characterised by a lifting arrangement

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CPC
H01L21/68742

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68742characterised by a lifting arrangement

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 12,354,849
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Gyeong min Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fixture and method for determining position of a target in a reacti...
- Patent number 12,354,893
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Siyao Luan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Floating pin for substrate transfer
- Patent number 12,347,719
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Sreenath Sovenahalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Estimation of chamber component conditions using substrate measurem...
- Patent number 12,339,645
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Chunlei Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated adaptive positioning systems and routines for automated...
- Patent number 12,341,040
- Issue date Jun 24, 2025
- Lam Research Corporation
- Hossein Sadeghi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support gap pumping to prevent glow discharge and light-up
- Patent number 12,334,383
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- James David Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,334,370
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Sangmin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,331,402
- Issue date Jun 17, 2025
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Motion device with magnetic levitation for wafer loading and unloading
- Patent number 12,327,752
- Issue date Jun 10, 2025
- YinGuan Semiconductor Technology Co., LTD.
- Huoliang Wu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate cleaning method and substrate processing method
- Patent number 12,322,586
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Koji Nishiyama
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater cover plate for uniformity improvement
- Patent number 12,315,745
- Issue date May 27, 2025
- Applied Materials, Inc.
- Muhammad M. Rasheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing device and wafer conveying method
- Patent number 12,308,277
- Issue date May 20, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hui Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tape pressure bonding apparatus
- Patent number 12,308,276
- Issue date May 20, 2025
- Disco Corporation
- Takashi Uchiho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,300,515
- Issue date May 13, 2025
- Semes Co., Ltd.
- Miso Park
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,297,536
- Issue date May 13, 2025
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,298,668
- Issue date May 13, 2025
- Tokyo Electron Limited
- Shinichiro Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and mounting table thereof
- Patent number 12,293,937
- Issue date May 6, 2025
- Tokyo Electron Limited
- Yohei Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,293,935
- Issue date May 6, 2025
- SCREEN Holdings Co., Ltd.
- Yosuke Yasutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 12,288,713
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device to reduce epitaxial defects due to contact stress...
- Patent number 12,283,515
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone heater
- Patent number 12,283,496
- Issue date Apr 22, 2025
- NGK Insulators, Ltd.
- Keisuke Takashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Servo-control system
- Patent number 12,278,134
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Paul Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ejector pin device for chip packaging
- Patent number 12,272,589
- Issue date Apr 8, 2025
- CHIPMORE TECHNOLOGY CORPORATION LIMITED
- Chaochao Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,272,590
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,266,562
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Hajime Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and processing apparatus
- Patent number 12,261,078
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 12,261,028
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Shuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND MOUNTING TABLE THEREOF
- Publication number 20250233008
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Yohei UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARTUS FOR DETECTING POSITION OF WAFER AND OPERATING METHOD THEREOF
- Publication number 20250233006
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Kyungrim Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...
- Publication number 20250233007
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Tilakraj Durgadahalli Shankaregowda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250218846
- Publication date Jul 3, 2025
- HITACHI HIGH-TECH CORPORATION
- Tomoyuki Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Device to Reduce Epitaxial Defects Due to Contact Stress...
- Publication number 20250218856
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT UNIT AND HEAT TREATMENT DEVICE INCLUDING SAME
- Publication number 20250218855
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250218832
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Tatsuya NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT STRUCTURES FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20250201622
- Publication date Jun 19, 2025
- Intel Corporation
- Sonja Koller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PELLICLE REMOVAL TOOL
- Publication number 20250191952
- Publication date Jun 12, 2025
- PHOTRONICS, INC.
- Hilario Ar-Miguel Alvarez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250191960
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Hyun Sun CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250191963
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Toshiki FUJINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20250191940
- Publication date Jun 12, 2025
- SPTS TECHNOLOGIES LIMITED
- Phil WALLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20250180996
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING
- Publication number 20250174595
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hong-Ta Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP EJECTOR APPARATUS
- Publication number 20250174488
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Sangjin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR DETERMINING WAFER BOW
- Publication number 20250167023
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Daniel FULFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT
- Publication number 20250167030
- Publication date May 22, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...
- Publication number 20250167022
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Keita Hirase
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...
- Publication number 20250157848
- Publication date May 15, 2025
- SEMES CO., LTD.
- Mun Hyeok HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...
- Publication number 20250149365
- Publication date May 8, 2025
- Jong Hyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...
- Publication number 20250149374
- Publication date May 8, 2025
- Jae Oh BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
- Publication number 20250149373
- Publication date May 8, 2025
- Applied Materials, Inc.
- Nitin Deepak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20250140595
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Yeontae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU BACK SIDE PLASMA TREATMENT FOR RESIDUE REMOVAL FROM SUBSTRATES
- Publication number 20250140530
- Publication date May 1, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KIT...
- Publication number 20250132189
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Masato ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...
- Publication number 20250132175
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250118586
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPACT DYNAMIC LEVELING LIFT MECHANISM
- Publication number 20250115999
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Tuan Anh Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...
- Publication number 20250118576
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANISM FOR FINE ADJUSTING AN ANGLE OF A SEMICONDUCTOR WAFER FIXTURE
- Publication number 20250112084
- Publication date Apr 3, 2025
- CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.
- Te-Chun CHEN
- H01 - BASIC ELECTRIC ELEMENTS

characterised by a lifting arrangement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing apparatus

Fixture and method for determining position of a target in a reacti...

Floating pin for substrate transfer

Estimation of chamber component conditions using substrate measurem...

Integrated adaptive positioning systems and routines for automated...

Substrate support gap pumping to prevent glow discharge and light-up

Apparatus and method for treating substrate

Integrated showerhead with thermal control for delivering radical a...

Motion device with magnetic levitation for wafer loading and unloading

Substrate cleaning method and substrate processing method

Plasma processing apparatus, and method and program for controlling...

Heater cover plate for uniformity improvement

Wafer processing device and wafer conveying method

Tape pressure bonding apparatus

Apparatus and method for drying substrate

Method and apparatus for low temperature selective epitaxy in a dee...

Substrate treating apparatus and substrate treating method

Substrate processing apparatus and substrate processing method

Heat treatment apparatus and heat treatment method

Plasma processing apparatus and mounting table thereof

Substrate processing apparatus

Mounting table and plasma processing apparatus

Method and device to reduce epitaxial defects due to contact stress...

Multi-zone heater

Servo-control system

Ejector pin device for chip packaging

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Processing method and processing apparatus

Plasma processing apparatus

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND MOUNTING TABLE THEREOF

APPARTUS FOR DETECTING POSITION OF WAFER AND OPERATING METHOD THEREOF

SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...

PLASMA PROCESSING APPARATUS

Method and Device to Reduce Epitaxial Defects Due to Contact Stress...

SUBSTRATE SUPPORT UNIT AND HEAT TREATMENT DEVICE INCLUDING SAME

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUPPORT STRUCTURES FOR SEMICONDUCTOR SUBSTRATES

PELLICLE REMOVAL TOOL

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

APPARATUS AND METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING

CHIP EJECTOR APPARATUS

DEVICE AND METHOD FOR DETERMINING WAFER BOW

LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT

SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...

SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...

UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...

VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...

SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING

APPARATUS FOR PROCESSING SUBSTRATE

IN-SITU BACK SIDE PLASMA TREATMENT FOR RESIDUE REMOVAL FROM SUBSTRATES

LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KIT...

ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...

ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY

COMPACT DYNAMIC LEVELING LIFT MECHANISM

CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...

MECHANISM FOR FINE ADJUSTING AN ANGLE OF A SEMICONDUCTOR WAFER FIXTURE