1. Field of the Invention
The present invention relates to a lens manufacturing method, a lens, and a lens holding device, and particularly, to a lens manufacturing method for grinding and polishing a lens, a lens manufactured through grinding and polishing, and a lens holding device used for manufacturing such a lens.
2. Description of the Related Art
When objects to be machined, such as lenses or semiconductor wafers, are grinded and polished, an object to be machined is fixed by bonding a reverse surface of the object to be machined to a holding fixture (jig) or suctioning the reverse surface of the object to be machined via the holding fixture, and a surface to be machined is machined using a machining machine in the fixed state.
For example, JP2000-79547A describes that an adhesive is used or a reverse surface is suctioned when a lens is attached to a jig for lens polishing. Additionally, JP2002-126960A describes that a lens is suctioned by a number of suction ports when a lens is polished, and JP1996-323571A (JP-H08-323571A) and JP2005-118979A describe that a planar semiconductor wafer is suctioned via a porous body or a number of holes.
Additionally, it is known that, when an object to be machined with a generally non-planar shape such as a lens is fixed to the holding fixture, the shape of a holding surface of the holding fixture imitates the shape of a reverse surface of the object to be machined. For example, JP2003-334748A describes that a lens reverse surface is fixed to a fixture via a low melting alloy, and JP2013-180372A and JP2013-180373A describe that a lens holding member having plasticity or shape memory properties is deformed according to the shape of a reverse surface of a lens.
In recent years, making an image finer is advancing in movies, television broadcasting, or the like. Along with this, sensors that capture such a high-definition image are also made to increase the number of pixels, and pixel size becomes small. For this reason, the accuracy required of an optical system is also made very high. For example, in ordinary spherical lenses, a saddle-type error (a so-called astigmatism error) may be generated in a planar shape, and aberration is generated in a transmission wave surface due to a difference in surface shape accuracy from a reverse surface. It is expected from now on that an allowable value of this astigmatism error is 0.1 μm or less.
However, in the above-described related-art techniques, it was difficult to machine non-planar lenses along with both surfaces with high accuracy.
For example, in the technique described in the above JP2000-79547A, simply when positioning being performed by a positioning member, the lens is held and fixed with an error of the reverse surface of the lens being indwelled, and a relative surface shape error occurs on the front and reverse surface of the lens. Additionally, in JP2002-126960A, the lens reverse surface (a surface opposite to the surface to be machined) is a plane, and cannot be applied in a case where the reverse surface and the lens holding surface of the holding fixture are non-planes. Also in JP1996-323571A (JP-H08-323571A) and JP2005-118979A, the object to be machined such as a semiconductor wafer is planar, and cannot be applied in a case where the reverse surface and the lens holding surface of the holding fixture are non-planes. Moreover, in all of JP2003-334748A, JP2013-180372A, and JP2013-180373A, the holding is made in a state where (the holding surface of) the holding fixture has imitated the shape of the reverse surface of the lens (the shape of the holding surface is deformed according to the lens reverse surface, and the shape itself of the reverse surface of the lens does not vary). In a case where an error (surface shape error) is in the lens reverse surface, the holding is made with the error being indwelled. For this reason, in a case where a front surface that is an opposite surface (a surface to be machined) of the lens held in this way is grinded or polished, the surface shape of the surface to be machined (front surface) is machined with the accuracy of the machining machine. Therefore, a relative error occurs on the front and reverse surfaces of the lens detached from the holding fixture. As a result, an optical transmission wave surface will have aberration.
The invention has been made in view of such circumstances, and an object thereof is to provide a lens manufacturing method that can manufacture a lens having excellent optical transmission performance, a lens having excellent optical transmission performance, and a lens holding device used for manufacturing such a lens.
In order to achieve the above object, a lens manufacturing method according to a first aspect of the invention is a lens manufacturing method comprising a holding step of holding a lens in a lens holding fixture, and a machining step of machining a surface to be machined in the held lens. A reverse surface of the surface to be machined is machined into a non-planar shape with a first surface shape error. A lens holding surface of the lens holding fixture is machined into the same shape as the non-planar shape with a second surface shape error smaller than the first surface shape error. In the holding step, the reverse surface is brought into surface contact with the lens holding surface in imitation of the lens holding surface to correct the shape of the lens such that the reverse surface runs along the lens holding surface. In the machining step, the surface to be machined is machined in a state where the correction has been made by the holding step.
