The cutting of holes and slots in thin substrates of transparent materials, such as glass, can be accomplished by focused laser beams that are used to ablate material along the contour of a hole or slot, where multiple passes are used to remove layer after layer of material until the inner plug no longer is attached to the outer substrate piece. The problem with such processes is that they require many passes (dozens or even more) of the laser beam to remove the material layer by layer, they generate significant ablative debris which will contaminate the surfaces of the part, and they generate a lot of subsurface damage (>100 μm) along the edge of the contour.
Therefore, there is a need for an improved process for cutting holes and slots.
Embodiments described herein relate to a process for cutting and separating interior contours in thin substrates of transparent materials, in particular glass.
In one embodiment, a method of laser drilling a material includes focusing a pulsed laser beam into a laser beam focal line, viewed along the beam propagation direction, directing the laser beam focal line into the material at a first location, the laser beam focal line generating an induced absorption within the material, the induced absorption producing a hole along the laser beam focal line within the material, translating the material and the pulsed laser beam relative to each other starting from the first location along a first closed contour, thereby laser drilling a plurality of holes along the first closed contour within the material, translating the material and the pulsed laser beam relative to each other starting from the first location along a first closed contour, thereby laser drilling a plurality of holes along the first closed contour within the material, and directing a carbon dioxide (CO2) laser into the material around a second closed contour contained within the first closed contour to facilitate removal of an inner plug of the material along the first closed contour.
The foregoing will be apparent from the following more particular description of example embodiments of the invention, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating embodiments of the present invention.
A description of example embodiments follows.
Disclosed herein is a process for cutting and separating interior contours in thin substrates of transparent materials, in particular glass. The method involves the utilization of an ultra-short pulse laser to form perforation or holes in the substrate, that may be followed by use of a CO2 laser beam to promote full separation about the perforated line. The laser process described below generates full body cuts of a variety of glasses in a single pass, with low sub-surface damage (<75 um), and excellent surface roughness (Ra<0.5 um). Sub-surface damage (SSD) is defined as the extent of cracks or “checks” perpendicular to the cut edge of the glass piece. The magnitude of the distance these cracks extend into the glass piece can determine the amount of later material removal that may be needed from grinding and polishing operations that are used to improve glass edge strength. SSD may be measured by using confocal microscope to observed light scattering from the cracks, and determining the maximum distance the cracks extend into the body of the glass over a given cut edge.
One embodiment relates a method to cut and separate interior contours in materials such as glass, with a separation process that exposes the high quality edge generated by the above-mentioned perforation process without damaging it by the separation process. When a part is cut out of a starting sheet of substrate, it may be comprised of outer or inner contours, as shown in
The challenge with separating an interior contour, such as a hole in a glass piece required for the “home” or power button on a smart phone, is that even if the contour is well perforated and a crack propagates around it, the inner plug of material may be under compressive pressure and locked in place by the material surrounding the plug. This means that the challenging part is an automated release process that allows the plug to drop out. This problem occurs regardless of whether or not the material to be cut is high stress and easy to form cracks in, like in the case of a chemically strengthened glass substrate like Gorilla® Glass, or if the material is low stress, like in the case of Eagle XG® glass. A high stress glass is a glass having central (in the center of the thickness of the glass) tension greater than about 24 MPa; while a low stress glass typically has a central tension less than about 24 MPa.
The present application is generally directed to a laser method and apparatus for precision cutting and separation of arbitrary shapes out of glass substrates in a controllable fashion, with negligible debris and minimum damage to part edges that preserves strength. The developed laser method relies on the material transparency to the laser wavelength in linear regime, or low laser intensity, which allows maintenance of a clean and pristine surface quality and on the reduced subsurface damage created by the area of high intensity around the laser focus. One of the key enablers of this process is the high aspect ratio of the defect created by the ultra-short pulsed laser. It allows creation of a fault line that extends from the top to the bottom surfaces of the material to be cut. In principle, this defect can be created by a single laser pulse and if necessary, additional pulses can be used to increase the extension of the affected area (depth and width).
Using a short pulse picosecond laser and optics which generate a focal line, a closed contour is perforated in a glass sheet. The perforations are less than a few microns in diameter, typical spacing of the perforations is 1-15 μm, and the perforations go entirely through the glass sheet.
To generate a weak point to facilitate material removal, an additional contour could then be optionally perforated with the same process a few hundred microns to the interior of the first contour.
A focused CO2 laser beam, of a high enough power density to ablate the glass material, is then traced around the second contour, causing the glass material to fragment and be removed. One or more passes of the laser may be used. A high pressure assist gas is also forced out through a nozzle collinearly to the CO2 beam, to provide additional force to drive the glass material out of the larger glass piece.
The method to cut and separate transparent materials is essentially based on creating a fault line on the material to be processed with an ultra-short pulsed laser. Depending on the material properties (absorption, CTE, stress, composition, etc.) and laser parameters chosen for processing that determined material, the creation of a fault line alone can be enough to induce self-separation. This is the case for most strengthened glasses (those that have already undergone ion-exchange before cutting) that have significant (i.e., greater than about 24 MPa) internal or central tension (CT). In this case, no secondary separation processes, such as tension/bending forces or CO2 laser, are necessary.
In some cases, the created fault line is not enough to separate the glass automatically. This is often the case for display glasses such as Eagle XG®, Lotus, or ion-exchangeable glasses that are cut before any ion-exchange step. Thus, a secondary process step may be necessary. If so desired, a second laser can be used to create thermal stress to separate it, for example. In the case of Corning code 2320 NIOX (non-ion exchanged Gorilla® Glass 3), we have found that separation can be achieved, after the creation of a defect line, by application of mechanical force or by tracing the existing fault line with an infrared CO2 laser beam to create thermal stress and force the parts to self-separate. Another option is to have the CO2 laser only start the separation and finish the separation manually. The optional CO2 laser separation is achieved with a defocused (i.e. spot size at the glass of 2-12 mm in diameter) continuous wave laser emitting at 10.6 μm and with power adjusted by controlling its duty cycle. Focus change (i.e., extent of defocusing) is used to vary the induced thermal stress by varying the spot size. After generation of the perforation lines, CO2 induced separation can generally be achieved by using a power at the glass of ˜40 W, a spot size of about 2 mm, and a traverse rate of the beam of ˜14-20 m/minute.
However, even if the glass has enough internal stress to start self-separation after the formation of the defect line, the geometry of the cut contour may prevent an interior glass part from releasing. This is the case for most closed or inner contours, such as simple holes or slots. The interior portion of the aperture will remain in place due to the compression forces present in the glass sheet—the cracks may propagate between the perforated defects, but no room exists to allow the piece to fall out of the mother sheet.
Forming the Defect or Perforation Line
For the first process step, there are several methods to create that defect line. The optical method of forming the line focus can take multiple forms, using donut shaped laser beams and spherical lenses, axicon lenses, diffractive elements, or other methods to form the linear region of high intensity. The type of laser (picosecond, femtosecond, etc.) and wavelength (IR, green, UV, etc.) can also be varied, as long as sufficient optical intensities are reached to create breakdown of the substrate material. This wavelength may be, for example, 1064, 532, 355 or 266 nanometers.
Ultra-short pulse lasers can be used in combination with optics that generate a focal line to fully perforate the body of a range of glass compositions. In some embodiments, the pulse duration of the individual pulses is in a range of between greater than about 1 picoseconds and less than about 100 picoseconds, such as greater than about 5 picoseconds and less than about 20 picoseconds, and the repetition rate of the individual pulses can be in a range of between about 1 kHz and 4 MHz, such as in a range of between about 10 kHz and 650 kHz.
In addition to a single pulse operation at the aforementioned individual pulse repetition rates, the pulses can be produced in bursts of two pulses, or more (such as, for example, 3 pulses, 4, pulses, 5 pulses, 10 pulses, 15 pulses, 20 pulses, or more) separated by a duration between the individual pulses within the pulse burst that is in a range of between about 1 nsec and about 50 nsec, for example, 10-50 nsec, or 10 to 30 nsec, such as about 20 nsec, and the burst repetition frequency can be in a range of between about 1 kHz and about 200 kHz. (Bursting or producing pulse bursts is a type of laser operation where the emission of pulses is not in a uniform and steady stream but rather in tight clusters of pulses.) The pulse burst laser beam can have a wavelength selected such that the material is substantially transparent at this wavelength. The average laser power per burst measured at the material can be greater than 40 microJoules per mm thickness of material, for example between 40 microJoules/mm and 2500 microJoules/mm, or between 200 and 800 microJoules/mm. For example, for 0.5 mm-0.7 mm thick Corning 2320 non-ion exchanged glass one may use 200 μJ pulse bursts to cut and separate the glass, which gives an exemplary range of 285-400 μJ/mm. The glass is moved relative to the laser beam (or the laser beam is translated relative to the glass) to create perforated lines that trace out the shape of any desired parts.
The laser creates hole-like defect zones (or damage tracks, or defect lines) that penetrate the full depth the glass, with internal openings, for example of approximately 1 micron in diameter. These perforations, defect regions, damage tracks, or defect lines are generally spaced from 1 to 15 microns apart (for example, 2-12 microns, or 3-10 microns). The defect lines extend, for example, through the thickness of the glass sheet, and are orthogonal to the major (flat) surfaces of the glass sheet.
In one embodiment, an ultra-short (˜10 psec) burst pulsed laser is used to create this high aspect ratio vertical defect line in a consistent, controllable and repeatable manner. The detail of the optical setup that enables the creation of this vertical defect line is described below and in U.S. Application No. 61/752,489, filed on Jan. 15, 2013. The essence of this concept is to use an axicon lens element in an optical lens assembly to create a region of high aspect ratio taper-free microchannel using ultra-short (picoseconds or femtosecond duration) Bessel beams. In other words, the axicon condenses the laser beam into a region of cylindrical shape and high aspect ratio (long length and small diameter). Due to the high intensity created with the condensed laser beam, nonlinear interaction of the laser electromagnetic field and the material occurs and the laser energy is transferred to the substrate. However, it is important to realize that in the areas where the laser energy intensity is not high (i.e., glass surface, glass volume surrounding the central convergence line), nothing happens to the glass as the laser intensity is below the nonlinear threshold.
