Light receiving member having a multilayered light receiving layer composed of a lower layer made of aluminum-containing inorganic material and an upper layer made of a non-single-crystal silicon material

FIELD OF THE INVENTION
This invention concerns a light receiving member sensitive to electromagnetic waves such as light (which herein means in a broader sense those lights such as ultraviolet rays, visible rays, infrared rays, X-rays, and .gamma.-rays).
More particularly, it relates to an improved light receiving member having a multilayered light receiving layer composed of a lower layer made of an inorganic material containing at least aluminum atoms, silicon atoms, and hydrogen atoms, and an upper layer made of non-single-crystal silicon material, which is suitable particularly for use in the case where coherent lights such as laser beams are applied.
BACKGROUND OF THE INVENTION
The light receiving member used for image formation has a light receiving layer made of a photoconductive material. This material is required to have characteristic properties such as high sensitivity, high S/N ratio (ratio of light current (Ip) to dark current (Id)), absorption spectral characteristic matching the spectral characteristic of electromagnetic wave for irradiation, rapid optical response, appropriate dark resistance, and non-toxicity to the human body at the time of use. The non-toxicity at the time of use is an important requirement in the case of a light receiving member for electronic photography which is built into an electronic photographic apparatus used as an office machine.
A photoconductive material attracting attention at present from the standpoint mentioned above is amorphous silicon (A-Si for short hereinafter). The application of A-Si to the light receiving member for electrophotography is disclosed in, for example, German Patent Laid-open Nos. 746967 and 2855718.
FIG. 2 is a schematic sectional view showing the layer structure of the conventional light receiving member for electrophotography. There are shown an aluminum support 201 and a photosensitive layer of A-Si 202 This type of light receiving member for electrophotography is usually produced by forming the photosensitive layer 202. of A-Si on the aluminum support 201 heated to 50.degree.-350.degree. C., by deposition, hot CVD process, plasma CVD process, plasma CVD process or sputtering.
Unfortunately, this light receiving member for electrophotography has a disadvantage that the sensitive layer 202 of A-Si is liable to crack or peel off during cooling subsequent to the film forming step, because the coefficient of thermal expansion of aluminum is nearly ten times as high as that of A-Si. To solve this problem, there was proposed a photosensitive body for electrophotography which is composed of an aluminum support, an inter mediate layer containing at least aluminum and a sensitive layer of A-Si (Japanese Patent Laid-open No. 28162/1984). The intermediate layer containing at least aluminum relieves the stress arising from the difference in the coefficient of thermal expansion between the aluminum support and the A-Si sensitive layer, thereby reducing the cracking and peeling of the A-Si sensitive layer.
The conventional light receiving member for electrophotography which has the light receiving layer made of A-Si has been improved in electrical, optical, and photoconductive characteristics (such as dark resistance, photosensitivity, and light responsivity), adaptability of use environment, stability with time, and durability. Nevertheless, it still has room for further improvement in its overall performance.
For the improvement of image characteristics, several improvements has recently been made on the optical exposure unit, development unit, and transfer unit in the electrophotographic apparatus. This, in turn, has required the light receiving member for electrophotography to be improved further in image characteristics. With the improvement of images in resolving power, the users have begun to require further improvements such as the reduction of unevenness (so-called "coarse image") in the region where the image density delicately changes, and the reduction of image defects (so-called "dots") which appear in black or white spots, especially the reduction of very small "dots" which attracted no attention in the past.
Another disadvantage of the conventional light receiving member for electrophotography is its low mechanical strength. When it comes into contact with foreign matters which have entered the electrophotographic apparatus, or when it comes into contact with the main body or tools while the electrophotographic apparatus is being serviced for maintenance, image defects occur or the A-Si film peels off on account to of the mechanical shocks and pressure. These aggravate the durability of the light receiving member for electrophotography.
An additional disadvantage of the conventional light receiving member for electrophotography is that the A-Si film is susceptible to cracking and peeling on account of the stress which occurs because the A-Si film differs from the aluminum support in the coefficient of thermal expansion. This leads to lower yields in production.
Under the circumstances mentioned above, it is necessary to solve the above-mentioned problems and to improve the light receiving member for electrophotography from the standpoint of its structure as well as the characteristic properties of the A-Si material per se.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a light receiving member for electrophotography which meets the above-mentioned requirements and eliminates the above-mentioned disadvantages involved in the conventional light receiving member.
According to the present invention, the improved light receiving member for electrophotography is made up of an aluminum support and a multilayered light receiving layer exhibiting photoconductivity formed on the aluminum support, wherein the multilayered light receiving layer consists of a lower layer in contact with the support and an upper layer, the lower layer being made of an inorganic material containing at least aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) ("AlSiH" for short hereinafter), and having a portion in which the aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) are unevenly distributed across the layer thickness, the upper layer being made of a non-single-crystal material composed of silicon atoms (Si) as the matrix and at least either of hydrogen atoms (H) or halogen atoms (X) ("Non-Si (H,X): for short hereinafter), and containing at least one of carbon atoms (C), nitrogen atoms (N) and oxygen atoms (0) in the layer region in adjacent with the lower layer.
The light receiving member for electrophotography in the present invention has the multilayered structure as mentioned above. Therefore, it is free from the abovementioned disadvantages, and it exhibits outstanding electric characteristics, optical characteristics, photoconductive characteristics, durability, image characteristics, and adaptability to ambient environments.
As mentioned above, the lower layer is made such that the aluminum atoms and silicon atoms, and especially the hydrogen atoms, are unevenly distributed across the layer thickness. This structure improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer. In addition, this structure joins the constituent elements of the aluminum support to the constituent elements of the upper layer gradually in terms of composition and constitution. This leads to the improvement of image characteristics relating to coarse image and dots. Therefore, the light receiving member permits the stable reproduction of images of high quality with a sharp half tone and a high resolving power.
The above-mentioned multilayered structure prevents the image defects and the peeling of the non-Si(H,X) film which occurs as the result of impactive mechanical pressure applied to the light receiving member for electrophotography. In addition, the multilayered structure relieves the stress arising from the difference between the aluminum support and the non-Si(H,X) film in the coefficient of thermal expansion and also prevents the occurrence of cracks and peeling in the non-Si(H,X) film. All this contributes to improved durability and increased yields in production.
Particularly, since at least one of carbon atoms, nitrogen atoms and oxygen atoms are incorporated into the layer region of the upper layer in adjacent with the lower layer in this invention, the quality of the upper layer is improved to enhance the durability to the high voltage and the close bondability between the upper layer and the lower layer can further be improved, and image defects or the peeling of the Non-Si(H,X) film can be prevented, thereby contributing to the improvement of the durability.
According to the present invention, the lower layer of the light receiving member may further contain atoms to control the image ("atoms (Mc)" for short hereinafter. The incorporation of atoms (Mc) to control the image quality improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer and also improves the transferability of electric charge (photocarrier) in the lower layer. Thus the light receiving member permits the stable reproduction of images of high quality with a sharp half tone and a high resolving power.
According to the present invention, the lower layer of the light receiving member may further contain atoms to control the durability ("atoms (CNOc) for short hereinafter). The incorporation of atoms (CNOc) greatly improves the resistance to impactive mechanical pressure applied to the light receiving member for electrophotography. In addition, it prevents the image defects and the peeling of the non-Si(H,X) film, relieves the stress arising from the difference between the aluminum support and the non-Si(H,X) film in the coefficient of thermal expansion, and prevents the occurrence of cracks and peeling in the non-Si(H,X) film. All this contributes to improved durability and increased yields in production.
According to the present invention, the lower layer of the light receiving member may further contain halogen atom (X). The incorporation of halogen atom (X) compensates for the dangling bonds of silicon atom (Si) and aluminum atom (Al), thereby creating a stable state in terms of constitution and structure. This, coupled with the effect produced by the distribution of silicon atoms (Si), aluminum atoms (Al), and hydrogen atoms (H) mentioned above, greatly improves the image characteristics relating to coarse image and dots.
According to the present invention, the lower layer of the light receiving member may further contain at least either of germanium atoms (Ge) or tin atoms (Sn). The incorporation of at least either of germanium atoms (Ge) or tin atoms (Sn) improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, the adhesion of the lower layer to the aluminum support, and the transferability of electric charge (photocarrier) in the lower layer. This leads to a distinct improvement in image characteristics and durability.
According to the present invention, the lower layer of the light receiving member may further contain at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, ("atoms (Me)" for short hereinafter). The incorporation of at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms permits more dispersion of the hydrogen atoms or halogen atoms contained in the lower layer (the reason for this is not yet fully elucidated) and also reduces the structure relaxation of the lower layer which occurs with lapse of time. This leads to reduced liability of cracking and peeling even after use for a long period of time. The incorporation of at least one kind of the above-mentioned metal atoms improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, the adhesion of the lower layer to the aluminum support, and the transferability of electric charge (photocarrier) in the lower layer. This leads to a distinct improvement in image characteristics and durability, which in turn leads to the stable production and quality.
In the meantime, the above-mentioned Japanese Patent Laid-open No. 28162/1984 mentions the layer containing aluminum atoms and silicon atoms unevenly across the layer thickness and also mentions the layer containing hydrogen atoms. However, it does not mention how the layer contains hydrogen atoms. Therefore, it is distinctly different from the present invention.

BRIEF DESCRIPTION OF THE INVENTION
FIG. 1 is a schematic diagram illustrating the layer structure of the light receiving member for electrophotography.
FIG. 2 is a schematic diagram illustrating the layer structure of the conventional light receiving member for electrophotography.
FIGS. 3 to 8 are diagrams illustrating the distribution state of aluminum atoms (Al) contained in the lower layer, and also illustrating the distribution of atoms (Mc) to control image quality, and/or atoms (CNOc) to control durability, and/or halogen atoms (X), and/or germanium atoms (Ge), and/or tin atoms (Sn), and/or at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, which are optionally contained in the lower layer.
FIGS. 9 to 16 are diagrams illustrating the distribution of silicon atoms (Si) and hydrogen atoms (H) contained in the lower layer, and also illustrating the distribution of atoms (Mc) to control image quality, and/or atoms (CNOc) to control durability, and/or halogen atoms (X), and/or germanium atoms (Ge), and/or tin atoms (Sn), and/or at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, which are optionally contained in the lower layer.
FIGS. 17 to 36 are diagrams illustrating the distribution of atoms (M) to control conductivity, carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O), and/or germanium atoms (Ge), and/or tin atoms (Sn), and/or alkali metal atoms, and/or alkaline earth metal atoms, and/or transition metal atoms, which are contained in the upper layer.
FIG. 37 is a schematic diagram illustrating an apparatus to form the light receiving layer of the light receiving member for electrophotography by RF glow discharge method according to the present invention.
FIG. 38 is an enlarged sectional view of the aluminum support having a V-shape rugged surface which is used to form the light receiving member for electrophotography according to the present invention.
FIG. 39 is an enlarged sectional view of the aluminum support having a dimpled surface on which is used to form the light receiving member for electrophotography according to the present invention.
FIG. 40 is a schematic diagram of the depositing apparatus to form the light receiving layer of the light receiving member for electrophotography by microwave glow discharge method according to the present invention.
FIG. 41 is a schematic diagram of the apparatus to form the light receiving layer of the light receiving member for electrophotography by microwave glow discharge method according to the present invention.
FIG. 42 is a schematic diagram of the apparatus to form the light receiving layer of the light receiving member for electrophotography by RF sputtering method according to the present invention.
FIGS. 43 (a) to 43(d) show the distribution of the content of the atoms across the layer thickness in Example 349, Comparative Example 8, Example 356, and Example 357, respectively, of the present invention.

DETAILED DESCRIPTION OF THE INVENTION
The light receiving member for electrophotography pertaining to the present invention will be described in more detail with reference to the drawings.
FIG. 1 is a schematic diagram showing a typical example of the layer structure suitable for the light receiving member for electrophotography pertaining to the present invention.
The light receiving member 100 for electrophotography as shown in FIG. 1 comprises an aluminum support 101 for use in the light receiving member for electrophotography and, disposed thereon, a light receiving layer 102 having a layered structure comprising a lower layer 103 constituted with AlSiH and having a part in which the above-mentioned aluminum atoms and silicon atoms are unevenly distributed across the layer thickness and the upper layer 104 constituted with Non-Si(H,X) and containing at least one of carbon atoms, nitrogen atoms and oxygen atoms in the layer region in adjacent with the lower layer. The upper layer 104 has a free surface 105.
Support
The aluminum support 101 used in the present invention is made of an aluminum alloy. The aluminum alloy is no specifically limited in base aluminum and alloy components. The kind and composition of the components may be selected as desired. Therefore, the aluminum alloy used in the present invention may be selected from pure aluminum, Al-Cu alloy, Al-Mn alloy, Al-Mg alloy, Al-Mg-Si alloy, Al-Zn-Mg alloy, Al-Cu-Mg alloy (duralumin and super duralumin), Al-Cu-Si alloy (lautal), Al-Cu-Ni-Mg alloy (Y-alloy and RR alloy), and aluminum powder sintered body (SAP) which are standardized or registered as a malleable material, castable material, or die casting material in the Japanese Industrial Standards (JIS), AA Standards, BS Standards, DIN Standards, and International Alloy Registration.
The composition of the aluminum alloy used in the invention is exemplified in the following. The scope of the invention is not restricted to the examples.
Pure aluminum conforming to JIS-1100 which is composed of less than 1.0 wt % of Si and Fe, 0.05-0.20 wt % of Cu, less than 0.05 wt % of Mn, less than 0.10 wt % of Zn, and more than 99.00 wt % of Al.
Al-Cu-Mg alloy conforming to JIS-2017 which is composed of 0.05-0.20 wt % of Si, less than 0.7 wt % of Fe, 3.5-4.5 wt % of Cu, 0.40-1.0 wt % of Mn, 0.40-0.8 wt % of Mg, less than 0.25 wt % of Zn, and less than 0.10 wt % of Cr, with the remainder being Al.
Al-Mn alloy conforming to JIS-3003 which is composed of less than 0.6 wt % of Si, less than 0.7 wt % of Fe, 0.05-0.20 wt % of Cu, 1.0-1.5 wt % of Mn, and less than 0.10 wt % of Zn, with the remainder being Al.
Al-Si alloy conforming to JIS-4032 which is composed of 11.0-13.5 wt % of Si, less than 1.0 wt % of Fe, 0.50-1.3 wt % of Cu, 0.8-1.3 wt % of Mg, less than 0.25 wt % of Zn, less than 0.10 wt % of Cr, and 0.5-1.3 wt % of Ni, with the remainder being Al.
Al-Mg alloy conforming to JIS-5086 which is composed of less than 0.40 wt % of Si, less than 0.50 wt % of Fe, less than 0.10 wt % of Cu, 0.20-0.7 wt % of Mn, 3.5-4.5 wt % of Mg, less than 0.25 wt % of Zn, 0.05-0.25 wt % of Cr, and less than 0.15 wt % of Ti, with the remainder being Al.
An alloy composed of less than 0.50 wt % of Si, less than 0.25 wt % of Fe, 0.04-0.20 wt % of Cu, 0.01-1.0 wt % of Mn, 0.5-10 wt % of Mg, 0.03-0.25 wt % of Zn, 0.05-0.50 wt % of Cr, 0.05-0.20 wt % of Ti or Tr, and less than 1.0 cc of H.sub.2 per 100 g of Al, with the remainder being Al.
Al alloy composed of less than 0.12 wt % of Si, less than 0.15% of Fe, less than 0.30 wt % of Mn, 0.5-5.5 wt % of Mg, 0.01-1.0 wt % of Zn, less than 0.20 wt % of Cr, and 0.01-0.25 wt % of Zr, with the remainder being Al.
Al-Mg-Si alloy conforming to JIS-6063 which is composed of 0.20-0.6 wt % of Si, less than 0.35 wt % of Fe, less than 0.10 wt % of Cu, less than 0.10 wt % of Mn, 0.45-0.9 wt % of MgO, less than 0.10 wt % of Zn, less than 0.10 wt % of Cr, and less than 0.10 wt % of Ti, with the remainder being Al.
Al-Zn-Mg alloy conforming to JIS-7N01 which is composed of less than 0.30 wt % of Si, less than 0.35 wt % of Fe, less than 0.20 wt % of Cu, 0.20-0.7 wt % of Mn, 1.0-2.0 wt % of Mg, 4.0-5.0 wt % of Zn, less than 0.30 wt % of Cr, less than 0.20 wt % of Ti, less than 0.25 wt % of Zr, and less than 0.10 wt % of V, with the remainder being Al.
In this invention, an aluminum alloy of proper composition should be selected in consideration of mechanical strength, corrosion resistance, workability, heat resistance, and dimensional accuracy which are required according to specific uses. For example, where precision working with mirror finish is required, an aluminum alloy containing magnesium and/or copper together is desirable because of its free-cutting performance.
According to the present invention, the aluminum support 101 can be in the form of cylinder or flat endless belt with a smooth or irregular surface. The thickness of the support should be properly determined so that the light receiving member for electrophotography can be formed as desired. In the case where the light receiving member for electrophotography is required to be flexible, it can be made as thin as possible within limits not harmful to the performance of the support. Usually the thickness should be greater than 10 um for the convenience of production and handling and for the reason of mechanical strength.
In the case where the image recording is accomplished by the aid of coherent light such as laser light, the aluminum support may be provided with an irregular surface to eliminate defective images caused by interference fringes.
The irregular surface on the support may be produced by any known method disclosed in Japanese Patent Laid-open Nos. 168156/1985, 178457/1985, and 225854/1985.
The support may also be provided with an irregular surface composed of a plurality of spherical dents in order to eliminate defective images caused by interference fringes which occur when coherent light such as laser light is used.
In this case, the surface of the support has irregularities smaller than the resolving power required for the light receiving member for electrophotography, and the irregularities are composed of a plurality of dents.
The irregularities composed of a plurality of spherical dents can be formed on the surface of the support according to the known method disclosed in Japanese Patent Laid-Open No. 231561/1986.
Lower layer
According to the present invention, the lower layer is made of an inorganic material which is composed of at least aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H). It may further contain atoms (Mc) to control image quality, atoms (CNOc) to control durability, halogen atoms (X), germanium atoms (Ge), and/or tin atoms (Sn), and at least one kind of atoms (Me) selected from the group consisting of alkali metal atoms, and/or alkaline earth metal atoms, and transition metal atoms.
The lower layer contains aluminum atoms (Al), silicon atoms, (Si), and hydrogen atoms (H) which are distributed evenly throughout the layer; but it has a part in which their distribution is uneven across the layer thickness. Their distribution should be uniform in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.
According to a preferred embodiment, the lower layer contains aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) which are distributed evenly and continuously throughout the layer, with the aluminum atoms (Al) being distributed such that their concentration gradually decreases across the layer thickness toward the upper layer from the support, with the silicon atoms (Si) and hydrogen atoms (H) being distributed such that their concentration gradually increases across the layer thickness toward the upper layer from the support. This distribution of atoms makes the aluminum support and the lower layer compatible with each other and also makes the lower layer and the upper layer compatible with each other.
In the light receiving member for electrophotography according to the present invention, it is desirable that the lower layer contains aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) which are specifically distributed across the layer thickness as mentioned above but are evenly distributed in the plane parallel to the surface of the support.
The lower layer may further contain atoms (Mc) to control image quality, atoms (CNOc) to control durability, halogen atoms (X), germanium atoms (Ge), and/or tin atoms (Sn), and at least one kind of atoms (Me) selected from the group consisting of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, which are evenly distributed throughout the entire layer or unevenly distributed across the layer thickness in a specific part. In either case, their distribution should be uniform in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.
FIGS. 3 to 8 show the typical examples of the distribution of aluminum atoms (Al) and optionally added atoms in the lower layer of the light receiving member for electrophotography in the present invention. (The aluminum atoms (Al) and the optionally added atoms are collectively referred to as "atoms (AM)" hereinafter.)
In FIGS. 3 to 8, the abscissa represents the concentration (C) of atoms (AM) and the ordinate represents the thickness of the lower layer. (The aluminum atoms (Al) and the optionally added atoms may be the same or different in their distribution across the layer thickness.)
The ordinate represents the thickness of the lower layer, with t.sub.B representing the position of the end (adjacent to the support) of the lower layer, with t.sub.T representing the position of the end (adjacent to the upper layer) of the lower layer. In other words, the lower layer containing atoms (AM) is formed from the t.sub.B side toward the t.sub.T side.
FIG. 3 shows a first typical example of the distribution of atoms (AM) across layer thickness in the lower layer. The distribution shown in FIG. 3 is such that the concentration (C) of atoms (AM) remains constant at C.sub.31 between position t.sub.B and position t.sub.31 and linearly decreases from C.sub.31 to C.sub.32 between position t.sub.31 and position t.sub.T.
The distribution shown in FIG. 4 is such that the concentration (C) of atoms (AM) linearly decreases from C.sub.41 to C.sub.42 between position t.sub.B and position t.sub.T.
The distribution shown in FIG. 5 is such that the concentration (C) of atoms (AM) gradually and continuously decreases from C.sub.51 to C.sub.52 between position t.sub.B and position t.sub.T.
The distribution shown in FIG. 6 is such that the concentration (C) of atoms (AM) remains constant at C.sub.61 between position t.sub.B and position t.sub.61 and linearly decreases from C.sub.62 to C.sub.63 between t.sub.61 and position t.sub.T
The distribution shown in FIG. 7 is such that the concentration (C) of atoms (AM) remains constant at C.sub.71 between position t.sub.B and position t.sub.71 and decreases gradually and continuously from C.sub.72 to C.sub.73 between position t.sub.71 and position t.sub.T.
The distribution shown in FIG. 8 is such that the concentration (C) of atoms (AM) decreases gradually and continuously from C.sub.81 to C.sub.82 between position t.sub.B and position t.sub.T.
The atoms (AM) in the lower layer are distributed across the layer thickness as shown in FIGS. 3 to 8 with reference to several typical examples. In a preferred embodiment, the lower layer contains silicon atoms (Si) and hydrogen atoms (H) and atoms (AM) in a high concentration of C in the part adjacent to the support, and also contains atoms (AM) in a much lower concentration at the interface t.sub.T. In such a case, the distribution across the layer thickness should be made such that the maximum concentration Cmax of atoms (Al) is 10 atom % or above, preferably 30 atom % or above, and most desirably 50 atom % or above.
According to the present invention, the amount of atoms (Al) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 5-95 atom %, preferably 10-90 atom %, and most desirably 20-80 atom %.
FIGS. 9 to 16 shows the typical examples of the distribution of silicon atoms (Si), hydrogen atoms (H), and the above-mentioned optional atoms contained across the layer thickness in the lower layer of the light receiving member for electrophotography in the present invention.
In FIGS. 9 to 16, the abscissa represents the concentration (C) of silicon atoms (Si), hydrogen atoms (H), and optionally contained atoms and the ordinate represents the thickness of the lower layer will be collectively referred to as "atoms (SHM)" hereinafter.) The silicon atoms (Si), hydrogen atoms (H), and optionally contained atoms may be the same or different in their distribution across the layer thickness. t.sub.B on the ordinate represents the end of the lower layer adjacent to the support and t.sub.T on the ordinate represents the end of the lower layer adjacent to the upper layer. In other words, the lower layer containing atoms (SHM) is formed from the t.sub.B side toward the t.sub.T side.
FIG. 9 shows a first typical example of the distribution of atoms (SHM) across the layer thickness in the lower layer. The distribution shown in FIG. 9 is such that the concentration (C) of atoms (SHM) linearly increases from C.sub.91 to C.sub.92 between position t.sub.B and position t.sub.91 and remains constant at C.sub.92 between position t.sub.91 and position t.sub.T.
The distribution shown in FIG. 10 is such that the concentration (C) of atoms (SHM) linearly increases from C.sub.101 to C.sub.102 between position t.sub.B and position t.sub.T.
The distribution shown in FIG. 11 is such that the concentration (C) of atoms (SHM) gradually and continuously increase from C.sub.111 to C.sub.112 between position t.sub.B and position t.sub.T.
The distribution shown in FIG. 12 is such that the concentration (C) of atoms (SHM) linearly increases from C.sub.121 to C.sub.122 between position t.sub.B and position t.sub.121 and remains constant at C.sub.123 between position t.sub.121 and position t.sub.T.
The distribution shown in FIG. 13 is such that the concentration (C) of atoms (SHM) gradually and continuously increases from C.sub.131 to C.sub.132 between position t.sub.B and position t.sub.131 and remains constant at C between position t.sub.131 and position t.sub.T.
The distribution shown in FIG. 14 is such that the concentration (C) of atoms (SHM) gradually and continuously increases from C.sub.141 to C.sub.142 between position t.sub.B and position t.sub.T.
The distribution shown in FIG. 15 is such that the concentration (C) of atoms (SHM) gradually increases from substantially zero to C.sub.151 position t.sub.B and position t.sub.151 and remains constant at C.sub.152 between position t.sub.151 and position t.sub.T. ("Substantially zero" means that the amount is lower than the detection limit. The same shall apply hereinafter.)
The distribution shown in FIG. 16 is such that the concentration (C) of atoms (SHM) gradually increases from substantially zero to C.sub.161 between position t.sub.B and position t.sub.T.
The silicon atoms (Si) and hydrogen atoms (H) in the lower layer are distributed across the layer thickness as shown in FIGS. 9 to 16 with reference to several typical examples. In a preferred embodiment, the lower layer contains aluminum atoms (Al) and silicon atoms (Si) and hydrogen atoms (H) in a low concentration of C in the part adjacent to the support, and also contains silicon atoms (Si) and hydrogen atoms (H) in a much higher concentration at the interface t.sub.T. In such a case, the distribution across the layer thickness should be made such that the maximum concentration C.sub.max of the total of silicon atoms (Si) and hydrogen atoms (H) is 10 atom % or above, preferably 30 atom % or above, and most desirably 50 atom % or above.
According to the present invention, the amount of silicon atoms (Si) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 5-95 atom %, preferably 10-90 atom %, and most desirably 20-80 atom %.
According to the present invention, the amount of hydrogen atoms (H) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 0.01-70 atom %, preferably 0.1-50 atom %, and most desirably 1-40 atom %.
The above-mentioned atoms (Mc) optionally contained to control image quality are selected from atoms belonging to Group III of the periodic table, except for aluminum atoms (Al) ("Group III atoms" for short hereinafter), atoms belonging to Group V of the periodic table, except for nitrogen atoms (N) ("Group V atoms" for short hereinafter), and atoms belonging to Group VI of the periodic table, except for oxygen atoms (O) ("Group VI atoms" for short hereinafter).
Examples of Group III atoms include B (boron), Ga (gallium), In (indium), and Tl (thallium), with B, Al and Ga being preferable. Examples of Group V atoms include P (phosphorus), As (arsenic), Sb (antimony) and Bi (bismuth), with P and As being preferable. Examples of Group VI atoms include S (sulfur), Se (selenium), Te (tellurium), and Po (polonium), with S and Se being preferable.
According to the present invention, the lower layer may contain atoms (Mc) to control image quality, which are Group III atoms, Group V atoms, or Group VI atoms. The atoms (Mc) improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer. They also control conduction type and/or conductivity in the region of the lower layer which contains a less amount of aluminum atoms (Al).
In the lower layer, the content of atoms (Mc) to control image quality should be 1.times.10.sup.-3 -5.times.10.sup.4 atom-ppm, preferably 1.times.10.sup.-1 -5.times.10.sup.4 atom-ppm, and most desirably 1.times.10.sup.-2 -5.times.10.sup.3 atom-ppm
The above-mentioned atoms (NCOc) optionally contained to control durability are selected from carbon atoms (C), nitrogen atoms (N), and oxygen atoms (O). When contained in the lower layer, carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O) as the atoms (CNOc) to control durability contributed to improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer and/or improve the adhesion of the lower layer to the aluminum support. They also contribute to control the width of the forbidden band in the region of the lower layer which contains a less amount of aluminum atoms (Al).
In the lower layer, the content of atoms (NCOc) to control durability should be 1.times.10.sup.3 -5.times.10.sup.5 atom-ppm, preferably 5.times.10.sup.1 -4.times.10.sup.5 atom-ppm, and most desirably 1.times.10.sup.2 -3.times.10.sup.3 atom-ppm
The above-mentioned halogen atoms (X) optionally contained in the lower layer are selected from fluorine atoms (F), chlorine atoms (Cl), bromine atoms (Br), and iodine atoms (I). When contained in the lower layer, fluorine atoms (F), and/or chlorine atoms (Cl), and/or bromine atoms (Br), and/or iodine atoms (I) as the halogen atoms (V) compensate for the unbonded hands of silicon atoms (Si) and aluminum atoms (Al) contained mainly in the lower layer and make the lower layer stable in terms of composition and structure, thereby improving the quality of the layer.
The content of halogen atoms (X) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 1-4.times.10.sup.5 atom-ppm, preferably 10-3.times.10.sup.5 atom-ppm, and most desirably 1.times.10.sup.2 -2.times.10.sup.5 atom-ppm.
According to the present invention, the lower layer may optionally contain germanium atoms (Ge) and/or tin atoms (Sn). They improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer and/or improve the adhesion of the lower layer to the aluminum support. They also narrow the width of the forbidden band in the region of the lower layer which contains a less amount of aluminum atoms (Al). These effects suppress interference which occurs when a light of long wavelength such as semiconductor laser is used as the light source for image exposure in the electrophotographic apparatus.
The content of germanium atoms (Ge) and/or tin atoms (Sn) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 1-9.times.10.sup.5 atom-ppm, preferably 1.times.10 .sup.2 -8.times.10.sup.5 atom-ppm, and most desirably 5.times.10.sup.2 -7.times.10.sup.5 atom-ppm
According to the present invention, the lower layer may optionally contain, as the alkali metal atoms and/or alkaline earth metal atoms and/or transition metal atoms, magnesium atoms (Mg) and/or copper atoms (Cu) and/or sodium atoms (Na) and/or yttrium atoms (Y) and/or manganese atoms (Mn) and/or zinc atoms (Zn). They disperse hydrogen atoms (H) and halogen atoms (X) uniformly in the lower layer and prevent the cohesion of hydrogen which is considered to cause cracking and peeling. They also improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer and/or improve the adhesion of the lower layer to the aluminum support.
The content of the above-mentioned metals in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 1-2.times.10.sup.5 atom-ppm, preferably 1.times.10.sup.2 -1.times.10.sup.5 atom-ppm, and most desirably 5.times.10.sup.2 -5.times.10.sup.4 atom-ppm.
According to the present invention, the lower layer composed of AlSiH is formed by the vacuum deposition film forming method, as in the upper layer which will be mentioned later, under proper conditions for the desired characteristic properties. The thin film is formed by one of the following various methods. Glow discharge method (including ac current discharge CVD, e.g., low-frequency CVD, high-frequency CVD, and microwave CVD, and dc current CVD), ECR-CVD method, sputtering method, vacuum metallizing method, ion plating method, light CVD method, "HRCVD" method (explained below), "FOCVD" method (explained below). (According to HRCVD method, an active substance (A) formed by the decomposition of a raw material gas and the other active substance (B) formed from a substance reactive to the first active substance are caused to react with each other in a space where the film formation is accomplished. According to FOCVD method, a raw material gas and a halogen-derived gas capable of oxidizing said raw material gas are caused to react in a space where the film formation is accomplished.) A proper method should be selected according to the manufacturing conditions, the capital available, the production scale, and the characteristic properties required for the light receiving member for electrophotography. Preferable among these methods are glow discharge method, sputtering method, ion plating method, HRCVD method, and FOCVD method on account of their ability to control the production conditions and to introduce aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) with ease. These methods may be used in combination with one another in the same apparatus.