According to the first aspect of the invention, by bringing the reverse surface of the lens having the first surface shape error into surface contact with the lens holding surface having the second surface shape error smaller than the first surface shape error in imitation of the lens holding surface, the shape (the front surface and the reverse surface) of the lens is corrected (deformed by a difference between the first surface shape error and the second surface shape error), and the surface to be machined is machined in this corrected state. Accordingly, the surface to be machined (front surface) in the lens is machined with machining accuracy determined depending on a distance between a machining tool and a lens holding surface (or the reverse surface of the held lens) of the lens holding fixture. If the machining is completed and the lens is removed from the holding fixture, the corrected state is completed and the lens reverse surface returns (is deformed) to its original shape (a state having the first surface shape error). However, the surface to be machined is also deformed in the same direction as the reverse surface by the “difference between the first surface shape error and the second surface shape error” due to the completion of the corrected state (in addition, in a case where the second surface shape error is very small compared to the first surface shape error, any one of the surfaces may be considered to be deformed by the first surface shape error). That is, since the same surface shape error (first surface shape error) occurs in the same direction as the thickness direction (a front and reverse surface direction) of the lens on the front surface and the reverse surface, the first surface shape errors are offset from each other on the reverse surface and the front surface of the lens, and a lens thickness error becomes small. As a result, a lens (a lens having excellent optical transmission performance) with a small transmission wave surface aberration can be manufactured.
In addition, in the first aspect and the following respective aspects, the “non-planar shape” may be a spherical shape or may be an aspheric shape. Additionally, as a case where the lens reverse surface and a lens holding surface have “the same shape”, for example, cases where both surfaces are spherical surfaces with the same radius, and the same paraboloidal surfaces, elliptical surface, the same hyperboloidal surfaces, and the same high-order polynomial surfaces are included.
In the lens manufacturing method related to a second aspect based on the first aspect, an aligning step of performing alignment of the reverse surface and the lens holding surface is further comprised, and the holding step is performed after the aligning step. The machining error of the lens can be made small by performing the alignment.
In the lens manufacturing method related to a third aspect based on the first or second aspect, in the aligning step, the alignment is performed by placing the reverse surface on an elastic holding member installed at a peripheral edge portion of the lens holding surface. In this aspect, the correction of the lens shape is kept from being influenced by placing the reverse surface on the elastic holding member installed at the peripheral portion of the lens holding surface to perform the alignment.
In the lens manufacturing method related to a fourth aspect based on any one of the first to third aspects, the elastic holding member is installed outside an effective diameter of the reverse surface. Since the elastic holding member is installed outside the effective diameter of the reverse surface, the influence exerted on the correction of the lens shape is made less. In addition, in a fourth aspect, the outside of a diameter to be machined, an outer peripheral portion (peripheral edge portion) held by the holding member at the time of the attachment to a lens barrel, or the like can be “outside the effective diameter”.
In the lens manufacturing method related to a fifth aspect based on any one of the first to fourth aspects, in the aligning step, the center of the lens and the center of the lens holding fixture are aligned with each other.
In the lens manufacturing method related to a sixth aspect based on any one of the first to fifth aspects, in the holding step, the correction is performed by suctioning the reverse surface via the lens holding fixture to make the reverse surface imitate the lens holding surface. By suctioning the reverse surface via the holding fixture, the reverse surface is held by the holding fixture in a state where the lens shape is corrected.
In the lens manufacturing method related to a seventh aspect based on any one of the first to sixth aspects, the second surface shape error is ½ or less of an allowable value (for example, a PV value 0.3 μm) of a thickness distribution error of the lens. In addition, in the seventh aspect, it is more preferable that the second surface shape error is ⅕ or less of the allowable value of the thickness distribution error of the lens.
In the lens manufacturing method related to an eighth aspect based on any one of the first to seventh aspects, the first surface shape error and the second surface shape error are specified by a PV value. In addition, the PV value (Peak-to-Valley Value) is a maximum error of a shape with respect to a design value of a machined surface, that is, a difference between a highest point (Peak) and a lowest point (Valley) within a measuring range, and is widely used for expressing the shape accuracy of an optical member.
