Patent Application
20160268157
The present disclosure relates to the field of display technology, in particular to a lift pin and a display panel production equipment.
In semiconductor and liquid crystal industries, in order to prevent the electrostatic ions, which are generated during transferring of a substrate, from damaging the product, plasma gas is usually applied to the substrate to neutralize the electrostatic ions.
In the liquid crystal industry, eliminating electrostatic effect by blowing the plasma gas is widely used for reducing and relieving the static electricity. Plasma gas apparatus is generally located above a stage. However, the electrostatic ions are generated mainly by a friction between the substrate and a lift pin, or generated by a friction between the substrate and the stage, or generated during transferring of the substrate. Thus, most of the electrostatic ions are located under the substrate.
As shown in
As described above, the currently existed external plasma gas apparatus cannot properly remove the electrostatic ions.
The present disclosure provides a lift pin which reduces electrostatic ions located on a back side of a substrate and effectively avoid electrostatic ions and particles generated by a friction. The present disclosure also provides a display panel production equipment.
According to one embodiment of the present disclosure, a lift pin includes a body having a hollow structure, and at least one opening provided on at least one of a top end portion and a lateral side portion of the body. The opening controls gas flowing through the hollow structure of the body to blow out from the opening.
The lift pin according to the embodiment of the present disclosure has the hollow structure body. Thus, the gas, which can neutralize the electrostatic ions, can be sent to an inside portion of lift pin. Further, the lift pin has the opening at the lateral side portion and/or the top end portion of the body. Thus, the gas flowing through the inside portion of the lift pin body can blow out from the opening. With this configuration, the electrostatic ions generated between the stage and the back side of the substrate can be effectively removed, and product yield can be improved.
Alternatively, multiple openings may be provided on the lateral side portion of the body.
In this configuration, the multiple openings provided on the lateral side portion of the body blow out the gas. Thus, electrostatic ions and a great amount of particles generated by a friction between the lift pin and the stage during an ascent of the lift pin can be effectively avoided.
Alternatively, the openings may have the same dimension.
With this configuration, the gas can be uniformly blown out from the lift pin and a blowing amount of the gas can be easily controlled. This configuration eases a control of an interaction force between the side portion of the lift pin and the stage passage during an ascent of the lift pin. Thus, the friction between the lift pin and the stage during the ascent of the lift pin can be effectively avoided.
Alternatively, the openings provided on the lateral side portion of the body may be disposed symmetrically with respect to a longitudinal center axis of the body.
With this configuration, the openings symmetrically provided on the lateral side portion of the body can control the interaction force between each of the two lateral sides of the lift pin and the stage passage to maintain the same. Thus, the friction between the lift pin and the stage during the ascent of the lift pin can be easily controlled.
Alternatively, the opening of the lift pin has a circular shape.
With this configuration, a design and manufacturing of the opening can be eased by using the circular shape.
Alternatively, the opening provided on the top end portion of the body may have an area equal to or less than 1.7671 square millimeters.
In the lift pin, a lift pin cap is disposed on the top end portion of the lift pin. Thus, the opening provided on the top end portion of the lift pin should not be to too large. When the opening provided on the top end portion of the body has an area equal to or less than 1.7671 square millimeters, the electrostatic ions on the back side of the substrate can be effectively reduced.
Alternatively, the opening provided on the lateral side portion of the body may have an area equal to or less than 0.7854 square millimeters.
In order to ensure strength of the lift pin, the opening provided on the lateral side portion of the lift pin should not be too large. When the opening provided on the lateral side portion of the body has an area equal to or less than 0.7854 square millimeters, the electrostatic ions and the particles generated by the friction can be further effectively avoided.
Alternatively, the lift pin body having a hollow structure has a cylinder shape.
With this configuration, a positioning design of the cylinder-shaped lift pin on the stage member can become easy and convenient. At the same time, a gas flow in the hollow structure of the cylinder-shaped lift pin can be easily controlled.
According to another embodiment of the present disclosure, a display panel production equipment includes a plasma gas apparatus and the above-described lift pin. The plasma gas apparatus has gas passage members corresponding to the lift pins one by one. The gas passage member outputs plasma gas to the corresponding lift pin. The plasma gas blows out from the opening provided on the body.
In the display panel production equipment provided by the above-described embodiment, the display panel production equipment includes above-described lift pin. Thus, the display panel production equipment can effectively reduce the electrostatic ions on the back side of the substrate, and effectively avoid electrostatic ions and the particles generated by the friction.
Alternatively, the lift pin may be seamlessly connected with the corresponding gas passage member.
With this seamless connection configuration, the plasma gas can be completely input to the inside portion of the lift pin and gas leakage can be avoided. Thus, the gas amount input to the inside portion of the lift pin can be accurately controlled.
Alternatively, the gas passage member may be a gas pipe.
When the gas passage member is the gas pipe, the seamless connection between the gas pipe and the lift pin can be easily achieved compared with other structure of the gas passage member. Further, the gas pipe can be easily and conveniently disposed.
The present disclosure discloses a lift pin and a display panel production equipment, each of which reduces electrostatic ions on a back side of a substrate and effectively avoids electrostatic ions and particles generated by a friction.
The following will describe embodiments of the present disclosure with reference to the accompanying drawings.
As shown in
The lift pin 20 has multiple openings provided on the lateral side portion. In
The openings 21, 22, 23, 24 have the same dimension.
The openings 21 and 23 are disposed symmetrically with respect to a longitudinal center axis 25 of the lift pin 20, and the openings 22 and 24 are disposed symmetrically with respect to the longitudinal center axis 25 of the lift pin 20.
Each of the openings 21, 22, 23, 24 has a circular shape. Alternatively, each of the openings 21, 22, 23, 24 may have a different shape, not limited to the circular shape according to the present disclosure.
The opening 26 provided on the top end portion has an area equal to or less than 1.7671 square millimeters.
Each of the openings 21, 22, 23, 24 provided on the lateral side portion has an area equal to or less than 0.7854 square millimeters. A radius of each opening 21, 22, 23, 24 is equal to or less than 0.5 millimeter.
The lift pin 20 has a hollow cylinder-shaped body. Alternatively, the lift pin 20 may have a hollow rectangular parallelepiped shape, or other shapes, which is not limited to the cylinder shape described in the embodiment of the present disclosure.
As shown in
The lift pin 31 is seamlessly connected with the corresponding gas passage member 32. Similarly, each of the lift pins included in the display panel production equipment is seamlessly connected with the corresponding gas passage member.
As shown in
As described above, the embodiment of the present disclosure provides a lift pin and a display panel production equipment. The lift pin includes a body having a hollow structure, and at least one opening provided on at least one of a top end portion and a lateral side portion of the body. The opening controls gas flowing through the hollow structure of the body to blow out from the opening in order to reduce the static electricity generated during a production of the substrate. Thus, electrostatic ions and particles generated by the friction can be effectively avoided.
Obviously, those skilled in the art can change and modify present disclosure in various ways without departing from a spirit and a scope of the present disclosure. Thus, when the change and modification of the present disclosure belong to a scope of the claims of the present disclosure and their equivalents, the present disclosure also intends to include these changes and modifications.
| Number | Date | Country | Kind |
|---|---|---|---|
| 201310424982.2 | Sep 2013 | CN | national |
This application is the U.S. national phase of PCT Application No. PCT/CN2014/075875 filed on Apr. 22, 2014, which claims priority to Chinese Patent Application No. 201310424982.2 filed on Sep. 17, 2013, the disclosures of which are incorporated in their entirety by reference herein.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2014/075875 | 4/22/2014 | WO | 00 |