The glow discharge method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced into an evacuatable deposition chamber, and glow discharge is performed, with the gases being introduced at a desired pressure, so that a layer of AlSiH is formed as required on the surface of the support placed in the chamber. The raw material gases may contain a gas to supply aluminum atoms (Al), a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOx) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc), germanium atoms (Ge) and tin atoms (Sn), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms).
The HRCVD may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced all together or individually into an evacuatable deposition chamber, and glow discharge is performed or the gases are heated, with the gases being introduced at a desired pressure, during which a first active substance (A) is formed and a second active substance (B) is introduced into the deposition chamber, so that a layer of AlSiH is formed as required on the surface of the support placed in the chamber. The raw material gases may contain a gas to supply aluminum atoms, (Al), a gas to supply silicon atoms (Si), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (germanium atoms (Ge) and tin atoms (Sn)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms). A second active substance (B) is formed by introducing a gas to supply hydrogen into the activation chamber. Said first active substance (A) and said second active substance are individually introduced into the deposition chamber.
The FOCVD method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced into an evacuatable deposition chamber, and chemical reactions are performed, with the gases being introduced at a desired pressure, so that a layer of AlSiH is formed as required on the surface of the support placed in the chamber. The raw material gases may contain a gas to supply aluminum atoms (Al), a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (germanium atoms (Ge) and tin atoms (Sn)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms). They may be introduced into the chamber altogether or individually, and a halogen (X) gas is introduced into the chamber separately from said raw materials gas, and these gases are subjected to chemical reaction in the deposition chamber.
The sputtering method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced into a sputtering deposition chamber, and a desired gas plasma environment is formed using an aluminum target and an Si target in an inert gas of Ar or He or an Ar- or He-containing gas. The raw material gases may contain a gas to supply hydrogen atoms (H), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (Germanium atoms (Ge) and tin atoms (Sn)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms). If necessary, a gas to supply aluminum atoms (Al) and/or to supply silicon atoms (Si) are introduced into the sputtering chamber.
The ion plating method may be performed in the same manner as the sputtering method, except that vapors of aluminum and silicon are passed through the gas plasma environment. The vapors of aluminum and silicon are produced from aluminum and silicon polycrystal or single crystal placed in a boat which is heated by resistance or electron beams (EB method).
According to the present invention, the lower layer contains aluminum atoms (Al), silicon atoms (Si), hydrogen atoms (H), optional atoms (Mc) to control image quality, optional atoms (CNOc) to control durability, optional halogen atoms (X), optional germanium atoms (Ge), optional tin atoms (Sn), optional alkali metal atoms, optional alkaline earth metal atoms, and optional transition metal atoms (collectively referred to as atoms (ASH) hereinafter), which are distributed in different concentrations across the layer thickness. The lower layer having such a depth profile can be formed by controlling the flow rate of the feed gas to supply atoms (ASH) according to the desired rate of change in concentration. The flow rate may be changed by operating the needle valve in the gas passage manually or by means of a motor, or it may be changed by any of customary means such as by properly adjusting the mass flow controller manually or by means of a programmable control apparatus.
In the case where the sputtering method is used, the lower layer having such a depth profile can be formed, as in the glow discharge method, it can be achieved by controlling the flow rate of the gaseous raw material to supply atoms (ASH) according to the desired rate of change in concentration and introducing the gas into the deposition chamber. Alternatively, it is possible to use a sputtering target comprising a Al-Si mixture in which the mixing ratio of Al and Si is properly changed in the direction of layer thickness of the target.
According to the present invention, the gas to supply Al includes, for example, AlCl.sub.3, AlBr.sub.3, All.sub.3, Al(CH.sub.3).sub.2 Cl, Al(CH.sub.3).sub.3, Al(OCH.sub.3).sub.3, Al(C.sub.2 H.sub.5).sub.3, Al(OC.sub.2 H.sub.5).sub.3, Al(i-C.sub.4 H.sub.9).sub.3, Al(i-C.sub.3 H.sub.7).sub.3, A(C.sub.3 H.sub.7).sub.3 and (Al(OC.sub.4 H.sub.9).sub.3. These gases to supply Al may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, if necessary.
According to the present invention, the gas to supply Si includes, for example, gaseous or gasifiable silicohydrides (silanes) such as Si.sub.2, SiH.sub.2 H.sub.6, Si.sub.3 H.sub.8 and Si.sub.4 H.sub.10. SiH.sub.4 and Si.sub.2 H.sub.6 are preferable from the standpoint of each of handling and the efficient supply of Si. These gases to supply Si may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, if necessary.
According to the present invention, the gas to supply H includes, for example, silicohydrides (silanes) such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8 and Si.sub.4 H.sub.10.
The amount of hydrogen atoms contained in the lower layer may be controlled by regulating the flow rate of the feed gas to supply hydrogen and/or regulating the temperature of the support and/or regulating the electric power for discharge.
The lower layer may contain atoms (Mc) to control image quality, such as Group III atoms, Group V atoms and Group VI atoms. This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce Group III atoms, a raw material to introduce Group V atoms, or a raw material to introduce Group VI atoms. The raw material to introduce Group III atoms, the raw material to introduce Group V atoms, or the raw material to introduce Group VI atoms may desirably be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions. The raw material to introduce Group III atoms, especially boron atoms, include, for example, boron, hydrides such as B.sub.2 H.sub.6, B.sub.5 H.sub.9, B.sub.5 H.sub.11, B.sub.6 H.sub.10, B.sub.6 H.sub.12 and B.sub.6 H.sub.14, and boron halides such as BF.sub.3, BCl.sub.3 and BBr.sub.3. Additional examples includes GaCl.sub.3, Ga(CH.sub.3).sub.3, InCl.sub.3 and TiCl.sub.3.
The raw material to introduce Group V atoms, especially phosphorus atoms, include, for example, phosphorus hydrides such as PH.sub.3, P.sub.2 H.sub.4 and phosphorus halides such as PH.sub.4 I, PF.sub.3, PF.sub.3, PCl.sub.3, PBr.sub.3, PBr.sub.5 and PI.sub.3. Other examples effective to introduce Group V atoms include AsH.sub.3, AsF.sub.3, AsCl.sub.3, AsBr.sub.3, AsF.sub.5, SbH.sub.3, SbF.sub.3, SbF.sub.5, SbCl.sub.3, SbCl.sub.5, BiH.sub.3, BiCl.sub.3 and BiBr.sub.3.
The raw material to introduce Group VI atoms includes, for example, gaseous or gasifiable substances such as H.sub.2, SF.sub.4, SF.sub.6, SO.sub.2, SO.sub.2 F.sub.2, COS, CS.sub.2, CH.sub.3 SH, C.sub.2 H.sub.5 SH, C.sub.4 H.sub.4 S, (CH.sub.3).sub.2 S and S(C.sub.2 H.sub.5).sub.2 S. Other examples include gaseous of gasifiable substances such as SeH.sub.2, SeF.sub.6, (CH.sub.3).sub.2)Se, (C.sub.2 H.sub.5).sub.2 Se. TeH.sub.2, TeF.sub.6, (CH.sub.3).sub.2 Te and (C.sub.2 H.sub.5).sub.2 Te.
These raw materials to introduce atoms (Mc) to control image quality may be diluted with an inert gas such as H.sub.2, He, Ar and Ne.
According to the present invention, the lower layer may contain atoms (CNOc) to control durability, e.g., carbon atoms (C), nitrogen atom (N), and oxygen atoms (O). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer, together with a raw material to introduce carbon atoms (C), or a raw material to introduce nitrogen atoms (N), or a raw material to introduce oxygen atoms (O). Raw materials to introduce carbon atoms (C), nitrogen atoms (N), or oxygen atoms (O) may desirably be in the gaseous form at normal temperature and under normal pressure or may be readily gasifiable under the layer forming conditions.
A raw material gas to introduce carbon atoms (C) includes those composed of C and H atoms such as saturated hydrocarbons having 1 to 4 carbon atoms, ethylene, series hydrocarbons having 2 to 4 carbon atoms and acetylene series hydrocarbons having 2 to 3 carbon atoms.
Examples of the saturated hydrocarbons include specifically methane (CH.sub.4), ethane (C.sub.2 H.sub.6), propane (C.sub.3 H.sub.8). n-butane (n-C.sub.4 H.sub.10) and pentane (C.sub.5 H.sub.12). Examples of the ethylene series hydrocarbons include ethylene (C.sub.2 H.sub.4), propylene ), butene-1 (C.sub.4 H.sub.8), butene-2 (C.sub.4 H.sub.8), isobutylene (C.sub.4 H.sub.8) and pentene (C.sub.5 H.sub.10). Examples of acetylene series hydrocarbon include acetylene ), methylacetylene (C.sub.3 H.sub.4) and butyne (C.sub.4 H.sub.6).
The raw material gas composed of Si, C, and H includes alkyl silicides such as Si(CH.sub.3).sub.4 and Si(C.sub.2 H.sub.5).sub.4.
Additional examples include gases of halogenated hydrocarbons such as of CF.sub.4, CCl.sub.4 and CH.sub.3 CF.sub.3, which introduce carbon atoms (C) as well as halogen atoms (X).
Examples of the raw material gas to introduce nitrogen atoms (N) include nitrogen and gaseous or gasifiable nitrogen compounds (e.g., nitrides and azides) which are composed of nitrogen and hydrogen, such as ammonia (NH.sub.3), hydrazine (H.sub.2 NNH.sub.2), hydrogen azide (HN.sub.3), and ammonium azide (NH.sub.4 N.sub.3).
Additional examples include halogenated nitrogen compounds such as nitrogen trifluoride (F.sub.3 N) and nitrogen tetrafluoride (F.sub.4 N.sub.2), which can introduce nitrogen atoms as well as halogen atoms (X).
Examples of the raw material gas to introduce oxygen atoms (O) include oxygen (O.sub.2), ozone (O.sub.3), nitrogen monoxide (NO), nitrogen dioxide (NO.sub.2), trinitrogen tetraoxide (N.sub.3 O.sub.4), dinitrogen pentaoxide (N.sub.2 O.sub.5) and nitrogen trioxide (NO.sub.3), as well as lower siloxanes such as disiloxane (H.sub.3 SiOSiH.sub.3) and trisiloxane (H.sub.3 SiOSiH.sub.2 OSiH.sub.3) which are composed of silicon atoms (Si), oxygen atoms (O) and hydrogen atoms (H).
Examples of the gas to supply hydrogen atoms include halogen gases and gaseous or gasifiable halides, interhalogen compounds, and halogen-substituted silane derivatives. Additional examples include gaseous or gasifiable halogen-containing silicohydrides composed of silicon atoms and halogen atoms.
The halogen compounds that can be suitably used in the present invention include halogen gases such as fluorine, chlorine, bromine and iodine; and interhalogen compounds such as BrF, ClF, ClF.sub.3, BrF.sub.5, BrF.sub.3, IF.sub.3, IF.sub.7, ICl and IBr.
Examples of the halogen-containing silicon compounds or halogen-substituted silane compounds, include specifically silane (SiH.sub.4) and halogenated silicon such as Si.sub.2 F SiCl.sub.4 and SiBr.sub.4.
In the case where the halogen-containing silicon compounds is used to form the light receiving member for electrophotography by the glow discharge method or HRCVD method, it is possible to form the lower layer composed of AlSiH containing halogen atoms on the support without using a silicohydride gas to supply silicon atoms.
In the case where the lower layer containing halogen atoms is formed by the glow discharge method of HRCVD method a silicon halide gas is used as the gas to supply silicon atoms. The silicon halide gas may be mixed with hydrogen or a hydrogen-containing silicon compound gas to facilitate the introduction of hydrogen atoms at a desired level.
The above-mentioned gases may be used individually or in combination with one another at a desired mixing ratio.
The raw materials to form the lower layer which are used in addition to the above-mentioned halogen compounds or halogen-containing silicon compounds include gaseous or gasifiable hydrogen halides such as HF, HCl, HBr and HI; and halogen-substituted silicohydrides such as SiH.sub.3 F.sub.2, SiH.sub.2 F.sub.2, SiHF.sub.3, SiH.sub.2 I.sub.2, SiS.sub.2 Cl.sub.2, SiHCl.sub.3, SiH.sub.2 Br.sub.2 and SiHBr.sub.3. Among these substances, the hydrogen-containing halides are a preferred halogen-supply gas because they supply the lower layer with halogen atoms as well as hydrogen atoms which are very effective for the control of electric or photoelectric characteristics.
The introduction of hydrogen atoms into the lower layer may also be accomplished in another method by inducing discharge in the deposition chamber containing a silicohydride such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8 and Si.sub.4 H.sub.10 and a silicon compound to supply silicon atoms (Si).
The amount of hydrogen atoms (H) and/or halogen atoms (X) to be introduced into the lower layer may be controlled by regulating the temperature of the support, the electric power for discharge, and the amount of raw materials for hydrogen atoms and halogen atoms to be introduced into the deposition chamber.
The lower layer may contain germanium atoms (Ge) or tin atoms (Sn). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce germanium atoms (Ge) or tin atoms (Sn) in a gaseous form. The raw material to supply germanium atoms (Ge) or the raw material to supply tin atoms (Sn) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.
The substance that can be used as a gas to supply germanium atoms (Ge) include gaseous or gasifiable germanium hydrides such as GeH.sub.4, Ge.sub.2 H.sub.6, Ge.sub.3 H.sub.8 and Ge.sub.4 H.sub.10 Among them, GeH.sub.4, Ge.sub.2 H.sub.6 and Ge.sub.3 H.sub.8 are preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of germanium atoms (Ge).
Other effective raw materials to form the lower layer include gaseous or gasifiable germanium hydride-halides such as GeHF.sub.3, GeH.sub.2 F.sub.2, GeH.sub.3 F, GeHCl.sub.3, GeH.sub.2 Cl.sub.2, GeH.sub.3 Cl, GeHBr.sub.3, GeH.sub.2 Br.sub.2. GeH.sub.3 Br, GeHI.sub.3, GeH.sub.2 I.sub.2 and GeH.sub.3 I and germanium halides such as GeF.sub.4, GeCl.sub.4, GeBr.sub.4, GeI.sub.4, GeF.sub.2, GeCl.sub.2, GeBr.sub.2 and GeI.sub.2.
The substance that can be used as a gas to supply tin atoms (Sn) include gaseous or gasifiable tin hydrides such as SnH.sub.4, Sn.sub.2 H.sub.6, Sn.sub.3 H.sub.8 and Sn.sub.4 H.sub.10. Among them, SnH.sub.4, Sn.sub.2 H.sub.6 and Sn.sub.3 H.sub.8 are preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of tin atoms (Sn).
Other effective raw materials to form the lower layer include gaseous or gasifiable tin hydride-halides such as SnHF.sub.3, SnH.sub.2 F.sub.2, SnH.sub.3 F, SnHCl.sub.3, SnH.sub.2 Cl.sub.2, SnH.sub.3 Cl, SnHBr.sub.3, SnH.sub.2 Br.sub.2, SnH.sub.3 Br, SnHI.sub.3, SnH.sub.2 I.sub.2 and SnH.sub.3 I, and tin halides such as SnF.sub.4, SnCl.sub.4, SnBr.sub.4, SnI.sub.4, SnF.sub.2, SnCl.sub.2, SnBr.sub.2 and SnI.sub.2.
The gas to supply GSc may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, is necessary.
The lower layer may contain magnesium atoms (Mg). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce magnesium atoms (Mg) in a gaseous form. The raw material to supply magnesium atoms (Mg) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.
The substance that can be used as a gas to supply magnesium atoms (Mg) include organometallic compounds containing magnesium atoms (Mg). Bis(cyclopentadienyl)magnesium (II) complex salt (Mg(C.sub.5 H.sub.5).sub.2) is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of magnesium atoms (Mg).
The gas to supply magnesium atoms (Mg) may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, if necessary.
The lower layer may contain copper atoms (Cu). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce copper atoms (Cu) in a gaseous form. The raw material to supply copper atoms(Cu) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.
The substance that can be used as a gas to supply copper atoms (Cu) include organometallic compounds containing copper atoms (Cu). Copper (II) bisdimethylglyoximate Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of Cu atoms.
The gas to supply copper atoms (Cu) may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, if necessary.
The lower layer may contain sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn), zinc atoms (Zn), etc. This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce sodium atoms (Na) or yttrium (Y) or manganese atoms (Mn) or zinc atoms (Zn). The raw material to supply sodium atoms (Na) or yttrium atoms (Y) or mangnaese atoms (Mn) or zinc atoms (Zn) may be gaseous at normal temperature and under normal. pressure or gasifiable under the layer forming conditions.
The substance that can be used as a gas to supply sodium atoms (Na) includes sodium amine (NaNH.sub.2) and organometallic compounds containing sodium atoms (Na). among them, sodium amine (NaNH.sub.2) is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of sodium atoms (Na).
The substance that can be used as a gas to supply yttrium atoms (Y) includes organometallic compounds containing yttrium atoms (Y). Triisopropanol yttrium Y(Oi-C.sub.3 H.sub.7).sub.3 is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of yttrium atoms (Y).
The substance that can be used as a gas to supply manganese atoms (Mn) includes organometallic compounds containing manganese atoms (Mn). Monomethylpentacarbonylmanganese Mn(CH.sub.3)(CO).sub.5, is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of sodium atoms (Na).
The substance that can be used as a gas to supply zinc atoms (Zn) includes organometallic compounds containing zinc atoms (Zn). Diethyl zinc Zn(C.sub.2 H.sub.5).sub.2 is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of zinc atoms (Zn).
The gas to supply sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn) may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, if necessary.
According to the present invention, the lower layer should have a thickness of 0.03-5 um, preferably, 0.01-1 um, and most desirable 0.05-0.5 um, from the standpoint of the desired electrophotographic characteristics and economic effects.
According to the present invention, the lower layer has an interface region which is in contact with the aluminum support and contains less than 95% of the aluminum atoms contained in the aluminum support. If the interface region contains more than 95% of the aluminum atoms contained in the aluminum support, it merely functions as the support. The lower layer also has an interface which is in contact with the upper layer and contains more than 5% of the aluminum atoms contained in the lower layer. If the interface region contains less than 5% of the aluminum atoms contained in the lower layer, if merely functions as the upper layer.
In order to form the lower layer of AlSiH which ha the characteristic properties to achieve the object of the present invention, it is necessary to properly establish the gas pressure in the deposition chamber nd the temperature of the support.
The gas pressure in the deposition chamber should be properly selected according to the desired layer. It is usually 1.times.10.sup.-5 -10 Torr, preferably 1.times.10.sup.-4 -3 Torr, and most desirably 1.times.10.sup.-4 -1 Torr.
The temperature (Ts) of the support should be properly selected according to the desired layer. It is usually 50.degree.-600.degree. C., and preferably 100.degree.-400.degree. C.
In order to form the lower layer of AlSiH by the glow discharge method according to the present invention, it is necessary to properly establish the discharge electric power to be supplied to the deposition chamber according to the desired layer. It is usually 5.times.10.sup.-5 -10 W/cm.sup.3, preferably 5.times.10.sup.-4 -5 W/cm.sup.3 and most desirably 1.times.10.sup.-3 -1 to 2.times.10.sup.-3 W/cm.sup.3.
The gas pressure of the deposition chamber, the temperature of the support, and the discharge electric power to be supplied to the deposition chamber mentioned above should be established interdependently to that the lower layer having the desired characteristic properties can be formed.
Upper layer
The upper layer in this invention is composed of a Non-Si (H, X) and has desired photoconductivity.
The upper layer of this invention contains, in at least the layer region adjacent with the lower layer, carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O), and optional atoms (M) to control conductivity but contains no substantial germanium atoms (Ge) and tin atoms (Sn). However, the upper layer may contain in other layer regions at least one of the atoms (M) to control the conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge) and tin atoms (Sn). Particularly, in the layer region of the upper layer near the free surface, at least one of carbon atoms (C), nitrogen atoms (N) and oxygen atoms (O) is preferably contained.
The upper layer may contain in the layer region of the upper layer at least adjacent with the lower layer carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O) and optional atoms (M) to control the conductivity, which are distributed evenly throughout the layer region or distributed evenly throughout the layer region but may be contained uneven distribution across the layer thickness in a part. However, in either of the cases, their distribution should be uniform in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.
In a case where the upper layer contains in other layer regions than the layer region at least in adjacent with the lower layer contains at least one of atoms (M) to control the conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge) and tin atoms (Sn), the atoms (M) to control the conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium (Ge), tin atoms (Sn) may be distributed uniformly in the layer region, or they may be contained in a portion uniformly distributed in the layer region but not unevenly distributed across the layer thickness.
However, in either of the cases, their distribution should be uniform in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.
According to the present invention, the upper layer may contain at least one of alkali metals, alkaline earth metal and transition metals. The atoms are incorporated in the entire layer region or a partial layer region of the upper layer, and they may be uniformly distributed throughout the region, or distributed evenly through the layer region but may contained unevenly distributed across the layer thickness.
However, they should be incorporated uniformly in either of the cases in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.
A layer region (hereinafter simply referred to as "layer region (M)") containing atoms (M) to control the conductivity (hereinafter simply referred to as "atoms (M)") and a layer region of the upper layer at least in adjacent with the lower layer (hereinafter simply referred to as "layer region (CNO.sub.B)") containing carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O) (hereinafter simply referred to as "atoms (CNO)") may be a substantially identical layer region or may have in common a portion at least on the side of the surface of the layer region (CNO.sub.B), or may be contained within the layer region (CNO.sub.B).
Further, the layer region (hereinafter simply referred to as "layer region (GS)") containing germanium atoms (Ge) and/or tin atoms (Sn) (hereinafter simply referred to as "atoms (GS)") may contain a portion on the surface of the layer region (CNO.sub.B).
Further, the layer region containing atoms (CNO) other than the layer region (CNO.sub.B) (hereinafter simply referred to as "layer region (CNO.sub.T)" and the layer region (CNO.sub.B) and the layer region (CNO.sub.T) being collectively referred as "layer region (CNO)"), the layer region (M), the layer region (GS) and the layer region (NYMZ) containing at least one of alkali metals, alkaline earth metals and transition metals may be substantially an identical layer region, may have in common at least a portion for the respective layer regions, or may have in common substantially the respective layer regions.
FIGS. 17 to 36 show the typical examples of the profile of atoms (M) across the layer thickness in the layer region (M), a typical example of the profile of atoms (CNO) in the layer region (CNO) across the layer thickness, a typical example of the profile of the atoms (GS) contained the layer region (GS) across the layer thickness, and a typical example of the profile of alkali metal atoms, alkaline earth metal atoms or transition metal atoms contained in the layer region incorporating at least one of alkali metal atoms, alkaline earth metal atoms and transition metal atoms across the layer thickness in the upper layer of the light receiving member for use in electrophotography in this invention (hereinafter the layer regions are collectively referred to as "layer region (Y)" and these atoms are collectively referred to as "atoms (Y)").
Accordingly, FIGS. 17 to 36 show the typical examples of the profiles of the atoms (Y) contained in the layer region (Y) across the layer thickness, in which one layer region (Y) is contained in the upper layer in a case where the layer region (M), layer region (CNO), layer region (GS), a layer region containing at least one of alkali metal, alkaline earth metal and transition metal are substantially the identical layer region, or a plurality of the layer regions (Y) are contained in the upper layer if they are not substantially identical layer region.
In FIGS. 17 to 36, the abscissa represents the distribution concentration C of the atoms (Y) and ordinate represents the thickness of the layer region (Y), while t.sub.B represents the position of the end of the layer region (Y) on the side of the lower layer and t.sub.T represents the position of the end of the layer region (Y) on the side of the free surface. That is, the layer region (Y) containing the atoms (Y) is formed from the side t.sub.B to the side t.sub.T.
FIG. 17 shows a first typical example of the profile of atoms (Y) contained in the layer region (Y) across the layer thickness.
In the example shown in FIG. 17, the atoms (Y) contained is distributed such that the concentration increases gradually and continuously from C.sub.171 to C.sub.172 from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 18, the atoms (Y) contained is distributed such that the concentration C linearly increases from C.sub.181 to C.sub.182 from the position t.sub.B to the position t.sub.181 and takes a constant value of C.sub.183 from the position t.sub.181 to the position t.sub.T.
In the example shown in FIG. 19, the atoms (Y) contained is distributed such that the concentration C takes a constant value of C.sub.191 from the position t.sub.B to the position t.sub.191, gradually and continuously increases from C.sub.191 to C.sub.192 from the position t.sub.191 to the position t.sub.192 and then takes a constant value of concentration t.sub.193 from the position t.sub.192 to the position t.sub.T.
In the example shown in FIG. 20, the atoms (Y) contained is distributed such that the concentration C takes a constant value of C.sub.201 from the position t.sub.B to the position t.sub.201, takes a constant value C.sub.202 from the position t.sub.201 to the position t.sub.202 and takes a constant value C.sub.203 from the position t.sub.202 to the position t.sub.T.
In the example shown in FIG. 21, the atoms (Y) contained is distributed such that the concentration C takes a constant value of the C.sub.211 from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 22, the atoms (Y) contained is distributed such that the concentration C takes a constant value C.sub.221 from the position t.sub.B to the position t.sub.221, decreases gradually and continuously from C.sub.222 to C.sub.223 from the position t.sub.221 to the position t.sub.T.
In the example shown in FIG. 23, the atoms (Y) contained is distributed such that the concentration C gradually and continuously decreases from C.sub.231 to the C.sub.232 from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 24 the atoms (Y) contained is distributed such that the distribution C takes a constant value C.sub.241 from the position t.sub.B to the position t.sub.241, gradually and continuously decreases from the C.sub.442 to the concentration substantialy equal to zero from the position t.sub.241 to the position t.sub.T (substantially zero means here and hereinafter the concentration lower than the detectable limit).
In the example shown in FIG. 25, the atoms (Y) contained is distributed such that the concentration C gradually and continuously decreases from C.sub.251 to substantially equal to zero from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 26, the atoms (Y) contained is distributed such that the concentration C remains constant at C.sub.261 from the position t.sub.B to the position t.sub.262, lineary decreases to C.sub.262 from the position t.sub.261 to the position t.sub.T and remains at C.sub.262 at the position t.sub.T.
In the example shown in FIG. 27, the atoms (Y) contained is distributed such that the concentration C linearly decreases from C.sub.271 to substantially equal to zero from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 28, the atoms (Y) contained is distributed such that the concentration C remaining constant at C.sub.281 from the position t.sub.B to the position t.sub.281 and linearly decreases from C.sub.281 to C.sub.282 from the position t.sub.282 to the position t.sub.T.
In the example shown in FIG. 29, the atoms (Y) contained is distributed such that the concentration C gradually and continuously decreases from C.sub.291 to C.sub.292 from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 30, the atoms (Y) contained is distributed such that the concentration C remains at a constant value C.sub.301 from the position t.sub.B to the position t.sub.301, linearly decreases from C.sub.302 to C.sub.303 from the position t.sub.301 to the position t.sub.T.
In the example shown in FIG. 31, the atoms (Y) contained is distributed such that the concentration C gradually and continuously increases from C.sub.311 to C.sub.312 from the position .sub.B to the position t.sub.311 and remains at a constant value C.sub.313 from the position t.sub.311 to the position t.sub.T.
In the example shown in FIG. 32, the atoms (Y) contained is distributed such that the concentration C gradually and continuously increases from C.sub.321 to C.sub.322 from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 33, the atoms (Y) contained is distributed such that the concentration C gradually and continuously increases from substantially zero to C.sub.331 from the position t.sub.B to the position t.sub.331 and remains constant at C.sub.332 between position t.sub.331 and position t.sub.T.
In the example shown in FIG. 34, the atoms (Y) contained is distributed such that the concentration C gradually and continuously increases from substantially zero to C.sub.341 from the position t.sub.B to the position t.sub.T.
In the example shown in FIG. 35, the atoms (Y) contained is distributed such that the concentration C linearly increases from C.sub.351 to C.sub.352 from the position t.sub.B to the position t.sub.351, and remains constant at C.sub.352 from the position t.sub.351 to the position t.sub.T.
In the example shown in FIG. 36, the atoms (Y) contained is distributed such that the concentration C linearly increases from C.sub.361 to C.sub.362 from the position t.sub.B to the position t.sub.T.
The atoms (M) to control the conductivity can include so-called impurities in the field of the semiconductor, and those used in this invention include atoms belonging to the group III of the periodical table giving p type conduction (hereinafter simply referred to as "group III atoms"), or atoms belonging to the group V of the periodical table except for nitrogen atoms (N) giving n-type conduction (hereinafter simply referred to as "group V atoms") and atoms belonging to the group VI of the periodical table except oxygen atoms (O) (hereinafter simply referred to as "group VI atoms").
Examples of the group III atoms can include B (boron), Al (aluminum), Ga (gallium), In (indium), Tl (thallium), etc., B, Al, Ga being particularly preferred. Examples of the group V atoms can include, specifically, P (phosphorus), As (arsenic), Sb (antimony), Bi (bismuth), P, As being particularly preferred. Examples of the group VI atoms can include, specifically, S (sulfur), Se (selenium), Te (tellurium) and Po (polonium), S and Se being particularly preferred. Incorporation of group III atoms, group V atoms or group VI atoms as the atoms (M) to control the conductivity into the layer region (M) in the present invention, can provide the effect, mainly, of controlling the conduction type and/or conductivity, and/or the effect of improving the charge injection between the layer region (M) and the layer region of the upper region other the layer region (M).
In the layer region (M), the content of atoms (M) to control the conductivity is preferably 1.times.10.sup.-3 -5.times.10.sup.4 atom-ppm, more preferably, 1.times.10.sup.-2 -1.times.10.sup.4 atom-ppm and, most preferably, 1.times.10.sup.-1 -5.times.10.sup.3 atom-ppm. Particularly, in a case where the layer region (M) contains carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O) described later by 1.times.10.sup.3 atom-ppm, the layer region (M) contains atoms (M) to control the conductivity preferably from 1.times.10.sup.-3 -1.times.10.sup.3 atom-ppm and, in a case if the content of the carbon atoms (C) and/or nitrogen atom (N) and/or oxygen atom (O) is in excess of 1.times.10.sup.3 atom-ppm, the content of the atoms (M) to control the conductivity is preferably 1.times.10.sup.-1 -5.times.10.sup.4 atom-ppm.
According to this invention, incorporation of the carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) in the layer region (CNO) can mainly obtain an effect of increasing the dark resistance and/or hardness, and/or improving the control for the spectral sensitivity and/or enhancing the close bondability between the layer region (CNO) and the layer region of the upper layer other than the layer region (CNO). The content of carbon atoms (C), and/or nitrogen atoms (N) and/or oxygen atoms (O) in the layer region (CNO) is preferably 1-9.times.10.sup.5 atom-ppm, preferably, 1.times.10.sup.1 -5.times.10.sup.5 atom-ppm and most more preferably, 1.times.10.sup.2 -3.times.10.sup.5 atom-ppm. In addition, if it is intended to increase the dark resistance and/or the hardness, the content is preferably 1.times.10.sup.3 -9.times.10.sup.5 atom-ppm and, preferably, it is 1.times.10.sup.2 -5.times.10.sup.5 atom-ppm in a case where the spectral sensitivity is intended to be controlled.