Turning to
As
As
Concrete optical assemblies 6, which can be applied to generate the focal line 2b, as well as a concrete optical setup, in which these optical assemblies can be applied, are described below. All assemblies or setups are based on the description above so that identical references are used for identical components or features or those which are equal in their function. Therefore only the differences are described below.
As the parting face eventually resulting in the separation is or must be of high quality (regarding breaking strength, geometric precision, roughness and avoidance of re-machining requirements), the individual focal lines to be positioned on the substrate surface along parting line 5 should be generated using the optical assembly described below (hereinafter, the optical assembly is alternatively also referred to as laser optics). The roughness results particularly from the spot size or the spot diameter of the focal line. In order to achieve a low spot size of, for example, 0.5 μm to 2 μm in case of a given wavelength λ of laser 3 (interaction with the material of substrate 1), certain requirements must usually be imposed on the numerical aperture of laser optics 6. These requirements are met by laser optics 6 described below.
In order to achieve the required numerical aperture, the optics must, on the one hand, dispose of the required opening for a given focal length, according to the known Abbé formulae (N.A.=n sin (theta), n: refractive index of the glass to be processes, theta: half the aperture angle; and theta=arctan (D/2f); D: aperture, f: focal length). On the other hand, the laser beam must illuminate the optics up to the required aperture, which is typically achieved by means of beam widening using widening telescopes between laser and focusing optics.
The spot size should not vary too strongly for the purpose of a uniform interaction along the focal line. This can, for example, be ensured (see the embodiment below) by illuminating the focusing optics only in a small, circular area so that the beam opening and thus the percentage of the numerical aperture only vary slightly.
According to
Lens 7 centered on the central beam is deliberately designed as a non-corrected, bi-convex focusing lens in the form of a common, spherically cut lens. Put another way, the spherical aberration of such a lens is deliberately used. As an alternative, aspheres or multi-lens systems deviating from ideally corrected systems, which do not form an ideal focal point but a distinct, elongated focal line of a defined length, can also be used (i.e., lenses or systems which do not have a single focal point). The zones of the lens thus focus along a focal line 2b, subject to the distance from the lens center. The diameter of aperture 8 across the beam direction is approximately 90% of the diameter of the beam bundle (beam bundle diameter defined by the extension to the decrease to 1/e2) (intensity) and approximately 75% of the diameter of the lens of the optical assembly 6. The focal line 2b of a non- aberration-corrected spherical lens 7 generated by blocking out the beam bundles in the center is thus used.
One disadvantage of this focal line is that the conditions (spot size, laser intensity) along the focal line, and thus along the desired depth in the material, vary and therefore the desired type of interaction (no melting, induced absorption, thermal-plastic deformation up to crack formation) may possibly only be selected in a part of the focal line. This means in turn that possibly only a part of the incident laser light is absorbed in the desired way. In this way, the efficiency of the process (required average laser power for the desired separation speed) is impaired on the one hand, and on the other hand the laser light might be transmitted into undesired deeper places (parts or layers adherent to the substrate or the substrate holding fixture) and interact there in an undesirable way (heating, diffusion, absorption, unwanted modification).
In the case shown in
It is particularly advantageous to realize the focal line positioning in such a way that at least one surface 1a, 1b is covered by the focal line, i.e. that the section of induced absorption 2c starts at least on one surface. In this way it is possible to achieve virtually ideal cuts avoiding ablation, feathering and particulation at the surface.
However, the depicted layout is subject to the following restrictions: As the focal line of axicon 9 already starts within the lens, a significant part of the laser energy is not focused into part 2c of focal line 2b, which is located within the material, in case of a finite distance between lens and material. Furthermore, length l of focal line 2b is related to the beam diameter for the available refraction indices and cone angles of axicon 9, which is why, in case of relatively thin materials (several millimeters), the total focal line is too long, having the effect that the laser energy is again not specifically focused into the material.
This is the reason for an enhanced optical assembly 6 which comprises both an axicon and a focusing lens.
It is therefore advantageous if the focal line is formed at a certain distance from the laser optics, and if the greater part of the laser radiation is focused up to a desired end of the focal line. As described, this can be achieved by illuminating a primarily focusing element 11 (lens) only circularly on a required zone, which, on the one hand, serves to realize the required numerical aperture and thus the required spot size, on the other hand, however, the circle of diffusion diminishes in intensity after the required focal line 2b over a very short distance in the center of the spot, as a basically circular spot is formed. In this way, the crack formation is stopped within a short distance in the required substrate depth. A combination of axicon 10 and focusing lens 11 meets this requirement. The axicon acts in two different ways: due to the axicon 10, a usually round laser spot is sent to the focusing lens 11 in the form of a ring, and the asphericity of axicon 10 has the effect that a focal line is formed beyond the focal plane of the lens instead of a focal point in the focal plane. The length l of focal line 2b can be adjusted via the beam diameter on the axicon. The numerical aperture along the focal line, on the other hand, can be adjusted via the distance z1 axicon-lens and via the cone angle of the axicon. In this way, the entire laser energy can be concentrated in the focal line.
If the crack formation (i.e., defect line) is supposed to continue to the emergence side of the substrate, the circular illumination still has the advantage that, on the one hand, the laser power is used in the best possible way as a large part of the laser light remains concentrated in the required length of the focal line, on the other hand, it is possible to achieve a uniform spot size along the focal line—and thus a uniform separation process along the focal line—due to the circularly illuminated zone in conjunction with the desired aberration set by means of the other optical functions.
Instead of the plano-convex lens depicted in
In order to generate very short focal lines 2b using the combination of an axicon and a lens depicted in
As shown in
The optical assembly 6 depicted in
In the depicted example it is possible to achieve a length of the focal line 1 of less than 0.5 mm using a typical laser beam diameter of 2 mm, a focusing lens 11 with a focal length f=25 mm, and a collimating lens with a focal length f′=150 mm. Furthermore applies Z1a=Z1b=140 mm and Z2=15 mm.
Note that typical operation of such a picosecond laser described herein creates a “burst” 500 of pulses 500A. (See, for example,
The energy required to modify the material can be described in terms of the burst energy—the energy contained within a burst (each burst 500 contains a series of pulses 500A), or in terms of the energy contained within a single laser pulse (many of which may comprise a burst). For these applications, the energy per burst can be from 25-750 μJ, more preferably 50-500 μJ, or 50-250 μJ. In some embodiments the energy per burst is 100-250 μJ. The energy of an individual pulse within the pulse burst will be less, and the exact individual laser pulse energy will depend on the number of pulses 500A within the pulse burst 500 and the rate of decay (e.g., exponential decay rate) of the laser pulses with time as shown in
The use of a laser capable of generating such pulse bursts is advantageous for cutting or modifying transparent materials, for example glass. In contrast with the use of single pulses spaced apart in time by the repetition rate of the single-pulsed laser, the use of a pulse burst sequence that spreads the laser energy over a rapid sequence of pulses within the burst 500 allows access to larger timescales of high intensity interaction with the material than is possible with single-pulse lasers. While a single-pulse can be expanded in time, as this is done the intensity within the pulse must drop as roughly one over the pulse width. Hence if a 10 psec single pulse is expanded to a 10 nsec pulse, the intensity drop by roughly three orders of magnitude. Such a reduction can reduce the optical intensity to the point where non-linear absorption is no longer significant, and light material interaction is no longer strong enough to allow for cutting. In contrast, with a pulse burst laser, the intensity during each pulse 500A within the burst 500 can remain very high—for example three 10 psec pulses 500A spaced apart in time by approximately 10 nsec still allows the intensity within each pulse to be approximately three times higher than that of a single 10 psec pulse, while the laser is allowed to interact with the material over a timescale that is now three orders of magnitude larger. This adjustment of multiple pulses 500A within a burst thus allows manipulation of time-scale of the laser-material interaction in ways that can facilitate greater or lesser light interaction with a pre-existing plasma plume, greater or lesser light-material interaction with atoms and molecules that have been pre-excited by an initial or previous laser pulse, and greater or lesser heating effects within the material that can promote the controlled growth of microcracks. The required amount of burst energy to modify the material will depend on the substrate material composition and the length of the line focus used to interact with the substrate. The longer the interaction region, the more the energy is spread out, and higher burst energy will be required. The exact timings, pulse durations, and burst repetition rates can vary depending on the laser design, but short pulses (<15 psec, or ≤10 psec) of high intensity have been shown to work well with this technique. A defect line or a hole is formed in the material when a single burst of pulses strikes essentially the same location on the glass. That is, multiple laser pulses within a single burst correspond to a single defect line or a hole location in the glass. Of course, since the glass is translated (for example by a constantly moving stage) (or the beam is moved relative to the glass, the individual pulses within the burst cannot be at exactly the same spatial location on the glass. However, they are well within 1 μm of one another-i. e., they strike the glass at essentially the same location. For example, they may strike the glass at a spacing, sp, from one another where 0<sp≤500 nm. For example, when a glass location is hit with a burst of 20 pulses the individual pulses within the burst strike the glass within 250 nm of each other. Thus, in some embodiments 1 nm<sp<250 nm. In some embodiments 1 nm<sp<100 nm.
Multi-photon effects, or multi-photon absorption (MPA) is the simultaneous absorption of two or more photons of identical or different frequencies in order to excite a molecule from one state (usually the ground state) to a higher energy electronic state (ionization). The energy difference between the involved lower and upper states of the molecule can be equal to the sum of the energies of the two photons. MPA, also called induced absorption, can be can be a second-order, third-order process, or higher-order process, for example, that is several orders of magnitude weaker than linear absorption. MPA differs from linear absorption in that the strength of induced absorption can be proportional to the square or cube (or higher power law) of the light intensity, for example, instead of being proportional to the light intensity itself. Thus, MPA is a nonlinear optical process.
The lateral spacing (pitch) between the defect lines (damage tracks) is determined by the pulse rate of the laser as the substrate is translated underneath the focused laser beam. Only a single picosecond laser pulse burst is usually necessary to form an entire hole, but multiple bursts may be used if desired. To form damage tracks (defect lines) at different pitches, the laser can be triggered to fire at longer or shorter intervals. For cutting operations, the laser triggering generally is synchronized with the stage driven motion of the workpiece beneath the beam, so laser pulse bursts are triggered at a fixed spacing, such as for example every 1 micron, or every 5 microns. Distance, or periodicity, between adjacent perforations or defect lines along the direction of the fault line can be greater than 0.1 micron and less than or equal to about 20 microns in some embodiments, for example. For example, the spacing or periodicity between adjacent perforations or defect lines is between 0.5 and 15 microns, or between 3 and 10 microns, or between 0.5 micron and 3.0 microns. For example, in some embodiments the periodicity can be between 2 micron and 8 microns.