A lens related to a ninth aspect of the invention is manufactured by the lens manufacturing method according to any one of the first to eighth aspects. Since the lens is manufactured by the lens manufacturing method according to any one of the first to eighth aspects, the surface shape errors are offset from each other on the reverse surface and the front surface of the lens, and a lens thickness error becomes small. As a result, a lens (a lens having excellent optical transmission performance) with a small transmission wave surface aberration is obtained.
In order to achieve the above object, a lens related to a tenth aspect of the invention is a lens having a front surface and a reverse surface machined into a non-planar shape. A surface shape error of the front surface is offset by a surface shape error of the reverse surface. Accordingly, the surface shape errors are offset from each other on the reverse surface and the front surface of the lens, and thereby, the lens thickness error becomes small. As a result, a lens (a lens having excellent optical transmission performance) with a small transmission wave surface aberration is obtained.
In the lens related to an eleventh aspect of the invention based on the tenth aspect, the surface shape error of the front surface and the surface shape error of the reverse surface have the same size, and occur in the same direction as a thickness direction of the lens. In the eleventh aspect, the offset of the surface shape errors in the above tenth aspect is specifically described.
In order to achieve the above object, a lens holding device related to a twelfth aspect of the invention is a lens holding device comprising a lens holding fixture that holds a lens; and a correction unit that corrects the shape of the lens such that a surface to be held in the lens runs along a lens holding surface of the lens holding fixture. The lens holding surface and the surface to be held are machined into the same non-planar shape. A surface shape error of the lens holding surface is smaller than a surface shape error of the surface to be held. The correction unit brings the surface to be held into surface contact with the lens holding surface in imitation of the lens holding surface to perform correction. The twelfth aspect specifies the invention of the lens holding device corresponding to the lens manufacturing method related to the first aspect, and a lens (a lens having excellent optical transmission performance) with small transmission wave surface aberration can be manufactured by using this lens holding device.
In the lens manufacturing device related to a thirteenth aspect based on the twelfth aspect, the surface shape error of the lens holding surface and the surface shape error of the surface to be held are specified by a PV value. The meaning of the PV value is the same as the above-described one of the eighth aspect.
According to the lens manufacturing method, the lens, and the lens holding device of the invention, a lens having excellent optical transmission performance can be obtained.
Hereinafter, embodiments of a lens manufacturing method, a lens, and a lens holding device related to the invention will be described with respect to the accompanying drawings.
<Configuration of Lens Manufacturing Apparatus>
The lens holding fixture 110 suctions and holds a lens 100 via the pump 122 and is rotated about an axis L by the motor 124. Control for the suction, the holding, and the rotation is performed by the controller 126. The push-out tool 132 is configured to be movable forward and backward in a direction passing through the center of the lens holding fixture 110, and is adapted to be able to push a side surface of the lens 100 placed on the lens holding fixture 110. The measurement pick 134 is adapted to be disposed outside the lens 100 and the lens holding fixture 110 and be able to detect any contact with the lens 100, and the alignment between the lens 100 and the lens holding fixture 110 is performed by the push-out tool 132 and the measurement pick 134.
The details of lens machining using the lens manufacturing apparatus 10 will be described below.
<Configuration of Lens Holding Fixture>
<Elastic Holding Member>
As illustrated in
The elastic holding member 112 consists of a spring 112A and a head 112B, and the head 112B protrudes to an upper part of the region 111B, as illustrated in
Since the structure and working of the elastic holding members 113 and 114 are the same as those of the elastic holding member 112, the description thereof will be omitted.
<Hole and Suction Port>
The lens holding fixture 110 is provided with a plurality of holes 115 passing therethrough in a vertical direction from the lens holding surface 111. The holes 115 communicate with a suction port 116 in a lower part of the lens holding fixture 110, and suction the reverse surface 100A of the lens 100 via the holes 115 and the suction port 116 during lens holding.
<Procedure of Lens Machining>
Next, a lens manufacturing method using the lens manufacturing apparatus 10 related to the present embodiment will be described.
First, the lens 100 is placed on the lens holding fixture 110 (S100). In this state, the reverse surface 100A is machined in a spherical shape (non-planar shape) with a radius R, and has an astigmatism error PV1 (first surface shape error) as illustrated in
The above-described aspheric surface shape and astigmatism error shape can be expressed by the following Equation.