In this invention, the spectral sensitivity can be controlled mainly and, particularly, sensitivity to the light of longer wave length can be improved in the case of using light of longer wavelength such as of a semiconductor laser by incorporating germanium atoms (Ge) and/or tin atoms (Sn) to the layer region (GS). The content of germanium atoms (Ge) and/or tin atoms (Sn) contained in the layer region is preferably 1-9.5.times.10.sup.5 atom-ppm, more preferably, 1.times.10.sup.2 -8.times.10.sup.5 atom-ppm and, most suitably, 5.times.10.sup.2 -7.times.10.sup.5 atom-ppm.
In addition, hydrogen atoms (H) and/or halogen atoms (X) contained in the upper layer in this invention can compensate the unbonded bands of silicon atoms (Si), thereby improving the quality of the layer. The content of hydrogen atoms (H) or the sum of the hydrogen atoms (H) and halogen atoms (X) in the upper layer is suitably 1.times.10.sup.3 -7.times.10.sup.5 atom-ppm, while the content of halogen atoms (X) is preferably 1-4.times.10.sup.5 atom-ppm. Particularly, in a case where the content of the carbon atoms (C), and/or nitrogen atoms (N) and/or oxygen atoms (O) in the upper layer is less than 3.times.10.sup.5 atom-ppm, the content of hydrogen atoms (H) or the sum of hydrogen atoms (H) and halogen atoms (X) is desirably 1.times.10.sup.3 -4.times.10.sup.5 atom-ppm. Furthermore, in a case where the upper layer is composed of poly-Si(H,X), the content of hydrogen atoms (H) or the sum of hydrogen atoms (H) and halogen atoms (X) in the upper layer is preferably 1.times.10.sup.3 -2.times.10.sup.5 atom-ppm and in a case where the upper layer is composed of A-Si(H,X), it is preferably 1.times.10.sup.4 -7.times.10.sup.5 atom-ppm.
In this invention, the content of at least one of alkali metal, alkaline earth metal and transition metal in the upper layer is preferably 1.times.10.sup.-3 -1.times.10.sup.4 atom-ppm, more preferably, 1.times.10.sup.-2 -1.times.10.sup.3 atom-ppm and most suitably 5.times.10.sup.-2 -5.times.10.sup.2 atom-ppm.
In this invention, the upper layer composed of NonSi(H,X) can be prepared by the same vacuum deposition film formation as that for the lower layer described above, and glow discharge, sputtering, ion plating, HRCVD process, FOCVD process are particularly preferred. These methods may be used in combination in one identical device system.
For instance, the glow discharge method may be performed in the following manner to form the upper layer composed of Non-Si(H,X). The raw material gases are introduced into an evacuatable deposition chamber and glow discharge is performed with the gases being introduced at a desired pressure, so that a layer of Non-Si(H,X) is formed as required on the surface of the support situated at a predetermined position and previously formed with a predetermined lower layer. The raw material gases may contain a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), and/or a gas to supply halogen atoms (X), an optional gas to supply atoms (M) to control the conductivity, and/or a gas to supply carbon atoms (C), and/or a gas to supply nitrogen atoms (N), and/or a gas to supply oxygen atoms (O), and/or a gas to supply germanium atoms (Ge), and/or a gas to supply tin atoms (Sn) and/or a gas to supply at least one of alkali metal, alkaline earth metal and transition metal.
The HRCVD process may be performed in the following manner to form the upper layer composed of Non-Si(H,X). The raw material gases are introduced individually or altogether into an evacuatable deposition chamber, and glow discharge performed or the gases are heated with the gases being introduced at a desired pressure, during which active substance (A) is formed and another active substance (B) is introduced into the deposition chamber, so that a layer of Non-Si(H,X) is formed as required on the surface of the support situated at a predetermined position and formed with a predetermined lower layer thereon in the deposition chamber. The raw material gases may contain a gas to supply silicon atoms (Si), a gas to supply halogen atoms (X), an optional gas to control conductivity (M), and/or a gas to supply carbon atoms (C), and/or a gas to supply nitrogen atoms (N), and/or a gas to supply oxygen atoms (O), and/or a gas to supply germanium atoms (Ge), and/or a gas to supply tin atoms (Sn) and/or a gas to supply at least one of alkali metal, alkaline earth metal and transition metal. Another active substance (B) is formed by introducing a gas to supply hydrogen activation space. The active substance (A) and another active substance (B) may individually be introduced into the deposition chamber.
The FOCVD process may be performed in the following manner to form the upper layer of Non-Si(H,X). The raw material gases are introduced into an evacuatable deposition chamber individually or altogether as required under a desired gas pressure. The raw material gases may contain a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), an optional gas to supply atoms (M) to control conductivity, and/or a gas to supply carbon atoms (C), and/or a gas to supply nitrogen atoms (N), and/or a gas to supply oxygen atoms (O), and/or a gas to supply germanium atoms (Ge), and/or a gas to supply tin atoms (Sn) and/or a gas to supply at least one of alkali metal, alkaline earth metal and transition metals. They may be introduced into the deposition chamber individually or altogether as required. A halogen (X) gas is introduced into the deposition chamber separately from the raw material gases described above and these gases subjected to chemical reactions in the deposition chamber.
The sputtering method or the ion plating method may performed in the following manner to form the upper layer composed of the Non-Si(H,X), basically, by the known method as described for example, in Japanese Patent Laid-Open No. Sho 61-59342.
According to this invention, the upper layer is formed, while controlling the profile of the concentration C of atoms (M) to control the conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge), tin atoms (Sn) and at least one of alkali metal atoms, alkaline earth metal atoms and transition metal atoms (simply referred to collectively as "atoms (Z)") across the layer thickness to obtain a layer having a desired depth profile across the layer thickness. This can be achieved, in the case of glow discharge, HRCVD and FOCVD, by properly controlling the gas flow rate of a gas to supply atoms (Z) the concentration of which is to be varied in accordance with a desired rate of change in the concentration and then introducing the gas into the deposition chamber.
The flow rate may be changed by operating a needle valve disposed in the gas passage manually or by means of a customary means such as an external driving motor.
Alternatively, the flow rate setting to a mass flow controller for the control of the gas flow rate is properly changed by an adequate means manually or using a programmable control device.
The gas to supply Si atoms used in this invention can include gaseous or gasifiable silicon hydrides (silanes) such as SiH.sub.4, Si.sub.2 H.sub.6, Si.sub.3 H.sub.8 and Si.sub.4 H.sub.10. SiH.sub.4 and Si.sub.2 H.sub.6 are preferable from the standpoint of ease of handling and the. efficient supply of Si. These gases to supply Si may be diluted with an inert gas such as H.sub.2, He, Ar and Ne if necessary.
According to the present invention, the gas to supply halogen includes various halogen compounds, for example, gaseous and gasifiable halogen compounds, for example, halogen gases, halides, interhalogen compounds and halogen-substituted silane derivatives.
Additional examples in this invention can include, gaseous or gasifiable halogen atom (X)-containing silicon hydride compounds composed of silicon atoms (Si) and halogen atoms (X).
Halogen compounds that can be suitably used in this invention can include halogen gases such as of fluorine, chlorine, bromine and iodine; and interhalogen compounds such as BrF, ClF, ClF.sub.3, BrF.sub.5, BrF.sub.3, IF.sub.3, IF.sub.7 ICl and IBr.
Examples of the halogen atoms (X)-containing silicon compounds, or halogen atom (X)-substituted silane derivatives can include, specifically, silicon halides such as SiF.sub.4, Si.sub.2 F.sub.6, SiCl.sub.4 and SiBr.sub.4.
In the case where the halogen-containing silicon compound is used to form the light receiving member for use in electrophotography according to this invention by the glow discharge or HRCVD method, it is possible to form the upper layer composed of Non-Si(H,X) containing halogen atoms (X) on a desired lower layer without using a silico-hydride gas to supply Si atoms.
In the case where the upper layer containing halogen atoms (X) is formed according to the glow discharge or HRCVD method, a silicon halide gas is used as the gas to supply silicon atoms to form the upper layer on a desired support. The silicon halide gas may further be mixed with hydrogen gas or a hydrogen atom (H)-containing silicon compound gas to facilitate the introduction of hydrogen atoms (H) at a desired level.
The above-mentioned gases may be used individually or in combination with one another at a desired mixing ratio.
In this invention, the above-mentioned halogen compounds or halogen atom (X)-containing silicon compounds are used as effective material as the gas to supply halogen atoms, but gaseous or gasifiable hydrogen halides such as HF, HCl, HBr and HI; and halogen-substituted silicohydrides such as SiH.sub.3 F, SiH.sub.2 F.sub.2, SiHF.sub.3, SiH.sub.2 I.sub.1, SiH.sub.2 Cl.sub.2, SiHCl.sub.3, SiH.sub.2 Br.sub.2 and SiBr.sub.3 can also be used. Among them, hydrogen atom (H)-containing halides can be used as preferably halogen supply gases in this invention upon forming the upper layer, because they supply the upper layer with halogen atoms (X), as well as hydrogen atoms (H) which are very effective for the control of electric or photoelectric characteristics.
The introduction of hydrogen atoms (H) into the upper layer may also be accomplished in another method by inducing discharge in the deposition chamber containing H.sub.2 or silicoharide such as SiH.sub.4, Si.sub.2 H , Si.sub.3 H.sub.8 and Si.sub.4 H.sub.10 and a silicon compound to supply silicon atoms (Si).
The amount of hydrogen atoms (H) and/or halogen atoms (X) to be introduced into the upper layer may be controlled by regulating the temperature of the support, the amount of raw materials for hydrogen atoms and halogen atoms to be introduced into the deposition chamber and/or the electric power for discharge.
The upper layer may contain atoms (M) to control the conductivity, for example, group III atoms, group V atoms or group VI atoms. This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer together with a raw materials to supply group III atoms, raw materials to supply group V atoms or raw material to supply group VI atoms. The raw material to supply group III atoms, the raw material to supply group V atoms, or the raw material to supply group VI atoms may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions are desirably used. The raw material to supply the group III atoms can include specifically boron hydrides such as B.sub.2 H.sub.6. B.sub.4 H.sub.10, B.sub.4 H.sub.9, B.sub.5 H.sub.11, B.sub.6 H.sub.10, B.sub.6 H.sub.12 and B.sub.6 H.sub.14 or boron harides such as BF.sub.3, BCl.sub.3 and BBr.sub.3 for the material to supply boron atoms. Additional examples are AlCl.sub.3, GaCl.sub.3, Ga(CH.sub.3).sub.3, InCl.sub. 3 and TlCl.sub.3.
The raw material to supply group V atoms that can be used effectively in this present invention can include, phosphorus hydride such as PH.sub.3, P.sub.2 H.sub.4, etc. phosphorus halide such as PH.sub.4 I, PF.sub.3, PF.sub.5, PCl.sub.3, PCl.sub.5, PBr.sub.3, PBr.sub.5 and PI.sub.3 as the material to supply phosphorus atoms.
Additional examples as effective raw materials to supply group V atoms can also include AsH.sub.3, AsF.sub.3, AsCl.sub.3 AsBr.sub.3, AsF.sub.5, SbH.sub.3, SbF.sub.3, SbF.sub.5, SbCl.sub.3, SbCl.sub.5, BiH.sub.3, BiCl.sub.3, BiBr.sub.3.
Raw materials to supply groups VI atoms can include those gaseous or gasifiable materials such as hydrogen sulfide (H.sub.2 S), SF.sub.4, SV.sub.6, SO.sub.2, SO.sub.2 F.sub.2, COS, CS.sub.2, CH.sub.3 SH, C.sub.2 H.sub.5 SH, C.sub.4 H.sub.4 S, (CH.sub.3).sub.2 S, C.sub.2 H.sub.5).sub.2 S, etc. Additional example can include, those gaseous or gasifiable materials such as SeH.sub.2, SeF.sub.6, (CH.sub.3).sub.2 Se, (C.sub.2 H.sub.5).sub.2 Se, TeH.sub.2, TeF.sub.6, (CH.sub.3).sub.2 Te, (C.sub.2 H.sub.5).sub.2 Te.
The raw material for supplying atoms (M) to control the conductivity may be diluted with an inert gas such as H.sub.2, He, Ar and Ne if necessary.
The upper layer may contain carbon atoms (C), nitrogen atoms (N) or oxygen atoms (O). This accomplished by introducing into the chamber the raw material to supply carbon atoms (C), the raw material to supply nitrogen atoms (N) or raw material to supply oxygen atoms (O) in a gaseous form together with other raw materials for forming the upper layer. The raw material to supply carbon atoms (C), the raw material to supply nitrogen atoms (N) or the raw material to supply oxygen atoms (O) are desirably gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.
A raw material that can effectively be used as the starting gas to supply carbon atoms (C) can include those hydrocarbons having C and H as constituent atoms, for example, saturated hydrocarbons having 1 to 4 carbon atoms, ethylene series hydrocarbons having 2 to 4 carbon atoms and acetylene series hydrocarbon atoms 2 to 3 carbon atoms.
Examples of the saturated hydrocarbons include methane (CH.sub.4), ethane (C.sub.2 H.sub.5), propane , n-butane (n-C.sub.4 H.sub.10), pentane (Examples of ethylene series hydrocarbons include ethylene (C.sub.2 H.sub.4), propylene butene-1), butene-2, isobutylene and pentene (C.sub.5 H.sub.10). Examples of acetylene series hydrocarbon can include, acetylene (C.sub.2 H.sub.2), methylacetylene ) and butine (C.sub.4 H.sub.6).
Additional example can include halogenated hydrocarbon gases such as CF.sub.4, CCl.sub.4 and CH.sub.3 CF.sub.3 with a view point that halogen atom (X) can be introduced in addition to hydrocarbons (C).
Examples of the raw materials gas to introduce nitrogen atoms (N) can include those having N as constituent atoms, or N and H as constituent atoms, for example, gaseous or gasifiable nitrogen, or nitrogen compounds such as nitrides and azides, for example, nitrogen (N.sub.2), ammonia (NH.sub.3), hydrazine (H.sub.2 NNH.sub.2), hydrogen azide (HN.sub.3) and ammonium azide (NH.sub.4 N.sub.3). Additional examples can include halogenated nitrogen compounds such as nitrogen trifluoride (F.sub.3 N) and nitrogen tetrafluoride (F.sub.4 N.sub.2), etc. which can introduce nitrogen atoms as well as halogen atoms (X).
Examples of the raw material gas to introduce oxygen atoms (O) can include oxygen (O.sub.2), ozone (O.sub.3), nitrogen monoxide (NO), nitrogen dioxide (NO.sub.2), dinitrogen oxide (N.sub.2 O), dinitrogen trioxide (N.sub.2 O.sub.3), trinitrogen tetraoxide (N.sub.3 O.sub.4), dinitrogen pentaoxide (N.sub.2 O.sub.5) and nitrogen trioxide (NO.sub.3), as well as lower siloxanes having silicon atoms (Si), oxygen atoms (O) and hydrogen atoms (H) as constituent atoms, for example, disiloxane (H.sub.3 SiOSiH.sub.3) and trisiloxane (H.sub.3 SiOSiH.sub.2 OSiH.sub.3).
The upper layer may be introduced with germanium (Ge) or tin atoms (Sn). This is accomplished by introducing, into the deposition chamber, the raw material to supply germanium (Ge) or the raw material to supply tin atoms (Sn) into the deposition chamber together with other raw materials to form the upper layer in a gaseous form. The raw material to supply germanium (Ge) or the raw material to supply tin atoms (Sn) may desirably be gaseous at normal temperature and normal pressure or gasifiable under the layer forming conditions.
The material that can be used as a gas to supply germanium atoms (Ge) can include, gaseous or gasifiable germanium hydrides such as GeH.sub.4, Ge.sub.2 H.sub.6, Ge.sub.3 H.sub.8 and Ge.sub.4 H.sub.10. and GeH.sub.4, Ge.sub.2 H.sub.6 and Ge.sub.3 H.sub.8 being preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of germanium atoms (Ge).
Additional examples of the raw material for effectively forming the upper layer can include those gaseous or gasifiable materials such as germanium hydride-halides, for example, GeHF.sub.3, GeH.sub.2 F.sub.2, GeH.sub.3 F, GeHCl.sub.3, GeH.sub.2 Cl.sub.2, GeH.sub.3 Cl, GeHBr.sub.3, GeH.sub.2 Br.sub.2. GeH.sub.3 Br, GeHI.sub.3, GeH.sub.2 I.sub.2 and GeH.sub.3 I, as well as germanium halides such as GeF.sub.4, GeCl.sub.4, GeBr.sub.4, GeI.sub.4, GeF.sub.2, GeCl.sub.2, GeBr.sub.2 and GeI.sub.2.
The material that can be used as a gas to supply tin atoms (Sn) can include gaseous or gasifiable tin hydrides such as SnH.sub.4, Sn.sub.2 H.sub.6, Sn.sub.3 H.sub.8 and Sn.sub.4 H.sub.10 and SnH.sub.4, Sn.sub.2 H.sub.6 and Sn.sub.3 H.sub.8 being preferred from the standpoint of easy handling at the time of layer forming and the efficient supply of tin atoms (Sn).
Additional examples of the starting material for effectively forming the upper layer can include gaseous or gasifiable tin halide-hydrides such as SnHF.sub.3, SnH.sub.2 F.sub.2, SnH.sub.3 F, SnHCl.sub.3, SnH.sub.2 Cl.sub.2, SnH.sub.3 Cl, SnHBr.sub.3, SnH.sub.2 Br.sub.2, SnH.sub.3 Br, SnHI.sub.3, SnH.sub.2 I.sub.2 and SnH.sub.3 I, as well as tin halides such as SnF.sub.4, SnCl.sub.4, SnBr.sub.4, SnI.sub.4, SnF.sub.2, SnCl.sub.2, SnBr.sub.2 and SnI.sub.2.
The lower layer may contain magnesium atoms (Mg). This accomplished by introducing, into the deposition chamber, the raw materials for supplying magnesium atoms (Mg) to form the upper layer together with other raw materials for forming the upper layer in a gaseous form. The raw material to supply magnesium atoms (Mg) may be gaseous at normal temperature and a normal pressure or gasifiable under the layer forming conditions.
The substance that can be used as a gas to supply magnesium atoms (Mg) can include organometallic compounds containing magnesium atoms (Mg). Bis(cyclopentadienyl)magnesium (II) complex salt (Mg(C.sub.56).sub.2) is preferable from the stand point of easy handling at the time of layer form an the effective supply of magnesium atoms (Mg).
The gas to supply magnesium atoms (Mg) may be diluted with an inert gas such as H.sub.2, He, Ar and Ne if necessary.
The upper layer may contain copper atoms (Cu). This is accomplished by introducing, into the deposition chamber, the raw material to supply copper atoms (Cu) for forming the upper layer together with other raw materials for forming the upper layer in a gaseous form. The raw material to supply copper atoms (Cu) may be gaseous at normal temperature and normal pressure and gasifiable under the layer forming condition.
The material that can be used as a gas to supply copper atoms (Cu) can include organometallic compounds containing copper atoms (Cu). Copper (II)bisdimethylglyoximate CU(C.sub.4 N.sub.2 O.sub.2).sub.2 is preferred from the stand point of easy handling at the time of layer forming and efficient supply of magnesium atoms (Mg).
The gas to supply copper atoms (Cu) may be diluted with an inert gas such as H.sub.2. He, Ar and Ne, if necessary.
The upper layer may contain sodium atoms (Na), yttrium atoms (Y), manganese atoms (Mn) or zinc atoms (Zn). This is accomplished by introducing, into the deposition chamber, raw material to supply sodium atoms (Na), the raw material to supply yttrium atoms (Y), the raw material to supply manganese atoms (Mn) or the raw materials to supply zinc atoms (Zn) for forming the upper layer together with other raw materials for forming the upper layer in a gaseous form. The raw material to supply sodium atoms (Na), the raw material to supply yttrium atoms (Y), the raw material to supply manganese atoms (Mn) or the raw material to supply zinc atoms (Zn) may be gaseous at normal temperature and normal pressure or gasifiable at least under the layer forming conditions.
The material that can be effectively used as a gas to supply sodium atoms (Na) can include sodium amine (NaNH.sub.2) and organometallic compounds containing sodium atoms (Na). Among them, sodium amine (NaNH.sub.2) is preferred from the standpoint of easy handling at the time of layer forming and the efficient supply of sodium atoms (Na).
The material that can be effectively used as a gas to supply yttrium atoms (Y) can include organometallic compounds containing ytrrium atoms (Y). Triisopropanol yttrium Y(Oi-C.sub.3 H.sub.7).sub.3 is preferred from the standpoint of easy handling at the time of layer forming and the effective supply of yttrium atoms (Y).
The material can be effectively used as a gas to supply manganese atoms (Mn) can include organometallic compounds containing manganese atoms (Mn). Monomethylpentacarbonyl manganese Mn(CH.sub.3)(CO).sub.5 is preferred from the standpoint of easy handling at the time of layer forming and the efficient supply of manganese atoms (Mn).
The material that can be effectively used as a gas to supply zinc atoms (Zn) can include organometallic compounds containing Zinc atoms (Zn). Diethyl zinc Zn(C.sub.2 H.sub.5).sub.2 is preferred from the standpoint of easy handling at the time of layer forming and the efficient supply of zinc atoms (Zn).
The gas to supply sodium atoms (Na), yttrium atoms (Y), manganese atoms (Mn) or zinc atoms (Zn) may be diluted with an inert gas such as H.sub.2, He, Ar and Ne, if necessary.
In the present invention, the layer thickness of the upper layer is 1-130 um, preferably, 3-100 um and, most suitably, 5-60 um from the standpoint of the desired electrophotographic characteristics and economical effect.
In order to form the upper layer composed of Non-Si(H,X) which has the characteristics to achieve the object of this invention, it is necessary to properly establish the gas pressure in the deposition chamber and the temperature of the support.
The gas pressure in the deposition chamber should properly be selected according to the design of the layer. It is usually 1.times.10.sup.-5 -10 Torr, preferably, 1.times.10.sup.-4 -3 Torr and, most suitably, 1.times.10.sup.-4 -1 Torr. In the case of selecting A-Si(H, X) as the Non-Si(H,X) for the upper layer, the temperature (Ts) of the support should properly be selected according to the desired design for the layer and it is usually 50.degree.-400.degree. C., preferably, 100.degree.-300.degree. C. In a case where poly-Si(H,X) is selected as the Non-Si(H,X) for the upper layer, there are various methods for forming the layer including, for example, the following methods.
In one method, the temperature of the support is set to a high temperature, specifically, to 400.degree.-600.degree. C. and a film is deposited on the support by means of the plasma CVD process.
In another method, an amorphous layer is formed at first to the surface of the support. That is, a film is formed on a support heated to a temperature of about 250.degree. C. by a plasma CVD process and the amorphous layer is annealed into a polycrystalline layer. The annealing is conducted by heating the support to 400.degree.-600.degree. C. about for 5-30 min, or applying laser beams for about 5-30 min.
Upon forming the upper layer composed of Non-Si(H,X) by the glow discharge method according to this invention, it is necessary to properly select the discharge electric power to be supplied to the deposition chamber according to the design of the layer. It is usually 5.times.10.sup.-5 -10 W/cm.sup.3, preferably, 5.times.10.sup.-5 -5 W/cm.sup.3 and, most suitably, 1.times.10.sup.-3 -2.times.10.sup.-1 W/cm.sup.3.
The gas pressure of the deposition chamber, the temperature of the support and the discharge electric power to be supplied to the deposition chamber mentioned above should be set interdependently so that the upper layer having the desired characteristic properties can be formed.
EFFECT OF THE INVENTION
The light receiving member for use in electrophotography according to this invention, having the specific layer structure as described above, can overcome all of the problems in the conventional light receiving members for use in electrophotography constituted with A-Si and it can exhibit particularly excellent electrical properties, optical properties, photoconductive properties, image properties, durability and characteristics in the circumstance of use.
Particularly, since the lower layer contains aluminum atoms (Al), silicon atoms (Si) and, particularly, hydrogen atoms (H) across the layer thickness in an unevenly distributed state according to the present invention, injection of charges (photocarriers) across the aluminum support and the upper layer can be improved and, moreover, since the texture and continuity for the constituent elements between the aluminum support and the upper layer is improved, image properties such as coarse image or dots can be improved thereby enabling to stably reproduce high quality images with clear half-tone and high resolving power.
In addition, it is possible to prevent image defects or peeling of Non-Si(H,X) films due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, thereby improving the durability and, further, stresses resulted from the difference in the heat expansion coefficients between aluminum support and Non-Si(H,X) film to prevent cracking or peeling in the No-Si(H,X) film to thereby enhance the yield of the productivity.
Incorporation of at least one of carbon atoms, nitrogen atoms and oxygen atoms into the layer region of the upper layer in adjacent with the lower layer can further improve the close bondability between the upper layer and the lower layer, to prevent the occurrence of image defects and peeling of the Non-Si(H,X) films thereby improving the durability.
Further, since atoms (Mc) to control the image quality are contained in the lower layer in addition to aluminum atoms (Al), silicon atoms (Si) and hydrogen atoms (H), the injection of photocarriers across the aluminum support and the upper layer is further improved and the transferability of the photocarriers in the lower layer is improved. Accordingly, image characteristics such as coarse image can be improved to stably reproduce a high quality image with clear half-tone and high resolving power.
Further, since halogen atoms contained in the lower layer contribute to compensate the dangling bonds of silicon atoms, aluminum atoms, etc. to attain more stable state in view of the texture and structure according to the present invention, remarkable improvement is made in view of the image characteristics such as coarse image or dots coupled with the foregoing effect due to the distribution of the silicon atoms, aluminum atoms and hydrogen atoms.
At least one of germanium atoms (Ge) and tin atoms (Sn) contain in the lower layer according to this invention contributes to significantly improve the injection of the photocarriers across the aluminum support and the upper layer, close bondability and the transferability of the photocarriers in the lower layer. This in turn provides remarkable improvement in the characteristics and durability of a light receiving member.
Particularly, at least one of alkali metal atoms, alkaline earth metal atoms and transition metal atoms contained in the upper layer according to the present invention provides an outstanding feature that the hydrogen atoms and/or halogen atoms contained in the lower layer are dispersed more effectively to prevent layer peeling resulted from the cohesion of hydrogen atoms and/or halogen atoms during long time use.
This contributes to significantly improve the injection of photocarriers and the close bondability across the aluminum support and the upper layer, and the transferability of photocarriers in the lower layer as described above. This also makes significant improvement in the property and durability of an image as obtained. These factors result in stable production of the light receiving member having a stable quality.
PREFERRED EMBODIMENT OF THE INVENTION
This invention will be described more specifically referring to examples but the invention is no way limited only thereto.
EXAMPLE 1
A light receiving member for use in electrophotography according to this invention was formed by radio frequency (hereinafter simply referred to as "RF") glow discharge decomposition.
FIG. 37 shows an apparatus for producing the light receiving member for use in electrophotography by the RF glow discharge decomposition, comprising a raw material gas supply device 1020 and a deposition device 1000.
In the figure, raw material gases for forming the respective layers in this invention were tightly sealed in gas cylinders 1071, 1072, 1073, 1074, 1075, 1076 and 1077, and a tightly sealed vessel 1078, in which the cylinder 1071 was for SiH.sub.4 gas (99.99% purity), the cylinder 1072 was for H.sub.2 gas (99.9999%), the cylinder 1073 was for CH.sub.4 gas (99.999% purity), cylinder 1074 was for PH.sub.3 gas diluted with H.sub.2 gas (99.999% purity, hereinafter simply referred to as "PH.sub.3 /H.sub.2 "), the cylinder 1075 was for B.sub.2 H.sub.6 gas diluted with H.sub.2 gas (99.999% purity, hereinafter simply referred to as "B.sub.2 H.sub.6 /H.sub.2 "), the cylinder 1076 was for NO gas (99.9% purity), the cylinder 1077 was for He gas (99.999% purity), and the vessel 1078 was tightly sealed charged with AlCl.sub.3 (99.99% purity).
In the figure, a cylindrical aluminum support 1005 had an outer diameter of 108 mm and a mirror-finished surface.
After confirming that valves 1051-1057 for the gas cylinders 1071-1077, flow-in valves 1031-1037 and a leak valve 1015 for the deposition chamber 1001 were closed and flow-out valves 1041-1047 and an auxiliary valve 1018 were opened, a main valve 1016 was at first opened to evacuate the deposition chamber 1001 and gas pipeways by a vacuum pump not illustrated.
Then, when the indication of a vacuum meter 1017 showed about 1.times.10.sup.-3 Torr, the auxiliary valve 1018, the flow-out valves 1041-1047 were closed.
Then, the valves 1051-1057 were opened to introduce SiH.sub.4 from the gas cylinder 1071, H.sub.2 gas from the gas cylinder 1072, CH.sub.4 gas from the gas cylinder 1073, PH.sub.3 /H.sub.2 gas from the gas cylinder 1074, B.sub.2 H.sub.6 /H.sub.2 gas from the gas cylinder 1075, NO gas from the gas cylinder 1076 and He gas from the gas cylinder 1077, and the pressures for the respective gases were adjusted to 2 kg/cm.sup.2 by pressure controllers 1061-1067.
Then, the flow-in valves 1031-1037 were gradually opened to introduce the respective gases in mass flow controllers 1021-1027. In this case, since the He gas from the gas cylinder 1077 was passed through the tightly sealed vessel 1078 charged with AlCl.sub.3, the AlCl.sub.3 gas diluted with the He gas (hereinafter simply referred to as "AlCl.sub.3 /He") was introduced to the mass flow controller 1027.
The temperature of the cylindrical aluminum support 1005 disposed in the deposition chamber 1001 was heated to 250.degree. C. by a heater 1014.
After completing the preparation for the film formation as described above, each of the lower and upper layers was formed on the cylindrical aluminum support 1005.
The lower layer was formed by gradually opening the flow-out valves 1041, 1042 and 1047, and the auxiliary valve 1018 thereby introducing the SiH.sub.4 gas, H.sub.2 gas and AlCl.sub.3 /He gas through the gas discharge aperture 1009 of a gas introduction pipe 1018 to the inside of the deposition chamber 1001. In this case, the gas flow rates were controlled by the respective mass flow controllers 1021, 1022 and 1027 such that the gas flow rates were set to 50 SCCM for SiH.sub.4, 10 SCCM for H.sub.2 gas, and 120 SCCM for AlCl.sub.3 /He. The pressure in the deposition chamber was controlled to 0.4 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced to the inside of the deposition chamber 1001 by way of an RF matching box 1012 while setting the power of a RF power source (not illustrated) to 5 mW/cm.sup.3, to cause RF glow discharge, thereby starting the formation of the lower layer on the aluminum support. The mass flow controllers 1021, 1022 and 1027 were adjusted during formation of the lower layer such that the SiH.sub.4 gas flow remains at a constant rate of 50 SCCM, the H.sub.2 gas flow rate is increased at a constant ratio from 10 SCCM to 200 SCCM and the AlCl.sub.3 /He gas flow rate is decreased at a constant ratio from 120 SCCM to 40 SCCM. Then, when the lower layer of 0.05 um thickness was formed, the RF glow discharge was stopped and the entrance of the gas to the inside of the deposition chamber 1001 is interrupted by closing the flow-out valves 1041, 1042 and 1047 and the auxiliary valve 1018, to complete the formation of the lower layer.