We discovered that using pulse burst lasers with certain volumetric pulse energy density (μJ/μm3) within the approximately cylindrical volume of the line focus re preferable to create the perforated contours in the glass. This can be achieved, for example, by utilizing pulse burst lasers, preferably with at least 2 pulses per burst and providing volumetric energy densities within the alkaline earth boro-aluminosilicate glasses (with low or no alkali) of about 0.005 μJ/μm3 or higher to ensure a damage track is formed, but less than 0.100 μJ/μm3 so as to not damage the glass too much, for example 0.005 μJ/μm3-0.100 μJ/μm3
Interior Contour Process
One manner of releasing a larger hole is to first perforate the contour of the hole, and then follow up with a laser heating process, such as with a CO2 laser, that heats up the inner glass piece until it softens and then is compliant enough to drop out. This works well for larger hole diameters and thinner materials. However, as the aspect ratio (thickness/diameter) of the glass plug gets very large, such methods have more difficulty. For example, with such methods, 10 mm diameter holes can be released from 0.7 mm thick glass, but <4 mm holes cannot always be released in the same glass thickness.
Step 2—A second perforation line 26 is formed to form a second contour inside of the first contour, using the same laser process, but approximately a few hundred microns inside the first contour. This step is optional, but is often preferred, as the extra perforation is designed to act as a thermal barrier and to promote the fragmentation and removal of material inside the hole when the next process step is employed.
Step 3—A highly focused CO2 laser 28 is used to ablate the material inside the hole, by tracing out the approximate path defined by the second perforation contour described above, or slightly (100 μm) inside the 2nd contour. This will physically melt, ablate, and drive out the glass material inside of the hole or slot. For code 2320 0.7 mm thick non-ion exchanged glass available from Corning Incorporated, a CO2 laser power of about 14 Watts with a focused spot size of about 100 μm diameter was used, and the CO2 laser was translated around the path at a speed of about 0.35 m/min, executing 1-2 passes to completely remove the material, the number of passes begin dependent on the exact geometry of the hole or slot. In general, for this process step, the CO2 beam would be defined as “focused” if it achieved a high enough intensity such that the glass material is melted and/or ablated by the high intensity. For example, the power density of the focused spot can be about 1750 W/mm2, which would be accomplished with the above descrbed conditions, or could be from 500 W/mm2 to 5000 W/mm2, depending on the desired speed of traversal of the laser beam across the surface.
In addition, as shown in
Sample Results:
As illustrated in
In some cases, the created fault line is not enough to separate the material spontaneously, and a secondary step may be necessary. While the perforated glass part may be placed in an chamber such as an oven to create a bulk heating or cooling of the glass part, to create thermal stress to separate the parts along the defect line, such a process can be slow and may require large ovens or chambers to accommodate many arts or large pieces or perforated glass. If so desired, a second laser can be used to create thermal stress to separate it, for example. In the case of TFT glass compositions, separation can be achieved, after the creation of a fault line, by application of mechanical force or by using a thermal source (e.g., an infrared laser, for example a CO2 laser) to create thermal stress and force separation of the material. Another option is to have the CO2 laser only start the separation and then finish the separation manually. The optional CO2 laser separation is achieved, for example, with a defocused continuous wave (cw) laser emitting at 10.6 microns and with power adjusted by controlling its duty cycle. Focus change (i.e., extent of defocusing up to and including focused spot size) is used to vary the induced thermal stress by varying the spot size. Defocused laser beams include those laser beams that produce a spot size larger than a minimum, diffraction-limited spot size on the order of the size of the laser wavelength. For example, CO2 laser spot sizes of 1 to 20 mm, for example 1 to 12 mm, 3 to 8 mm, or about 7 mm, 2 mm, and 20 mm can be used for CO2 lasers, for example, with a CO2 10.6 μm wavelength laser. Other lasers, whose emission wavelength is also absorbed by the glass, may also be used, such as lasers with wavelengths emitting in the 9-11 micron range, for example. In such cases CO2 laser with power levels between 100 and 400 Watts may be used, and the beam may be scanned at speeds of 50-500 mm/sec along or adjacent to the defect lines, which creates sufficient thermal stress to induce separation. The exact power levels, spot sizes, and scanning speeds chosen within the specified ranges may depend on the material use, its thickness, coefficient of thermal expansion (CTE), elastic modulus, since all of these factors influence the amount of thermal stress imparted by a specific rate of energy deposition at a given spatial location. If the spot size is too small (i.e. <1 mm), or the CO2 laser power is too high (>400 W), or the scanning speed is too slow (less than 10 mm/sec), the glass may be over heated, creating ablation, melting or thermally generated cracks in the glass, which are undesirable, as they will reduce the edge strength of the separated parts. Preferably the CO2 laser beam scanning speed is >50 mm/sec, in order to induce efficient and reliable part separation. However, if the spot size created by the CO2 laser is too large (>20 mm), or the laser power is too low (<10 W, or in some cases <30 W), or the scanning speed is too high (>500 mm/sec), insufficient heating occurs which results in too low a thermal stress to induce reliable part separation.
For example, in some embodiments, a CO2 laser power of 200 Watts may be used, with a spot diameter at the glass surface of approximately 6 mm, and a scanning speed of 250 mm/sec to induce part separation for 0.7 mm thick Corning Eagle XG® glass that has been perforated with the above mentioned psec laser. For example a thicker Corning Eagle XG® glass substrate may require more CO2 laser thermal energy per unit time to separate than a thinner Eagle XG® substrate, or a glass with a lower CTE may require more CO2 laser thermal energy to separate than a glass with a lower CTE. Separation along the perforated line will occur very quickly (less than 1 second) after CO2 spot passes a given location, for example within 100 milliseconds, within 50 milliseconds, or within 25 milliseconds.
Distance, or periodicity, between adjacent defect lines 120 along the direction of the fault lines 110 can be greater than 0.1 micron and less than or equal to about 20 microns in some embodiments, for example. For example, in some embodiments, the periodicity between adjacent defect lines 120 may be between 0.5 and 15 microns, or between 3 and 10 microns, or between 0.5 micron and 3.0 microns. For example, in some embodiments the periodicity between adjacent defect lines 120 can be between 0.5 micron and 1.0 micron.
There are several methods to create the defect line. The optical method of forming the line focus can take multiple forms, using donut shaped laser beams and spherical lenses, axicon lenses, diffractive elements, or other methods to form the linear region of high intensity. The type of laser (picosecond, femtosecond, etc.) and wavelength (IR, green, UV, etc.) can also be varied, as long as sufficient optical intensities are reached to create breakdown of the substrate material in the region of focus to create breakdown of the substrate material or glass workpiece, through nonlinear optical effects. Preferably, the laser is a pulse burst laser which allows for control of the energy deposition with time by adjusting the number of pulses within a given burst.
In the present application, an ultra-short pulsed laser is used to create a high aspect ratio vertical defect line in a consistent, controllable and repeatable manner. The details of the optical setup that enables the creation of this vertical defect line are described below, and in U.S. Application No. 61/752,489 filed on Jan. 15, 2013, the entire contents of which are incorporated by reference as if fully set forth herein. The essence of this concept is to use optics to create a line focus of a high intensity laser beam within a transparent part. One version of this concept is to use an axicon lens element in an optical lens assembly to create a region of high aspect ratio, taper-free microchannels using ultra-short (picoseconds or femtosecond duration) Bessel beams.
In other words, the axicon condenses the laser beam into a high intensity region of cylindrical shape and high aspect ratio (long length and small diameter). Due to the high intensity created with the condensed laser beam, nonlinear interaction of the electromagnetic field of the laser and the substrate material occurs and the laser energy is transferred to the substrate to effect formation of defects that become constituents of the fault line. However, it is important to realize that in the areas of the material where the laser energy intensity is not high (e.g., glass volume of substrate surrounding the central convergence line), the material is transparent to the laser and there is no mechanism for transferring energy from the laser to the material. As a result, nothing happens to the glass or workpiece when the laser intensity is below the nonlinear threshold.
The methods described above provide the following benefits that may translate to enhanced laser processing capabilities and cost savings and thus lower cost manufacturing. The cutting process offers:
1) Full separation of interior contours being cut: the methods described above are capable of completely separating/cutting holes and slots in a clean and controlled fashion in ion-exchangeable glass (such as Gorilla® glass, Corning glass codes 2318, 2319, 2320 or the like) as produced by the fusion draw process, or other glass forming processes, before the glass part has undergone chemical strengthening.
2) Separation of holes/slots with very small dimensions: Other processes may be used to heat and induce softening of a glass plug which can allow it to drop out of a glass sheet. However, as the aspect ratio (thickness/diameter) of the glass plug gets very large, such methods fail. For example, heating (not ablation) of the interior glass plug will drop out 10 mm diameter holes out of 0.7 mm thick glass, but if the diameter of the hole is reduced to 4 mm, such processes will not work. However, the process disclosed here has been used to remove glass plugs that have dimensions as small as 1.5 mm (diameter of a circle, or width of a slot) in 0.7 mm thick glass.
3) Reduced subsurface defects and excellent edge quality: Due to the ultra-short pulse interaction between laser and material, there is little thermal interaction and thus a minimal heat affected zone that can result in undesirable stress and micro-cracking. In addition, the optics that condense the laser beam into the glass creates defect lines that are typically 2 to 5 microns diameter on the surface of the part. After separation, the subsurface damage is <75 μm, and can be adjusted to be <25 μm. The roughness of the separated surface (or cut edge), results particularly from the spot size or the spot diameter of the focal line. A roughness of the separated (cut) surface which can be, for example, 0.1 to 1 microns or for example 0.25 to 1 microns), can be characterized, for example, by an Ra surface roughness statistic (roughness arithmetic average of absolute values of the heights of the sampled surface, which include the heights of bumps resulting from the spot diameter of the focal line). The surface roughness generated by this process is often <0.5 μm (Ra), and can be as low as 0.1 μm (Ra). This has great impact on the edge strength of the part as strength is governed by the number of defects, their statistical distribution in terms of size and depth. The higher these numbers are the weaker the edges of the part will be. In addition, if any mechanical finishing processes such as grinding and polishing are later used to modify the edge shape, the amount of material removal required will be lower for parts with less sub-surface damage. This reduces or eliminates finishing steps, lower part cost. The hole and slot release process described here takes full advantage of the high-quality edge created by this line-focus picosecond laser perforation process—it ensures that the removal of the interior glass material is done in a manner that cleanly releases the glass along this perforation line, and does not induce ablative damage, micro-cracking, or other defects to the desired part edge.
