further include a laser oscillator configured to irradiate the laser beam onto the second surface of the substrate.
According to another aspect of an exemplary embodiment, there is provided a method of manufacturing a laser-induced ultrasound generator, the method including: forming a thin metal film on a substrate; converting the thin metal film into a plurality of metal dots by annealing the substrate; forming a plurality of nanostructures on the substrate by dry-etching the substrate, the dry-etching comprising using the plurality of metal dots as a mask; removing the plurality of metal dots; and forming a thermoelastic layer on the substrate to cover the plurality of nanostructures.
The forming of the thin metal film may include forming a thin metal film having a thickness of about 10 nm to about 1000 nm.
The converting of the thin metal film into the plurality of metal dots may include forming metal dots, each having a diameter of about 10 nm to about 1000 nm, as the plurality of metal dots.
The forming of the plurality of nanostructures may include forming a plurality of nanopillars, each having a diameter corresponding to a size of one of the plurality of metal dots, as the plurality of nanostructures.
The method may further include forming a matching layer on the thermoelastic layer, a surface of the matching layer facing a surface of the substrate.
These and/or other aspects will become apparent and more readily appreciated from the following description of the exemplary embodiments, taken in conjunction with the accompanying drawings in which:
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings, wherein thicknesses of layers or regions illustrated in the drawings are exaggerated for clarity of description. In this regard, the present exemplary embodiments may have different forms and should not be construed as being limited to the descriptions set forth herein. It will be understood that when an element is referred to as being “on” another element, it can be directly on the other element, or intervening elements may also be present. Like reference numerals refer to the like elements throughout and a detailed description thereof will be omitted.
Referring to
The substrate 110 may be formed of a material having a relatively high light transmittivity so that a laser beam L may be incident onto the thermoelastic layer 130 without any loss. The substrate 110 may be formed of quartz, fused silicon, glass or the like. The laser beam L may be incident onto a first surface 110a of the substrate 110, and a plurality of nanostructures may be formed on a surface of the substrate 110 opposite to the first surface 110a. The nanostructures may be cylinder-shaped nanopillars 114. The nanopillars 114 may be formed by etching the substrate 110 and thus, the nanopillars may be formed to be expanded from the substrate 110.
Although the nanopillars 114 are illustrated as the nanostructures according to the current exemplary embodiment, the exemplary embodiments are not limited thereto. For example, nano-cone structures may be formed as the nanostructures instead of the nanopillars 114.
The nanopillars 114 may have a diameter of about 10 nm to about 1000 nm, and a gap between adjacent nanopillars 114 may be about 10 nm to about 1000 nm.
The thermoelastic layer 130 expands upon absorbing an irradiated laser beam L, and an ultrasound U is generated according to the expansion of the thermoelastic layer 130. The thermoelastic layer 130 may be formed of a material having a relatively high thermal expansion coefficient. The thermoelastic layer 130 may be a thin film so as to easily thermally expand or contract. For example, the thickness of the thermoelastic layer 130 may be several μm or less. The thermoelastic layer 130 may be formed of a metal or a polymer material. For example, the thermoelastic layer 130 may be formed of a metal such as Cr, Ti, Au, or Al or of a polymer material such as black polydimethylsiloxane (PDMS) mixed with carbon or carbon tapes.
The thermoelastic layer 130 may fill spaces between the nanopillars 114. The thermoelastic layer 130 may completely fill spaces between the nanopillars 114 as illustrated in
If the thermoelastic layer 130 is formed of the metal, the thermoelastic layer 130 may be formed as a double layer. For example, the thermoelastic layer 130 may include an adhesive layer formed of Ti or Cr and a metal layer including a material such as Au or Al on the adhesive layer.
The matching layer 150 may modify acoustic impedance of an ultrasound U generated in the thermoelastic layer 130 stepwise so that the acoustic impedance of the ultrasound U is similar to that of an object. The thermoelastic layer 130 may be a single layer or may be formed of a plurality of layers. The matching layer 150 may be formed of a polymer material. For example, the matching layer 150 may be formed of parylene, polydimethylsiloxane (PMDS) or polyimide.