Then, for forming the first layer region of the upper layer, the flow-out valves 1041, 1042 and 1046, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas, H.sub.2 gas and NO gas through the gas discharge aperture 1009 of the gas introduction pipe 1008 into the deposition chamber 1001. In this case, respective mass flow controllers 1021, 1022 and 1026 were adjusted so that the SiH.sub.4 gas flow rate was 100 SCCM, H.sub.2 gas flow rate was 100 SCCM and NO gas flow rate was 30 SCCM. The pressure in the deposition chamber 1001 was controlled to 0.35 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced into the deposition chamber 1001 through the radio frequency matching box 1012 while setting the power of a RF power source (not illustrated) to 10 mW/cm.sup.3, to cause RF glow discharge and start the formation of the first layer region of the upper layer over the lower layer. Then, when the first layer region of the upper layer with 3 um thickness was formed, the RF glow discharge was stopped and the flow of the gas into the deposition chamber 1001 was interrupted by closing the flow-out valves 1041, 1042 and 1046, and the auxiliary valve 1018, thereby completing the formation of the first layer region of the upper layer.
Then, for forming the second layer region of the upper layer, the flow-out valves 1041 and 1042, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas and H.sub.2 gas through the gas discharge aperture 1009 of the gas introduction pipe 1008 into the deposition chamber 1001. In this case, respective mass flow controllers 1021 and 1022 were adjusted so that the SiH.sub.4 gas flow rate was 300 SCCM and H.sub.2 flow rate was 300 SCCM. The pressure in the deposition chamber 1001 was controlled to 0.5 Torr by adjusting the opening of the main valve 1016 while the observing the vacuum meter 1017. Then, RF power was introduced into the deposition chamber 1001 through the radio frequency matching box 1012 while setting the power of the RF power source (not illustrated) to 15 mW/cm.sup.3, to cause the RF glow discharge and start the formation of the second layer region on the first layer region of the upper layer. Then, when the second layer region of the upper layer with 20 um thickness was formed, the RF glow discharge was stopped and the flow of the gas into the deposition chamber 1001 was interrupted by closing the flow-out valves 1041 and 1042, and the auxiliary valve 1018, thereby completing the formation of the second layer region of the upper layer.
Then, for forming the third layer region of the upper layer, the flow-out valves 1041 and 1043, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas and CH.sub.4 gas through the gas discharge aperture 1009 of the gas introduction pipe 1008 into the deposition chamber 1001. In this case, respective mass flow controllers 1021 and 1023 were adjusted so that the SiH.sub.4 gas flow rate was 50 SCCM and CH.sub.4 flow rate was 500 SCCM. The pressure in the deposition chamber 1001 was controlled to 0.4 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced into the deposition chamber 1001 through the radio frequency matching box 1012 while setting the power of the RF power source (not illustrated) to 10 mW/cm.sup.3, to cause the RF glow discharge and start the formation of the third layer region on the second layer region of the upper layer. Then, when the third layer region of the upper layer with 0.5 um thickness was formed, the RF glow discharge was stopped and the flow of the gas into the deposition chamber 1001 was interrupted by closing the flow-out valves 1041 and 1043, and the auxiliary valve 1018, thereby completing the formation of the third layer region of the upper layer.
The conditions for preparing the light receiving member for use in electrophotography described above are shown in Table 1.
It will be apparent that all of the flow-out valves other than those required for forming the respective layers were completely closed and, for avoiding the respective gases from remaining in the deposition chamber 1001 and in the pipeways from the flow-out valves 1041-1047 to the deposition chamber 1001, the flow-out valves 1041-1047 were closed, the auxiliary valve 1018 was opened and, further, the main valve was fully opened thereby evacuating the inside of the system once to a high vacuum degree as required.
Further, for forming the layer uniformly during this layer formation, the cylindrical aluminum support 1005 was rotated at a desired speed by a driving device not illustrated.
COMPARATIVE EXAMPLE 1
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 1 except for not using H.sub.2 gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electrophotography are shown in Table 2.
The light receiving members for use in electrophotography thus prepared in Example 1 and Comparative Example 1 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristics with voltage withstanding property in that no image defects were formed even if a high voltage was applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 1 was less than 3/4 of that of the light receiving member for use in electrophotography in Comparative Example 1. In addition, for comparing the "coarse image", when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 1 was less than 2/3 for that of the light receiving member for use in electrophotography in Comparative Example 1, and the light receiving member for use in electrophotography of Example 1 was excellent over the light receiving member for use in Electrophotography of Comparative Example 1 in view of the visual observation.
In addition, for comparing the occurrence of image defects and the peeling of the light receiving layer due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, when stainless steel balls of 3.5 mm diameter were fallen freely from the vertical height of 30 cm above the surface of the light receiving member for use in electrophotography and abutted against the surface of the light receiving member for use in electrophotography, to thereby measure the frequency of occurrence for cracks in the light receiving layer, it was found that the rate of occurrence in the light receiving member for use in electrophotography of Example 1 was less than 3/5 for that in the light receiving member for use in electrophotography of Comparative Example 1.
As has been described above, the light receiving member for use in electrophotography of Example 1 was superior to the light receiving member for use in electrophotography of Comparative Example 1.
EXAMPLE 2
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 except for changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer, under the preparation conditions shown in Table 3 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 3
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 except for not using the CH.sub.4 gas in the upper layer of Example 1, under the preparation conditions shown in Table 4 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 4
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 except for replacing the PH.sub.3 /H.sub.2 gas cylinder with a He gas (99.9999% purity) cylinder and, further, using SiF.sub.4 gas and N.sub.2 gas from cylinder not illustrated in Example 1, under the preparation conditions shown in Table 5 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 5
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 except for replacing the B.sub.2 H.sub.6 /H.sub.2 gas cylinder with an Ar gas (99.9999% purity) cylinder and, further replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 1, under the preparation conditions shown in Table 6 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 6
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using PH.sub.3 /H.sub.2 gas and C.sub.2 H.sub.6 gas in the upper layer, under the preparation conditions shown in Table 7 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 7
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 8 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and. peeling in the same manner as in Example 1.
EXAMPLE 8
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using N.sub.2 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 9 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 9
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 except for replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 1, under the preparation conditions shown in Table 10 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 10
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by replacing the NO gas cylinder with a N.sub.2 gas cylinder in Example 1, under the preparation conditions shown in Table 11 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 11
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 1, under the preparation conditions shown in Table 12 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 12
A light receiving member for use in electrophotography was prepared in the same manner as in Example 6 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 13 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 6.
EXAMPLE 13
A light receiving member for use in electrophotography was prepared in the same manner as in Example 9 by further using B.sub.2 H.sub.6 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 14 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 9.
EXAMPLE 14
A light receiving member for use in electrophotography was prepared in the same manner as in Example 11 by further using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 15 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 11.
EXAMPLE 15
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using GeH.sub.4 from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 16 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 16
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 1, under the preparation conditions shown in Table 17 and, when evaluated in the same manner as in Example 1, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 17
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 1, under the preparation conditions shown in Table 18 and, when evaluated in the same manner as in Example 1, except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 18
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 1, under the preparation conditions shown in Table 19 and, when evaluated in the same manner as in Example 1, except for using an electrophotographic apparatus, i.e., a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 19
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 1, under the preparation conditions shown in Table 20, and evaluated in the same manner as in Example 1 except for using an electrophotographic apparatus, manufactured for experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 20
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 16 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 16 and further machined into a cross sectional shape of: a=25 um, b=0.8 um as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 16, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 16.
EXAMPLE 21
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 16 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of: c=50 um and d=1 um as shown in FIG. 39 and, when evaluated in the same manner as in Example 16, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 16.
EXAMPLE 22
A light receiving member for use in electrophotography having an upper layer comprising poly-Si(H, X) was prepared in the same manner as in Example 9 by using a cylindrical aluminum support heated to a temperature of 500.degree. C., under the preparation conditions as shown in Table 21 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 9.
EXAMPLE 23
A light receiving member for use in electrophotography according to this invention was formed by microwave (hereinafter simply referred to as "uW") glow discharge decomposition.
A production apparatus for the light receiving member for use in photography by the uW glow discharge decomposition shown in FIG. 41 was used, in which a decomposition device 1100 for use in the uW glow discharge decomposition shown in FIG. 40 was used instead of the deposition device 1000 in the production apparatus of RF glow discharge decomposition shown in FIG. 37, and it was connected with a raw material gas supply device 1020.
In the figure, a cylindrical aluminum support 1107 had 108 mm of outer diameter and mirror-finished surface.
At first, in the same manner as in Example 1, the inside of the deposition chamber 1101 and the gas pipeways was evacuated such that the pressure in the deposition chamber 1101 was 5.times.10.sup.-6 Torr.
Then, in the same manner as in Example 1, the respective gases were introduced in the mass flow controllers 1021-1027. In this case, however, a SiF.sub.4 gas cylinder was used in place of the N.sub.2 gas cylinder.
Further, the cylindrical aluminum support 1107 disposed in the deposition chamber 1101 was heated to a temperature of 250.degree. C. by a heater not illustrated.
After the preparation for the film formation was thus completed, each of the lower and the upper layers was formed on the cylindrical aluminum support 1107. The lower layer was formed by gradually opening the flow-out valves 1041, 1042 and 1047 and the auxiliary valve 1018, thereby flowing the SiH.sub.4 gas, H.sub.2 gas and AlCl.sub.3 /He gas through the gas discharge aperture not illustrated of the gas introduction pipe 1110 into a plasma generation region 1109. In this case, the gas flow rate was controlled by each of the mass flow controllers 1021, 1022 and 1027 such that SiH.sub.4 gas flow rate was 150 SCCM, H.sub.2 gas flow rate was 20 SCCM and AlCl.sub.3 gas flow rate was 400 SCCM. The pressure in the deposition chamber 1101 was set to 0.6 mTorr by adjusting the opening of the main valve not illustrated while observing the vacuum meter not illustrated. Then, uW power was introduced by way of a wave guide portion 1103 and a dielectric window 1102 into a plasma generation region 1109 by setting the power for a uW power source not illustrated to 0.5 W/cm.sup.3, to cause uW glow discharge and start the formation of the lower layer on the cylindrical aluminum support 1107. The mass flow controllers 1021, 1022 and 1027 were controlled such that the SiH.sub.4 gas flow rate remained at a constant rate of 150 SCCM, the H.sub.2 gas flow rate was increased at a constant ratio from 20 SCCM to 500 SCCM, the AlCl.sub.3 /He gas flow rate was reduced at a constant ratio from 400 SCCM to 80 SCCM for the 0.01 um on the support side, while reduced at a constant ratio from 80 SCCM to 50 SCCM for 0.01 um on the side of the upper layer during formation of the lower layer. When the lower layer of 0.02 um thickness was formed, the uW glow discharge was stopped, the flow-out valves 1041, 1042, 1047 and the auxiliary valve 1018 were closed to interrupt the flow of the gas into the plasma generation region 1109 thereby completing the formation of the lower layer.
Then, for forming the first layer region of the upper layer, the flow-out valves 1041, 1042, 1044, 1045 and 1046, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas, H.sub.2 gas and SIF.sub.4 gas, B.sub.2 H.sub.6 lH.sub.2 and NO gas through the gas discharge aperture not illustrated of the gas introduction pipe 1110 into the plasma generation space 1109. In this case, respective mass flow controllers 1021, 1022, 1024, 1025 and 1026 were adjusted so that the SiH.sub.4 gas flow rate was 3500 SCCM, H.sub.2 gas flow rate was 350 SCCM, SiF.sub.4 gas flow rate was 20 SCCM, B.sub.2 H.sub.6 H.sub.2 gas flow rate was 600 ppm to the SiH.sub.4 gas flow rate and NO gas flow rate was 13 SCCM. The pressure in the deposition chamber 1101 was controlled to 0.5 mTorr. Then, RF power was introduced into the plasma generation chamber 1109 while setting the power of RF power source (not illustrated) to 0.5 mW/cm.sup.3, to cause uW glow discharge and start the formation of the first layer region of the upper layer over the lower layer. Then, the first layer region of 3 um thickness of the upper layer was formed.
Then, for forming the second layer region of the upper layer, the flow-out valves 1041, 1042 and 1044, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas, H.sub.2 gas and SiF.sub.4 gas through the gas discharge aperture not illustrated of the gas introduction pipe 1110 into the plasma generation space 1109. In this case, respective mass flow controllers 1021, 1022 and 1024 were adjusted so that the SiH.sub.4 gas flow rate was 700 SCCM, H.sub.2 gas flow rate was 500 SCCM and SiF.sub.4 gas flow rate was 30 SCCM. The pressure in the deposition chamber 1101 was controlled to 0.5 mTorr. Then, the power of a uW power source (not illustrated) was set to 0.5 mW/cm.sup.3, to cause uW glow discharge in the plasma generation region 1109 and form the second layer region with 20 um thickness of the upper layer on the first layer region of the upper layer.
Then, for forming the third layer region of the upper layer, the flow-out valves 1041 and 1043 and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas and CH.sub.4 gas through the gas discharge aperture not illustrated of the gas introduction pipe 1110 into the plasma generation space 1109. In this case, respective mass flow controllers 1021 and 1023 were adjusted so that the SiH.sub.4 gas flow rate was 150 SCCM and CH.sub.4 gas flow rate was 500 SCCM. The pressure in the deposition chamber 1101 was controlled to 0.3 mTorr. Then, the power of a uW power source (not illustrated) was set to 0.5 mW/cm.sup.3, to cause uW glow discharge in the plasma generation region 1109 and the third layer region with 0.5 um thickness of the upper layer was formed on the second layer region of the upper layer.
The conditions for preparing the light receiving member for use in electrophotography described above are shown in Table 22.
When the light receiving member for use in electrophotography was evaluated in the same manner in Example 1, improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 24
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 1, under the preparation conditions shown in Table 23 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 25
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by replacing the No gas cylinder with a N.sub.2 gas cylinder in Example 1, under the preparation conditions shown in Table 24 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 26
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 1, under the preparation conditions shown in Table 25 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse . image and peeling in the same manner as in Example 1.
EXAMPLE 27
A light receiving member for use in electrophotography was prepared in the same manner as in Example 6 by further using SiF.sub.4 from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 26 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 6.
EXAMPLE 28
A light receiving member for use in electrophotography was prepared in the same manner as in Example 9 by further using B.sub.2 H.sub.6 lH.sub.2 gas in the upper layer, under the preparation conditions shown in Table 27 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 9.
EXAMPLE 29
A light receiving member for use in electrophotography was prepared in the same manner as in Example 11 by further using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 28 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 11.
EXAMPLE 30
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by replacing the PH.sub.3 /H.sub.2 gas cylinder with a He gas (99.999% purity) cylinder and further using N.sub.2 gas from not illustrated cylinder in the Example 1, under the preparation conditions shown in Table 29 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 31
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using PH.sub.3 /H.sub.2 gas, C.sub.2 H.sub.2 gas and SiF.sub.4 gas in the upper layer, under the preparation conditions shown in Table 30 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 32
A light receiving member for use in electrophotography was prepared in the same manner as in Example 6 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 31 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 6.
EXAMPLE 33
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using B.sub.2 H.sub.6 lH.sub.2 and C.sub.2 H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 32 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 34
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using PH.sub.3 /H.sub.2 gas and C.sub.2 H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 33 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 35
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using PH.sub.3 /H.sub.2 and C.sub.2 H.sub.2 gas, SiF.sub.4 gas and H.sub.2 S gas in the upper layer, under the preparation conditions shown in Table 34 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 36
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using B.sub.2 H.sub.6 gas upon forming the lower layer in Example 1, under the preparation conditions as shown in Table 35.
COMPARATIVE EXAMPLE 2
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 36 except for not using gas and H.sub.2 gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electrophotography are shown in Table 36.
The light receiving members for use in electrophotography thus prepared in Example 36 and Comparative Example 2 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristics with voltage withstanding property in that no image defects were formed even if a high voltage was applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 24 was less than 3/4 of that of the light receiving member for use in electrophotography in Comparative Example 2. In addition, for comparing the "coarse image" , when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 36 was less than 1/2 for that of the light receiving member for use in electrophotography in Comparative Example 2, and the light receiving member for use in electrophotography of Example 1 was excellent over the light receiving member for use in Electrophotography of Comparative Example in view of the visual observation.
EXAMPLE 37
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 except for changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer, under the preparation conditions shown in Table 37 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 38
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 except for not using the CH.sub.4 gas in the upper layer of Example 36, under the preparation conditions shown in Table 38 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 39
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 except for replacing the PH.sub.3 /H.sub.2 gas cylinder with a He gas (99.9999% purity) cylinder and, further, using SiF.sub.4 gas and N.sub.2 gas from cylinder not illustrated, under the preparation conditions shown in Table 39 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 40
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 except for replacing the B.sub.2 H.sub.6 1H.sub.2 gas cylinder with an Ar gas (99.9999% purity) cylinder and, further replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder, under the preparation conditions shown in Table 40 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 41
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using PH.sub.3 /H.sub.2 gas and C.sub.2 H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 41 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 42
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer under the preparation conditions shown in Table 42, and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 43
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using N.sub.2 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 43 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 44
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 except for replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 36, under the preparation conditions shown in Table 44 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 45
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by replacing the NO gas cylinder with a N.sub.2 gas cylinder in Example 36, under the preparation conditions shown in Table 45 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 46
A light receiving member for use in electrophotography prepared in the same manner as in Example 36 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 36, under the preparation conditions shown in Table 46 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 47
A light receiving member for use in electrophotography was prepared in the same manner as in Example 41 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 47 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 41.
EXAMPLE 48
A light receiving member for use in electrophotography was prepared in the same manner as in Example 44 by further using Bphd 2H.sub.6 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 48 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 44.
EXAMPLE 49
A light receiving member for use in electrophotography was prepared in the same manner as in Example 46 by further using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 49 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 46.
EXAMPLE 50
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using GeH.sub.4 from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 50 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 51
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 36, under the preparation conditions shown in Table 51 and, when evaluated in the same manner as in Example 36, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 52
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 36, under the preparation conditions shown in Table 52 and, when evaluated in the same manner as in Example 36, except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 53
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 36, under the preparation conditions shown in Table 53 and, when evaluated in the same manner as in Example 36, except for using an electrophotographic apparatus, i.e , a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 54
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 36, under the preparation conditions shown in Table 54, and evaluated in the same manner as in Example 36, except for using an electrophotographic apparatus, manufactured for experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 55
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 51 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 51 and further machined into a cross sectional shape of : a =25 um, b =0.8 um as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 51, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 51.
EXAMPLES 56, 57
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 51 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of : c =50 um and d =1 um as shown in FIG. 39 and, when evaluated in the same manner as in Example 56, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 51.
EXAMPLE 58
A light receiving member for use in electrophotography was prepared by microwave glow discharge decomposition in the same manner as in Example 23 by further using B.sub.2 H.sub.6 gas upon forming the lower layer in Example 23, under the preparation conditions shown in Table 56.
When the light receiving member for use in electrophotography was evaluated in the same manner as in Example 36, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 59
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 36, under the preparation conditions shown in Table 57 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 60
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by replacing the No gas cylinder with a N.sub.2 gas cylinder in Example 36, under the preparation conditions shown in Table 58 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 61
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 36, under the preparation conditions shown in Table 59 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 62
A light receiving member for use in electrophotography was prepared in the same manner as in Example 41 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 60 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 41.
EXAMPLE 63
A light receiving member for use in electrophotography was prepared in the same manner as in Example 44 by further using B.sub.2 H.sub.6 1H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 61 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 44.
EXAMPLE 64
A light receiving member for use in electrophotography was prepared in the same manner as in Example 46 by further using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 62 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 46.
EXAMPLE 65
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by replacing the PH.sub.3 /H.sub.2 gas cylinder with a He gas (99.999% purity) cylinder and further using N.sub.2 gas from a not illustrated cylinder in the Example 36, under the preparation conditions shown in Table 63 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 66
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using PH.sub.3 /H.sub.2 gas, C.sub.2 H.sub.2 gas and SiF.sub.4 gas in the upper layer, under the preparation conditions shown in Table 64 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 67
A light receiving member for use in electrophotography was prepared in the same manner as in Example 41 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 65 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 41.
EXAMPLE 68
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using B.sub.2 H.sub.6 /H.sub.2 and C.sub.2 H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 66 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 69
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using PH.sub.3 /H.sub.2 gas and C.sub.2 H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 67 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 70
A light receiving member for use in electrophotography was prepared in the same manner as in Example 36 by further using PH.sub.3 /H.sub.2 and C.sub.2 H.sub.2 gas, SiF.sub.4 gas and H.sub.2 S gas in the upper layer, under the preparation conditions shown in Table 68 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 36.
EXAMPLE 71
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using NO gas upon forming the lower layer in Example 1, under the preparation conditions as shown in Table 69.
COMPARATIVE EXAMPLE 3
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 71 except for not using H.sub.2 gas and NO gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electrophotography are shown in Table 70.
The light receiving members for use in electrophotography thus prepared in Example 36 and Comparative Example 2 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristics with voltage withstanding property in that no image defects were formed even if a high voltage was applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 71 was less than 3/4 of that of the light receiving member for use in electrophotography in Comparative Example 3. In addition, for comparing the "coarse image" , when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 71 was less than 1/2 for that of the light receiving member for use in electrophotography in Comparative Example 3, and the light receiving member for use in electrophotography of Example 71 was excellent over the light receiving member for use in Electrophotography of Comparative Example 3 in view of the visual observation.
In addition, for comparing the occurrence of image defects and the peeling of the light receiving layer due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, when stainless steel balls of 3.5 mm diameter were fallen freely from the vertical height of 30 cm above the surface of the light receiving member for use in electrophotography and abutted against the surface of the light receiving member for use in electrophotography, to thereby measure the frequency of occurrence for cracks in to the light receiving layer, it was found that the rate of occurrence in the light receiving member for use in electrophotography of Example 71 was less than 2/5 for that in the light receiving member for use in electrophotography of Comparative Example 3.
As has been described above, the light receiving member for use in electrophotography of Example 71 was superior to the light receiving member for use in electrophotography of Comparative Example 3.
EXAMPLE 72
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 except for changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer and using B.sub.2 H.sub.6 gas in the upper layer, under the preparation conditions shown in Table 71 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 73
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 except for not using the CH.sub.4 gas in the upper layer of Example 71, under the preparation conditions shown in Table 72 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 74
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the PH.sub.3 /H.sub.2 gas cylinder with the He gas (99.9999% purity) cylinder and, further, using SiF.sub.4 gas and N.sub.2 gas from cylinders not illustrated in Example 71, under the preparation conditions shown in Table 73 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 75
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the B.sub.2 H.sub.6 /H.sub.2 gas cylinder with an Ar gas (99.9999% purity) cylinder and replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 71, under the preparation conditions shown in Table 74 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 76
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by further using pH.sub.3 /H.sub.2 and C.sub.2 H.sub.6 gas in the upper layer, under the preparation conditions shown in Table 75 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 77
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 76 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 78
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by further using N.sub.2 gas and H.sub.2 S gas from a not illustrated cylinder in the Example 71, under the preparation conditions shown in Table 77, and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 1.
EXAMPLE 79
receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 71, under the preparation conditions shown in Table 78 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 80
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the NO gas cylinder with a N.sub.2 gas cylinder and, further using the H.sub.2 S gas from cylinder not illustrated in Example 71, under the preparation conditions shown in Table 79 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 81
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 71, under the preparation conditions shown in Table 80 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 82
A light receiving member for use in electrophotography was prepared in the same manner as in Example 76 by further using SiF.sub.4 gas from a not illustrated cylinder and replacing C.sub.2 H.sub.2 gas cylinder with CH.sub.4 gas cylinder in the upper layer, under the preparation conditions shown in Table 82 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 79.
EXAMPLE 83
A light receiving member for use in electrophotography was prepared in the same manner as in Example 79 by using Si.sub.2 F.sub.4 gas from a not illustrated cylinder and further using B.sub.2 H.sub.6 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 82 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 79.
EXAMPLE 84
A light receiving member for use in electrophotography was prepared in the same manner as in Example 81 by further using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 83 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 81.
EXAMPLE 85
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by further using GeH.sub.4 from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 84 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 86
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 71, under the preparation conditions shown in Table 85 and, when evaluated in the same manner as in Example 71, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 87
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 71, under the preparation conditions shown in Table 86 and, when evaluated in the same manner as in Example 71, except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 88
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 71, under preparation conditions shown in Table 87 and, when evaluated in the same manner as in Example 71, except for using an electrophotographic apparatus, i.e., a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 89
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 71, under the preparation conditions shown in Table 88, and evaluated in the same manner as in Example 71, except for using an electrophotographic apparatus, manufactured for experimental use, satisfactory improve was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 90
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 86 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 86 and further machined into a cross sectional shape of:a =25 um, b=0.8 um as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 86, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 86.
EXAMPLE 91
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 86 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of c=50 um and d=1 um as shown in FIG. 39 and, when evaluated in the same manner as in Example 86, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 86.
EXAMPLE 92
A light receiving member for use in electrophotography having an upper layer comprising poly-Si(H, X) was prepared in the same manner as in Example 79 by using a cylindrical aluminum support heated to a temperature of 500.degree. C., the preparation conditions as shown in Table 89 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 79.
EXAMPLE 93
A light receiving member for use in electrophotography was prepared by microwave glow discharge decomposition in the same manner as in Example 23 by further using NO gas and B gas upon forming the lower layer in Example 23, under the preparation conditions shown in Table 90.
When the light receiving member for use in electrophotography was evaluated in the same manner as in Example 71, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 94
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 71, under the preparation conditions shown in Table 91 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 95
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the No gas cylinder with a N.sub.2 gas cylinder in Example 71, under the preparation conditions shown in Table 92 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 96
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 71, under the preparation conditions shown in Table 93 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 97
A light receiving member for use in electrophotography was prepared in the same manner as in Example 76 by further using SiF.sub.4 from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 94 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 76.
EXAMPLE 98
A light receiving member for use in electrophotography was prepared in the same manner as in Example 79 by replacing SiH.sub.4 gas cylinder with Si.sub.2 H.sub.6 gas cylinder and further using gas in the upper layer, under the preparation conditions shown in Table 95 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 79.
EXAMPLE 99
A light receiving member for use in electrophotography was prepared in the same manner as in Example 81 by further using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 96 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 81.
EXAMPLE 100
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by replacing the PH.sub.3 /H.sub.2 gas cylinder with a He gas (99.999% purity) cylinder and further using N.sub.2 gas from a not illustrated cylinder in the Example 71, under the preparation conditions shown in Table 97 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 101
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by further using C gas and SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 98 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 11.
EXAMPLE 102
A light receiving member for use in electrophotography was prepared in the same manner as in Example 101 by further using SiF.sub.4 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 99 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 101.
EXAMPLE 103
A light receiving member for us in electrophotography was prepared in the same manner as in Example 106 by using B.sub.2 /H.sub.6 /H.sub.2 and further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 100 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 104
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by using PH.sub.3 /H.sub.2 and further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 101 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 105
A light receiving member for use in electrophotography was prepared in the same manner as in Example 71 by using C.sub.2 H.sub.2 gas, SiF.sub.4 gas and H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 102 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 106
A light receiving member for use in electrophotography was prepared in the same manner as in Example 79 by using C.sub.2 H.sub.2 gas and SiF.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 103 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 79.
EXAMPLE 107
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 104, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 108
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 105 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 109
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 106 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 110
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 107 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 111
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 108 and, when evaluated in the same manner, satisfactory improvement was . obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 112
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 109 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 113
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 110 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 114
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 111 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 115
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106 by further using PH.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 112 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 116
A light receiving member for use in electrophotography was prepared in the same manner as in Example 115, under the preparation conditions shown in Table 113 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 115.
EXAMPLE 117
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106 by further using H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 114 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 118
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 114 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 119
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 116 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 120
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106 by further using NH.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 117 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 121
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106 by further using N.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 118 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 122
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 119 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 123
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 120 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 124
A light receiving member for use in electrophotography was prepared in the same manner as in Example 115, under the preparation conditions shown in Table 121 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 115.
EXAMPLE 125
A light receiving member for use in electrophotography was prepared in the same manner as in Example 106, under the preparation conditions shown in Table 122 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 106.
EXAMPLE 126
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using SiF.sub.4 gas and NO gas upon forming the lower layer in Example 1, under the preparation conditions shown in Table 123.
COMPARATIVE EXAMPLE 4
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 126 except for not using SiF.sub.4 gas, NO gas and H.sub.2 gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electro photography are shown in Table 124.
The light receiving members for use in electrophotography thus prepared in Example 126 and Comparative Example 4 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristics with voltage withstanding property in that no image defects were formed even if a high voltage was applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 71 was less than half of that of the light receiving member for use in electrophotography in Comparative Example 3. In addition, for comparing the "coarse image", when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 126 was less than 1/2 for that of the light receiving member for use in electrophotography in Comparative Example 4, and the light receiving member for use in electrophotography of Example 126 was excellent over the light receiving member for use in Electrophotography of Comparative Example 4 in view of the visual observation.
In addition, for comparing the occurrence of image defects and the peeling of the light receiving layer due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, when stainless steel balls of 3.5 mm diameter were fallen freely from the vertical height of 30 cm above the surface of the light receiving member for use in electrophotography and abutted against the surface of the light receiving member for use in electrophotography, to thereby measure the frequency of occurrence for cracks in the light receiving layer, it was found that the rate of occurrence in the light receiving member for use in electrophotography of Example 126 was less than 2/5 for that in the light receiving member for use in electrophotography of Comparative Example 4.
As has been described above, the light receiving member for use in electrophotography of Example 126 was superior to the light receiving member for use in electrophotography of Comparative Example 4.
EXAMPLE 127
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by not using the NO gas and changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer of Example 126, under the preparation conditions shown in Table 125 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 128
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by not using the CH.sub.4 gas in Example 126, under the preparation conditions shown in Table 126 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 129
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using He gas (99.9999% purity) from a not illustrated cylinder in Example 126, under the preparation conditions shown in Table 127 and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 130
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by replacing the B.sub.2 H.sub.6 /H.sub.2 gas with diluted H.sub.2 gas (99.999% purity, hereinafter simply referred to as PH.sub.3 /H.sub.2) cylinder, replacing the NO gas cylinder with NH.sub.3 gas (99.999% purity) cylinder in Example 126, under the preparation conditions shown in Table 128 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 131
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 129 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 132
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using PH.sub.3 /H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 130 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 133
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using N.sub.2 gas, H.sub.2 S and PH.sub.3 /H.sub.2 gas from a not illustrated cylinder in the Example 126, under the preparation conditions shown in Table 131 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 134
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 126, under the preparation conditions shown in Table 132 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 135
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by replacing the B.sub.2 H.sub.6 /H.sub.2 gas cylinder with H.sub.2 -diluted BF.sub.3 gas (99.999% purity, hereinafter simply referred to as PH.sub.3 /H.sub.2) cylinder, replacing the NO gas cylinder with a N.sub.2 gas (99.999% purity) cylinder and using H.sub.2 S gas from a not illustrated cylinder in Example 126, under the preparation conditions shown in Table 133 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 136
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder in Example 126, under the preparation conditions shown in Table 134, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 137
A light receiving member for use in electrophotography was prepared in the same manner as in Example 131 by further using the hydrogen gas-diluted PF.sub.5 gas (99.999% purity, hereinafter simply referred to as PF.sub.3 /H.sub.2) from a not illustrated cylinder and PH.sub.3 /H.sub.2 gas, replating the G.sub.2 H.sub.2 gas cylinder with CH.sub.4 gas cylinder, under the preparation conditions shown in Table 135 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 131.
EXAMPLE 138
A light receiving member for use in electrophotography was prepared in the same manner as in Example 136 by using a not illustrated Si.sub.2 F.sub.6 gas cylinder, under the preparation conditions shown in Table 136 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 134.
EXAMPLE 139
A light receiving member for use in electrophotography was prepared in the same manner as in Example 136 by further using PH.sub.3 /H.sub.2 gas and Si.sub.2 F.sub.4 gas, under the preparation conditions shown in Table 137 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 136.