Speed: Unlike processes which use focused laser to purely ablate the material around the inner contour, this laser process is a single pass process for the perforation line. The perforated hole contour may be created by the picosecond laser process described herein at speeds of 80-1000 mm/sec, depending only on the acceleration capabilities of the stages involved. This is in contrast to ablative hole and slot drilling methods, where material is removed “layer by layer” and requires many passes or long residence times per location of the laser beam.
Process cleanliness: the methods described above are capable of separating/cutting glass or other transparent brittle materials in a clean and controlled fashion. It is very challenging to use conventional ablative or thermal laser processes because they tend to trigger heat affected zones that induce micro-cracks and fragmentation of the glass into several smaller pieces. The characteristics of the laser pulses and the induced interactions with the material of the disclosed method avoid all of these issues because they occur in a very short time scale and the material transparency to the laser radiation minimizes the induced thermal effects. Since the defect line is created within the object, the presence of debris and adhered particles during the cutting step is virtually eliminated. If there are any particulates resulting from the created defect line, they are well contained until the part is separated.
Cutting Complex Profiles and Shapes in Different Sizes
The methods described above enable cutting/separation of glass and other substrates following many forms and shapes, which is a limitation in other competing technologies. Tight radii may be cut (<2 mm), allowing creation of small holes and slots (such as required for speakers/microphone in a cell phone application). Also, since the defect lines strongly control the location of any crack propagation, those method give great control to the spatial location of a cut, and allow for cut and separation of structures and features as small as a few hundred microns.
Elimination of Process Steps
The process to fabricate glass plates from the incoming glass panel to the final size and shape involves several steps that encompass cutting the panel, cutting to size, finishing and edge shaping, thinning the parts down to their target thickness, polishing, and even chemically strengthening in some cases. Elimination of any of these steps will improve manufacturing cost in terms of process time and capital expense. The methods described above may reduce the number of steps by, for example:
Reduced debris and edge defects generation—potential elimination of washing and drying stations
Cutting the sample directly to its final size, shape and thickness—eliminating need for finishing lines.
Thus, according to some embodiments, a glass article has at least one inner contour edge with plurality of defect lines extending perpendicular to the face of the glass sheet at least 250 μm, the defect lines each having a diameter less than or equal to about 5 μm. For example, a glass article has at least one inner contour edge having a plurality of defect lines extending perpendicular to the major (i.e., large relative to the sides) flat face of the glass sheet at least 250 μm, the defect lines each having a diameter less than or equal to about 5 μm. In some embodiments, the smallest dimension or width of the interior contour defined by the inner contour edge is less than 5 mm, for example it may be 0.1 mm to 3 mm in width (or diameter), e.g, 0.5 mm to 2 mm. According to some embodiments, the glass article comprises post-ion exchange glass. According to some embodiments, the defect lines extend the full thickness of the at least one inner contour edge. According to at least some embodiments, the at least one inner contour edge has an Ra surface roughness less than about 0.5 μm. According to at least some embodiments, the at least one inner contour edge has subsurface damage up to a depth less than or equal to about 75 μm. In at least some embodiments, of the glass article the defect lines extend the full thickness of the edge. The distance between the defect lines is, for example, less than or equal to about 7 μm.
The relevant teachings of all patents, published applications and references cited herein are incorporated by reference in their entirety.
While exemplary embodiments have been disclosed herein, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention encompassed by the appended claims.
This application is a divisional of U.S. patent application Ser. No. 14/536,009 filed on Nov. 7, 2014, which claims the benefit of U.S. Provisional Application No. 61/917148 filed on Dec. 17, 2013 and U.S. Provisional Application No. 62/022855 filed on Jul. 10, 2014. The entire teachings of these applications are incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
1790397 | Woods et al. | Jan 1931 | A |
2682134 | Stookey | Jun 1956 | A |
2749794 | O'Leary | Jun 1956 | A |
3647410 | Heaton et al. | Mar 1972 | A |
3695497 | Dear | Oct 1972 | A |
3695498 | Dear | Oct 1972 | A |
3729302 | Heaton | Apr 1973 | A |
3775084 | Heaton | Nov 1973 | A |
4226607 | Domken | Oct 1980 | A |
4441008 | Chan | Apr 1984 | A |
4546231 | Gresser et al. | Oct 1985 | A |
4646308 | Kafka et al. | Feb 1987 | A |
4764930 | Bille et al. | Aug 1988 | A |
4891054 | Bricker et al. | Jan 1990 | A |
4907586 | Bille et al. | Mar 1990 | A |
4918751 | Pessot et al. | Apr 1990 | A |
4929065 | Hagerty et al. | May 1990 | A |
5035918 | Vyas | Jul 1991 | A |
5040182 | Spinelli et al. | Aug 1991 | A |
5104210 | Tokas | Apr 1992 | A |
5108857 | Kitayama et al. | Apr 1992 | A |
5112722 | Tsujino et al. | May 1992 | A |
5114834 | Nachshon | May 1992 | A |
5265107 | Delfyett, Jr. | Nov 1993 | A |
5314522 | Kondo et al. | May 1994 | A |
5400350 | Galvanauskas | Mar 1995 | A |
5434875 | Rieger et al. | Jul 1995 | A |
5436925 | Lin et al. | Jul 1995 | A |
5553093 | Ramaswamy et al. | Sep 1996 | A |
5574597 | Kataoka et al. | Nov 1996 | A |
5586138 | Yokoyama | Dec 1996 | A |
5656186 | Mourou et al. | Aug 1997 | A |
5684642 | Zumoto et al. | Nov 1997 | A |
5696782 | Harter et al. | Dec 1997 | A |
5736709 | Neiheisel | Apr 1998 | A |
5776220 | Allaire et al. | Jul 1998 | A |
6016223 | Suzuki et al. | Jan 2000 | A |
6016324 | Rieger et al. | Jan 2000 | A |
6038055 | Hänsch et al. | Mar 2000 | A |
6055829 | Witzmann et al. | May 2000 | A |
6078599 | Everage et al. | Jun 2000 | A |
6156030 | Neev | Dec 2000 | A |
6160835 | Kwon | Dec 2000 | A |
6186384 | Sawada | Feb 2001 | B1 |
6210401 | Lai | Apr 2001 | B1 |
6256328 | Delfyett et al. | Jul 2001 | B1 |
6259151 | Morrison | Jul 2001 | B1 |
6259512 | Mizouchi | Jul 2001 | B1 |
6272156 | Reed et al. | Aug 2001 | B1 |
6301932 | Allen et al. | Oct 2001 | B1 |
6322958 | Hayashi | Nov 2001 | B1 |
6339208 | Rockstroh et al. | Jan 2002 | B1 |
6373565 | Kafka et al. | Apr 2002 | B1 |
6381391 | Islam et al. | Apr 2002 | B1 |
6396856 | Sucha et al. | May 2002 | B1 |
6407360 | Choo et al. | Jun 2002 | B1 |
6438996 | Cuvelier | Aug 2002 | B1 |
6445491 | Sucha et al. | Sep 2002 | B2 |
6449301 | Wu et al. | Sep 2002 | B1 |
6484052 | Visuri et al. | Nov 2002 | B1 |
6489589 | Alexander | Dec 2002 | B1 |
6501578 | Bernstein et al. | Dec 2002 | B1 |
6552301 | Herman et al. | Apr 2003 | B2 |
6573026 | Aitken et al. | Jun 2003 | B1 |
6592703 | Habeck et al. | Jul 2003 | B1 |
6635849 | Okawa et al. | Oct 2003 | B1 |
6635850 | Amako et al. | Oct 2003 | B2 |
6720519 | Liu et al. | Apr 2004 | B2 |
6729161 | Miura et al. | May 2004 | B1 |
6744009 | Xuan et al. | Jun 2004 | B1 |
6787732 | Xuan et al. | Sep 2004 | B1 |
6800237 | Yamamoto et al. | Oct 2004 | B1 |
6800831 | Hoetzel | Oct 2004 | B1 |
6958094 | Ohmi et al. | Oct 2005 | B2 |
6992026 | Fukuyo et al. | Jan 2006 | B2 |
7009138 | Amako et al. | Mar 2006 | B2 |
7353829 | Wachter et al. | Apr 2008 | B1 |
7402773 | Nomaru | Jul 2008 | B2 |
7511886 | Schultz et al. | Mar 2009 | B2 |
7535634 | Savchenkov et al. | May 2009 | B1 |
