Number | Name | Date | Kind |
---|---|---|---|
3925603 | Naruse et al. | Dec 1975 | |
4041530 | Kramer et al. | Aug 1977 | |
4085423 | Tsunola et al. | Apr 1978 | |
4160269 | Kramer et al. | Jul 1979 | |
4290122 | Bates et al. | Sep 1981 | |
4334300 | Arquie et al. | Jun 1982 | |
4344164 | Bricot et al. | Aug 1982 | |
4399529 | Leterme et al. | Aug 1983 | |
4402061 | Hazel et al. | Aug 1983 | |
4417330 | Hazel et al. | Nov 1983 | |
4562568 | Hazel et al. | Dec 1985 |
Entry |
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Makosch et al.; "Interferometric method for step height measurements on surfaces with variable title"; IBM Tech Disclosure Bulletin, vol. 23, No. 4, Sept. 1980, pp. 1485-1486. |