EXAMPLE 140
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using GeH.sub.4 from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 138 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 141
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 126, under the preparation conditions shown in Table 139 and, when evaluated in the same manner as in Example 126, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 142
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 126, under the preparation conditions shown in Table 140 and, when evaluated in the same manner as in Example 126, except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 143
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 126, under the preparation conditions shown in Table 141 and, when evaluated in the same manner as in Example 126, except for using an electrophotographic apparatus, i.e., a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 144
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 126, under the preparation conditions shown in Table 142, and evaluated in the same manner as in Example 126, except for using an electrophotographic apparatus, manufactured for experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 145
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 141 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 141 and further machined into a cross sectional shape of : a=25 um, b=0.8 um as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 141, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 141.
EXAMPLE 146
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 141 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of : c=50 um and d=1 um as shown in FIG. 39 and, when evaluated in the same manner as in Example 141, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 141.
EXAMPLE 147
A light receiving member for use in electrophotography having an upper layer comprising poly-Si(H, X) was prepared in the same manner as in Example 134 by using a cylindrical aluminum support heated to a temperature of 500.degree. C., under the preparation conditions as shown in Table 143 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 134.
EXAMPLE 148
A light receiving member for use in electrophotography was prepared by microwave glow discharge decomposition in the same manner as in Example 23 by further using SiF.sub.4 gas, No gas and B.sub.2 H.sub.6 gas in Example 23, under the same preparation conditions as shown in Table 144.
When the light receiving member for use in electrophotography was evaluated in the same manner as in Example 126. satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 149
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 126, under the preparation conditions shown in Table 145 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 150
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by replacing the NO gas cylinder with a N.sub.2 gas cylinder in Example 126, under the preparation conditions shown in Table 146 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 151
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by using PF.sub.5 gas and Si.sub.2 F.sub.6 gas from a not illustrated cylinder and replacing NO gas cylinder with a NH.sub.3 gas cylinder in Example 126, under the preparation conditions shown in Table 147 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 152
A light receiving member for use in electrophotography was prepared in the same manner as in Example 131 by further using PF.sub.5 /H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 148 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 131.
EXAMPLE 153
A light receiving member for use in electrophotography was prepared in the same manner as in Example 134, under the preparation conditions shown in Table 149 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 134.
EXAMPLE 154
A light receiving member for use in electrophotography was prepared in the same manner as in Example 136 by further using PH.sub.3 /H.sub.2 gas, under the preparation conditions shown in Table 150 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 136.
EXAMPLE 155
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using the He gas (99.999% purity) from a not illustrated cylinder in the Example 126, under the preparation conditions shown in Table 151 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 156
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using C.sub.2 H.sub.2 gas and PH.sub.3 /H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 151 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 157
A light receiving member for use in electrophotography was prepared in the same manner as in Example 131 by further using PH.sub.3 /H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 153 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 131.
EXAMPLE 158
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 154 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 159
A light receiving member for use in electrophotography was prepared in the same manner as in Example 158 by further using C.sub.2 H.sub.2 gas and PH.sub.3 /H.sub.2 from a not illustrated cylinder, under the preparation conditions shown in Table 155 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 158.
EXAMPLE 160
A light receiving member for use in electrophotography was prepared in the same manner as in Example 126 by further using C.sub.2 H.sub.2 gas, PF.sub.3 /H.sub.2 gas and H.sub.2 S gas from a not was prepared in the same manner as in Example 126 by further using C.sub.2 H.sub.2 gas, PF.sub.3 /H.sub.2 gas and H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 156 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 126.
EXAMPLE 161
A light receiving member for use in electrophotography was prepared in the same manner as in Example 134 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 134 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 134.
EXAMPLE 162
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 158, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 163
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 159, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 164
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161 by using BF.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 160, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 165
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 161 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 166
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 162 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 167
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 163 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 168
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 164 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 169
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 165 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 170
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161 by further using PH.sub.3 gas and Si.sub.2 F.sub.6 gas from a not illustrated cylinder, under the preparation conditions shown in Table 166 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 171
A light receiving member for use in electrophotography was prepared in the same manner as in Example 170, under the preparation conditions shown in Table 167 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 170.
EXAMPLE 172
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161 by further using H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 168 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 173
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 169 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 174
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 170 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 175
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161 by further using NH.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 171 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 176
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161 by further using N.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 172 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 177
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 173 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 178
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 174 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 179
A light receiving member for use in electrophotography was prepared in the same manner as in Example 170, under the preparation conditions shown in Table 175 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 170.
EXAMPLE 180
A light receiving member for use in electrophotography was prepared in the same manner as in Example 161, under the preparation conditions shown in Table 176 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 161.
EXAMPLE 181
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 by further using GeH.sub.4 gas upon forming the lower layer in Example 1, under the same preparation conditions as shown in Table 177. COMPARATIVE EXAMPLE 5
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 181 except for not using GeH.sub.4 gas and H.sub.2 gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electro photography are shown in Table 178.
The light receiving members for use in electrophotography thus prepared in Example 181 and Comparative Example 5 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristics with voltage withstanding property in that no image defects were formed even if a high voltage was applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 181 was less than 2/5 of that of the light receiving member for use in electrophotography in Comparative Example 5. In addition, for comparing the "coarse image", when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 181 was less than 1/3 for that of the light receiving member for use in electrophotography in Comparative Example 5, and the light receiving member for use in electrophotography of Example 181 was excellent over the light receiving member for use in Electrophotography of Comparative Example 5 in view of the visual observation.
In addition, for comparing the occurrence of image defects and the peeling of the light receiving layer due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, when stainless steel balls of 3.5 mm diameter were fallen freely from the vertical height of 30 cm above the surface of the light receiving member for use in electrophotography and abutted against the surface of the light receiving member for use in electrophotography, to thereby measure the frequency that cracks occurred to the light receiving layer, it was found that the rate of occurrence in the light receiving member for use in electrophotography of Example 181 was less than 1/3 for that in the light receiving member for use in electrophotography of Comparative Example 5.
When the lower layer of the light receiving member for use in electrophotography of Example 181 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
As has been described above, the light receiving member for use in electrophotography of Example 181 was superior to the light receiving member for use in electrophotography of Comparative Example 5.
EXAMPLE 182
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer, under the preparation conditions shown in Table 179, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 183
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 not using the CH.sub.4 gas in the upper layer of Example 181, under the preparation conditions shown in Table 180, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 184
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using He gas (99.9999% purity) and N.sub.2 gas from a not illustrated cylinder in Example 181, under the preparation conditions shown in Table 181, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 185
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by replacing the B.sub.2 H.sub.6 /H.sub.2 gas cylinder with hydrogen-diluted PH.sub.3 gas (99.999% purity, hereinafter simply referred to as PH.sub.3 /H.sub.2) cylinder, replacing the NO gas cylinder with NH.sub.3 gas (99.999% purity) cylinder in Example 181, under the preparation conditions shown in Table 182, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 186
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder in Example 181, under the preparation conditions shown in Table 183 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 187
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using PH.sub.3 /H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 184 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 188
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using N.sub.2 gas, H.sub.2 S (99.9% purity) and PH.sub.3 /H.sub.2 gas from a not illustrated cylinder in Example 181, under the preparation conditions shown in Table 185, and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 189
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by replacing the GeH.sub.4 gas cylinder with GeF.sub.4 gas (99.999% purity), and replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in Example 181, under the preparation conditions shown in Table 186 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 190
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by replacing the B.sub.2 H.sub.6 /H.sub.2 gas cylinder with H.sub.2 -diluted BF.sub.3 gas (99.999% purity, hereinafter simply referred to as BF.sub.3 /H.sub.2) cylinder and replacing the NO gas cylinder with N.sub.2 gas and also using H.sub.2 S gas from a not illustrated cylinder in Example 181, under the preparation conditions shown in Table 187, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 191
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by replacing cylinder in Example 181, under the preparation conditions shown in Table 188, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 192
A light receiving member for use in electrophotography was prepared in the same manner as in Example 186 by replacing the PF.sub.5 gas diluted with hydrogen (99.999% purity, hereinafter simply referred to as PH.sub.3 /H.sub.2) from a not illustrated cylinder and further using B.sub.2 H.sub.6 /H.sub.2 gas, under the preparation conditions shown in Table 189, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 186.
EXAMPLE 193
A light receiving member for use in electrophotography was prepared in the same manner as in Example 189 by using Si.sub.2 H.sub.6 (99.99% purity), Si.sub.2 F.sub.6 (99199% purity) gas, under the preparation conditions shown in Table 190, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 189.
EXAMPLE 194
A light receiving member for use in electrophotography was prepared in the same manner as in Example 191 by further using PF.sub.5 /H.sub.2 gas and Si.sub.2 F.sub.6 gas, under the preparation conditions shown in Table 191 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 191.
EXAMPLE 195
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using GeH.sub.4 gas in the upper layer, under the preparation conditions shown in Table 192 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 196
A light receiving member for use in electrophotography was in same manner as prepared the in Example 181 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 181, under the preparation conditions shown in Table 193 and, when evaluated in the same manner as in Example 181, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc. and modified for experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 197
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 181, under the preparation conditions shown in Table 194 and, when evaluated in the same manner as in Example 181, except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 198
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 181, under the preparation conditions shown in Table 195 and, when evaluated in the same manner as in Example 181, except for using an electrophotographic apparatus, i.e., a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 199
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 181, under the preparation conditions shown in Table 196, and evaluated in the same manner as in Example 181, except for using an electrophotographic apparatus, manufactured for experimental use and, when evaluated in the same manner, satisfactory improvement was obtained to the dots coarse image and peeling in the same manner as in Example 181.
EXAMPLE 200
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 196 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 196 and further machined into a cross sectional shape of a=25 um, b=0.8 um as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 196, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 196.
EXAMPLE 201
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 196 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of: c=50 um and d=1 um as shown in FIG. 39 and, when evaluated in the same manner as in Example 196, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 196.
EXAMPLE 202
A light receiving member for use in electrophotography in the same manner as in Example 189 having an upper layer comprising poly-Si(H, X) was prepared by using a cylindrical aluminum support heated to a temperature of 500.degree. C., under the preparation conditions as shown in Table 197 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 189.
EXAMPLE 203
A light receiving member for use in electrophotography was prepared by microwave glow discharge decomposition in the same manner as in Example 23 by further using GeH.sub.4 gas, B.sub.2 H.sub.6 gas and NO gas upon forming the lower layer in Example 23, under the same preparation conditions as shown in Table 198.
When the light receiving member for use in electrophotography was evaluated in the same manner as in Example 181, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 204
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder, and replacing GeH.sub.4 gas cylinder with a GeF.sub.4 gas cylinder and further using Si.sub.2 F.sub.6 gas in Example 181, under the preparation conditions shown in Table 199 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 205
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181, under the preparation conditions shown in Table 200 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 206
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by using SnH.sub.4 gas (99.99% purity), PF.sub.5 gas and Si.sub.2 F.sub.6 gas from a not illustrated cylinder and replacing NO gas cylinder with a NH.sub.3 gas cylinder in Example 181, under the preparation conditions shown in Table 201 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 207
A light receiving member for use in electrophotography was prepared in the same manner as in Example 186 by further using PF.sub.5 /H.sub.2 gas and SiF.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 202 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 186.
EXAMPLE 208
A light receiving member for use in electrophotography was prepared in the same manner as in Example 189, under the preparation conditions shown in Table 203 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 189.
EXAMPLE 209
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using PH.sub.3 /H.sub.2 gas, under the preparation conditions shown in Table 204 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 210
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using He gas and N.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 205 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 211
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using C.sub.2 H.sub.2 gas, SiF.sub.4 gas and PH.sub.3 /H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 206 and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 212
A light receiving member for use in electrophotography was prepared in the same manner as in Example 211 by further using PH.sub.3 /H.sub.2 gas and SiF.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 207 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 211.
EXAMPLE 213
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 208 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 214
A light receiving member for use in electrophotography was prepared in the same manner as in Example 213 by further using C.sub.2 H.sub.2 and SnH.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 209 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 213.
EXAMPLE 215
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using C.sub.2 H.sub.2 gas, PF.sub.3 /H.sub.2 gas, H.sub.2 S gas and SiF.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 210 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 216
A light receiving member for use in electrophotography was prepared in the same manner as in Example 189 by further using C.sub.2 H.sub.2 gas and SiF.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 211 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 189.
EXAMPLE 217
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216 by using SnH.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 212, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 218
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 213 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 219
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216 by using BF.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 214, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 220
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 215 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 221
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 216 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 222
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 217 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 223
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 218 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 224
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 219 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 225
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216 by further using PH.sub.3 gas and Si.sub.2 F.sub.6 gas from a not illustrated cylinder, under the preparation conditions shown in Table 220 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 226
A light receiving member for use in electrophotography was prepared in the same manner as in Example 225, under the preparation conditions shown in Table 221 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 225.
EXAMPLE 227
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216 by further using H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 222 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 228
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 223 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 229
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 224 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 230
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216 by further using NH.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 225 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 231
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216 by further using N.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 226 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 232
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 227 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 233
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 228 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 234
A light receiving member for use in electrophotography was prepared in the same manner as in Example 225, under the preparation conditions shown in Table 229 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 225.
EXAMPLE 235
A light receiving member for use in electrophotography was prepared in the same manner as in Example 216, under the preparation conditions shown in Table 230 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 216.
EXAMPLE 236
The light receiving member for use in electrophotography according to this invention was formed by radio frequency (hereinafter simply referred to as "RF") glow discharge decomposition.
FIG. 37 shows an apparatus for producing the light receiving member for use in electrophotography by the RF glow discharge decomposition, comprising a raw material gas supply device 1020 and a deposition device 1000.
In the figure, raw material gases for forming the respective layers in this invention were tightly sealed in gas cylinders 1071, 1072, 1073, 1074, 1075, 1076, 1077 and 1079, and tightly sealed vessels 1078 and 1080 in which the cylinder 1071 was for SiH.sub.4 gas (99.99% purity), the cylinder 1072 was for H.sub.2 gas (99.9999%), the cylinder 1073 was for CH.sub.4 gas (99.999% purity), the cylinder 1074 was for GeH.sub.4 gas (99.999%), the cylinder 1075 was for PH.sub.3 gas diluted with H.sub.2 gas (99.999% purity, hereinafter simply referred to as "PH.sub.3 /H.sub.2 "), the cylinder 1076 was for NO gas (99.9% purity), the cylinders 1077 and 1079 were for He gas (99.999% purity), the tightly sealed vessel 178 was charged with AlCl.sub.3 (99.999% purity) and the tightly sealed vessel 178 was charged with Mg(C.sub.5 H.sub.5).sub.3 (99.999% purity).
In the figure, a cylindrical aluminum support 1005 had an outer diameter of 108 mm and a mirror-finished surface.
After confirming that valves 1051-1058 for the gas cylinders 1071-1077 and 1079, flow-in valves 1031-1038 and a leak valve 1015 for the deposition chamber 1001 were closed and flow-out valves 1041-1048 and an auxiliary valve 1018 were opened, a main valve 1016 was at first opened to evacuate the deposition chamber 1001 and gas pipeways by a vacuum pump not illustrated.
Then, when the indication of a vacuum meter 1017 showed about 1.times.10.sup.-3 Torr, the auxiliary valve 1018, the flow-out valves 1041-1048 were closed.
Then, the valves 1051-1058 were opened to introduce SiH.sub.4 from the gas cylinder 1071, H.sub.2 gas from the gas cylinder 1072, CH.sub.4 gas from the gas cylinder 1073, GeH.sub.4 gas from the gas cylinder 1074, B.sub.2 H.sub.5 /H.sub.2 gas from the gas cylinder 1075, NO gas from the gas cylinder 1076 and He gas from the gas cylinders 1077 and 1079, and the pressures for the respective gases were adjusted to 2 kg/cm.sup.2 by pressure controllers 1061-1068.
Then, the flow-in valves 1031-1038 were gradually opened to introduce the respective gases in mass flow controllers 1021-1028. In this case, since the He gas from the gas cylinder 1077 was passed through the tightly sealed vessel 1078 charged with AlCl.sub.3, the AlCl.sub.3 gas diluted with the He gas (hereinafter simply referred to as "AlCl.sub.3 /He") was introduced to the mass flow controller 1027 and since the He gas from the gas cylinder 1079 was passed through the tightly sealed vessel 1080 charged with Mg(C.sub.5 H.sub.5).sub.2, the Mg(C.sub.5 H.sub.5).sub.3 gas diluted with the He gas (hereinafter simply referred to as "Mg(C.sub.2 H.sub.5).sub.2 /He") was introduced to the mass flow controller 1028.
The temperature of the cylindrical aluminum support 1005 disposed in the deposition chamber 1001 was heated to 250.degree. C. by a heater 1014.
After completing the preparation for the film formation as described above, each of the lower and upper layers was formed on the cylindrical aluminum support 1005.
The lower layer was formed by gradually opening the flow-out valves 1041, 1042, 1047 and 1048, and the auxiliary valve 1018 thereby introducing the SiH.sub.4 gas, H.sub.2 gas, AlCl.sub.3 /He gas and Mg(C.sub.5 H.sub.5) gas through the gas discharge aperture 1009 of a gas introduction pipe 1008 to the inside of the deposition chamber 1001. In this case, the gas flow rates were controlled by the respective mass flow controllers 1021, 1022, 1027 and 1028 such that the gas flow rates were set to 50 SCCM for SiH.sub.4, 10 SCCM for H.sub.2 gas, 120 SCCM for AlCl.sub.3 /He and 10 SCCM for Mg(C.sub.5 H.sub.5).sub.2. The pressure in the deposition chamber 1101 was controlled to 0.4 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced to the inside of the deposition chamber 1001 by way of an RF matching box 1012 while setting the power of RF power source (not illustrated) to 5 mW/cm.sup.3, to cause RF glow discharge, thereby starting the formation of the lower layer on the aluminum support. The mass flow controllers 1021, 1022, 1027 and 1028 were adjusted during formation of the lower layer such that the SiH.sub.4 gas flow remains at a constant rate of 50 SCCM the H.sub.2 gas flow rate was increased at a constant ratio from 10 SCCM to 200 SCCM, the AlCl.sub.3 /He gas flow rate was decreased at a constant ratio from 120 SCCM to 40 SCCM and Mg(C.sub.5 H.sub.5).sub.2 /He gas flow remains at a constant rate of 10 SCCM. Then, when the lower layer of 0.05 um thickness was formed, the RF glow discharge was stopped and the entrance of the gas to the inside of the deposition chamber 1001 is interrupted by closing the flow-out valves 1041, 1042, 1047 and 1048, and the auxiliary valve 1018, to complete the formation of the lower layer.
Then, for forming the first layer region of the upper layer, the flow-out valves 1041, 1042 and 1046, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas, H.sub.2 gas and NO gas through the gas discharge aperture 1009 of the gas introduction pipe 1008 into the deposition chamber 1001. In this case, respective mass flow controllers 1021, 1022 and 1026 were adjusted so that the SiH.sub.4 gas flow rate was 100 SCCM, H.sub.2 gas flow rate was 100 SCCM and NO gas flow rate was 30 SCCM. The pressure in the deposition chamber 1001 was controlled to 0.35 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced into the deposition chamber 1001 through a radio frequency matching box 1012 while setting the power of RF power source (not illustrated) to 10 mW/cm.sup.3, to cause RF glow discharge and start the formation of the first layer region of the upper layer over the lower layer. Then, when the first layer region of the upper layer with 3 um thickness was formed, the RF glow discharge was stopped and the flow of the gas into the deposition chamber 1001 was interrupted by closing the flow-out valves 1041, 1042 and 1046, and the auxiliary valve 1018, thereby completing the formation of the first layer region of the upper layer.
Then, for forming the second layer region of the upper layer, the flow-out valves 1041 and 1042, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas and H.sub.2 gas through the gas discharge aperture 1009 of the gas introduction pipe 1008 into the deposition chamber 1001. In this case, respective mass flow controllers 1021 and 1022 were adjusted so that the SiH.sub.4 gas flow rate was 300 SCCM and H.sub.2 flow rate was 300 SCCM. The pressure in the deposition chamber 1001 was controlled to 0.5 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced into the deposition chamber 1001 through the radio frequency matching box 1012 while setting the power of the RF power source (not illustrated) to 15 mW/cm.sup.3, to cause the RF glow discharge and start the formation of the second layer region on the first layer region of the upper layer. Then, when the second layer region of the upper layer with 20 um thickness was formed, the RF glow discharge was stopped and the flow of the gas into the deposition chamber 1001 was interrupted by closing the flowout valves 1041 and 1042, and the auxiliary valve 1018, thereby completing the formation of the second layer region of the upper layer.
Then, for forming the third layer region of the upper layer, the flow-out valves 1041 and 1043, and the auxiliary valve 1018 were gradually opened to flow SiH.sub.4 gas and CH.sub.4 gas through the gas discharge aperture 1009 of the gas introduction pipe 1008 into the deposition chamber 1001. In this case, respective mass flow controllers 1021 and 1023 were adjusted so that the SiH.sub.4 gas flow rate was 50 SCCM and CH.sub.4 flow rate was 500 SCCM. The pressure in the deposition chamber 1001 was controlled to 0.4 Torr by adjusting the opening of the main valve 1016 while observing the vacuum meter 1017. Then, RF power was introduced into the deposition chamber 1001 through the radio frequency matching box 1012 while setting the power of RF power source (not illustrated) to 10 mW/cm.sup.3, to cause the RF glow discharge and start the formation of the third layer region on the second layer region of the upper layer. Then, when the third layer region of the upper layer with 0.5 um thickness was formed, the RF glow discharge was stopped and the flow of the gas into the deposition chamber 1001 was interrupted by closing the flow-out valves 1041 and 1043, and the auxiliary valve 1018, thereby completing the formation of the third layer region of the upper layer.
The conditions for preparing the light receiving member for use in electrophotography described above are shown in Table 231.
It will be apparent that all of the flow-out valves other than those required for forming respective layers were completely closed and, for avoiding the respective gases from remaining in the deposition chamber 1001 and in the pipeways from the flow-out valves 1041-1048 to the deposition chamber 1001, the flow-out valves 1041-1048 were closed, the auxiliary valve 1018 was opened and, further, the main valve was fully opened thereby evacuating the inside of the system once to a high vacuum degree as required.
Further, for forming the layer uniformly during this layer formation, the cylindrical aluminum support 1005 was rotated at a desired speed by a driving device not illustrated.
COMPARATIVE EXAMPLE 6
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 236 except for not using H.sub.2 gas and Mg(C.sub.5 H.sub.5).sub.2 /H.sub.2 gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electrophotography are shown in Table 232.
The light receiving members for use in electrophotography thus prepared in Example 236 and Comparative Example 6 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristics with voltage withstanding property in that no image defects were formed even if a high voltage wa applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 236 was less than 1/3 of that of the light receiving member for use in electrophotography in Comparative Example 6. In addition, for comparing the "coarse image", when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 236 was less than 1/4 for that of the light receiving member for use in electrophotography in Comparative Example 6 and the light receiving member for use in electrophotography of Example 236 was excellent over the light receiving member for use in Electrophotography of Comparative Example 6 in view of the visual observation.
In addition, for comparing the occurrerce of image defects and the peeling of the light receiving layer due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, when stainless steel balls of 3.5 mm diameter were fallen freely from the vertical height of 30 cm above the surface of the light receiving member for use in electrophotography and abutted against the surface of the light receiving member for use in electrophotography, to thereby measure the frequency that cracks occurred to the light receiving layer, it was found that the rate of occurrence in the light receiving member for use in electrophotography of Example 236 was less than 1/4 for that in the light receiving member for use in electrophotography of Comparative Example 6.
When the lower layer of the light receiving member for use in electrophotography of Example 236 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
As has been described above, the light receiving member for use in electrophotography of Example 236 was superior to the light receiving member for use in electrophotography of Comparative Example 6.
EXAMPLE 237
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer, under the preparation conditions shown in Table 233 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 238
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by not using the CH.sub.4 gas in the upper layer of Example 236, under the preparation conditions shown in Table 234 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 239
A light receiving member for use in electrophotography was prepared in the same manner as in Example 181 by further using not illustrated SiF.sub.4 gas (99.9999% purity), not illustrated He gas (99.999% purity) and not illustrated N.sub.2 gas in Example 236, under the preparation conditions shown in Table 235 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 240
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by replacing GeH.sub.4 gas cylinder with Ar gas (99.9999% purity) cylinder, replacing NO gas cylinder with NH.sub.3 gas (99.999% purity) cylinder, replacing B.sub.2 H.sub.6 /H.sub.2 gas cylinder with H.sub.2 -diluted PH.sub.3 gas (99.999% purity, hereinafter simply referred to as "PH.sub.3 /H.sub.2 gas") purity, hereinafter simply referred to as PH.sub.3 /H.sub.2) cylinder, replacing the NO gas cylinder with NH.sub.3 gas (99.999% purity) cylinder in Example 236, under the preparation conditions shown in Table 236 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 241
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas, not illustrated PH.sub.3 /H.sub.2 gas, not illustrated C.sub.2 H.sub.2 gas and not illustrated SiF.sub.4 gas, under the preparation conditions shown in Table 237 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 242
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by replacing GeH.sub.4 gas cylinder with SiF.sub.4 gas (99.999% purity) cylinder, and further using NO gas, not illustrated PH.sub.3 /H.sub.2 gas, B.sub.2 H.sub.6 /H.sub.2 gas and Si/F.sub.4 gas, under the preparation conditions shown in Table 238 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 243
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas, not illustrated H.sub.2 S (99.9% purity), not illustrated PH.sub.3 /H.sub.2 gas and not illustrated N.sub.2 gas, under the preparation conditions shown in Table 239, and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 244
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 replacing the CH.sub.4 gas cylinder with C.sub.2 H.sub.2 gas (99.999% purity) cylinder in Example 236, under the preparation conditions shown in Table 240 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 245
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by replacing the B.sub.2 H.sub.6 /H.sub.2 gas cylinder with BF.sub.3 gas diluted H.sub.2 (99.999% purity, hereinafter simply referred to as BF.sub.3 /H.sub.2) cylinder, and replacing the NO gas cylinder with N.sub.2 gas and using H.sub.2 S gas from a not illustrated cylinder in Example 236, under the preparation conditions shown in Table 241, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 181.
EXAMPLE 246
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by replacing the NO gas cylinder with a NH.sub.3 gas (99.999% purity) cylinder, replacing B.sub.2 H.sub.6 /H.sub.2 gas cylinder with PH.sub.3 /H.sub.2 gas cylinder in Example 236, under the preparation conditions shown in Table 242, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 247
A light receiving member for use in electrophotography was prepared in the same manner as in Example 241 by further using H.sub.2 -diluted PF.sub.5 gas from a not illustrated cylinder (99.999% purity, hereinafter simply referred to as "PF.sub.3 /H.sub.2 gas"), SiF.sub.4 gas and B.sub.2 H.sub.6 /H.sub.2 gas, under the preparation conditions shown in Table 243, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 241.
EXAMPLE 248
A light receiving member for use in electrophotography was prepared in the same manner as in Example 244 by further using Si.sub.2 H.sub.6 (99.99% purity), Si.sub.2 F.sub.6 (99199% purity) gas and PH.sub.3 /H.sub.3 gas, under the preparation conditions shown in Table 244, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 244.
EXAMPLE 249
A light receiving member for use in electrophotography was prepared in the same manner as in Example 246 by further using B.sub.2 H.sub.6 /H.sub.2 gas from a not illustrated cylinder, PH.sub.5 /H.sub.5 gas and Si.sub.2 F.sub.6 gas, under the preparation conditions shown in Table 245 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 246.
EXAMPLE 250
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas and GeH.sub.4 gas in the upper layer, under the preparation conditions shown in Table 246 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 251
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 247, under the preparation conditions shown in Table 193 and, when evaluated in the same manner as in Example 236, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 252
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 236, under the preparation conditions shown in Table 248 and, when evaluated in the same manner as in Example 236 except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 253
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 236 under the preparation conditions shown in Table 249 and, when evaluated in the same manner as in Example 236, except for using an electrophotographic apparatus, i.e., a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 254
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 236, under the preparation conditions shown in Table 250, and evaluated in the same manner as in Example 236, except for using an electrophotographic apparatus, manufactured for experimental use and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 255
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 251 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 251 and further machined into a cross sectional shape of: a=25 um, b=0.8 um as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 251, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 251.
EXAMPLE 256
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 251 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of: c=50 um and d=1 um as shown in FIG. 39 and, when evaluated in the same manner as in Example 251, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 251.
EXAMPLE 257
A light receiving member for use in electrophotography having an upper layer comprising poly-Si(H, X) was prepared in the same manner as in Example 244 by using a cylindrical aluminum support heated to a temperature of 500.degree. C., under the preparation conditions as shown in Table 251 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 244.
EXAMPLE 258
A light receiving member for use in electrophotography was prepared by microwave glow discharge decomposition in the same manner as in Example 23 by further using SiF.sub.4 gas, NO gas, Mg(C.sub.5 H.sub.5).sub.2 /He gas and B.sub.2 H.sub.6 /H.sub.2 gas upon forming the lower layer in Example 23, under the same preparation conditions as shown in Table 252.
When the light receiving member for use in electrophotography was evaluated in the same manner as in Example 236. satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
When the lower layer of the light receiving member for use in electrophotography of Example 258 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
EXAMPLE 259
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas (99.9999% purity) cylinder, and further using B.sub.2 H.sub.6 /H.sub.2 gas Si.sub.2 F.sub.6 gas in Example 236, under the preparation conditions shown in Table 253 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 260
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas, N.sub.2 gas, under the preparation conditions shown in Table 254 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 261
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by using SnH.sub.4 gas (99.99% purity) from a not illustrated cylinder, PF.sub.3 /H.sub.2 gas, Si.sub.2 /F.sub.6 gas and replacing NO gas cylinder with NH.sub.3 gas (99.999%, purity) cylinder in Example 236, under the preparation conditions shown in Table 255 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 262
A light receiving member for use in electrophotography was prepared in the same manner as in Example 241 by replacing N.sub.2 gas cylinder with SiF.sub.4 gas and further using PF.sub.5 H.sub.2 gas from a not illustrated cylinder, SiF.sub.4 gas in Example 236, under the preparation conditions shown in Table 256 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 241.
EXAMPLE 263
A light receiving member for use in electrophotography was prepared in the same manner as in Example 244 by further using Si.sub.2 H.sub.6 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 257 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 244.
EXAMPLE 264
A light receiving member for use in electrophotography was prepared in the same manner as in Example 246 by further using B.sub.2 H.sub.6 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 258 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 246.
EXAMPLE 265
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas and He gas from a not illustrated cylinder, under the preparation conditions shown in Table 259 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 266
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas, SiF.sub.4 gas from a not illustrated cylinder, C.sub.2 H.sub.2 gas and PH.sub.3 /H.sub.2, under the preparation conditions shown in Table 266 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 267
A light receiving member for use in electrophotography was prepared in the same manner as in Example 241, under the preparation conditions shown in Table 261 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 241.
EXAMPLE 268
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using B.sub.2 H.sub.6 /H.sub.2 gas, C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 262 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 269
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, PH.sub.3 /H.sub.2 gas, under the preparation conditions shown in Table 262 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 270
A light receiving member for use in electrophotography was prepared in the same manner as in Example 236 by further using GeH.sub.4 gas, H.sub.2 S gas from a not illustrated cylinder, PH.sub.3 /H.sub.2 gas, C.sub.2 H.sub.2 gas and SiF.sub.4, under the preparation conditions shown in Table 264 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 271
A light receiving member for use in electrophotography was prepared in the same manner as in Example 244 by further using SiH.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 265 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 244.