<Aspheric Surface Shape Definitional Equation (Rotation Object with Respect to Optical Axis)>
<Astigmatism Shape Definitional Equation>
Here, C is an inverse number of the paraxial curvature radius of a lens, h is the height from the optical axis, K is a cone constant, and A4 to A20 are aspheric surface coefficients. In the case of a spherical surface, K=0 and A4 to A20=0.
In addition, as illustrated in
In addition, in S100, as described above, the reverse surface 100A of the lens 100 is held to abuts against the elastic holding members 112, 113, and 114 (refer to
Next, alignment (aligning step) of the lens 100 and the lens holding fixture 110 is performed (S110). This alignment is performed by pushing the side surface (end part) of the lens 100 with the push-out tool 132 as described above, and it can be seen that, if a suitable amount of push-out is reached, an opposite side surface of the lens 100 touches the measurement pick 134, the measurement pick 134 fluctuates, a signal showing the fluctuation is output, and the amount of push-out becomes suitable. In a case where the amount of push-out is excessive, the lens holding fixture 110 has only to be half-rotated by the motor 124 and the controller 126 to push out the opposite side surface. By repeating the push-out in this way while the lens holding fixture 110 is rotated appropriately, the alignment can be performed, and the center of the lens 100 and the center of the lens holding fixture 110 can be matched with each other.
If the alignment is performed in S110, the lens 100 is held by the lens holding fixture 110 in an aligned state (S120; holding step). The holding of the lens 100 is performed by suctioning the reverse surface 100A of the lens 100 via the holes 115 and the suction port 116 using the pump 122 and the controller 126, as described above. Then, by suctioning the reverse surface 100A in this way, the shape of the reverse surface 100A comes into surface contact with the lens holding surface 111 of the lens holding fixture 110 in imitation of the lens holding surface 111. Accordingly, the shape of the lens 100 is corrected (deformed) such that the reverse surface 100A having the astigmatism error PV1 runs along the lens holding surface 111 having the astigmatism error PV2 (<PV1) (refer to
Such holding continues being performed until the machining (grinding and polishing) of the lens 100 is completed.
If the lens 100 is held, grinding and polishing is performed (S130; machining step). This grinding and polishing is performed by moving a front surface 100B (surface to be machined) of the lens 100, rotating the grindstone 142 using a motor (not illustrated) as illustrated in
After the grinding and polishing of S130 is completed, the rotation of the lens holding fixture 110 is stopped, suction of the reverse surface 100A is stopped and the lens 100 is separated from the lens holding fixture 110 (S140). Then, as illustrated in
As described above, according to the lens manufacturing apparatus 10, the lens holding fixture 110, and the lens manufacturing method related to the present embodiment, a lens 100 with a small surface shape error and a small transmission wave surface aberration (a lens having excellent optical transmission performance) can be obtained.
Next, the lens manufacturing apparatus 10, the lens 100, the lens holding fixture 110, and the lens manufacturing method related to the above embodiment will be described, showing specific numerical values using an example and comparative examples. The conditions of the example and Comparative Examples 1 and 2 are as follows.
Surface shape error of lens reverse surface (astigmatism error: PV value): 150 nm
Surface shape error of lens holding fixture (astigmatism error: PV value): 30 nm
Surface shape error of lens reverse surface (astigmatism error: PV value): 50 nm
Surface shape error of lens holding fixture (astigmatism error: PV value): 200 nm
Surface shape error of lens reverse surface (astigmatism error: PV value): 180 nm
Surface shape error of lens holding fixture (astigmatism error: PV value): 30 nm
The above example is an example in a case where (Surface shape error of lens reverse surface<Surface shape error of lens holding fixture) is satisfied, that is, the reverse surface error is corrected by the holding fixture, that is, the conditions of the invention are satisfied, and Comparative example 1 is an example in a case where (Surface shape error of lens reverse surface>Surface shape error of lens holding fixture) is satisfied, that is, the conditions of the invention are not satisfied. Additionally, Comparative Example 2 is a case where (Surface shape error of lens reverse surface<Surface shape error of lens holding fixture) is satisfied but the surface shape error of the lens reverse surface is not corrected by the lens holding fixture (for example, a case according to a related-art holding method such that a lens is bonded at an outer peripheral part of the lens by the lens holding fixture).
