characterised by a lifting arrangement

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CPC
H01L21/68742

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68742characterised by a lifting arrangement

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method and substrate processing method
- Patent number 12,322,586
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Koji Nishiyama
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater cover plate for uniformity improvement
- Patent number 12,315,745
- Issue date May 27, 2025
- Applied Materials, Inc.
- Muhammad M. Rasheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing device and wafer conveying method
- Patent number 12,308,277
- Issue date May 20, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hui Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tape pressure bonding apparatus
- Patent number 12,308,276
- Issue date May 20, 2025
- Disco Corporation
- Takashi Uchiho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,297,536
- Issue date May 13, 2025
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,298,668
- Issue date May 13, 2025
- Tokyo Electron Limited
- Shinichiro Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,300,515
- Issue date May 13, 2025
- Semes Co., Ltd.
- Miso Park
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus and mounting table thereof
- Patent number 12,293,937
- Issue date May 6, 2025
- Tokyo Electron Limited
- Yohei Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,293,935
- Issue date May 6, 2025
- SCREEN Holdings Co., Ltd.
- Yosuke Yasutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 12,288,713
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone heater
- Patent number 12,283,496
- Issue date Apr 22, 2025
- NGK Insulators, Ltd.
- Keisuke Takashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device to reduce epitaxial defects due to contact stress...
- Patent number 12,283,515
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Servo-control system
- Patent number 12,278,134
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Paul Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ejector pin device for chip packaging
- Patent number 12,272,589
- Issue date Apr 8, 2025
- CHIPMORE TECHNOLOGY CORPORATION LIMITED
- Chaochao Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,272,590
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,266,562
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Hajime Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and processing apparatus
- Patent number 12,261,078
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 12,261,028
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Shuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection method for seized traveling lift pins in wafer processing...
- Patent number 12,249,534
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicle removal tool
- Patent number 12,249,528
- Issue date Mar 11, 2025
- Photronics, Inc.
- Hilario Ar-Miguel Alvarez
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support assembly and substrate processing apparatus
- Patent number 12,243,767
- Issue date Mar 4, 2025
- Eugene Technology Co., Ltd.
- Sang Don Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving fusion bonding
- Patent number 12,243,848
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hong-Ta Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including electrostatic chuck, subst...
- Patent number 12,243,727
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Dong Chan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin interface in a substrate support
- Patent number 12,237,200
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Alexander Sulyman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,230,515
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Moveable edge ring designs
- Patent number 12,230,482
- Issue date Feb 18, 2025
- Lam Research Corporation
- Hiran Rajitha Rathnasinghe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20250180996
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING
- Publication number 20250174595
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hong-Ta Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP EJECTOR APPARATUS
- Publication number 20250174488
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Sangjin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR DETERMINING WAFER BOW
- Publication number 20250167023
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Daniel FULFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT
- Publication number 20250167030
- Publication date May 22, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...
- Publication number 20250167022
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Keita Hirase
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...
- Publication number 20250157848
- Publication date May 15, 2025
- SEMES CO., LTD.
- Mun Hyeok HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...
- Publication number 20250149365
- Publication date May 8, 2025
- Jong Hyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...
- Publication number 20250149374
- Publication date May 8, 2025
- Jae Oh BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
- Publication number 20250149373
- Publication date May 8, 2025
- Applied Materials, Inc.
- Nitin Deepak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20250140595
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Yeontae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU BACK SIDE PLASMA TREATMENT FOR RESIDUE REMOVAL FROM SUBSTRATES
- Publication number 20250140530
- Publication date May 1, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KIT...
- Publication number 20250132189
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Masato ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...
- Publication number 20250132175
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250118586
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...
- Publication number 20250118576
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT DYNAMIC LEVELING LIFT MECHANISM
- Publication number 20250115999
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Tuan Anh Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANISM FOR FINE ADJUSTING AN ANGLE OF A SEMICONDUCTOR WAFER FIXTURE
- Publication number 20250112084
- Publication date Apr 3, 2025
- CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.
- Te-Chun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU FLUORESCENCE-BASED CHAMBER AND WAFER MONITORING
- Publication number 20250110055
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- David Eitan BARLAZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LIFT PIN GUIDE
- Publication number 20250112082
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Hugo RIVERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20250105049
- Publication date Mar 27, 2025
- SEMES CO., LTD.
- Seung Eun NA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LIFT PIN
- Publication number 20250105048
- Publication date Mar 27, 2025
- TOKAI CARBON CO., LTD.
- Takeshi Tokunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL TERMINAL CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATIN...
- Publication number 20250096496
- Publication date Mar 20, 2025
- Jae Oh BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20250093789
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Structure for Thermal Processing Systems
- Publication number 20250096032
- Publication date Mar 20, 2025
- Mattson Technology, Inc.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PEELING DEVICE, SUBSTRATE PEELING METHOD, AND METHOD OF M...
- Publication number 20250096027
- Publication date Mar 20, 2025
- KIOXIA Corporation
- Yoshio MIZUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND HEATING UNIT
- Publication number 20250096028
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Ju Mi LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS
- Publication number 20250076360
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- Daesung JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK INCLUDING SELF-SEALING VACUUM SEAL ASSEMBLIES AND METHO...
- Publication number 20250079228
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Wei-Yu Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL SWITCH FOR WAFER TEMPERATURE MODULATION
- Publication number 20250079234
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Hang Zhang
- H01 - BASIC ELECTRIC ELEMENTS