EXAMPLE 272
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 266 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 273
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 267 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 274
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271 by further using BF.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 268 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 275
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 269 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 276
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 270 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 277
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 271 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 278
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 272 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 279
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 273 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 280
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271 by further using PH.sub.3 gas from a not illustrated cylinder and Si.sub.2 F.sub.6 gas, under preparation conditions shown in Table 274 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 281
A light receiving member for use in electrophotography was prepared in the same manner as in Example 280, under the preparation conditions shown in Table 275 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 280.
EXAMPLE 282
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271 by using H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 276 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 283
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 277 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 284
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 278 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 285
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271 by using NH.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 279 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 286
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271 by using N.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 280 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 287
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 281 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 288
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 282 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 271.
EXAMPLE 289
A light receiving member for use in electrophotography
was prepared in the same manner as in Example 280, under the preparation conditions shown in Table 283 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 280.
EXAMPLE 290
A light receiving member for use in electrophotography was prepared in the same manner as in Example 271, under the preparation conditions shown in Table 284 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 71.
EXAMPLE 291
A lower layer of a light receiving member for use in electrophotography according to this invention was formed by RF sputtering method and the upper layer thereof was formed RF glow discharge decomposition.
FIG. 42 shows an apparatus for producing the light receiving member for use in electrophotography by the RF sputtering, comprising a raw material gas supply device 1500 and a deposition device 1501.
In the figure, a target 1045 is composed of Si, Al and Mg as the raw material for forming the lower layer, in which the mixing ratio for the atoms is varied such that a desired profile is obtained across the thickness for each of the atoms.
In the figure, raw material gases for forming the lower layer in this invention were tightly sealed in gas cylinders 1408, 1409 and 1410, in which the cylinder 1408 was for SiH.sub.4 gas (99.99% purity), the cylinder 1409 was for H.sub.2 gas (99.9999%) and the cylinder 1076 was for Ar gas (99.9999% purity).
In the figure, a cylindrical aluminum support 1402 has an outer diameter of 108 mm and a mirror-finished surface.
At first, in the same manner as in Example 1, the inside of the deposition chamber 1401 and gas pipeways was evacuated till the pressure of the deposition chamber 1401 was reduced to 1.times.10.sup.-6 Torr.
Then, in the same manner as in Example 1, the respective gases were introduced into the mass flow controllers 1412-1414.
The temperature of the cylindrical aluminum support 1402 disposed in the deposition chamber 1401 was heated to 250.degree. C. by a heater not illustrated.
After completing the preparation for the film formation as described above, the lower layer was formed on the cylindrical aluminum support 1402.
The lower layer was formed by gradually opening the flow-out valves 1420, 1421 and 1422, and the auxiliary valve 1432 thereby introducing the SiH.sub.4 gas, H.sub.2 gas and Ar gas to the inside of the deposition chamber 1401. In this case, the gas flow rates were controlled by the respective mass flow controllers 1412, 1413 and 1414 such that the gas flow rates were set to 50 SCCM for SiH.sub.4, 10 SCCM for H.sub.2 gas, and 200 SCCM for Ar gas. The pressure in the deposition chamber 1401 was controlled to 0.01 Torr by adjusting the opening of the main valve 1407 while observing the vacuum meter 1435. Then, RF power was introduced between the target 1405 and the aluminum support 1402 by way of an RF matching box 1433 while setting the power of an RF power source (not illustrated) to 1 mW/cm.sup.3, thereby starting the formation of the lower layer on the cylindrical aluminum support. The mass flow controllers 1412, 1413 and 1414 were adjusted during formation of the lower layer such that the SiH.sub.4 gas flow remained at a constant rate of 50 SCCM, the H.sub.2 gas flow rate was increased at a constant ratio from 5 SCCM to 100 SCCM and the Ar gas flow rate remained at a constant ratio of 204 SCCM. Then, when the lower layer of 0.05 um thickness was formed, the RF glow discharge was stopped and the entrance of the gas to the inside of the deposition chamber 1401 was interrupted by closing the flow-out valves 1420, 1421 and 1423 and the auxiliary valve 1432, to complete the formation of the lower layer.
The cylindrical aluminum support 1402 was rotated at a desired speed by a driving device not illustrated during formation of the lower layer for making the layer formation uniform.
Then, a light receiving member for use in electrophotography was prepared in the same manner as in Example 265 under the preparation conditions shown in Table 285 by using the device illustrated in FIG. 37 upon forming the upper layer. When the same evaluation was applied, satisfactory improvement was obtained to dots, coarse image and layer peeling in the same manner as in Example 265.
When the lower layer of the light receiving member for use in electrophotography of Example 291 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
EXAMPLE 292
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 under the preparation conditions shown in Table 286 by further using Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He gas upon forming the lower layer in Example 1.
COMPARATIVE EXAMPLE 7
A light receiving member for use in electrophotography was prepared under the same preparation conditions as those in Example 292 except for not using H.sub.2 gas and Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He gas upon forming the lower layer. The conditions for preparing the light receiving member for use in electrophotography are shown in Table 287.
The light receiving members for use in electrophotography thus prepared in Example 292 and Comparative Example 7 were set respectively to an electrophotographic apparatus, i.e., a copying machine NP-7550 manufactured by Canon Inc. and modified for experimental use and, when several electrophotographic properties were checked under various conditions, it was found that both of them had outstanding characteristic with voltage withstanding property in that no image defects were formed even if a high voltage was applied to the light receiving member for use in electrophotography by highly intensive corona discharge or frictional discharge by means of a cleaning agent.
Then, when the number of dots as the image characteristics were compared, it was found that the number of dots, particularly, the number of dots with less than 0.1 mm diameter of the light receiving member for use in electrophotography of Example 292 was less than 1/4 of that of the light receiving member for use in electrophotography in Comparative Example 7. In addition, for comparing the "coarse image", when the image density was measured for circular regions each of 0.05 mm diameter assumed as one unit at 100 points and the scattering in the image density, was evaluated, it was found that the scattering in the light receiving member for use in electrophotography of Example 292 was less than 1/5 for that of the light receiving member for use in electrophotography in Comparative Example 7 and the light receiving member for use in electrophotography of Example 292 was excellent over the light receiving member for use in Electrophotography of Comparative Example 7 in view of the visual observation.
In addition, for comparing the occurrence of image defects and the peeling of the light receiving layer due to impactive mechanical pressure applied for a relatively short period of time to the light receiving member for use in electrophotography, when stainless steel balls of 3.5 mm diameter were fallen freely from the vertical height of 30 cm above the surface of the light receiving member for use in electrophotography and abutted against the surface of the light receiving member for use in electrophotography, to thereby measure the frequency that cracks occurred to the light receiving layer, it was found that the rate of occurrence in the light receiving member for use in electrophotography of Example 292 was less than 1/5 for that in the light receiving member for use in electrophotography of Comparative Example 7.
When the lower layer of the light receiving member for use in electrophotography of Example 292 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
As has been described above, the light receiving member for use in electrophotography of Example 292 was superior to the light receiving member for use in electrophotography of Comparative Example 6.
EXAMPLE 293
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using B.sub.2 H.sub.6 /H.sub.2 gas and NO gas and changing the way of varying the AlCl.sub.3 /He gas flow rate in the lower layer, under the preparation conditions shown in Table 288, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 294
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using Mg(C.sub.5 H.sub.5) gas diluted with He gas (hereinafter simply referred to as "Mg(C.sub.5 H.sub.5).sub.2 /He") from a not illustrated sealed vessel and GeH.sub.4 gas in the lower layer, and He gas from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 289 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 295
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by further using Mg(C.sub.5 H.sub.5).sub.2 /He gas from a not illustrated sealed vessel, CH.sub.4 gas, B.sub.2 H.sub.6 /H.sub.2 gas, NO gas, SiF.sub.4 gas (99.999% purity) from a not illustrated cylinder, N.sub.2 gas from a not illustrated cylinder and He gas, under the preparation conditions shown in Table 290 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 296
A light receiving member for use in electrophotography was prepared in the same manner as in Example 291 by replacing H.sub.2 gas cylinder with Ar gas cylinder (99.9999% purity), CH.sub.4 gas cylinder with NH.sub.3 gas cylinder (99.999% purity), and further using SiV.sub.4 gas in the upper layer, under the preparation conditions shown in Table 291 and, when evaluated in the same manner, satisfactory improvement, was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 297
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using CH.sub.4 gas and B.sub.2 H.sub.6 /H.sub.2 gas in the lower layer, and PH.sub.3 /H.sub.2 gas (99.999% purity) from a not illustrated cylinder in the upper layer, under the preparation conditions shown in Table 292, and when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 298
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing NO gas cylinder with SiF.sub.4 gas cylinder in the lower layer, and further using PH.sub.3 /H.sub.2 from a not illustrated cylinder in the upper layer in Example 292, under the preparation conditions shown in Table 298 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 299
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using Mg(C.sub.5 H.sub.5).sub.2 /He gas from a not illustrated sealed vessel in the lower layer, and PH.sub.3 /H.sub.2 gas from a not illustrated cylinder and N.sub.2 gas in the upper layer, under the preparation conditions shown in Table 294 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 300
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by further using CH.sub.4 gas and B.sub.2 H.sub.6 /H.sub.2 gas in the lower layer, and replacing CH.sub.4 gas cylinder with C.sub.2 H.sub.2 gas (99.9999% purity) cylinder in the upper layer, under the preparation conditions shown in Table 295 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 301
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using Mg(C.sub.5 H.sub.5).sub.2 /He gas from a not illustrated sealed vessel, replacing B.sub.2 H.sub.6 gas cylinder with PH.sub.3 /H.sub.2 gas cylinder and further using SiF.sub.4 gas from a not illustrated cylinder, under the preparation conditions shown in Table 296 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 302
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing CH.sub.4 gas cylinder with NH.sub.3 gas (99.999% purity) cylinder in Example 292, and using NH.sub.3 gas in the upper layer, under the preparation conditions shown in Table 297, and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 303
A light receiving member for use in electrophotography was prepared in the same manner as in Example 297 by using CH.sub.4 gas in the lower layer, and further using SiF.sub.4 gas in the upper layer, under the preparation conditions shown in Table 298 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 297.
EXAMPLE 304
A light receiving member for use in electrophotography was prepared in the same manner as in Example 300 by replacing CH.sub.4 gas with C.sub.2 H.sub.2 gas, using PH.sub.3 /H.sub.2 gas from a not illustrated cylinder in the lower layer, and further using Si.sub.2 F.sub.6 gas (99.99% purity) cylinder from a not illustrated cylinder and Si.sub.2 F.sub.6 gas (99.99 a% purity) in the upper layer, under the preparation conditions shown in Table 299 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 300.
EXAMPLE 305
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using Si.sub.2 F.sub.6 gas, PH.sub.3 gas and NH.sub.3 gas from a not illustrated cylinder, under the preparation conditions shown in Table 300, and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 306
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292, under the preparation conditions shown in Table 301 and, when evaluated in the same manner, satisfactory improvement was, obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 307
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by changing the outer diameter of the cylindrical aluminum support to 80 mm in Example 292, under the preparation conditions shown in Table 302 and, when evaluated in the same manner as in Example 292, except for using an electrophotographic apparatus, i.e., a copying machine NP-9030 manufactured by Canon Inc, and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 308
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by changing the outer diameter of the cylindrical aluminum support to 60 mm in Example 292, under the preparation conditions shown in Table 303 and, when evaluated in the same manner as in Example 292, except for using an electrophotographic apparatus, i.e., a copying machine NP-150Z manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 309
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by changing the outer diameter of the cylindrical aluminum support to 30 mm in Example 294, under the preparation conditions shown in Table 304 and, when evaluated in the same manner as in Example 236, except for using an electrophotographic apparatus, PG,235 i.e., a copying machine FC-5 manufactured by Canon Inc. and modified for the experimental use, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 310
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by changing the outer diameter of the cylindrical aluminum support to 15 mm in Example 292, under the preparation conditions shown in Table 305, and evaluated in the same manner as in Example 292, except for using an electrophotographic apparatus, manufactured for experimental use and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 311
A light sensitive member for use in electrophotography was prepared, under the same preparation conditions as those in Example 307 by using a cylindrical aluminum support applied with mirror-finishing fabrication in Example 307 and further machined into a cross sectional shape of: a=25 .mu.m, b=0.8 .mu.m as shown in FIG. 38 by a diamond point tool and, when evaluated in the same manner as in Example 207, satisfactory improvement was obtained to, the dots, coarse image and peeling in the same manner as in Example 307.
EXAMPLE 312
A light receiving member for use in electrophotography was prepared, under the same preparation conditions as those in Example 307 using a cylindrical aluminum support applied with mirror-finish fabrication and subsequently applied with a so-called surface dimpling of causing a number of hit pits to the surface of the cylindrical aluminum support by the exposure to a plurality of dropping bearing balls to form into a cross sectional shape of: c=50 .mu.m and d=1 .mu.m as shown in FIG. 39 and, when evaluated in the same manner as in Example 307, satisfactory improvement was be obtained for the dots, coarse image and peeling in the same as in Example 307.
EXAMPLE 313
A light receiving member for use in electrophotography having an upper layer comprising poly-Si(H, X) was prepared in the same manner as in Example 300 by replacing CH.sub.4 gas with C.sub.2 h.sub.2 gas and using a cylindrical aluminum support heated to a temperature of 500.degree. C., under the preparation conditions as shown in Table 306 and, when evaluated in the same manner, satisfactory improvement was obtained to dots, coarse image and peeling in the same manner as in Example 300.
EXAMPLE 314
A light receiving member for use in electrophotography was prepared by microwave glow discharge decomposition in the same manner as in Example 23 by further using Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)He gas, SiF.sub.4 gas, NO gas and B.sub.2 H.sub.6 gas upon forming the lower layer in Example 23, under the same preparation conditions as shown in Table 307.
When the light receiving member for use in electrophotography was evaluated in the same manner as in Example 292, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
When the lower layer of the light receiving member for use in electrophotography of Example 314 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
EXAMPLE 315
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing the CH.sub.4 gas cylinder with a C.sub.2 H.sub.2 gas cylinder in Example 292, under the preparation conditions shown in Table 308 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 316
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing B.sub.2 H.sub.6 /H.sub.2 gas cylinder with PF.sub.3 /H.sub.2 gas cylinder in Example 292, using CH.sub.4 gas in lower layer, and using SiF.sub.4 gas in the entire layer, under the preparation condition shown in Table 309 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 317
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing CH.sub.4 gas cylinder with NH.sub.3 gas cylinder, using SnH.sub.4 from a not illustrated cylinder, Mg(C.sub.5 H.sub.5).sub.2 /He gas from a not illustrated sealed vessel in Example 292, under the preparation conditions shown in Table 310 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 318
A light receiving member for use in electrophotography was prepared in the same manner as in Example 297 by replacing N.sub.2 gas cylinder with PF.sub.3 /H.sub.2 gas cylinder, and using SiF.sub.4 gas, under the preparation conditions shown in Table 311 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 241.
EXAMPLE 319
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing CH.sub.4 gas cylinder with C.sub.2 H.sub.2 gas cylinder, and further using Si.sub.2 H.sub.6 gas in the upper layer, under the preparation conditions shown in Table 312 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 320
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing CH.sub.4 gas cylinder with C.sub.2 H.sub.2 gas cylinder in Example 292, and further using PH.sub.3 /H.sub.2 gas from a nor illustrated gas cylinder in the upper layer, under the preparation conditions shown in Table 313 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 321
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by further using NO gas, B.sub.2 H.sub.6 /H.sub.2 gas, Mg(C.sub.5 H.sub.5).sub.2 /He gas in the lower layer, and replacing H.sub.2 gas with not illustrated He gas in the upper layer in Example 292, under the preparation conditions shown in Table 314 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 322
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by using SiF.sub.4 gas, CH.sub.4 gas, B.sub.2 H.sub.6 /H.sub.2 gas, NO gas, AlCl.sub.3 /He gas, Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He gas in the entire layer, and using PH.sub.3 /H.sub.2 gas in the upper layer, under the preparation conditions shown in Table 315 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 323
A light receiving member for use in electrophotography was prepared in the same manner as in Example 322, under the preparation conditions shown in Table 316 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 322.
EXAMPLE 324
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by further using C.sub.2 H.sub.2 gas, under the preparation conditions shown in Table 317 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 325
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by replacing C.sub.4 gas cylinder with C.sub.2 H.sub.2 2 gas cylinder, B.sub.2 H.sub.6 /H.sub.2 gas cylinder with PH.sub.3 /H.sub.2 gas cylinder in Example 292, under the preparation conditions shown in Table 318 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 326
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292 by further using H.sub.2 S gas (99.999% purity) from a not illustrated cylinder, under the preparation conditions shown in Table 319 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 327
A light receiving member for use in electrophotography was prepared in the same manner as in Example 322 by further using C.sub.2 H.sub.2 gas from a not illustrated cylinder, under the preparation conditions shown in Table 320 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 322.
EXAMPLE 328
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 321 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 329
A light receiving member for use in electrophotography was prepared in the same manner as in Example 322 by further using Mg(C.sub.5 H.sub.5).sub.2 /He gas from a not illustrated sealed vessel, under the preparation conditions shown in Table 322 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 322.
EXAMPLE 330
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 324 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327
EXAMPLE 331
A light receiving member for use in electrophotography was prepared in the same manner as in Example 329, under the preparation conditions shown in Table 324 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 329.
EXAMPLE 332
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 325 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 333
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 326 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 334
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 327 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 335
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 328 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 336
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327 by further using H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 329 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 236.
EXAMPLE 337
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 330 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 338
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327 by further using H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 327 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 339
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 332 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 340
A light receiving member for use in electrophotography was prepared in the same manner as in Example 329, under the preparation conditions shown in Table 333 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 329.
EXAMPLE 341
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327 by further using NH.sub.3 tas and H.sub.2 S gas from a not illustrated cylinder, under the preparation conditions shown in Table 327 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 342
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 335 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 343
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 336 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 344
A light receiving member for use in electrophotography was prepared in the same manner as in Example 329, under the preparation conditions shown in Table 337 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 329.
EXAMPLE 345
A light receiving member for use in electrophotography was prepared in the same manner as in Example 329 by further using Mg(C.sub.5 H.sub.5).sub.2 /He gas, under the preparation conditions shown in Table 338 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 329.
EXAMPLE 346
A light receiving member for use in electrophotography was prepared in the same manner as in Example 327, under the preparation conditions shown in Table 339 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 327.
EXAMPLE 347
A light receiving member for use in electrophotography was prepared in the same manner as in Example 292, under the preparation conditions shown in Table 340 and, when evaluated in the same manner, satisfactory improvement was obtained to the dots, coarse image and peeling in the same manner as in Example 292.
EXAMPLE 348
The lower layer was formed under the preparation conditions shown in Table 341 in the same manner as in Example 292 except for using a target composed of Si, Al, Cu instead of Si, Al, Mg upon forming the lower layer in Example 291.
Then, a light receiving member for use in electrophotography was prepared in the same manner as in Example 292 under the preparing conditions shown in a Table 341 by using the device shown in FIG. 37 for forming the upper layer. When the evaluation was conducted in the same manner, satisfactory improvement to dots end layer peeling was obtained in the same manner as in Example 292.
When the lower layer of the light receiving member for use in electrophotography of Example 348 was analyzed by using SIMS, it was found that the content of silicon atoms, hydrogen atoms and aluminum atoms in the direction of the film thickness was varied as desired.
EXAMPLE 349
A light receiving member for use in electrophotography was prepared in the same manner as in Example 1 under the preparation conditions shown in Table 225 by further using NaNH.sub.2 /He gas upon forming the lower layer in Example 1.
COMPARATIVE EXAMPLE 8
A light receiving member for use in electrophotography was prepared under the same conditions in Example 349 except for not using H.sub.2 gas upon forming the lower layer.
The orifice for the content of atoms across the layer thickness near the lower layer of the light receiving member for use in electrophotography in Example 349 and Comparative Example 8 thus prepared was analyzed by using SIMS (secondary ion mass analyzing device, manufactured by Kameka: IMS-3F). The results are shown in FIG. 43(a), (b). In FIG. 43, the abscissa represents the measured time corresponding to the position across the layer thickness, and the ordinate represents the content for each of the atoms by relative values.
FIG. 4(a) shows the profile for the content of atoms across the layer thickness in Example 349 in which aluminum atoms were distributed more on the side of the support, while silicon atoms, hydrogen atoms are distributed more on the side of the upper layer.
FIG. 4(b) shows the profile for the content of atoms across the layer thickness in Comparative Example 8 in which aluminum atoms are distributed more on the side of the support, silicon atoms were distributed more on the side of the upper layer and hydrogen atoms were distributed uniformly.
Then, the light receiving members for use photography thus prepared in Example 349 and Comparative Example 8 were set respectively to electrophotographic apparatus, that is, a copying machine NP-7550 manufactured by Cannon Inc. and modified for experimental use and several electrophotographic properties were checked under various conditions.
The light receiving member for use in electrophotography was rotated for 1000 turns while using a magnet roller as a cleaning roller, coating positive toners on the magnet roller while keeping all of the charging devices not operated. Then, a black original was prepared by an ordinary electrophotographic process and as a result of measuring the number of dots generated, it was found that the light receiving member for use in electrophotography of Example 349 showed the number of dots less than 1/3 for that of the light receiving member for use in electrophotography in Comparative Example 8.
In addition, the light receiving member for use in electrophotography was rotated by 20 turns in a state where coagulated paper dusts were placed on the grits of a separation charger to cause abnormal discharge. Then, after removing the paper dusts, images were prepared by using a black original and, as a result of measuring the number of dots, it was found that the number of dots in the light receiving member for use in electrophotography of Example 349 was less than 2/3 for that of the light receiving member for use in electrophotography in Comparative Example 8.
Further, a roll made of high density polyethylene having about 32 mm.phi. diameter and 5 mm thickness was urged to the light receiving member for use in electrophotography under the pressure of 2 kg and then the light receiving member for use in electrophotography was rotated for 500,000 turns. Then, as a result of comparing the number of peeling visually in the light receiving layer, it was found that the number of peeling for the light receiving member for use in Example 349 was less than 1/2 for that of the light receiving member for use in electrophotography in Comparative Example 8.
As has been described above, the light receiving member for use in electrophotography in Example 349 was superior from overall point of view to the light receiving member for use in electrophotography in Comparative Example 8.
EXAMPLE 350
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 342 except for changing the gas flow rate of Al(CH.sub.3).sub.3 /He to the value shown in Table 343.
COMPARATIVE EXAMPLE 9
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 342 except for changing the gas flow rate of Al(CH.sub.3).sub.3 /He to the value shown in Table 343.
A roll made of high density polyethylene was urged to the light receiving members for use in electrophotography thus prepared in Example 350 and Comparative Example 9 in the same manner as in Example 349 and the number of layer peeling was compared. The result is shown in Table 343 assuming the number of layer peeling to 1 in the layer of the light receiving member for use in electrophotography of Example 349. Further, the content of aluminum atoms near the upper portion of the lower layer was analyzed by using SIMS. The result is shown in Table 343.
As shown by the result in Table 343, the number of layer peeling was low and satisfactory result was obtained in the region where the content of the aluminum atoms near the upper portion of the lower layer is greater than 20 atom %.
EXAMPLE 351
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 342 except for changing the temperature for the support at a constant rate from 350.degree. C. to 250.degree. C. and using Y(Oi--C.sub.3 H.sub.7).sub.3 instead of NaNH.sub.2 during formation of the lower layer. When the evaluation was conducted in the same manner, satisfactory improvement to dots and layer peeling was obtained in the same manner as in Example 349.
EXAMPLE 352
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 342 except for changing RF power at a constant rate from 50 mW/cm.sup.3 to 5 mW/cm.sup.3 and using Mn(CH.sub.3)(CO).sub.5 instead of NaNH.sub.2 during formation of the lower layer. When the evaluation was conducted in the same manner, satisfactory improvement to dots and layer peeling was obtained in the same manner as in Example 349.
EXAMPLE 353
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 344 except for using Zn(C.sub.2 H.sub.5).sub.2 instead of NaNH.sub.2 and, further, adding the raw material gas shown in Table 342. When the evaluation was conducted in the same manner, satisfactory improvement to dots and layer peeling was obtained in the same manner as in Example 349.
EXAMPLE 354
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 342 except for changing the outer diameter of the cylindrical aluminum support to 30 mm and changing the gas flow rate and RF power shown in Table 342 to 1/3 respectively. When the evaluation was conducted in the same manner, satisfactory improvement to dots and layer peeling was obtained in the same manner as in Example 349.
EXAMPLE 355
A light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in Table 345. When the evaluation was conducted in the same manner, satisfactory improvement to dots and layer peeling was obtained in the same manner as in Example 349.
EXAMPLE 356
A light receiving member for use in electrophotography was prepared by the microwave glow discharge decomposition in the same manner as in Example 23 under the preparing conditions shown in Table 346 by further using SiF.sub.4 gas and NaNH.sub.2 /He gas upon forming the lower layer in Example 23.
When the same evaluation as in Example 349 was conducted for the light receiving member for use in electrophotography, satisfactory improvement was obtained to dots and layer peeling in the same manner as in Example 349.
The profile for the content of atoms across the layer thickness near the lower layer wa analyzed by using SIMS in the same manner as in Example 349 and the result is shown in FIG. 43(c).
It was found that aluminum atoms, silicon atoms and hydrogen atoms are distributed in the same manner as in Example 349.
EXAMPLE 357
The lower layer was formed under the preparing conditions shown in Table 347 in the same manner as in Example 291 except for using a target composed of Si, Al, Mn instead of a target composed of Si, Al, Mg upon forming the lower layer in Example 291.
Then, a light receiving member for use in electrophotography was prepared in the same manner as in Example 349 under the preparing conditions shown in 342 by using the device shown in FIG. 37 for forming the upper layer. When the evaluation was conducted in the same manner, satisfactory improvement to dots and layer peeling was obtained in the same manner as in Example 349.
The profile for the content of atoms across the layer thickness near the lower layer was analyzed by using SIMS in the manner as in Example 349 and the results is shown in FIG. 43(d).
It was found that aluminum atoms, silicon atoms and hydrogen atoms were distributed in the same manner as in Example 349.
In the following Tables 1 to 346, the mark "*" means increase of a flow rate at constant proportion;
the mark "**" means decrease of a flow rate at constant proportion;
the term "S-side" means substrate side;
the term "UL-side" means upper layer side;
the term "LL-side" means lower layer side;
the term "U.1st LR-side" means 1st layer region side of the upper layer;
the term "U.2nd LR-side" means 2nd layer region side of the upper layer;
the term "U.3rd LR-side" means 3rd layer region side of the upper layer;
the term "U.4th LR-side" means 4th layer region side of the upper layer; and
the term "FS-side" means free surface side of the upper layer.