7633033 | Thomas et al. | Dec 2009 | B2 |
7642483 | You et al. | Jan 2010 | B2 |
7649153 | Haight et al. | Jan 2010 | B2 |
7726532 | Gonoe | Jun 2010 | B2 |
8104385 | Hayashi et al. | Jan 2012 | B2 |
8118971 | Hori et al. | Feb 2012 | B2 |
8132427 | Brown et al. | Mar 2012 | B2 |
8168514 | Garner et al. | May 2012 | B2 |
8245539 | Lu et al. | Aug 2012 | B2 |
8245540 | Abramov et al. | Aug 2012 | B2 |
8269138 | Garner et al. | Sep 2012 | B2 |
8283595 | Fukuyo et al. | Oct 2012 | B2 |
8292141 | Cox et al. | Oct 2012 | B2 |
8296066 | Zhao et al. | Oct 2012 | B2 |
8327666 | Harvey et al. | Dec 2012 | B2 |
8341976 | Dejneka et al. | Jan 2013 | B2 |
8347651 | Abramov et al. | Jan 2013 | B2 |
8358888 | Ramachandran | Jan 2013 | B2 |
8444906 | Lee et al. | May 2013 | B2 |
8448471 | Kumatani et al. | May 2013 | B2 |
8518280 | Hsu et al. | Aug 2013 | B2 |
8549881 | Brown et al. | Oct 2013 | B2 |
8584354 | Cornejo et al. | Nov 2013 | B2 |
8584490 | Garner et al. | Nov 2013 | B2 |
8592716 | Abramov et al. | Nov 2013 | B2 |
8604380 | Howerton et al. | Dec 2013 | B2 |
8607590 | Glaesemann et al. | Dec 2013 | B2 |
8616024 | Cornejo et al. | Dec 2013 | B2 |
8635887 | Black et al. | Jan 2014 | B2 |
8680489 | Martinez et al. | Mar 2014 | B2 |
8685838 | Fukuyo et al. | Apr 2014 | B2 |
8697228 | Carre et al. | Apr 2014 | B2 |
8720228 | Li | May 2014 | B2 |
8826696 | Brown et al. | Sep 2014 | B2 |
8852698 | Fukumitsu | Oct 2014 | B2 |
8887529 | Lu et al. | Nov 2014 | B2 |
8916798 | Plüss | Dec 2014 | B2 |
8943855 | Gomez et al. | Feb 2015 | B2 |
8951889 | Ryu et al. | Feb 2015 | B2 |
8971053 | Kariya et al. | Mar 2015 | B2 |
9138913 | Arai et al. | Sep 2015 | B2 |
9227868 | Matsumoto et al. | Jan 2016 | B2 |
9290407 | Barefoot et al. | Mar 2016 | B2 |
9296066 | Hosseini et al. | Mar 2016 | B2 |
9324791 | Tamemoto | Apr 2016 | B2 |
9327381 | Lee et al. | May 2016 | B2 |
9446590 | Chen et al. | Sep 2016 | B2 |
9481598 | Bergh et al. | Nov 2016 | B2 |
20020046997 | Nam et al. | Apr 2002 | A1 |
20020082466 | Han | Jun 2002 | A1 |
20020097486 | Yamaguchi et al. | Jul 2002 | A1 |
20020110639 | Bruns | Aug 2002 | A1 |
20030006221 | Hong et al. | Jan 2003 | A1 |
20040221615 | Postupack et al. | Nov 2004 | A1 |
20050024743 | Camy-Peyret | Feb 2005 | A1 |
20050098548 | Kobayashi et al. | May 2005 | A1 |
20050115938 | Sawaki et al. | Jun 2005 | A1 |
20050274702 | Deshi | Dec 2005 | A1 |
20050277270 | Yoshikawa et al. | Dec 2005 | A1 |
20060011593 | Fukuyo | Jan 2006 | A1 |
20060109874 | Shiozaki et al. | May 2006 | A1 |
20060127679 | Gulati et al. | Jun 2006 | A1 |
20060227440 | Gluckstad | Oct 2006 | A1 |
20060266744 | Nomaru | Nov 2006 | A1 |
20060289410 | Morita et al. | Dec 2006 | A1 |
20070044606 | Kang et al. | Mar 2007 | A1 |
20070091977 | Sohn et al. | Apr 2007 | A1 |
20070111390 | Komura et al. | May 2007 | A1 |
20070111480 | Maruyama et al. | May 2007 | A1 |
20070119831 | Kandt | May 2007 | A1 |
20070132977 | Komatsuda | Jun 2007 | A1 |
20070138151 | Tanaka et al. | Jun 2007 | A1 |
20070177116 | Amako | Aug 2007 | A1 |
20070202619 | Tamura et al. | Aug 2007 | A1 |
20070298529 | Maeda et al. | Dec 2007 | A1 |
20080000884 | Sugiura et al. | Jan 2008 | A1 |
20080079940 | Sezerman et al. | Apr 2008 | A1 |
20080099444 | Misawa et al. | May 2008 | A1 |
20080190981 | Okajima et al. | Aug 2008 | A1 |
20090013724 | Koyo et al. | Jan 2009 | A1 |
20090176034 | Ruuttu et al. | Jul 2009 | A1 |
20090183764 | Meyer | Jul 2009 | A1 |
20090199694 | Uh et al. | Aug 2009 | A1 |
20090242528 | Howerton et al. | Oct 2009 | A1 |
20090250446 | Sakamoto | Oct 2009 | A1 |
20090294419 | Abramov et al. | Dec 2009 | A1 |
20090294422 | Lubatschowski et al. | Dec 2009 | A1 |
20090324899 | Feinstein et al. | Dec 2009 | A1 |
20100024865 | Shah et al. | Feb 2010 | A1 |
20100025387 | Arai et al. | Feb 2010 | A1 |
20100029460 | Shojiya et al. | Feb 2010 | A1 |
20100032087 | Takahashi et al. | Feb 2010 | A1 |
20100086741 | Bovatsek et al. | Apr 2010 | A1 |
20100089631 | Sakaguchi et al. | Apr 2010 | A1 |
20100089882 | Tamura | Apr 2010 | A1 |
20100102042 | Garner et al. | Apr 2010 | A1 |
20100129603 | Blick et al. | May 2010 | A1 |
20100147813 | Lei et al. | Jun 2010 | A1 |
20100252540 | Lei et al. | Oct 2010 | A1 |
20100252959 | Lei et al. | Oct 2010 | A1 |
20100276505 | Smith | Nov 2010 | A1 |
20100279067 | Sabia et al. | Nov 2010 | A1 |
20100287991 | Brown et al. | Nov 2010 | A1 |
20100326138 | Kumatani et al. | Dec 2010 | A1 |
20110049764 | Lee et al. | Mar 2011 | A1 |
20110049765 | Li et al. | Mar 2011 | A1 |
20110088324 | Wessel | Apr 2011 | A1 |
20110100401 | Fiorentini | May 2011 | A1 |
20110132881 | Liu | Jun 2011 | A1 |
20110139760 | Shah et al. | Jun 2011 | A1 |
20110183116 | Hung et al. | Jul 2011 | A1 |
20110240611 | Sandström et al. | Oct 2011 | A1 |
20110277507 | Lu et al. | Nov 2011 | A1 |
20110318555 | Bookbinder et al. | Dec 2011 | A1 |
20120017642 | Teranishi et al. | Jan 2012 | A1 |
20120047951 | Dannoux et al. | Mar 2012 | A1 |
20120048604 | Cornejo et al. | Mar 2012 | A1 |
20120061440 | Roell | Mar 2012 | A1 |
20120064306 | Kang et al. | Mar 2012 | A1 |
20120067858 | Kangastupa et al. | Mar 2012 | A1 |
20120103018 | Lu et al. | May 2012 | A1 |
20120131962 | Mitsugi et al. | May 2012 | A1 |
20120135195 | Glaesemann et al. | May 2012 | A1 |
20120135607 | Shimoi et al. | May 2012 | A1 |
20120135608 | Shimoi et al. | May 2012 | A1 |
20120145331 | Gomez et al. | Jun 2012 | A1 |
20120196071 | Cornejo et al. | Aug 2012 | A1 |
20120196454 | Shah et al. | Aug 2012 | A1 |
20120216570 | Abramov et al. | Aug 2012 | A1 |
20120234049 | Bolton | Sep 2012 | A1 |
20120234807 | Sercel et al. | Sep 2012 | A1 |
20120255935 | Kakui et al. | Oct 2012 | A1 |
20120299219 | Shimoi et al. | Nov 2012 | A1 |
20120302139 | Darcangelo et al. | Nov 2012 | A1 |
20130019637 | Sol et al. | Jan 2013 | A1 |
20130034688 | Koike et al. | Feb 2013 | A1 |
20130044371 | Rupp et al. | Feb 2013 | A1 |
20130061636 | Imai et al. | Mar 2013 | A1 |
20130068736 | Mielke et al. | Mar 2013 | A1 |
20130075480 | Yokogi et al. | Mar 2013 | A1 |
20130091897 | Fugii et al. | Apr 2013 | A1 |
20130122264 | Fujii et al. | May 2013 | A1 |
20130126573 | Hosseini et al. | May 2013 | A1 |
20130129947 | Harvey et al. | May 2013 | A1 |
20130133367 | Abramov et al. | May 2013 | A1 |
20130143416 | Norval | Jun 2013 | A1 |
20130149434 | Oh et al. | Jun 2013 | A1 |
20130149494 | Koike et al. | Jun 2013 | A1 |
20130167590 | Teranishi et al. | Jul 2013 | A1 |
20130174607 | Wootton et al. | Jul 2013 | A1 |
20130174610 | Teranishi et al. | Jul 2013 | A1 |
20130180285 | Kariya | Jul 2013 | A1 |
20130189806 | Hoshino | Jul 2013 | A1 |
20130192305 | Black et al. | Aug 2013 | A1 |
20130209731 | Nattermann et al. | Aug 2013 | A1 |
20130216573 | Trusheim et al. | Aug 2013 | A1 |
20130220982 | Thomas et al. | Aug 2013 | A1 |
20130221053 | Zhang | Aug 2013 | A1 |
20130224439 | Zhang et al. | Aug 2013 | A1 |
20130228918 | Chen et al. | Sep 2013 | A1 |
20130247615 | Boek et al. | Sep 2013 | A1 |
20130266757 | Giron et al. | Oct 2013 | A1 |
20130270240 | Kondo | Oct 2013 | A1 |
20130280495 | Matsumoto | Oct 2013 | A1 |
20130288010 | Akarapu et al. | Oct 2013 | A1 |
20130291598 | Saito et al. | Nov 2013 | A1 |
20130312460 | Kunishi et al. | Nov 2013 | A1 |
20130323469 | Abramov et al. | Dec 2013 | A1 |
20130334185 | Nomaru | Dec 2013 | A1 |
20130340480 | Nattermann et al. | Dec 2013 | A1 |
20140027951 | Srinivas et al. | Jan 2014 | A1 |
20140034730 | Lee | Feb 2014 | A1 |
20140036338 | Bareman et al. | Feb 2014 | A1 |
20140042202 | Lee | Feb 2014 | A1 |
20140047957 | Wu | Feb 2014 | A1 |
20140102146 | Saito et al. | Apr 2014 | A1 |
20140110040 | Cok | Apr 2014 | A1 |
20140113797 | Yamada et al. | Apr 2014 | A1 |
20140133119 | Kariya et al. | May 2014 | A1 |
20140141217 | Gulati et al. | May 2014 | A1 |
20140147623 | Shorey et al. | May 2014 | A1 |
20140147624 | Streltsov et al. | May 2014 | A1 |
20140165652 | Saito | Jun 2014 | A1 |
20140174131 | Saito et al. | Jun 2014 | A1 |
