Laser processing beam machine

Abstract

A laser processing beam machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam to the workpiece held on the chuck table, and a processing-feed means for moving the chuck table and the laser beam application means relative to each other, wherein the laser beam application means comprises a laser beam oscillation means for oscillating a laser beam and a condenser for converging the laser beam oscillated by the laser beam oscillation means; and the condenser comprises a condenser lens opposed to the workpiece held on the chuck table, a cylindrical lens arranged on the upstream side in the laser beam application direction of the condenser lens, and an interval adjustment mechanism for adjusting the interval between the condenser lens and the cylindrical lens.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a laser processing beam machine constituted according to the present invention;

FIG. 2 is a constitutional block diagram of laser beam application means provided in the laser processing beam machine shown in FIG. 1;

FIG. 3 is an explanatory diagram of a processing head comprising a condenser of a first embodiment constituting the laser beam application means shown in FIG. 2;

FIG. 4 is a perspective view of the processing head shown in FIG. 3;

FIG. 5 is a perspective view of a cylindrical lens unit constituting the condenser of the processing head shown in FIG. 3;

FIG. 6 is an exploded perspective view of the constituent members of the cylindrical lens unit shown in FIG. 5;

FIG. 7 is a sectional view of a lens holding member holding a cylindrical lens constituting the cylindrical lens unit shown in FIG. 5;

FIG. 8 is a perspective view of an interval adjustment mechanism for adjusting the interval between a condenser lens and a cylindrical lens unit provided in the laser processing beam machine shown in FIG. 1;

FIG. 9 is a perspective view of the interval adjustment mechanism shown in FIG. 8 in which the cylindrical lens unit is set;

FIGS. 10( a), 10(b) and 10(c) are each explanatory diagrams showing a state wherein a focal spot having a circular section is formed by a condenser lens and a cylindrical lens which is a convex lens;

FIGS. 11( a), 11(b) and 11(c) are each explanatory diagrams showing a state wherein a focal spot having an elliptic section is formed by a condenser lens and a cylindrical lens which is a convex lens;

FIGS. 12( a), 12(b) and 12(c) are each explanatory diagrams showing a state wherein a focal spot having an elliptic section is formed by a condenser lens and a cylindrical lens which is a concave lens;

FIGS. 13( a) and 13(b) are explanatory diagrams showing a groove forming step which is carried out by the laser processing beam machine shown in FIG. 1;

FIG. 14 is an explanatory diagram of a processing head comprising a condenser of a second embodiment;

FIG. 15 is a perspective view of a first cylindrical lens unit constituting the condenser of the processing head shown in FIG. 14;

FIG. 16 is a perspective view of a second cylindrical lens unit constituting the condenser of the processing head shown in FIG. 14;

FIG. 17 is a perspective view of the interval adjustment mechanism in which the first cylindrical lens unit and the second cylindrical lens unit are set;

FIGS. 18( a), 18(b) and 18(c) are each explanatory diagrams showing a state wherein a focal spot having a circular section is formed by the condenser lens, the first cylindrical lens and the second cylindrical lens; and

FIGS. 19( a), 19(b) and 19(c) are each explanatory diagrams showing a state wherein a focal spot having an elliptic section is formed by the condenser lens, the first cylindrical lens and the second cylindrical lens.

Claims

1. A laser processing beam machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam to the workpiece held on the chuck table, and a processing-feed means for moving the chuck table and the laser beam application means relative to each other, wherein the laser beam application means comprises a laser beam oscillation means for oscillating a laser beam and a condenser for converging the laser beam oscillated by the laser beam oscillation means; andthe condenser comprises a condenser lens opposed to the workpiece held on the chuck table, a cylindrical lens arranged on the upstream side in the laser beam application direction of the condenser lens, and an interval adjustment mechanism for adjusting the interval between the condenser lens and the cylindrical lens.

2. The laser processing beam machine according to claim 1, wherein the cylindrical lens is a convex lens and arranged to converge the laser beam in a processing-feed direction.

3. The laser processing beam machine according to claim 1, wherein the cylindrical lens is a concave lens and arranged to diverge the laser beam in a processing-feed direction.

4. A laser processing beam machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam to the workpiece held on the chuck table, and a feed means for moving the chuck table and the laser beam application means relative to each other, wherein the laser beam application means comprises a laser beam oscillation means for oscillating a laser beam and a condenser for converging the laser beam oscillated by the laser beam oscillation means; andthe condenser comprises a condenser lens opposed to the workpiece held on the chuck table, a first cylindrical lens and a second cylindrical lens arranged in the upstream side in the laser beam application direction of the condenser lens, and an interval adjustment mechanism for adjusting the interval between the first cylindrical lens and the second cylindrical lens.

5. The laser processing beam machine according to claim 4, wherein the first cylindrical lens is arranged on the condenser side, the second cylindrical lens is arranged on the upstream side in the laser beam application direction of the first cylindrical lens, and the interval adjustment mechanism moves the second cylindrical lens to adjust the interval between the first cylindrical lens and the second cylindrical lens.

6. The laser processing beam machine according to claim 4 or 5, wherein the first cylindrical lens is a convex lens and the second cylindrical lens is a concave lens.

7. The laser processing beam machine according to claim 4 or 5, wherein the first cylindrical lens and the second cylindrical lens are arranged to converge or diverge the laser beam in the processing-feed direction.