TABLE 1__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 2__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 3__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 4__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5.fwdarw.200* .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 5__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region B.sub.2 H.sub.6 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 NO 0.1 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 N.sub.2 1 B.sub.2 H.sub.6 0.3 ppm Al.sub.2 Cl.sub.3 /He 0.5 SiF.sub.4 0.5__________________________________________________________________________
TABLE 6__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 4 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region__________________________________________________________________________
TABLE 7__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 8__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20**Upper 1st SiH.sub.4 100 330 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 8000 ppm__________________________________________________________________________
TABLE 9__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 10__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 11__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 12__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 13__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 14__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 3rd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 15__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region PH.sub.3 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 16__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10.fwdarw.50* region H.sub.2 300 4th SiH.sub.4 100.fwdarw.40** 300 10 0.4 1 layer CH.sub.4 100.fwdarw.600* region__________________________________________________________________________
TABLE 17__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 85 300 9 0.35 3layer layer H.sub.2 90 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 9 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 18__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 70 300 8 0.35 3layer layer H.sub.2 80 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 8 2nd SiH.sub.4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.4 400 region__________________________________________________________________________
TABLE 19__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5**Upper 1st SiH.sub.4 55 300 7 0.35 3layer layer H.sub.2 70 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 7 2nd SiH.sub.4 150 300 10 0.4 20 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 20__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5**Upper 1st SiH.sub.4 45 300 6 0.35 3layer layer H.sub.2 60 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 5 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 21__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20**Upper 1st SiH.sub.4 180 500 22 0.4 4layer layer H.sub.2 1200 region B.sub.2 H.sub.6 (against SiH.sub.4) 700 ppm C.sub.2 H.sub.2 8 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 22__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 H.sub.2 20.fwdarw.500* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 400.fwdarw.80** (UL-side: 0.01 .mu.m) 80.fwdarw.50**Upper 1st SiH.sub.4 350 250 0.5 0.5 3layer layer H.sub.2 350 region B.sub.2 H.sub.6 (against SiH.sub.4) 600 ppm NO 13 SiF.sub.4 20 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 23__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region__________________________________________________________________________
TABLE 24__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 25__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 26__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 27__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 3rd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 28__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region PH.sub.3 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 29__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 N.sub.2 1__________________________________________________________________________
TABLE 30__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 31__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 PH.sub.3 0.3 ppm NO 0.1 CH.sub.4 1 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 32__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer B.sub.2 H.sub.6 (against SiH.sub.4) 40 ppm region C.sub.2 H.sub.2 15 H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 33__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer PH.sub.3 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer C.sub.2 H.sub.2 15 region H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 34__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.4 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 SiF.sub.4 0.5 NO 0.3 H.sub.2 S (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 0.5 2nd SiH.sub.4 100 300 15 0.5 3 layer H.sub.2 500 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm C.sub.2 H.sub.2 0.1 SiF.sub.4 0.2 NO 0.1 H.sub.2 S (against SiH.sub.4) 0.4 ppm AlCl.sub.3 /He 0.2 3rd SiH.sub.4 100 300 25 0.6 30 layer CH.sub.4 600 region H.sub.2 300 PH.sub.3 (against SiH.sub.4) 3000 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm SiF.sub.4 0.2 NO 0.2 H.sub.2 S (against SiH.sub.4) 0.8 ppm AlCl.sub.3 /He 0.1 4th SiH.sub.4 30 300 10 0.4 0.5 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 1 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm H.sub.2 S (against SiH.sub.4) 0.8 ppm SiF.sub.4 0.5 NO 0.6 AlCl.sub.3 /He 0.5__________________________________________________________________________
TABLE 35__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 10.fwdarw.200* AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 36__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 37__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.02 .mu.m) 10Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 38__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5.fwdarw.200* .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 39__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region B.sub.2 H.sub.6 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 NO 0.1 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 N.sub.2 1 B.sub.2 H.sub.6 0.3 ppm AlCl.sub.3 /He 0.5 SiF.sub.4 0.5__________________________________________________________________________
TABLE 40__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 4 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region__________________________________________________________________________
TABLE 41__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 42__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** PH.sub.3 (against SiH.sub.4) 60 ppmUpper 1st SiH.sub.4 100 330 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 8000 ppm__________________________________________________________________________
TABLE 43__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 60.fwdarw.100*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 44__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 45__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.150 ppm*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm* N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 46__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4) 5.fwdarw.200 ppm*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 47__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub. 4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 48__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 200 300 10 0.5 10 layer H.sub.2 200 region 3rd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 49__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub. 4) 50 ppm 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region PH.sub.3 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 50__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 80.fwdarw.150 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10.fwdarw.50* region H.sub.2 300 4th SiH.sub.4 100.fwdarw.40** 300 10 0.4 1 layer CH.sub.4 100.fwdarw.600* region__________________________________________________________________________
TABLE 51__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 70 ppmUpper 1st SiH.sub.4 85 300 9 0.35 3layer layer H.sub.2 90 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 9 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 52__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 70 ppmUpper 1st SiH.sub.4 70 300 8 0.35 3layer layer H.sub.2 80 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 8 2nd SiH.sub.4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.4 400 region__________________________________________________________________________
TABLE 53__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** B.sub.2 H.sub.6 (against SiH.sub.4) 70 ppmUpper 1st SiH.sub.4 55 300 7 0.35 3layer layer H.sub.2 70 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 7 2nd SiH.sub.4 150 300 10 0.4 20 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 54__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** B.sub.2 H.sub.6 (against SiH.sub.4) 70 ppmUpper 1st SiH.sub.4 45 300 6 0.35 3layer layer H.sub.2 60 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 5 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 55__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.30 ppmUpper 1st SiH.sub.4 180 500 22 0.4 4layer layer H.sub.2 1200 region B.sub.2 H.sub.6 (against SiH.sub.4) 700 ppm C.sub.2 H.sub.2 8 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 56__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 H.sub.2 20.fwdarw.500* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 400.fwdarw.80** (UL-side: 0.01 .mu.m) 80.fwdarw.50** B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppmUpper 1st SiH.sub.4 350 250 0.5 0.5 3layer layer H.sub.2 350 region B.sub.2 H.sub.6 (against SiH.sub.4) 600 ppm NO 13 SiF.sub.4 20 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 57__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region__________________________________________________________________________
TABLE 58__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.150 ppm*Upper 1st SiH.sub.4 350 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.2 100 region 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 59__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rate temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 0.5 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4) 5.fwdarw.200 ppm*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 60__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 61__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 3rd Si.sub.2 H.sub.4 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 62__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.5** region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region PH.sub.3 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 63__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 25 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 N.sub.2 1__________________________________________________________________________
TABLE 64__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub. 2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm C.sub.2 H.sub.2 0.1 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm C.sub.2 H.sub.2 0.1 PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 65__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4)Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 AlCl.sub.3 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 PH.sub.3 (against SiH.sub.4) 0.3 ppm NO 10 CH.sub.4 1 AlCl.sub.3 0.1 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 PH.sub.3 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 66__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.02 .mu.m) 10 B.sub.2 H.sub.6 (against SiH.sub.4) 150.fwdarw.200 ppm*Upper 1st SiH.sub.4 100 250 25 0.5 2layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer B.sub.2 H.sub.6 (against SiH.sub.4) 40 ppm region C.sub.2 H.sub. 2 15 H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 67__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.02 .mu.m) 10 PH.sub.3 (against SiH.sub.4) 120.fwdarw.180 ppm*Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer PH.sub.3 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer C.sub.2 H.sub.2 15 region H.sub.2 300 3rd SiH.sub. 4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 68__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 H.sub.2 S 1 ppm 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 H.sub.2 S 1 ppm 3rd SiH.sub. 4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm H.sub.2 S 1 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region H.sub.2 S 1 ppm__________________________________________________________________________
TABLE 69__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He 120.fwdarw.40** NO 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 70__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 71__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 NO 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 72__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5.fwdarw.200* .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 5Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 73__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm CH.sub.4 1Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 CH.sub.4 1 NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** B.sub.2 H.sub. 6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.2 CH.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.5 SiF.sub.4 0.7 AlCl.sub.3 /He 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm__________________________________________________________________________
TABLE 74__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 10 0.4 0.2 H.sub.2 5.fwdarw.200* Al(CH.sub.3).sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.4*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 4 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region__________________________________________________________________________
TABLE 75__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 76__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 5 PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 330 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 8000 ppm__________________________________________________________________________
TABLE 77__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm N.sub.2 100 .fwdarw. 150* H.sub.2 S 10 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900 .fwdarw. 600 ppm** H.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 78__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10 .fwdarw. 20* region NO 1__________________________________________________________________________
TABLE 79__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** N.sub.2 100 H.sub.2 S (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900 .fwdarw. 600 ppm** H.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 80__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 300 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 5*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 81__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NO 5 .fwdarw. 10* B.sub.2 H.sub.6 (against SiH.sub.4) 10 .fwdarw. 100 ppm*Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 82__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** NO 10 PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR side: 1 .mu.m) 10 .fwdarw. 0** 2nd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 3rd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub. 2 H.sub.2 200 region__________________________________________________________________________
TABLE 83__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 5* B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppmUpper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30 .fwdarw. 50* region PH.sub.3 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80 .fwdarw. 100* region PH.sub.3 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 84__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** NO 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10 .fwdarw. 0** 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10 .fwdarw. 50* region H.sub.2 300 4th SiH.sub.4 100 .fwdarw. 40** 300 10 0.4 1 layer CH.sub. 4 100 .fwdarw. 600* region__________________________________________________________________________
TABLE 85__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** NO 9 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 85 300 9 0.35 3layer layer H.sub.2 90 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 9 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 86__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** NO 8 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 70 300 8 0.35 3layer layer H.sub.2 80 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 8 2nd SiH.sub.4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.4 400 region__________________________________________________________________________
TABLE 87__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5 .fwdarw. 100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100 .fwdarw. 15** (UL-side: 0.01 .mu.m) 15 .fwdarw. 5** NO 7 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 55 300 7 0.35 3layer layer H.sub.2 70 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 7 2nd SiH.sub.4 150 300 10 0.4 20 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 88__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.3 0.2 0.02 H.sub.2 5 .fwdarw. 100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 85 .fwdarw. 15** (UL-side: 0.01 .mu.m) 15 .fwdarw. 5** NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppmUpper 1st SiH.sub.4 45 300 6 0.35 3layer layer H.sub.2 60 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 5 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 89__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppmUpper 1st SiH.sub.4 180 500 22 0.4 4layer layer H.sub.2 1200 region B.sub.2 H.sub.6 (against SiH.sub.4) 700 ppm C.sub.2 H.sub.2 8 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10 .fwdarw. 20* region NO 1__________________________________________________________________________
TABLE 90__________________________________________________________________________Order of Gases and Substrate .mu.W Inner Layerlamination their flow rates temperature discharging pressure thickness(layer name) (SCCM) (.degree.C.) power (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 H.sub.2 20 .fwdarw. 500* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 400 .fwdarw. 80** (UL-side: 0.01 .mu.m) 80 .fwdarw. 50** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppmUpper 1st SiH.sub.4 350 250 0.5 0.5 3layer layer H.sub.2 350 region B.sub.2 H.sub.6 (against SiH.sub.4) 600 ppm NO 13 SiF.sub.4 20 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 91__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10 .fwdarw. 20* region NO 1 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region__________________________________________________________________________
TABLE 92__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** N.sub.2 100 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900 .fwdarw. 600 ppm** N.sub.2 150 2nd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 93__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 300 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 5*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 94__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** PH.sub.3 (against SiH.sub.4) 10 .fwdarw. 100 ppm*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 95__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 82 m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10 .fwdarw. 0** 2nd SiH.sub.4 100 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 3rd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 96__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 5*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30 .fwdarw. 50* region B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80 .fwdarw. 100* region PH.sub. 3 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 97__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 30** (UL-side: 0.15 .mu.m) 30 .fwdarw. 10** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10 .fwdarw. 0** B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 98__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 300 10 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** C.sub.2 H.sub.2 1 .fwdarw. 5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub. 4 0.5 B.sub.2 H.sub.6 0.3 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 99__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NO 5 .fwdarw. 10 ppm* B.sub.2 H.sub.6 (against SiH.sub.4) 10 .fwdarw. 100 ppm*Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 PH.sub.3 0.3 ppm NO 0.1 CH.sub.4 1 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 100__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100 .fwdarw. 10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3 .fwdarw. 13* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.5 2layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer B.sub.2 H.sub.6 (against SiH.sub.4) 40 ppm region C.sub.2 H.sub.2 15 H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 101__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100 .fwdarw. 10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3 .fwdarw. 13* PH.sub.3 (against SiH.sub.4) 10 .fwdarw. 100 ppm*Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer PH.sub.3 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer C.sub.2 H.sub.2 15 region H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 102__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 300 10 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** C.sub.2 H.sub.2 1 .fwdarw. 5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 H.sub.2 S 1 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 5 H.sub.2 S 1 ppm B.sub.2 H.sub.6 0.3 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm H.sub.2 S 1 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 103__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 104__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 7 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 2 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 105__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 3 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.5 .fwdarw. 2* B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 106__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 8 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 1 B.sub.2 H.sub.6 (against SiH.sub.4) 5 .fwdarw. 0.3 ppm** 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 107__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 5 .fwdarw. 10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 1 .mu.m) 0.1 .fwdarw. 15* (U .multidot. 4th LR-side: 19 .mu.m) 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 108__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 10 .fwdarw. 100 ppm*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 2 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 5 .mu.m) 0.1 .fwdarw. 13* (U .multidot. 4th LR-side) 13 .fwdarw. 17** B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 109__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 10 (UL-side: 0.01 .mu.m) 10 .fwdarw. 100*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 19 .mu.m) 15 (U .multidot. 4th LR-side: 1 .mu.m) 15 .fwdarw. 30* SiH.sub.4 (U .multidot. 2nd LR-side: 19 .mu.m) 100 (U .multidot. 4th LR-side: 1 .mu.m) 100 .fwdarw. 50** NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 110__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 5 NO 0.1Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 111__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 1 .fwdarw. 6* NO 0.1Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 6 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 12 .fwdarw. 0.3 ppm** NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 112__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm PH.sub.3 (against SiH.sub.4) 8 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 PH.sub.3 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 113__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 .fwdarw. 100 ppm*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm PH.sub.3 (against SiH.sub.4) 10 .fwdarw. 0.3 ppm** NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 PH.sub.3 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 114__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 0.1 NO 10 H.sub.2 S 1 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 H.sub.2 S 1 ppm 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S 1 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 H.sub.2 S 1 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 S 1 ppm__________________________________________________________________________
TABLE 115__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 10 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 116__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 30 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 117__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 2 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 NH.sub.3 100 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 118__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 1.fwdarw.3 * NO 3 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 10 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub. 2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 N.sub.2 500 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 119__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 2 NO 5.fwdarw.8 * B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 120__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 2 NO 5.fwdarw.8 * B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 50 (UL-side: 0.01 .mu.m) 50.fwdarw.100 *Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm NO 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 4 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 121__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 PH.sub.3 8 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 6 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 PH.sub.3 0.1 ppm C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 122__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 10 NO 0.1Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.0.3 ppm ** NO 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 3 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 123__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 SiF.sub.4 5 H.sub.2 10.fwdarw.200 * AlCl.sub.3 /He 120.fwdarw.40 ** NO 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 124__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120.fwdarw.40 **Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 125__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.02 SiF.sub.4 5 H.sub.2 10.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10 ** (UL-side: 0.01 .mu.m) 10Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 126__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5.fwdarw.200 * .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 5 SiF.sub.4 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 127__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 10 SiF.sub.4 5 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm CH.sub.4 1Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 CH.sub.4 1 NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 10.fwdarw.1 ** 1 .mu.m) B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.2 CH.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.5 SiF.sub.4 0.7 AlCl.sub.3 /He 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm__________________________________________________________________________
TABLE 128__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 250 10 0.4 0.2 H.sub.2 5.fwdarw.200 * Al(CH.sub.3).sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** NH.sub.3 1.fwdarw.4 ** SiH.sub.4 1.fwdarw.10 *Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 4 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region__________________________________________________________________________
TABLE 129__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 300 10 0.4 0.2 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** C.sub.2 H.sub.2 1.fwdarw.5 * B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 1.fwdarw.10 *Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region SiF.sub.4 50 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 130__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He 200.fwdarw.20 ** NO 5 PH.sub.3 100 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 330 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm__________________________________________________________________________
TABLE 131__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm N.sub.2 100.fwdarw.150 * H.sub.2 S 10 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 5layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm ** N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 132__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 SiF.sub.4 5 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 **Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20 * region NO 1__________________________________________________________________________
TABLE 133__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** N.sub.2 100 H.sub.2 S(against SiH.sub.4) 10 ppm BF.sub.3 10 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region BF.sub.3 (against SiH.sub.4) 1000 ppm N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 134__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* SiF.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.4 50 region__________________________________________________________________________
TABLE 135__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5.fwdarw.10* PF.sub.5 (against SiH.sub.4) 10.fwdarw.100 ppm*Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 1000 ppm NO 10 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub. 4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 136__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Si.sub.2 F.sub.6 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 3rd SiH.sub. 4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 137__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm Si.sub.2 F.sub.6 1.fwdarw.8*Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PF.sub.5 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region PF.sub.5 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 138__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 5 SiF.sub.5 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10.fwdarw.50* region H.sub.2 300 4th SiH.sub.4 100.fwdarw.40** 300 10 0.4 1 layer CH.sub.4 100.fwdarw.600* region__________________________________________________________________________
TABLE 139__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 9 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm SiF.sub.4 5Upper 1st SiH.sub.4 85 330 9 0.35 3layer layer H.sub.2 95 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 9 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 140__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 8 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm SiF.sub.4 5Upper 1st SiH.sub.4 75 300 8 0.35 3layer layer H.sub.2 80 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 8 2nd SiH.sub.4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.2 400 region__________________________________________________________________________
TABLE 141__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** NO 7 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm SiF.sub.4 4Upper 1st SiH.sub.4 55 300 7 0.35 3layer layer H.sub.2 70 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 7 2nd SiH.sub.4 150 300 10 0.4 20 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 142__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm SiF.sub.4 4Upper 1st SiH.sub.4 45 300 6 0.35 3layer layer H.sub.2 60 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 5 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 143__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppm SiF.sub.4 5Upper 1st SiH.sub.4 180 500 22 0.4 4layer layer H.sub.2 1200 region B.sub.2 H.sub.6 (against SiH.sub.4) 700 ppm C.sub.2 H.sub.2 8 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 144__________________________________________________________________________Order of Gases and Substrate .mu.W discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 H.sub.2 20.fwdarw.500* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 400.fwdarw.80** (UL-side: 0.01 .mu.m) 80.fwdarw.50** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppm SiF.sub.4 10Upper 1st SiH.sub.4 350 250 0.5 0.5 3layer layer H.sub.2 350 region B.sub.2 H.sub.6 (against SiH.sub.4) 600 ppm NO 13 SiF.sub.4 20 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 145__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against iH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 SiF.sub.4 5 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.200* region NO 1 SiF.sub.4 5 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region SiF.sub.4 5__________________________________________________________________________
TABLE 146__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** N.sub.2 100 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm SiF.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.2 100 region 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 147__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* SiF.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.2 50 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region Si.sub.2 F.sub.6 5 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 148__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5.fwdarw.10* PF.sub.5 (against SiH.sub.4) 10.fwdarw.100 ppm*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 1000 ppm NO 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PF.sub.5 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 149__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 3rd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 150__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 SiF.sub.4 1.fwdarw.10* NH.sub.3 1.fwdarw.5* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.4 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 5 0.4 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region B.sub.2 H.sub.6 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 151__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 SiF.sub.4 5 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppmUpper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 152__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 153__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5.fwdarw.10* PH.sub.3 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 5Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 PH.sub.3 0.3 ppm NO 0.1 CH.sub.4 1 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm AlCl.sub.3 /He 0.1 NO 500 SiF.sub.4 0.5 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 PH.sub.3 0.3 ppm__________________________________________________________________________
TABLE 154__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3.fwdarw.13* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 10Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer B.sub.2 H.sub.6 region (against SiH.sub.4) 1500 ppm C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer H.sub.2 300 region C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 40 ppm 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 155__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3.fwdarw.13* PH.sub.3 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 10Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer C.sub.2 H.sub.2 13 region PH.sub.3 (against SiH.sub.4) 1500 ppm H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer C.sub.2 H.sub.2 15 region H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 156__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-Side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.1 H.sub.2 S 1 ppm SiF.sub. 4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 0.3 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.1 H.sub.2 S 1 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm NO 0.1 SiF.sub.4 0.5 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 0.3 ppm H.sub.2 S 1 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region NO 0.1 PH.sub.3 0.3 ppm B.sub.2 H.sub.6 0.3 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.1__________________________________________________________________________
TABLE 157__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-Side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 5 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.1 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 158__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-Side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 C.sub.2 H.sub.2 0.1 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiH.sub.4 300 300 20 0.5 7 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 2 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 159__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-Side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 20 0.5 3 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.5.fwdarw.2* B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 160__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-Side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 10 BF.sub.3 (against SiH.sub.4) 10 ppm SiF.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region BF.sub.3 (against SiH.sub.4) 1000 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 2nd SiH.sub.4 300 300 20 0.5 8 layer C.sub.2 H.sub.2 1 region BF.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region BF.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region BF.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1__________________________________________________________________________
TABLE 161__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/Cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 5.fwdarw.10* SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 5 ALCL.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer NO 0.1 region SiF.sub.4 0.5 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 1 .mu.m) 0.1.fwdarw.15* (U .multidot. 4th LR-side: 19 .mu.m) 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.1__________________________________________________________________________
TABLE 162__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/Cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.1 300 20 0.5 2 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 (U .multidot. 2nd LR-side:1 .mu.m) 0.1.fwdarw.13* (U .multidot. 4th LR-side: 19 .mu.m) 1.fwdarw.17* AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 163__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/Cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 C.sub.2 H.sub.2 0.1 SiF.sub.4 5 B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 10 (UL-side: 0.01 .mu.m) 10.fwdarw.100**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiH.sub.4 300 300 20 0.5 5 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 0.1 AlCl.sub.3 /He 0.1 3rd NO 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 19 .mu.m) 15 (U .multidot. 4th LR-side: 1 .mu.m) 15.fwdarw.30* SiH.sub.4 (U .multidot. 2nd LR-side: 19 .mu.m) 100 (U .multidot. 4th LR-side: 1 .mu.m) 100.fwdarw.50** AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 164__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 5 NO 0.1 SiF.sub.4 (S-side: 0.01 .mu.m) 2 (UL-side: 0.01 .mu.m) 2.fwdarw.5*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.2 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 165__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.6* NO 0.1 SiF.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 2nd SiH.sub.4 300 300 20 0.5 6 layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1__________________________________________________________________________
TABLE 166__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Si.sub.2 F.sub.6 3Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 Si.sub.2 F.sub.6 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Si.sub.2 F.sub.6 0.5 AlCl.sub.3 /He 0.1 3rd Si.sub.2 F.sub.6 0.5 300 15 0.4 20 layer NO 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 8 ppm AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Si.sub.2 F.sub.6 0.5 PH.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1__________________________________________________________________________
TABLE 167__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.1 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 10.fwdarw.0.3 ppm** AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm PH.sub.3 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 168__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) NO 10 30.fwdarw.10** C.sub.2 H.sub.2 0.1 SiF.sub.4 1.fwdarw.10* H.sub.2 S 1 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 H.sub.2 S 1 ppm 2nd SiH.sub.4 300 300 20 0.5 5 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 0.1 AlCl.sub.3 /He 0.1 H.sub.2 S 1 ppm 3rd NO 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 15 SiH.sub.4 100 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S 1 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 169__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 5 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 10 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 170__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 2nd SiH.sub.4 300 300 20 0.5 5 layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 3rd SiH.sub.4 100 300 15 0.4 30 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1__________________________________________________________________________
TABLE 171__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 2 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppm SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer NO 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 0.1 NH.sub.3 100 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.1__________________________________________________________________________
TABLE 172__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.3* NO 3 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiF.sub.4 0.1 300 20 0.5 2 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm N.sub.2 500 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 173__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 2 NO 5.fwdarw.8* B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 174__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 2 NO 5.fwdarw.8* B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 50 ppm (UL-side: 0.01 .mu.m) 50.fwdarw.100 ppm* SiF.sub.4 3Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm 3rd SiF.sub.4 0.5 300 20 0.5 4 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 175__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 C.sub.2 H.sub.2 0.1 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiH.sub.4 100 300 15 0.4 20 layer SiF.sub.4 0.5 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 8 ppm NO 0.1 AlCl.sub.3 /He 0.1 3rd NO 0.1 300 20 0.5 6 layer SiF.sub.4 0.5 region H.sub.2 300 NO 0.1 PH.sub.3 (against SiH.sub.4) 0.1 ppm AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm__________________________________________________________________________
TABLE 176__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 10 NO 0.1 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 NO 0.1 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.0.3 ppm** 3rd SiF.sub.4 0.5 300 20 0.5 3 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5__________________________________________________________________________
TABLE 177__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 GeH.sub.4 15 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 178__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120.fwdarw.40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 179__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.02 GeH.sub.4 15 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10Upper 1st SiH.sub.4 300 250 10 0.4 3layer layer H.sub.2 300 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 180__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5.fwdarw.200* .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 5 GeH.sub.4 15 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 181__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 GeH.sub.4 15Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 CH.sub.4 1 NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 CH.sub.4 1 NO 0.1 B.sub.2 H.sub.6 0.3 ppm GeH.sub.4 0.5 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 SiF.sub.4 0.5 AlCl.sub.3 /He 0.5 B.sub.2 H.sub.6 0.3 ppm N.sub.2 1 GeH.sub.4 0.5__________________________________________________________________________
TABLE 182__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 10 0.4 0.2 H.sub.2 5.fwdarw.200* Al(CH.sub.3).sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.4* GeH.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 4 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region__________________________________________________________________________
TABLE 183__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region SiF.sub.4 50 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 184__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 5 PH.sub.3 (against SiH.sub.4) 100 ppm GeH.sub.4 5Upper 1st SiH.sub.4 100 330 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 8000 ppm__________________________________________________________________________
TABLE 185__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm N.sub.2 100.fwdarw.150* H.sub.2 S 10 ppm GeH.sub.4 15Upper 1st SiH.sub.4 100 300 10 0.35 5layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub. 2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 186__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 GeH.sub.4 15 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10**Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 187__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** N.sub.2 100 H.sub.2 S (against SiH.sub.4) 10 ppm BF.sub.3 10 ppm GeH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region BF.sub.3 (against SiH.sub.4) 1000 ppm N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 188__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* GeH.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region B.sub. 2 H.sub.6 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.4 50 region__________________________________________________________________________
TABLE 189__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5.fwdarw.10* GeF.sub.4 5.fwdarw.10* PF.sub.5 (against SiH.sub.4) 10.fwdarw.100 ppm*Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 1000 ppm NO 10 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 ( 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 190__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Si.sub.2 F.sub.6 5 GeH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 3rd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region PH.sub.3 (against SiH.sub.4) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 191__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm Si.sub.2 F.sub.6 1.fwdarw.8* GeH.sub.4 5.fwdarw.20*Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region Si.sub.2 F.sub.6 10 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PF.sub.5 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region PF.sub.5 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 192__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 5 GeH.sub.4 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10.fwdarw.50* region H.sub.2 300 4th SiH.sub.4 100.fwdarw.40** 300 10 0.4 1 layer CH.sub.4 100.fwdarw.600* region__________________________________________________________________________
TABLE 193__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 9 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm GeH.sub.4 15Upper 1st SiH.sub.4 85 330 9 0.35 3layer layer H.sub.2 95 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 9 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 194__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 8 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm GeH.sub.4 15Upper 1st SiH.sub.4 70 300 8 0.35 3layer layer H.sub.2 80 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 8 2nd SiH.sub.4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.4 400 region__________________________________________________________________________
TABLE 195__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** NO 7 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm GeH.sub.4 4Upper 1st SiH.sub.4 55 300 7 0.35 3layer layer H.sub.2 70 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 7 2nd SiH.sub.4 150 300 10 0.4 20 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 196__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm GeH.sub.4 4Upper 1st SiH.sub.4 45 300 6 0.35 3layer layer H.sub.2 60 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 5 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 197__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppm GeH.sub.4 25Upper 1st SiH.sub.4 180 500 22 0.4 4layer layer H.sub.2 1200 region B.sub.2 H.sub.6 (against SiH.sub.4) 700 ppm C.sub.2 H.sub.2 8 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 198__________________________________________________________________________Order of Gases and Substrate .mu.W Inner Layerlamination their flow rates temperature discharging pressure thickness(layer name) (SCCM) (.degree.C.) power(mw/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 H.sub.2 20.fwdarw.500* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 400.fwdarw.80** (UL-side: 0.01 .mu.m) 80.fwdarw.50** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppm GeH.sub.4 40Upper 1st SiH.sub.4 350 250 0.5 0.5 3layer layer H.sub.2 350 region B.sub.2 H.sub.6 (against SiH.sub.4) 600 ppm NO 13 SiF.sub.4 20 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub. 4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 199__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 15Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 Si.sub.2 F.sub.6 5 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1 SiF.sub.4 5 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region SiF.sub.4 5__________________________________________________________________________
TABLE 200__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** N.sub.2 100 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm GeH.sub.4 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.2 100 region 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 201__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* SnH.sub.4 2.fwdarw.20*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.2 5 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region Si.sub.2 F.sub.6 5 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 202__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5.fwdarw.10* PF.sub.5 (against SiH.sub.4) 10.fwdarw.100 ppm* GeH.sub.4 2.fwdarw.20*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 1000 ppm NO 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PF.sub.5 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 203__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 3rd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 204__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 GeH.sub.4 1.fwdarw.10* NH.sub.3 1.fwdarw.5* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10**Upper 1st SiH.sub.4 100 300 10 0.4 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 5 0.4 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region B.sub.2 H.sub.6 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 205__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 GeH.sub.4 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region 4th SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 N.sub.2 1__________________________________________________________________________