20140199519 | Schillinger et al. | Jul 2014 | A1 |
20140216108 | Weigel et al. | Aug 2014 | A1 |
20140239034 | Cleary et al. | Aug 2014 | A1 |
20140290310 | Green | Oct 2014 | A1 |
20140320947 | Egerton et al. | Oct 2014 | A1 |
20140333929 | Sung et al. | Nov 2014 | A1 |
20140361463 | DeSimone et al. | Dec 2014 | A1 |
20150034612 | Hosseini et al. | Feb 2015 | A1 |
20150038313 | Hosseini | Feb 2015 | A1 |
20150060402 | Burkett et al. | Mar 2015 | A1 |
20150075221 | Kawaguchi et al. | Mar 2015 | A1 |
20150075222 | Mader | Mar 2015 | A1 |
20150110442 | Zimmel et al. | Apr 2015 | A1 |
20150118522 | Hosseini | Apr 2015 | A1 |
20150136743 | Hosseini | May 2015 | A1 |
20150140241 | Hosseini | May 2015 | A1 |
20150140735 | Hosseini | May 2015 | A1 |
20150151380 | Hosseini | Jun 2015 | A1 |
20150158120 | Courvoisier et al. | Jun 2015 | A1 |
20150165548 | Marjanovic et al. | Jun 2015 | A1 |
20150165560 | Hackert et al. | Jun 2015 | A1 |
20150165562 | Marjanovic et al. | Jun 2015 | A1 |
20150165563 | Manley et al. | Jun 2015 | A1 |
20150166391 | Marjanovic et al. | Jun 2015 | A1 |
20150166393 | Marjanovic et al. | Jun 2015 | A1 |
20150166394 | Marjanovic et al. | Jun 2015 | A1 |
20150166395 | Marjanovic et al. | Jun 2015 | A1 |
20150166396 | Marjanovic et al. | Jun 2015 | A1 |
20150166397 | Marjanovic et al. | Jun 2015 | A1 |
20150183679 | Saito | Jul 2015 | A1 |
20150232369 | Marjanovic et al. | Aug 2015 | A1 |
20150299018 | Bhuyan et al. | Oct 2015 | A1 |
20150360991 | Grundmueller et al. | Dec 2015 | A1 |
20150367442 | Bovatsek et al. | Dec 2015 | A1 |
20160008927 | Grundmueller et al. | Jan 2016 | A1 |
20160009066 | Nieber et al. | Jan 2016 | A1 |
20160023922 | Addiego et al. | Jan 2016 | A1 |
20160031745 | Ortner et al. | Feb 2016 | A1 |
20160060156 | Krueger et al. | Mar 2016 | A1 |
20160280580 | Bohme | Sep 2016 | A1 |
20160290791 | Buono et al. | Oct 2016 | A1 |
20160304386 | Dong et al. | Oct 2016 | A1 |
20170169847 | Tamaki | Jun 2017 | A1 |
Number | Date | Country |
---|---|---|
2388062 | Jul 2000 | CN |
1283409 | Nov 2006 | CN |
101502914 | Aug 2009 | CN |
201357287 | Dec 2009 | CN |
101637849 | Feb 2010 | CN |
201471092 | May 2010 | CN |
102248302 | Nov 2011 | CN |
102649199 | Aug 2012 | CN |
102672355 | Sep 2012 | CN |
102898014 | Jan 2013 | CN |
102916081 | Feb 2013 | CN |
102923939 | Feb 2013 | CN |
103013374 | Apr 2013 | CN |
103143841 | Jun 2013 | CN |
203021443 | Jun 2013 | CN |
103273195 | Sep 2013 | CN |
103316990 | Sep 2013 | CN |
103359947 | Oct 2013 | CN |
103359948 | Oct 2013 | CN |
103531414 | Jan 2014 | CN |
103746027 | Apr 2014 | CN |
203509350 | Apr 2014 | CN |
104344202 | Feb 2015 | CN |
102672355 | May 2015 | CN |
2231330 | Jan 1974 | DE |
102006035555 | Jan 2008 | DE |
102012010635 | Nov 2013 | DE |
102012110971 | May 2014 | DE |
102013223637 | May 2015 | DE |
270897 | Feb 1992 | EP |
0609978 | Aug 1994 | EP |
656241 | Dec 1998 | EP |
938946 | Sep 1999 | EP |
949541 | Oct 1999 | EP |
1159104 | Aug 2004 | EP |
1609559 | Dec 2005 | EP |
1043110 | Aug 2006 | EP |
2133170 | Dec 2009 | EP |
2202545 | Jun 2010 | EP |
2574983 | Apr 2013 | EP |
2754524 | Jul 2014 | EP |
2781296 | Sep 2014 | EP |
2783784 | Oct 2014 | EP |
2859984 | Apr 2015 | EP |
2989294 | Oct 2013 | FR |
1242172 | Aug 1971 | GB |
2481190 | Jan 2015 | GB |
6246930 | Feb 1987 | JP |
1179770 | Jul 1989 | JP |
6318756 | Nov 1994 | JP |
19944318756 | Nov 1994 | JP |
3106243 | Apr 1997 | JP |
11197498 | Jul 1999 | JP |
1999197498 | Jul 1999 | JP |
11269683 | Oct 1999 | JP |
1999269683 | Oct 1999 | JP |
11330597 | Nov 1999 | JP |
1999330597 | Nov 1999 | JP |
11347758 | Dec 1999 | JP |
1999347758 | Dec 1999 | JP |
2001130921 | May 2001 | JP |
2001138083 | May 2001 | JP |
2002210730 | Jul 2002 | JP |
2002228818 | Aug 2002 | JP |
2003025085 | Jan 2003 | JP |
2003062756 | Mar 2003 | JP |
2003114400 | Apr 2003 | JP |
2003154517 | May 2003 | JP |
2003181668 | Jul 2003 | JP |
2003238178 | Aug 2003 | JP |
2004209675 | Jul 2004 | JP |
2005104819 | Apr 2005 | JP |
2005205440 | Aug 2005 | JP |
2005288503 | Oct 2005 | JP |
3775250 | May 2006 | JP |
3775410 | May 2006 | JP |
2006130691 | May 2006 | JP |
2006248885 | Sep 2006 | JP |
2007021548 | Feb 2007 | JP |
2007196277 | Aug 2007 | JP |
2007253203 | Oct 2007 | JP |
2009172633 | Aug 2009 | JP |
2010046761 | Mar 2010 | JP |
4592855 | Dec 2010 | JP |
2011049398 | Mar 2011 | JP |
4672689 | Apr 2011 | JP |
2011517299 | Jun 2011 | JP |
4880820 | Feb 2012 | JP |
2012024782 | Feb 2012 | JP |
2012031018 | Feb 2012 | JP |
2012159749 | Aug 2012 | JP |
2012187618 | Oct 2012 | JP |
2013007842 | Jan 2013 | JP |
2013031879 | Feb 2013 | JP |
2013043808 | Mar 2013 | JP |
2013075802 | Apr 2013 | JP |
2013091578 | May 2013 | JP |
5274085 | Aug 2013 | JP |
5300544 | Sep 2013 | JP |
2013187247 | Sep 2013 | JP |
2013203630 | Oct 2013 | JP |
2013203631 | Oct 2013 | JP |
2013223886 | Oct 2013 | JP |
2012015366 | Feb 2002 | KR |
2009057161 | Jun 2009 | KR |
1020621 | Mar 2011 | KR |
1120471 | Mar 2012 | KR |
2012074508 | Jul 2012 | KR |
2013031380 | Mar 2013 | KR |
1269474 | May 2013 | KR |
2013124646 | Nov 2013 | KR |
1344368 | Dec 2013 | KR |
2014022980 | Feb 2014 | KR |
2014022981 | Feb 2014 | KR |
2014064220 | May 2014 | KR |
20150009153 | Jan 2015 | KR |
201139025 | Nov 2011 | TW |
201226345 | Jul 2012 | TW |
1999029243 | Jul 1999 | WO |
1999063900 | Dec 1999 | WO |
2004110693 | Dec 2004 | WO |
2006073098 | Jul 2006 | WO |
2007094160 | Aug 2007 | WO |
2008049389 | May 2008 | WO |
2008080182 | Jul 2008 | WO |
2008128612 | Oct 2008 | WO |
2009114375 | Sep 2009 | WO |
2009119694 | Oct 2009 | WO |
2010035736 | Apr 2010 | WO |
2010111609 | Sep 2010 | WO |
2010129459 | Nov 2010 | WO |
2011025908 | Mar 2011 | WO |
2011056781 | May 2011 | WO |
2012006736 | Jan 2012 | WO |
2012075072 | Jun 2012 | WO |
2012108052 | Aug 2012 | WO |
2012166753 | Dec 2012 | WO |
2013022148 | Feb 2013 | WO |
2013043173 | Mar 2013 | WO |
2013138802 | Sep 2013 | WO |
2013150990 | Oct 2013 | WO |
2013153195 | Oct 2013 | WO |
2014028022 | Feb 2014 | WO |
2014064492 | May 2014 | WO |
2014079478 | May 2014 | WO |
2014079570 | May 2014 | WO |
2014085663 | Jun 2014 | WO |
2014111385 | Jul 2014 | WO |
2014111794 | Jul 2014 | WO |
2014161534 | Oct 2014 | WO |
2014161535 | Oct 2014 | WO |
2015077113 | May 2015 | WO |
2015095088 | Jun 2015 | WO |
2015095090 | Jun 2015 | WO |
2015095146 | Jun 2015 | WO |
2015127583 | Sep 2015 | WO |
2016005455 | Jan 2016 | WO |
2016010954 | Jan 2016 | WO |
2016154284 | Sep 2016 | WO |
2017091529 | Jun 2017 | WO |
Entry |
---|
Kerr, “Filamentary tracks formed in transparent optical glass by laser beam self-focusing. II. Theoretical Analysis” Physical Review A, 4(3) Sep. 1971. pp. 1195-1218. |
Abramov et al., “Laser separation of chemically strengthened glass”, Physics Procedia, 5 (2010), 285-290. |
Bagchi et al; “Fast ion beams from intense, femtosecond laser irradiated nanostructured surfaces”; Appl. Phys. B 88, 167-173, (2007). |
Bhuyan et al; “Laser micro- and nanostructuring using femtosecond Bessel beams”; Eur. Phys. J. Special Topics, 199, 101-110 (2011). |
Bhuyan et al; “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams”; Applied Physics Letters, 104, 021107 (2014). |
Bhuyan et al; “Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass”; Proc. of SPIE, vol. 7728, 77281V-2-77281V-8. |
Courvoisier et al; “Applications of femtosecond Bessel beams to laser ablation”; Appl Phys A (2013) 112:29-34. |
Courvoisier et al; “Surface nanoprocessing with nondiffracting femtosecond Bessel beams”; Optics Letters, vol. 34, No. 20, 2009, 3163-3165. |
D. Zeng, et al., Characteristic Analysis of a Refractive Axicon System for Optical Trepanning; Optical Engineering 45(9), 094302 Sep. 2006. |
Design of Diffractivephase Axicon Illuminated by a Gaussian-Profile Beam, Zhangg Uo-Qing, D Ongb I-Zhen,Y Angg Uo-Zhen, and Gu Ben-Yuan, vol. 6, No. 5 Acta Physica Sinica May 1996, pp. 354. |
E. Vanagas et al., “Glass Cutting by Femtosecond Pulsed Radiation”, J. Microlith., Microfa., Microsyst., 3(2) 358-363, 2004. |