characterised by a lifting arrangement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate cleaning method and substrate processing method

Plasma processing apparatus, and method and program for controlling...

Heater cover plate for uniformity improvement

Wafer processing device and wafer conveying method

Tape pressure bonding apparatus

Apparatus and method for drying substrate

Method and apparatus for low temperature selective epitaxy in a dee...

Substrate processing apparatus and substrate processing method

Heat treatment apparatus and heat treatment method

Substrate treating apparatus and substrate treating method

Plasma processing apparatus and mounting table thereof

Substrate processing apparatus

Mounting table and plasma processing apparatus

Multi-zone heater

Method and device to reduce epitaxial defects due to contact stress...

Servo-control system

Ejector pin device for chip packaging

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Processing method and processing apparatus

Plasma processing apparatus

Detection method for seized traveling lift pins in wafer processing...

Pellicle removal tool

Substrate support assembly and substrate processing apparatus

Methods and systems for improving fusion bonding

Substrate processing apparatus including electrostatic chuck, subst...

Lift pin interface in a substrate support

Substrate processing apparatus and substrate processing method

Moveable edge ring designs

Level monitoring and active adjustment of a substrate support assembly

Patents Applicationslast 30 patents

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING

CHIP EJECTOR APPARATUS

DEVICE AND METHOD FOR DETERMINING WAFER BOW

LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT

SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...

SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...

UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...

VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...

SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING

APPARATUS FOR PROCESSING SUBSTRATE

IN-SITU BACK SIDE PLASMA TREATMENT FOR RESIDUE REMOVAL FROM SUBSTRATES

LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KIT...

ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERA...

ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY

CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...

COMPACT DYNAMIC LEVELING LIFT MECHANISM

MECHANISM FOR FINE ADJUSTING AN ANGLE OF A SEMICONDUCTOR WAFER FIXTURE

IN-SITU FLUORESCENCE-BASED CHAMBER AND WAFER MONITORING

WAFER LIFT PIN GUIDE

SUBSTRATE PROCESSING APPARATUS AND METHOD

WAFER LIFT PIN

ELECTRICAL TERMINAL CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATIN...

RETICLE CARRIER AND ASSOCIATED METHODS

Support Structure for Thermal Processing Systems

SUBSTRATE PEELING DEVICE, SUBSTRATE PEELING METHOD, AND METHOD OF M...

SUBSTRATE TREATING APPARATUS AND HEATING UNIT

SUBSTRATE INSPECTION APPARATUS

WAFER CHUCK INCLUDING SELF-SEALING VACUUM SEAL ASSEMBLIES AND METHO...

THERMAL SWITCH FOR WAFER TEMPERATURE MODULATION