Hence, astigmatism errors PV3A are offset from each other at the front surface and the reverse surface of the lens 200 similar to the above-described embodiment by the above machining. In addition,
In this way, according to the invention, it can be seen that a lens with a small transmission wave surface aberration (a lens having excellent optical transmission performance) can be obtained.
<Simulation Result>
Next, results obtained when the lens manufacturing method of the invention is simulated are illustrated.
In contrast, in the case of the manufacturing method of the invention, the machining error of the reverse surface 710A is generated as a machining error of the front surface 710B as it is. In
<Other Forms of Lens Holding Fixture>
Next, other forms of the lens holding fixture will be described. In the above-described embodiment and example, an aspect in which the lens holding fixture 110 includes the elastic holding member 112 and the same aspect as this have been described. However, the lens holding fixture in the invention is not limited to such aspects. In addition to the above aspects, an aspect like a lens holding fixture 510 illustrated in
As illustrated in a plan view of
In addition, as illustrated in a cross sectional view (a cross section taken along line 12B-12B of
In the lens holding fixture 510 and the above-described lens holding fixture 110, the elastic holding members are provided in three places apart at equal intervals in the circumferential direction. However, the number and arrangement of elastic holding members are not limited to such an aspect. For example, six or more elastic holding members may be provided at equal intervals in the circumferential direction. Otherwise, not elastic holding members that perform holding substantially at one point but elastic holding members having a length in the circumferential direction or an elastic holding member covering the entire circumference of the lens holding fixture may be provided.
Additionally, in the lens holding fixture 510 and the lens holding fixture 110, the suctioning and holding of a lens is performed by the holes and the suction port. However, as in a lens holding fixture 610 illustrated in
In addition, since elements, such as a pump, a motor, a controller, a push-out tool, and a measurement pick, in
Moreover, it is obvious that the invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the invention.
10: lens manufacturing apparatus
100, 200, 300, 400: lens
110, 210, 310, 410, 510, 610: lens holding fixture
111: lens holding surface
112, 113, 114, 512, 513, 514: elastic holding member
115: hole
116, 616: suction port
122: pump
124: motor
126: controller
132: push-out tool
134: measurement pick
142: grindstone
Number | Date | Country | Kind |
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2014-202531 | Sep 2014 | JP | national |
The present application is a Continuation of PCT International Application No. PCT/JP2015/070567 filed on Jul. 17, 2015 claiming priority under 35 U.S.C §119(a) to Japanese Patent Application No. 2014-202531 filed on Sep. 30, 2014. Each of the above applications is hereby expressly incorporated by reference, in their entirety, into the present application.
Number | Name | Date | Kind |
---|---|---|---|
7144305 | Toyoshima | Dec 2006 | B2 |
7500903 | Toyoshima | Mar 2009 | B2 |
20100252941 | Fujii | Oct 2010 | A1 |
20120224140 | Felten et al. | Sep 2012 | A1 |
Number | Date | Country |
---|---|---|
4-92760 | Aug 1992 | JP |
8-323571 | Dec 1996 | JP |
2000-79547 | Mar 2000 | JP |
2002-126960 | May 2002 | JP |
2003-334748 | Nov 2003 | JP |
2005-118979 | May 2005 | JP |
2010-137316 | Jun 2010 | JP |
2013-180372 | Sep 2013 | JP |
2013-180373 | Sep 2013 | JP |
Entry |
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International Preliminary Report on Patentability for PCT/JP2015/070567 (PCT/IPEA/409) dated Feb. 18, 2016. |
International Search Report for PCT/JP2015/070567 (PCT/ISA/210) dated Sep. 15, 2015. |
Written Opinion of the International Searching Authority for PCT/JP2015/070567 (PCT/ISA/237) dated Sep. 15, 2015. |
Japanese Notification of Reasons for Refusal dated May 16, 2017, for Japanese Application No. 2016-551608, with an English translation. |
Number | Date | Country | |
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20170182621 A1 | Jun 2017 | US |
Number | Date | Country | |
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Parent | PCT/JP2015/070567 | Jul 2015 | US |
Child | 15456035 | US |