Herman, et al., “Laser Micromachining of ‘transparent’ fused silica with 1ps pulses and pulse trains”, SPIE Conference, San Jose, CA, Jan. 1999, vol. 3616-0277-786X/99. |
High-Resolution Optical Coherence Tomography Over a Large Depth Range With an Axicon Lens, Zhihua Ding, Hongwu Ren, Yonghua Zhao, J. Stuart Nelson, and Zhongping Chen, Feb. 15, 2002 / vol. 27, No. 4 / Optics Letters 243. |
http://www.gtat.com/collateral/documents/english-us/sapphire/12-21-12_gt_touchscreen_v3_web.pdf. |
Ilya Golub, Fresnel Axicon, 1890 Optics Letters / vol. 31, No. 12 / Jun. 15, 2006. |
Kruger, et al., “Laser micromachining of barium aluminum borosilicate glass with pulse durations between 20 fs and 3 ps,” , Applied Surface Science, 127-129(1998), 892-898. |
M. K. Bhuyan, et al., High Aspect Ratio Nanochannel Machining Using Single Shot Femtosecond Bessel Beams, Appl. Phys. Lett. 97, 081102 (2010). |
M. K. Bhuyan, et al., High Aspect Ratio Taper-Free Microchannel Fabrication Using Femtosecond Bessel Beams, Jan. 18, 2010 / vol. 18, No. 2 / Optics Express 566. |
O.G. Kosareva, et al. Formation of extended plasma channels in a condensed medium upon axicon focusing of a femtosecond laser pulse, Quantum Electronics, 35(11), 1013-1014 (2005). |
Pavel Polynkin, et al., Extended filamentation with temporally chirped femtosecond Bessel-Gauss beams in air, Jan. 19, 2009 / vol. 17, No. 2 / Optics Express 575. |
Perry, et al., “Ultrashort-Pulse Laser Machining,” submitted to ICA of Lasers and Electro-Optics, Preprint Nov. 16-19, 1998, Pub. Jan. 22, 1999, International Congress on Applications of Lasers and Electro-Optics. |
Rieko Arimoto, et al., Imaging Properties of Axicon in a Scanning Optical System; Nov. 1, 1992 / Vol. 31, No. 31 / Applied Optics 6653. |
Stoian et al; “Spatial and temporal laser pulse design for material processing on ultrafast scales”; Appl. Phys. A (2014) 114:119-127. |
Sundaram et al; “Inducing and Probing Non-Thermal Transistions in Semiconductors Using Femtosecond Laser Pulses”; Nature Materials; vol. 1 2002; 217-224. |
Velpula et al; “Ultrafast imaging of free carriers: controlled excitation with chirped ultrafast laser Bessel beams”; Proc of SPIE vol. 8967, 896711-1-896711-8. |
Yoshino, et al., “Micromachining with a High Repetition Rate Femtosecond Fiber Laser,” Journal of laser Micro/Nanoengineering vol. 3, No. 3, 2008. |
“What is the difference between Ra and RMS?”; Harrison Electropolishing LP; (http://www.harrisonep.com/electropolishing-ra.html); Accessed Aug. 8, 2016. |
Case Design Guidelines for Apple Devices Release R5 (http://web.archive.org/web/20131006050442/http://developer.apple.com/resources/cases/Case-Design-Guidelines.pdf; archived on Oct. 6, 2013). |
Dong et al.; On-axis irradiance distribution of axicons illuminated by spherical wave; Optics & Laser Technology 39 (2007) 1258-1261. |
Toytoman et al.; “Optical breakdown in transparent media with adjustable axial length and location”; Optics Express vol. 18 No. 24 (2010), 24688-24698. |
Singapore Patent Application No. 11201605864R Search Report dated May 24, 2017, 10 Pages; Intellecutal Property of Office of Singapore. |
Abakians, H. et al.; Evaporative Cutting of a Semitransparent Body With a Moving CW Laser; Journal of Heat Transfer; Nov. 1988; pp. 924-930; vol. 110; ASME. |
Ahmed, F. et al.; Display glass cutting by femtosecond laser induced single shot periodic void array; Applied Physics A Material Science & Processing; Jun. 3, 2008; pp. 189-192; vol. 93; Springer-Verlag. |
Bagchi, S. et al.; Fast ion beams from intense, femtosecond laser irradiated nanostructured surfaces; Applied Physics B Lasers and Optics; Jun. 27, 2007; pp. 167-173; vol. 88; Springer-Verlag. |
Bhuyan, M.K. et al.; Femtosecond non-diffracting Bessel beams and controlled nanoscale ablation; ResearchGate Conference Paper; Sep. 2011; pp. 1-4. |
Bhuyan, M.K. et al.; Laser micro- and nanostructuring using femtosecond Bessel beams; The European Physical Journal Special Topics; Dec. 7, 2011; pp. 101-110; vol. 1999; EDP Sciences, Springer-Verlag. |
Bhuyan, M.K. et al.; Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams; Applied Physics Letters; Jan. 14, 2014; pp. 021107-1-021107-4; vol. 104; AIP Publishing LLC. |
Bhuyan, M.K. et al.; Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass; Nonlinear Optics and Applications IV; 2010; pp. 77281V-1-77281V-8; vol. 7728; SPIE. |
Case Design Guidelines for Apple Devices; Sep. 13, 2013; pp. 1-58; Apple Inc. |
Chiao, R. Y. et al.; Self-Trapping of Optical Beams; Physical Review Letters; Oct. 12, 1964; pp. 479-482; vol. 13, No. 15. |
Corning EAGLE AMLCD Glass Substrates Material Information; Apr. 2005; pp. MIE 201-1-MIE 201-3; Corning Incorporated. |
Corning 1737 AMLCD Glass Substrates Material Information; Aug. 2002; pp. MIE 101-1-MIE 101-3; Corning Incorporated. |
Couairon, A. et al.; Femtosecond filamentation in transparent media; ScienceDirect Physical Reports; Feb. 6, 2007; pp. 47-189; vol. 441; Elsevier B.V. |
Courvoisier, F. et al.; Applications of femtosecond Bessel beams to laser ablation; Applied Physics A Materials Science & Processing; Sep. 6, 2012; pp. 29-34; vol. 112; Springer-Verlag. |
Courvoisier, F. et al.; Surface nanoprocessing with nondiffracting femtosecond Bessel beams; Optics Letters; Oct. 15, 2009; pp. 3163-3165; vol. 34, No. 20; Optical Society of America. |
Dong, M. et al.; On-axis irradiance distribution of axicons illuminated by spherical wave; ScienceDirect Optics & Laser Technology; Sep. 2007; pp. 1258-1261; vol. 39; Elsevier Ltd. |
Duocastella, M. et al.; Bessel and annular beams for materials processing; Laser & Photonics Reviews; 2012; pp. 607-621; vol. 6, No. 5. |
Durnin, J.; Exact solutions for nondiffracting beams. I. The scalar theory; J. Opt. Soc. Am. A; Apr. 1987; pp. 551-654; vol. 4, No. 4; Optical Society of America. |
Eaton, S. et al.; Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate; Optics Express; Jun. 13, 2005; pp. 4708-4716; vol. 13, No. 12; Optical Society of America. |
Gattass, R. et al.; Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates; Optics Express; Jun. 12, 2006; pp. 5279-5284; vol. 14, No. 12; Optical Society of America. |
Gori, F. et al.; Analytical derivation of the optimum triplicator; Optics Communications; Dec. 1, 1998; pp. 13-16; vol. 157; Elsevier B.V. |
Honda, M. et al.; A Novel Polymer Film that Controls Light Transmission; Progress in Pacific Polymer Science 3; 1994; pp. 159-169; Springer-Verlag Berlin Heidelberg. |
Hu, Z. et al.; 5-Axis Laser Cutting Interference Detection and Correction Based on STL Model; Chinese Journal of Lasers; Dec. 2009; pp. 3313-3317; vol. 36, No. 12. |
Huang, Z. et al.; Laser etching of glass substrates by 1064 nm laser irradiation; Applied Physics A Materials Science & Processing; Jun. 6, 2008; pp. 159-163; vol. 93; Springer-Verlag. |
Juodkazis, S. et al.; Laser-Induced Microexplosion Confined in the Bulk of a Sapphire Crystal: Evidence of Multimegabar Pressures; Physical Review Letters; Apr. 28, 2006; pp. 166101-1-166101-4; vol. 96; The American Physical Society. |
Karlsson, S. et al.; The Technology of Chemical Glass Strengthening—A Review; Glass Technology—European Journal of Glass Science and Technology Part A; Apr. 2010; pp. 41-54; vol. 51, No. 2. |
Levy, U. et al.; Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography; Optics Letters; Mar. 15, 2010; pp. 880-882; vol. 35, No. 6; Optical Society of America. |
Liu, X. et al.; Laser Ablation and Micromachining with Ultrashort Laser Pulses; IEEE Journal of Quantum Electronics; Oct. 1997; p. 1706-1716; vol. 33, No. 10; IEEE. |
Maeda, K et al.; Optical performance of angle dependent light control glass; Optical Materials Technology for Energy Efficiency and Solar Energy Conversion X; 1991; pp. 138-148; vol. 1536; SPIE. |
Mbise, G. et al.; Angular selective window coatings; theory and experiments; J. Phys. D: Appl. Phys.; 1997; pp. 2103-2122; vol. 30; IOP Publishing Ltd. |
McGloin, D. et al.; Bessel beams: diffraction in a new light; Contemporary Physics; Jan.-Feb. 2005; pp. 15-28; vol. 46; Taylor & Francis Ltd. |