The matching layer 150 on the thermoelastic layer 130 may be omitted. In particular, if the thermoelastic layer 130 is formed of a polymer material, the matching layer 150 may be omitted.
The laser oscillator 170 irradiates the laser beam L onto the substrate 110, from which an ultrasound U is generated. For example, the laser oscillator 170 may be a pulse laser, and a pulse width of the laser may be in the range of nanoseconds or picoseconds.
After the laser beam L is transmitted through the substrate 110 and then is irradiated onto the thermoelastic layer 130, an ultrasound U is generated in the thermoelastic layer 130 due to thermoelasticity. The ultrasound U is irradiated onto an object, a portion of the ultrasound U is absorbed by the object, and the remainder of the ultrasound U is reflected. By receiving a signal reflected by the object, that is, an echo signal of the ultrasound U, a shape of the object and characteristics of tissues of the object may be measured.
The ultrasound generator 110 may convert light into the ultrasound U based on the following principle. When light having an energy density of I(x, y, z, t) is irradiated onto the thermoelastic layer 130, the thermoelastic layer 130 generates heat H as expressed as in Equation 1 below.
H=(1−R)·I·μeμz ([Equation 1]
Here, R denotes a reflection coefficient of a thermoelastic layer with respect to the light, and μ denotes an absorption coefficient of the thermoelastic layer with respect to the laser beam, and z denotes a vertical distance between the thermoelastic layer and a surface onto which the laser beam is incident.
In the thermoelastic layer, a variation in temperature (ΔT) as expressed in Equation 2 below is generated.
Here, k denotes a thermal conductivity of the thermoelastic layer, C denotes a heat propagation speed in the thermoelastic layer, ρ denotes a density of the thermoelastic layer, and Cp denotes a specific heat of the thermoelastic layer.
Due to the variation in temperature (ΔT), a variation in volume (ΔV) as in Equation 3 below is generated in the thermoelastic layer.
Here, β denotes a thermal coefficient of volume of the thermoelastic layer.
An ultrasound having a pressure P as expressed in Equation 4 below is generated according to the variation in volume (ΔV) of the thermoelastic layer.
Here, vs denotes a speed at which the ultrasound travels.
If the same material is used for the thermoelastic layer in the ultrasound generator, an ultrasound generation efficiency may be improved only by increasing the light absorption ratio of the thermoelastic layer.
According to exemplary embodiments, the nanopillars 114 are formed between the substrate 110, which is an insulation material, and the thermoelastic layer 130, and thus, light irradiated onto the nanopillars 114 generates surface plasmon polaritons between the substrate 110 and the thermoelastic layer 130. If the nanopillars 114, which are nanostructures in a three-dimensional shape, are formed between the substrate 110 and the thermoelastic layer 130, the surface plasmon polaritons become trapped in the nanostructures, and a light absorption ratio in the thermoelastic layer 130 is increased. Thus, an ultrasound generation efficiency may be improved.
Referring to
Therefore, the thermoelastic layer of the ultrasound generator of the current exemplary embodiment has an increased light absorption ratio due to a function of the nanopillars formed between the substrate and the thermoelastic layer. Furthermore, when the same laser energy is used in the ultrasound generator of the current exemplary embodiment and the conventional ultrasound generator, the ultrasound generator of the current exemplary embodiment generates an ultrasound having a pressure greater than that of an ultrasound generated by the conventional ultrasound generator.
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The substrate 210 is dipped into a solution which is capable of removing the metal dots 222, thereby removing the metal dots 222 from the substrate 210.
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When the thermoelastic layer 230 is formed of a polymer material, the matching layer 250 may be omitted.
According to the method of manufacturing a laser-induced ultrasound generator, as metal dots formed by annealing are used in forming nanopillars, an additional mask process involving a nano-sized mask is not required.
It should be understood that the exemplary embodiments described herein should be considered in a descriptive sense only and not for purposes of limitation. Descriptions of features or aspects within each exemplary embodiment should typically be considered as available for other similar features or aspects in other exemplary embodiments.
While one or more exemplary embodiments have been described with reference to the figures, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present disclosure as defined by the following claims.
Number | Date | Country | Kind |
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10-2013-0136302 | Nov 2013 | KR | national |