Merola, F. et al.; Characterization of Bessel beams generated by polymeric microaxicons; Measurement Science and Technology; May 15, 2012; pp. 1-10; vol. 23; IOP Publishing Ltd. |
Mirkhalaf, M. et al.; Overcoming the brittleness of glass through bio-inspiration and micro-architecture; Nature Communications; Jan. 28, 2014; pp. 1-9; Macmillan Publishers Limited. |
Romero, L. et al.; Theory of optimal beam splitting by phase gratings. II. Square and hexagonal gratings; J. Opt. Soc. Am. A; Aug. 2007; pp. 2296-2312; vol. 24, No. 8; Optical Society of America. |
Salleo, A. et al.; Machining of transparent materials using an IR and UV nanosecond pulsed laser; Applied Physics A Materials Science & Processing; Sep. 20, 2000; pp. 601-608; vol. 71; Springer-Verlag. |
Serafetinides, A. et al.; Polymer Ablation by Ultra-Short Pulsed Lasers; Proceedings of SPIE; 2000; pp. 409-415. |
Shah, L. et al.; Micromachining with a High Repetition Rate Femtosecond Fiber Laser; JLMN—Journal of Laser Micro/Nanoengineering; Nov. 2008; pp. 157-162; vol. 3, No. 3. |
Shealy, D. et al.; Geometric optics-based design of laser beam shapers; Opt. Eng.; Nov. 2003; pp. 3123-3138; vol. 42, No. 11; Society of Photo-Optical Instrumentation Engineers. |
Stoian, R. et al.; Spatial and temporal laser pulse design for material processing on ultrafast scales; Applied Physics A Materials Science & Processing; Jan. 1, 2014; pp. 119-127; vol. 114; Springer-Verlag Berlin Heidelberg. |
Thiele, E.; Relation between Catalytic Activity and Size of Particle; Industrial and Engineering Chemistry; Jul. 1939; pp. 916-920; vol. 31, No. 7. |
Toytman, I. et al.; Optical breakdown in transparent media with adjustable axial length and location; Optic Express; Nov. 22, 2010; pp. 24688-24698; vol. 18, No. 24; Optical Society of America. |
Velpula, P. et al.; Ultrafast imaging of free carriers: controlled excitation with chirped ultrafast laser Bessel beams; Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; Proc. of SPIE; 2014; pp. 896711-1-896711-8; vol. 8967; SPIE. |
Wang Z. et al.; Investigation on CO2 laser irradiation inducing glass strip peeling for microchannel formation; Biomicrofluidics; Mar. 12, 2012; pp. 012820-1-012820-12; vol. 6; American Institute of Physics. |
Ra & RMS: Calculating Surface Roughness; Harrison Eelectropolishing; 2012. |
Wu, W. et al.; Optimal Orientation of the Cutting Head for Enhancing Smoothness Movement in Three-Dimensional Laser Cutting; Chinese Journal of Lasers; Jan. 2013; pp. 0103005-1-0103005-7, vol. 10, No. 1. |
GT ASF Grown Sapphire Cover and Touch Screen Material; www.gtat.com; 2012; pp. 1-2; GTAT Corporation. |
Xu, H. et al.; Optimization of 3D laser cutting head orientation based on minimum energy consumption; Int J Adv Manuf Technol; Jun. 28, 2014; pp. 1283-1291; vol. 74; Springer-Verlag London. |
Yan, Y. et al.; Fiber structure to convert a Gaussian beam to higher-order optical orbital angular momentum modes; Optics Letters; Aug. 15, 2012; pp. 3294-3296; vol. 37, No. 16; Optical Society of America. |
Abramov et al., “Laser separation of chemically strengthened glass”; Physics Procedia 5 (2010) 285-290, Elsevier.; doi: 10.1016/j.phpro.2010.08.054. |
Arimoto et al., “Imaging properties of axicon in a scanning optical system”; Applied Optics, Nov. 1, 1992, vol. 31, No. 31, pp. 6653-6657. |
“TruMicro 5000” Product Manual, Trumpf Laser GmbH + Co. KG, pp. 1-4, Aug. 2011. |
Bhuyan et al., “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams”; Applied Physics Letters 97, 081102 (2010); doi: 10.1063/1.3479419. |
Bhuyan et al., “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams”; Optics Express (2010) vol. 18, No. 2, pp. 566-574. |
Cubeddu et al., “A compact time-resolved reflectance system for dual-wavelength multichannel assessment of tissue absorption and scattering”; Part of the SPIE Conference on Optical Tomography and Spectroscopy of Tissue III, San Jose, CA (Jan. 1999), SPIE vol. 3597, 0277-786X/99, pp. 450-455. |
Cubeddu et al., “Compact tissue oximeter based on dual-wavelength multichannel time-resolved reflectance”; Applied Optics, vol. 38, No. 16, Jun. 1, 1999, pp. 3670-3680. |
Ding et al., “High-resolution optical coherence tomography over a large depth range with an axicon lens”; Optic Letters, vol. 27, No. 4, pp. 243-245, Feb. 15, 2002, Optical Society of America. |
“EagleEtch” Product Brochure, EuropeTec USA Inc., pp. 1-8, Aug. 1, 2014. |
Girkin et al., “Macroscopic multiphoton biomedical imaging using semiconductor saturable Bragg reflector modelocked Lasers”; Part of the SPIE Conference on Commercial and Biomedical Applications of Ultrafast Lasers, San Jose, CA (Jan. 1999), SPIE vol. 3616, 0277-786X/99, pp. 92-98. |
Glezer et al., “Ultrafast-laser driven micro-explosions in transparent materials”; Applied Physics Letters, vol. 71 (1997), pp. 882-884. |
Golub, I., “Fresnel axicon”; Optic Letters, vol. 31, No. 12, Jun. 15, 2006, Optical Society of America, pp. 1890-1892. |
Herman et al., “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains”; Part of the SPIE Conference on Commercial and Biomedical Applications of Ultrafast Lasers, San Jose, CA (Jan. 1999), SPIE vol. 3616, 0277-786X/99, pp. 148-155. |
Kosareva et al., “Formation of extended plasma channels in a condensed medium upon axicon focusing of a femtosecond laser pulse”; Quantum Electronics 35 (11) 1013-1014 (2005), Kvantovaya Elektronika and Turpion Ltd.; doi: 10.1070/QE2005v035n11ABEH013031. |
Krüger et al., “Femtosecond-pulse visible laser processing of transparent materials”; Applied Surface Science 96-98 (1996) 430-438. |
Krüger et al., “Laser micromachining of barium aluminium borosilicate glass with pluse durations between 20 fs and 3 ps”; Applied Surface Science 127-129 (1998) 892-898. |
Krüger et al., “Structuring of dielectric and metallic materials with ultrashort laser pulses between 20 fs and 3 ps”; SPIE vol. 2991, 0277-786X/97, pp. 40-47. |
Lapczyna et al., “Ultra high repetition rate (133 MHz) laser ablation of aluminum with 1.2-ps pulses”; Applied Physics A 69 [Suppl.], S883-S886, Springer-Verlag (1999); doi: 10.1007/s003399900300. |
Perry et al., “Ultrashort-pulse laser machining”; UCRL-JC-132159 Rev 1., Jan. 22, 1999, pp. 1-24. |
Perry et al., “Ultrashort-pulse laser machining”; UCRL-ID-132159, Sep. 1998, pp. 1-38. |
Perry et al., “Ultrashort-pulse laser machining of dielectric materials”; Journal of Applied Physics, vol. 85, No. 9, May 1, 1999, American Institute of Physics, pp. 6803-6810. |
“PHAROS High-power femtosecond laser system” product brochure; Light Conversion, Vilnius, LT; Apr. 18, 2011, pp. 1-2. |
Polynkin et al., “Extended filamentation with temporally chirped femtosecond Bessel-Gauss beams in air”; Optics Express, vol. 17, No. 2, Jan. 19, 2009, OSA, pp. 575-584. |
Serafetinides et al., “Ultra-short pulsed laser ablation of polymers”; Applied Surface Science 180 (2001) 42-56. |
Sundaram et al., “Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses”; Nature Miracles, vol. 1, Dec. 2002, Nature Publishing Group (2002), pp. 217-224. |
Vanagas et al., “Glass cutting by femtosecond pulsed irradiation”; J. Micro/Nanolith. MEMS MOEMS. 3(2), 358-363 (Apr. 1, 2004); doi: 10.1117/1.1668274. |
Varel et al., “Micromachining of quartz with ultrashort laser pulses”; Applied Physics A 65, 367-373, Springer-Verlag (1997). |
Yoshino et al., “Micromachining with a high repetition rate femtosecond fiber laser”; JLMN—Journal of Laser Micro/Nanoengineering vol. 3, No. 3 (2008), pp. 157-162. |
Zeng et al. “Characteristic analysis of a refractive axicon system for optical trepanning”; Optical Engineering 45(9), 094302 (Sep. 2006), pp. 094302-1-094302-10. |
Zhang et al., “Design of diffractive-phase axicon illuminated by a Gaussian-profile beam”; Acta Physica Sinica (overseas edition), vol. 5, No. 5 (May 1996) Chin. Phys. Soc., 1004-423X/96/05050354-11, pp. 354-364. |
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20160368809 A1 | Dec 2016 | US |
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