TABLE 206__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 2.fwdarw.20*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 2 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm PH.sub.3 1 ppm GeH.sub.4 0.5__________________________________________________________________________
TABLE 207__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5.fwdarw.10* PH.sub.3 (against SiH.sub.4) 10.fwdarw.100 ppm* GeH.sub.4 (against SiH.sub.4) 3.fwdarw.30Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 PH.sub.3 (against SiH.sub.4) 0.3 ppm NO 0.5 CH.sub.4 1 AlCl.sub.3 /He 0.8 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 0.5 ppm AlCl.sub.3 /He 0.3 NO 0.3 SiF.sub.4 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 NO 0.1 PH.sub.3 (against SiH.sub.4) 0.3 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm__________________________________________________________________________
TABLE 208__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3.fwdarw.13* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 20Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm region C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer H.sub.2 300 region C.sub.2 H.sub. 2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 40 ppm 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 209__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3.fwdarw.13* PH.sub.3 (against SiH.sub.4) 10.fwdarw.100 ppm* GeH.sub.4 10 SnH.sub.4 10Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer C.sub.2 H.sub.2 13 region PH.sub.3 (against SiH.sub.4) 1500 ppm H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer C.sub.2 H.sub.2 15 region H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 210__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 300 10 0.4 0.2 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** C.sub.2 H.sub.2 1.fwdarw.5 * B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 2.fwdarw.20 * H.sub.2 S (against SiH.sub.4) 1 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 0.1 NO 0.4 H.sub.2 S 1 ppm SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 NO 0.4 B.sub.2 H.sub.6 0.3 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.3 H.sub.2 S 1 ppm GeH.sub.4 5 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm NO 0.4 SiF.sub.4 0.5 AlCl.sub.3 /He 0.3 B.sub.2 H.sub.6 0.3 ppm H.sub.2 S 1 ppm GeH.sub.4 3 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region NO 0.4 PH.sub.3 0.3 B.sub.2 H.sub.6 0.3 SiF.sub.4 0.5 AlCl.sub.3 /He 0.5 H.sub.2 S 1 ppm GeH.sub.4 2__________________________________________________________________________
TABLE 211__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 5 GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.1 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4 ) 0.3 ppm GeH.sub.4 2 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 3 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.4 SiF.sub.4 1 NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 3__________________________________________________________________________
TABLE 212__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 10 C.sub.2 H.sub.2 0.1 SnH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiH.sub.4 300 300 20 0.5 7 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 2 AlCl.sub. 3 /He 0.1 SnH.sub.4 1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 SnH.sub.4 2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.3 SiF.sub.4 1 NO 0.4 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SnH.sub.4 2__________________________________________________________________________
TABLE 213__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 1.fwdarw.10 *Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 20 0.5 3 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.5.fwdarw.2 * B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 2 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 GeH.sub.4 3 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm NO 0.2 AlCl.sub.3 /He 0.3 SiF.sub.4 0.3 GeH.sub.4 3__________________________________________________________________________
TABLE 214__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 10 BF.sub.3 (against SiH.sub.4) 10 ppm GeH.sub.4 1.fwdarw.10 *Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region BF.sub.3 (against SiH.sub.4) 1000 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 2nd SiH.sub.4 300 300 20 0.5 8 layer C.sub.2 H.sub.2 1 region BF.sub.3 (against SiH.sub.4) 10.fwdarw.0.3 ppm ** AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 GeH.sub.4 2 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region BF.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 GeH.sub.4 4 4th SiH.sub.4 50 300 15 0.5 0.5 layer C.sub.2 H.sub.2 30 region BF.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 1 NO 0.3 GeH.sub.4 2__________________________________________________________________________
TABLE 215__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 5.fwdarw.10 * GeH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 GeF.sub.4 2 3rd SiH.sub.4 100 300 15 0.4 20 layer NO 0.1 region SiF.sub.4 0.5 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 1 .mu.m) 0.1.fwdarw.15 * (U .multidot. 4th LR-side: 19 .mu.m) 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeF.sub.4 4 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm SiF.sub.4 1 AlCl.sub.3 /He 0.3 GeF.sub.4 1__________________________________________________________________________
TABLE 216__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm * GeF.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.1 300 20 0.5 2 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeF.sub.4 2 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 5 .mu.m) 0.1.fwdarw.13 * (U .multidot. 4th LR-side: 15 .mu.m) 13.fwdarw.17 * AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeF.sub.4 1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 40 region AlCl.sub.3 /He 0.2 SiF.sub.4 0.5 NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm GeF.sub.4 2__________________________________________________________________________
TABLE 217__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 10 C.sub.2 H.sub.2 0.1 GeH.sub.4 10 B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 10 (UL-side: 0.01 .mu.m) 10.fwdarw.100 *Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiH.sub.4 300 300 20 0.5 5 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub. 6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 0.1 AlCl.sub.3 /He 0.1 GeH.sub.4 1 3rd NO 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 19 .mu.m) 15 (U .multidot. 4th LR-side: 1 .mu.m) 15.fwdarw.30 * SiH.sub.4 (U .multidot. 2nd LR-side: 19 .mu.m) 100 (U .multidot. 4th LR-side: 1 .mu.m) 100.fwdarw.50 ** AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 25 region AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm GeH.sub.4 1__________________________________________________________________________
TABLE 218__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 5 NO 0.1 GeF.sub.4 (S-side: 0.01 .mu.m) 2 (UL-side: 0.01 .mu.m) 2.fwdarw.5 * GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeF.sub.4 2 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm NO 0.1 GeF.sub.4 2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm NO 0.2 AlCl.sub.3 /He 0.3 SiF.sub.4 0.4 GeF.sub.4 1__________________________________________________________________________
TABLE 219__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 1.fwdarw.6 * NO 0.1 GeH.sub.4 15Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 2nd SiH.sub.4 300 300 20 0.5 6 layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub. 2 300 NO 0.1 GeH.sub.4 2 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.0.3 ** AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 GeH.sub.4 2 4th SiH.sub.4 60 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 1 SiF.sub.4 0.5 NO 0.3 GeH.sub.4 1__________________________________________________________________________
TABLE 220__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Si.sub.2 F.sub.6 3 GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 Si.sub.2 F.sub.6 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Si.sub.2 F.sub.4 0.5 AlCl.sub.3 /He 0.1 GeH.sub.4 4 3rd Si.sub.2 F.sub.6 0.5 300 15 0.4 20 layer NO 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 8 ppm AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm GeH.sub.4 1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm Si.sub.2 F.sub.6 1 PH.sub.3 (against SiH.sub.4) 0.1 ppm AlCl.sub.3 /He 0.5 GeH.sub.4 1__________________________________________________________________________
TABLE 221__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm * SiF.sub.4 5 GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.1 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub. 3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 10.fwdarw.0.3 ** AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 2 4th SiH.sub.4 50 300 15 0.4 0.6 layer C.sub.2 H.sub.2 20 region AlCl.sub.3 /He 0.2 SiF.sub.4 0.5 NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm PH.sub.3 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1__________________________________________________________________________
TABLE 222__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 10 C.sub.2 H.sub.2 0.1 GeH.sub.4 1.fwdarw.10 * H.sub.2 S 1 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 H.sub.2 S (against SiH.sub.4) 1 ppm 2nd SiH.sub.4 300 300 20 0.5 5 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 0.1 AlCl.sub.3 /He 0.1 H.sub.2 S (against SiH.sub.4) 1 ppm GeH.sub.4 2 3rd NO 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 15 SiH.sub.4 100 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S (against SiH.sub.4) 1 ppm GeH.sub.4 1 4th SiH.sub.4 50 300 15 0.5 0.6 layer C.sub.2 H.sub.2 20 region AlCl.sub.3 /He 0.2 SiF.sub.4 0.8 NO 0.4 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S (against SiH.sub.4) 1 ppm GeH.sub.4 2__________________________________________________________________________
TABLE 223__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 5 GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4 ) 0.3 ppm GeH.sub.4 1 3rd SiF.sub.4 0.5 300 15 0.4 10 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 GeH.sub.4 2 4th SiH.sub.4 60 300 15 0.5 0.5 layer C.sub.2 H.sub.2 40 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm NO 0.3 AlCl.sub.3 /He 0.2 SiF.sub.4 0.6 GeH.sub.4 1__________________________________________________________________________
TABLE 224__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm SiF.sub.4 5 GeH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 2nd SiH.sub.4 300 300 20 0.5 5 layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 GeH.sub.4 1 3rd SiH.sub.4 100 300 15 0.4 30 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 GeH.sub.4 2 4th SiH.sub.4 60 300 15 0.5 0.5 layer C.sub.2 H.sub.2 40 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm AlCl.sub.3 /He 0.2 SiF.sub.4 0.5 NO 0.2 GeH.sub.4 3__________________________________________________________________________
TABLE 225__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 2 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppm GeH.sub.4 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub. 4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 GeH.sub.4 1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer NO 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 0.1 NH.sub.3 100 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 2 4th SiH.sub.4 55 300 15 0.5 0.5 layer C.sub.2 H.sub.2 30 region NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm SiF.sub.4 1 AlCl.sub.3 /He 0.2 GeH.sub.4 3__________________________________________________________________________
TABLE 226__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 1.fwdarw.3 * NO 3 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm GeH.sub.4 15Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiF.sub.4 0.1 300 20 0.5 2 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 0.4 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm N.sub.2 500 GeH.sub.4 1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 25 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.3 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1__________________________________________________________________________
TABLE 227__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination temperature power pressure thickness(layer name) Gases and their flow rates (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** C.sub.2 H.sub.2 2 NO 5.fwdarw.8 * B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm * SnH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 SnH.sub.4 1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SnH.sub.4 2 4th SiH.sub.4 60 300 10 0.5 0.5 layer C.sub.2 H.sub.2 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm AlCl.sub.3 /He 0.2 SiF.sub.4 1 NO 0.3 SnH.sub.4 2__________________________________________________________________________
TABLE 228__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 2 NO 5 .fwdarw. 8* B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 50 (UL-side: 0.01 .mu.m) 50 .fwdarw. 100* GeH.sub.4 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 2nd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub. 2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm GeH.sub.4 2 3rd SiF.sub.4 0.5 300 20 0.5 4 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1 4th SiH.sub.4 60 300 15 0.5 0.4 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.5 SiF.sub.4 0.5 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm GeH.sub.4 1__________________________________________________________________________
TABLE 229__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** NO 10 C.sub.2 H.sub.2 0.1 GeH.sub.4 15Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region PH.sub.3 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 2nd SiH.sub.4 100 300 15 0.4 20 layer SiF.sub.4 0.5 region GeH.sub.4 2 C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 8 ppm NO 0.1 AlCl.sub.3 /He 0.1 3rd NO 0.1 300 20 0.5 6 layer SiF.sub.4 0.5 region H.sub.2 300 SiH.sub.4 300 PH.sub.3 (against SiH.sub.4) 0.1 ppm AlCl.sub.3 /He 0.1 C.sub.2 H.sub.2 0.1 4th SiH.sub.4 50 300 10 0.5 0.6 layer C.sub.2 H.sub.2 20 region AlCl.sub.3 /He 0.2 SiF.sub.4 0.5 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm GeH.sub.4 1 PH.sub.3 (against SiH.sub.4) 0.1 ppm__________________________________________________________________________
TABLE 230__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** C.sub.2 H.sub.2 10 NO 0.1 GeH.sub.4 15Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 NO 0.1 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 12 .fwdarw. 0.3 ppm** GeH.sub.4 1 3rd SiF.sub.4 0.5 300 20 0.5 3 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 GeH.sub.4 1 4th SiH.sub.4 50 300 15 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm NO 0.3 AlCl.sub.3 /He 0.1 SiF.sub.4 0.4 GeH.sub.4 0.5__________________________________________________________________________
TABLE 231__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 10 .fwdarw. 200* AlCl.sub.3 /He 120 .fwdarw. 40** Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 232__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120 .fwdarw. 40**Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region NO 30 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 233__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.02 H.sub.2 10 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100 .fwdarw. 10** (UL-side: 0.01 .mu.m) 10 Mg(C.sub.5 H.sub.5).sub.2 /He 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 3Upper 1st SiH.sub.4 300 250 10 0.4 3layer layer H.sub.2 300 region NO 30 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 234__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5 .fwdarw. 200* .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 235__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** NO 10 SiF.sub.4 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm CH.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 CH.sub.4 1 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 300 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 region He 600 AlCl.sub.3 /He 0.1 SiF.sub.4 0.2 CH.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region NO 0.1 SiF.sub.4 0.5 AlCl.sub.3 /He 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 N.sub.2 1__________________________________________________________________________
TABLE 236__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 10 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 4* Mg(C.sub.5 H.sub.5).sub.2 /He 1 .fwdarw. 10*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 4 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region__________________________________________________________________________
TABLE 237__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 300 10 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** C.sub.2 H.sub.2 1 .fwdarw. 5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 1 .fwdarw. 5*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region SiF.sub.4 50 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 238__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** NO 5 PH.sub.3 (against SiH.sub.4) 100 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 330 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm__________________________________________________________________________
TABLE 239__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm N.sub.2 100 .fwdarw. 150* H.sub.2 S 10 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 5layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900 .fwdarw. 600 ppm** N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 240__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm C.sub.2 H.sub.2 0.5 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 100 250 10 0.4 0.3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10 .fwdarw. 20* region NO 1__________________________________________________________________________
TABLE 241__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** N.sub.2 100 H.sub.2 S (against SiH.sub.4) 10 ppm BF.sub.3 10 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region BF.sub.3 (against SiH.sub.4) 1000 ppm N.sub.2 150 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 242__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 300 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 5* Mg(C.sub.5 H.sub.5).sub.2 /He 1 .fwdarw. 10* PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 243__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NO 5 .fwdarw. 10* PF.sub.5 (against SiH.sub.4) 10 .fwdarw. 100 ppm* Mg(C.sub.5 H.sub.5).sub.2 /He 5 .fwdarw. 10*Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 1000 ppm NO 10 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 244__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He 200 .fwdarw. 20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4 100 ppm Si.sub.2 F.sub.6 5 Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10 .fwdarw. 0** 2nd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 3rd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region PH.sub.3 (against SiH.sub.4 ) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 245__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10 .fwdarw. 100* 250 5 0.4 0.2 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200 .fwdarw. 40** (UL-side: 0.15 .mu.m) 40 .fwdarw. 10** NH.sub.3 1 .fwdarw. 5* B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm GeH.sub.4 5 Mg(C.sub.5 H.sub.5).sub.2 /He 5 .fwdarw. 1** Si.sub.2 F.sub.6 1 .fwdarw. 8*Upper 1st SiH.sub.4 100 270 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region Si.sub.2 F.sub.6 10 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30 .fwdarw. 50* region PF.sub.5 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80 .fwdarw. 100* region PF.sub.5 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 246__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.2) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5 .fwdarw. 200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200 .fwdarw. 30** (UL-side: 0.01 .mu.m) 30 .fwdarw. 10** GeH.sub.4 5 Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10 .fwdarw. 0** 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10 .fwdarw. 50* region H.sub.2 300 4th SiH.sub.4 100 .fwdarw. 40** 300 10 0.4 1 layer CH.sub.4 100 .fwdarw. 600* region__________________________________________________________________________
TABLE 247__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 9 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 85 330 9 0.35 3layer layer H.sub.2 90 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 9 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 248__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 8 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 70 300 8 0.35 3layer layer H.sub.2 80 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 8 2nd SiH.sub.4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.4 400 region__________________________________________________________________________
TABLE 249__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** NO 7 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 55 300 7 0.35 3layer layer H.sub.2 70 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 7 2nd SiH.sub.4 150 300 10 0.4 20 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 250__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 80 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 45 300 6 0.35 3layer layer H.sub.2 60 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 5 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 251__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 180 500 22 0.4 4layer layer H.sub.2 1200 region B.sub.2 H.sub.6 (against SiH.sub.4) 700 ppm C.sub.2 H.sub.2 8 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 252__________________________________________________________________________Order of Gases and Substrate .mu.W Inner Layerlamination their flow rates temperature discharging pressure thickness(layer name) (SCCM) (.degree.C.) power (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 H.sub.2 20.fwdarw.500* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 400.fwdarw.80** (UL-side: 0.01 .mu.m) 80.fwdarw.50** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 60 ppm SiF.sub.4 20 Mg(C.sub.5 H.sub.5).sub.2 /He 15Upper 1st SiH.sub.4 350 250 0.5 0.5 3layer layer H.sub.2 350 region B.sub.2 H.sub.6 (against SiH.sub.4) 600 ppm NO 13 SiF.sub.4 20 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 253__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 1 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 SiF.sub.4 5 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1 SiF.sub.4 5 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region SiF.sub.4 5__________________________________________________________________________
TABLE 254__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** N.sub.2 100 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 1.fwdarw.10*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 900.fwdarw.600 ppm** N.sub.2 150 2nd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 255__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.01 .mu.m) 40.fwdarw.10** NH.sub.3 1.fwdarw.5* Mg(C.sub.3 H.sub.5).sub.2 /He 8 SiH.sub.4 2.fwdarw.20*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.2 50 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region Si.sub.2 F.sub.6 5 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 256__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 1 Mg(C.sub.5 H.sub.5).sub.2 /He 10 PF.sub.5 (against SiH.sub.4) 10.fwdarw.100 ppm*Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer H.sub.2 100 region PF.sub.5 (against SiH.sub.4) 1000 ppm NO 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PF.sub.5 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 257__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** 2nd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm 3rd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 258__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 Mg(C.sub.5 H.sub.5).sub.2 /He 1.fwdarw.10* NH.sub.3 1.fwdarw.5* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** PF.sub.3 (against SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 100 300 10 0.4 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm NH.sub.3 5 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 100 300 5 0.4 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region B.sub.2 H.sub.6 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 259__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 200 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 100 region NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 260__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 10 SiF.sub.4 0.5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm C.sub.2 H.sub.2 5 AlCl.sub.3 /He 1 NO 1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 SiF.sub.4 1 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm AlCl.sub.3 /He 0.1 NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 SiF.sub.4 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region AlCl.sub.3 /He 0.5 NO 0.5 SiF.sub.4 1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm PH.sub.3 (against SiH.sub.4) 3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 261__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** ` NO 5.fwdarw.10* PH.sub.3 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 280 10 0.35 3layer layer H.sub.2 100 region PH.sub.3 (against SiH.sub.4) 800 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 NO 10 AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 CH.sub.4 1 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 PH.sub.3 (against SiH.sub.4) 0.3 ppm NO 0.5 CH.sub.4 1 AlCl.sub.3 /He 0.8 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm PH.sub.3 (against SiH.sub.4) 0.5 ppm AlCl.sub.3 /He 0.3 NO 0.3 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 NO 0.1 PH.sub.3 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 262__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.4 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 C.sub. H.sub.2 3.fwdarw.13* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 8 NO 0.5Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer B.sub.2 H.sub.6 (against SiH.sub.4) region 1500 ppm C.sub.2 H.sub.2 13 H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer H.sub.2 300 region C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 40 ppm 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 263__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 C.sub.2 H.sub.2 3.fwdarw.13* PH.sub.3 (against SiH.sub.4) 10.fwdarw.100 ppm* Mg(C.sub.5 H.sub.5).sub.2 /He 3 NO 0.5Upper 1st SiH.sub.4 100 250 10 0.5 2layer layer C.sub.2 H.sub.2 13 region PH.sub.3 (against SiH.sub.4) 1500 ppm H.sub.2 300 NO 1 2nd SiH.sub.4 100 250 25 0.5 22 layer C.sub.2 H.sub.2 15 region H.sub.2 300 3rd SiH.sub.4 100 250 20 0.5 5 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 264__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.5* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 0.5 NO 0.5 H.sub.2 S (against SiH.sub.4) 50 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 C.sub.2 H.sub.2 5 AlCl.sub.3 /He 1 NO 1 H.sub.2 S (against SiH.sub.4) 10 ppm SiF.sub.4 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.1 H.sub.2 S (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm NO 0.4 SiF.sub.4 0.5 AlCl.sub.3 /He 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region NO 0.4 PH.sub.3 (against SiH.sub.4) 3 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 1 AlCl.sub.3 /He 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 H.sub.2 S (against SiH.sub.4) 10 ppm__________________________________________________________________________
TABLE 265__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm C.sub.2 H.sub.2 0.1 NO 5 SiF.sub.4 5 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiF.sub.4 0.1 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 1 NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 266__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 10 C.sub.2 H.sub.2 0.1 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 2nd SiH.sub.4 300 300 20 0.5 7 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 2 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 NO 0.1 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 1 NO 0.4 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 267__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 3 Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 3 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.5.fwdarw.2* B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub. 6 (against SiH.sub.4) 0.5 ppm NO 0.2 AlCl.sub.3 /He 0.3 SiF.sub.4 0.3 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 268__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 10 BF.sub.3 (against SiH.sub.4) 10 ppm SiF.sub.4 0.8 Mg(C.sub.5 H.sub.5).sub.2 /He 1.fwdarw.8*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region BF.sub.3 (against SiH.sub.4) 1000 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiH.sub.4 300 300 20 0.5 8 layer C.sub.2 H.sub.2 1 region BF.sub.3 (against SiH.sub.4) 10.fwdarw.0.3 ppm ** AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region BF.sub.3 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 15 0.5 0.5 layer C.sub.2 H.sub.2 30 region BF.sub.3 (against SiH.sub. 4) 0.3 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 1 NO 0.3 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 269__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm C.sub.2 H.sub.2 0.1 NO 5.fwdarw.10* SiF.sub.4 5 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 2000 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer NO 0.1 region SiF.sub.4 0.5 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 1 .mu.m) 0.1.fwdarw.15* (U .multidot. 4th LR-side: 19 .mu.m) 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm SiF.sub.4 1 AlCl.sub.3 /He 0.3 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 270__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm * SiF.sub.4 1 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd SiF.sub.4 0.1 300 20 0.5 2 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 (U .multidot. 2nd LR-side: 5 .mu.m) 0.1.fwdarw.13* (U .multidot. 4th LR-side) 13.fwdarw.17* AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 40 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 271__________________________________________________________________________Order of Substrate RF discharging Inner Layerlamination Gases and their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 10 C.sub.2 H.sub.2 0.1 SiF.sub.4 3 B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 10 (UL-side: 0.01 .mu.m) 10.fwdarw.100** Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiH.sub.4 300 300 20 0.5 5 layer SiF.sub.4 0.5 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 0.1 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd NO 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 19 .mu.m) 15 (U .multidot. 4th LR-side: 1 .mu.m) 15.fwdarw.30* SiH.sub.4 (U .multidot. 2nd LR-side: 19 .mu.m) 100 (U .multidot. 4th LR-side: 1 .mu.m) 100.fwdarw.50** AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 25 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 272__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 5 NO 0.1 SiF.sub.4 5 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm NO 0.2 AlCl.sub.3 /He 0.3 SiF.sub.4 0.4 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 273__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.6* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 0.1 SiF.sub.4 1 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiH.sub.4 300 300 20 0.5 6 layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.0.3 ppm** AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 Mg(C.sub.5 H.sub.5).sub. 2 /He 0.1 4th SiH.sub.4 60 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 1 SiF.sub.4 0.5 NO 0.3 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 274__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Si.sub.2 F.sub.6 3 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 Si.sub.2 F.sub.6 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Si.sub.2 F.sub.6 0.5 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd Si.sub.2 F.sub.6 0.5 300 15 0.4 20 layer NO 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 8 ppm AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm Si.sub.2 F.sub.6 1 PH.sub.3 (against SiH.sub.4) 0.1 ppm AlCl.sub.3 /He 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 275__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 3 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 5 Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiF.sub.4 0.1 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 10.fwdarw.0.3 ppm** AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub. 4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 15 0.4 0.6 layer C.sub.2 H.sub.2 20 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm PH.sub.3 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 276__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 10 C.sub.2 H.sub.2 0.1 SiF.sub.4 5 H.sub.2 S 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 10.fwdarw.1**Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 H.sub.2 S (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd SiH.sub.4 300 300 20 0.5 5 layer SiF.sub.4 0.1 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.1 NO 0.1 AlCl.sub.3 /He 0.1 H.sub.2 S (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd GeH.sub.4 1 300 15 0.4 20 layer NO 0.1 region SiF.sub.4 0.5 C.sub.2 H.sub.2 15 SiH.sub.4 100 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 15 0.5 0.6 layer C.sub.2 H.sub.2 20 region AlCl.sub.3 /He 0.2 SiF.sub.4 0.8 NO 0.4 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm H.sub.2 S (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 277__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm C.sub.2 H.sub.2 0.1 NO 5 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 15 0.4 10 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 60 300 15 0.5 0.5 layer C.sub.2 H.sub.2 40 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm NO 0.3 AlCl.sub.3 /He 0.2 SiF.sub.4 0.6 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 278__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 0.1 NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm SiF.sub.4 5 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiH.sub.4 300 300 20 0.5 5 layer C.sub.2 H.sub.2 0.1 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.1 H.sub.2 300 NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 30 layer C.sub.2 H.sub.2 15 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 60 300 15 0.5 0.5 layer C.sub.2 H.sub.2 40 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm AlCl.sub.3 /He 0.2 SiF.sub.4 0.5 NO 0.2 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 279__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 2 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 30 ppm SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiF.sub.4 0.5 300 15 0.4 20 layer NO 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 0.1 NH.sub.3 100 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 55 300 15 0.5 0.5 layer C.sub.2 H.sub.2 30 region NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm SiF.sub.4 1 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 280__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 1.fwdarw.3* NO 3 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 15Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 2nd SiF.sub.4 0.1 300 20 0.5 10 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 0.4 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm N.sub.2 500 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub. 2 25 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.3 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 281__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 2 NO 5.fwdarw.8* B.sub.2 H.sub.6 (against SiH.sub.4) 10.fwdarw.100 ppm* SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.5 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub. 2 /He 0.1 4th SiH.sub.4 60 300 10 0.5 0.5 layer C.sub.2 H.sub.2 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm AlCl.sub.3 /He 0.2 SiF.sub.4 1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 NO 0.3__________________________________________________________________________
TABLE 282__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 2 NO 5.fwdarw.8* B.sub.2 H.sub.6 (against SiH.sub.4) (S-side: 0.01 .mu.m) 50 ppm (UL-side: 0.01 .mu.m) 50.fwdarw.100 ppm* SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 10 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 2nd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 20 0.5 4 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 60 300 15 0.5 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.5 SiF.sub.4 0.5 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.4 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 283__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** PH.sub.3 (against SiH.sub.4) 50 ppm NO 5 C.sub.2 H.sub.2 0.1 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 20Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region PH.sub.3 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 5 C.sub.2 H.sub. 2 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 2nd SiH.sub.4 100 300 15 0.4 20 layer SiF.sub.4 0.5 region C.sub.2 H.sub.2 15 PH.sub.3 (against SiH.sub.4) 8 ppm NO 0.1 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiH.sub.4 300 300 20 0.5 6 layer SiF.sub.4 0.5 region H.sub.2 300 NO 0.1 PH.sub.3 (against SiH.sub.4) 0.1 ppm AlCl.sub.3 /He 0.1 C.sub.2 H.sub.2 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.5 0.6 layer C.sub.2 H.sub.2 20 region AlCl.sub.3 /He 0.2 SiF.sub. 4 0.5 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 PH.sub.3 (against SiH.sub.4) 0.1 ppm__________________________________________________________________________
TABLE 284__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm C.sub.2 H.sub.2 10 NO 0.1 SiF.sub.4 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 15Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 C.sub. 2 H.sub.2 0.1 H.sub.2 150 NO 10 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 NO 0.1 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.0.3 ppm** Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiF.sub.4 0.5 300 20 0.5 3 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm NO 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 4th SiH.sub.4 50 300 15 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm NO 0.3 AlCl.sub.3 /He 0.1 SiF.sub.4 0.4 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1__________________________________________________________________________
TABLE 285__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.01 0.05 H.sub.2 5.fwdarw.100 * Ar 200Upper 1st SiH.sub.4 100 250 10 0.35 3layer layer He 600 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm NO 10 2nd SiH.sub.4 300 250 25 0.6 25 layer He 100 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 286__________________________________________________________________________Order of Gasses and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 H.sub.2 10.fwdarw.200 * AlCl.sub.3 /He 120.fwdarw.40 ** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region H.sub.2 100 NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0 ** 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 287__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 AlCl.sub.3 /He 120.fwdarw.40 **Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0 ** H.sub.2 100 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 288__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.03 H.sub.2 10.fwdarw.200 * AlCl.sub.3 /He 120.fwdarw.40 ** (S-side: 0.01 .mu.m) 100.fwdarw.10 ** (UL-side: 0.02 .mu.m) 10 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 5Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0 ** H.sub.2 100 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 289__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 H.sub.2 5.fwdarw.200 * .dwnarw. .dwnarw. AlCl.sub.3 /He 300 1.5 (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** GeH.sub.4 5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5.fwdarw.3 ** Mg(C.sub.5 H.sub.5).sub.2 /He 2Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer H.sub.2 100 region NO 10 2nd SiH.sub.4 300 250 20 0.5 20 layer H.sub.2 500 region__________________________________________________________________________
TABLE 290__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 6 SiF.sub.4 3 Mg(C.sub.5 H.sub.5).sub.2 /He 5 NO 8 CH.sub.4 1Upper 1st SiH.sub.4 100 250 10 0.3 0.02layer layer He 300 region CH.sub.4 1 NO 5 B.sub.2 H.sub. 6 (against SiH.sub.4) 1500 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.4 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 AlCl.sub.3 /He 0.3 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 SiF.sub.4 0.1 NO 0.1 CH.sub.4 1 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 N.sub.2 1 B.sub.2 H.sub.6 (against SiH.sub. 4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 1 SiF.sub.4 2 AlCl.sub.3 /He 1 N.sub.2 0.5__________________________________________________________________________
TABLE 291__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temprature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 250 10 0.4 0.2 SiF.sub.4 10 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** GeH.sub.4 1.fwdarw.5 * B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 20Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side: 2 .mu.m) 5 (U .multidot. 2nd LR-side: 1 .mu.m) 5.fwdarw.0 ** SiF.sub.4 10 2nd SiH.sub.4 400 250 10 0.5 15 layer Ar 200 region SiF.sub.4 40 3rd SiH.sub.4 100 250 5 0.4 0.3 layer NH.sub.3 30 region SiF.sub.4 10__________________________________________________________________________
TABLE 292__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/Cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 300 10 0.4 0.2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1.fwdarw.10 * CH.sub.4 2.fwdarw.25 * H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 300 10 0.4 3layer layer CH.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 100 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 293__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 330 5 0.4 0.05 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He 200.fwdarw.20 ** Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 100 330 10 0.4 3layer layer CH.sub.4 20 region PH.sub.3 (against SiH.sub.4) 800 ppm H.sub.2 300 2nd SiH.sub.4 400 330 25 0.5 25 layer SiF.sub.4 10 region H.sub.2 800 3rd SiH.sub.4 100 350 15 0.4 5 layer CH.sub.4 400 region B.sub. 2 H.sub.6 (against SiH.sub.4) 5000 ppm 4th SiH.sub.4 20 350 10 0.4 1 layer CH.sub.4 400 region B.sub.2 H.sub.6 (against SiH.sub.4) 8000 ppm__________________________________________________________________________
TABLE 294__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** Mg(C.sub.5 H.sub.5).sub.2 /He 2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 30Upper 1st SiH.sub.4 100 300 10 0.4 3layer layer B.sub.2 H.sub.6 region (against SiH.sub.4) 1000 ppm CH.sub.4 20 H.sub.2 100 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 200 region 3rd SiH.sub.4 50 300 20 0.4 5 layer N.sub.2 500 region PH.sub.3 (against SiH.sub.4) 3000 ppm 4th SiH.sub.4 40 300 10 0.4 0.3 layer CH.sub.4 600 region__________________________________________________________________________
TABLE 295__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 CH.sub.4 10 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He 200.fwdarw.20 ** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 250 15 0.4 3layer layer NO 10 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm H.sub.2 100 2nd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region 3rd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw. 20 * region NO 1__________________________________________________________________________
TABLE 296__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** 1.fwdarw.10 * Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5 Mg(C.sub.5 H.sub.5).sub.2 /He 10 PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer CH.sub.4 region (LL-side: 2 .mu.m) 20 (U .multidot. 2nd LR-side: 1 .mu.m) 20.fwdarw.0 ** PH.sub.3 (against SiH.sub.4) 800 ppm H.sub.2 100 SiF.sub.4 5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region SiF.sub.4 20 3rd SiH.sub.4 100 300 15 0.4 20 layer CH.sub.4 100 region SiF.sub.4 5 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region SiF.sub.4 5__________________________________________________________________________
TABLE 297__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 300 5 0.4 0.2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1.fwdarw.10 * H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 **Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 region (against SiH.sub.4) 800 ppm NO (LL-side: 2 .mu.m) 5 (U .multidot. 2nd LR-side: 1 .mu.m) 5.fwdarw.0 ** H.sub.2 100 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 50 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.4 50 region__________________________________________________________________________
TABLE 298__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 250 5 0.4 0.2 CH.sub.4 2.fwdarw.20 * H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer CH.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 100 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region SiF.sub.4 5__________________________________________________________________________
TABLE 299__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer Cu(C.sub.4 H.sub.7 N.sub.1 O.sub.2).sub.2 /He 250 5 0.4 0.05 3.fwdarw.1 ** SiH.sub.4 50 C.sub.2 H.sub.2 5 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He 200.fwdarw.20 ** PH.sub.3 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer C.sub.2 H.sub.2 10 region PH.sub.3 (against SiH.sub.4) 800 ppm H.sub.2 300 2nd Si.sub.2 H.sub.4 200 300 10 0.5 10 layer H.sub.2 200 region Si.sub.2 H.sub. 6 10 3rd SiH.sub.4 300 330 20 0.4 30 layer C.sub.2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) (U .multidot. 2nd LR-side: 1 .mu.m) 800.fwdarw.100 ppm** (U .multidot. 4th LR-side: 29 .mu.m) 100 ppm 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 300__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100 * 250 5 0.4 0.2 NO 1.fwdarw.10 * Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1.fwdarw.5 * H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40 ** (UL-side: 0.15 .mu.m) 40.fwdarw.10 ** Si.sub.2 F.sub.6 1Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0 ** H.sub.2 100 Si.sub.2 F.sub.6 10 2nd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region Si.sub.2 F.sub.6 10 3rd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50 * region PF.sub.3 (against SiH.sub.4) 50 ppm Si.sub.2 F.sub.6 30 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100 * region PF.sub.3 (against SiH.sub.4) 500 ppm Si.sub.2 F.sub.6 10__________________________________________________________________________
TABLE 301__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 20 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 300 10 0.4 3layer layer CH.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 100 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region 3rd SiH.sub.4 100 300 5 0.4 1 layer GeH.sub.4 10.fwdarw.50 * region H.sub.2 300 3rd SiH.sub.4 100.fwdarw.40 ** 300 10 0.4 1 layer CH.sub.4 100.fwdarw.600 * region__________________________________________________________________________
TABLE 302__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 25 300 1 0.3 0.02 SiH.sub.4 50 * H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 5 B.sub.2 H.sub.6 (againt SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 85 300 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO 10 (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0 ** H.sub.2 100 2nd SiH.sub.4 300 300 15 0.5 20 layer H.sub.2 400 region 3rd SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 303__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 0.7 0.3 0.02 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 2 H.sub.2 5.fwdarw.200 * AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30 ** (UL-side: 0.01 .mu.m) 30.fwdarw.10 ** NO 4 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 80 300 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side: 2 .mu.m) 8 (U .multidot. 2nd LR-side: 1 .mu.m) 8.fwdarw.0 ** H.sub.2 80 2nd SiH.sub. 4 200 300 12 0.4 20 layer H.sub.2 400 region 3rd SiH.sub.4 40 300 7 0.3 0.5 layer CH.sub.4 400 region__________________________________________________________________________
TABLE 304__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 15 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side:0.01 .mu.m) 100.fwdarw.15** (UL-side:0.01 .mu.m) 15.fwdarw.5** NO 3 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 60 300 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side:2 .mu.m) 6 (U .multidot. 2nd LR-side:1 .mu.m) 6.fwdarw.0** H.sub.2 80 2nd SiH.sub.4 150 layer H.sub.2 300 region 3rd SiH.sub.4 30 300 5 0.3 0.5 layer CH.sub.4 300 region__________________________________________________________________________
TABLE 305__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side:0.01 .mu.m) 80.fwdarw.15** (UL-side:0.01 .mu.m) 15.fwdarw.5** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 NO 2 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppmUpper 1st SiH.sub.4 40 300 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side:2 .mu.m) 4 (U .multidot. 2nd LR-side: 1 .mu.m) 4.fwdarw.0** H.sub.2 80 2nd SiH.sub.4 100 300 6 0.3 20 layer H.sub.2 300 region 3rd SiH.sub.4 20 300 3 0.2 0.5 layer CH.sub.4 200 region__________________________________________________________________________
TABLE 306__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 500 5 0.4 0.05 C.sub.2 H.sub.2 5 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 20 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 500 30 0.4 3layer layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm H.sub.2 500 2nd SiH.sub.4 300 500 30 0.5 10 layer H.sub.2 1500 region 3rd SiH.sub.4 200 500 30 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1__________________________________________________________________________
TABLE 307__________________________________________________________________________Order of Gases and Substrate .mu.W Inner Layerlamination their flow rates temperature discharging pressure thickness(layer name) (SCCM) (.degree.C. power (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 150 250 0.5 0.6 0.02 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 SiF.sub.4 10 H.sub.2 20.fwdarw.500* AlCl.sub.3 /He (S-side:0.01 .mu.m) 400.fwdarw.80** (UL-side:0.01 .mu.m) 80.fwdarw.50** NO 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 500 250 0.5 0.4 3layer layer SiF.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 303 NO 13 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 308__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 C.sub.2 H.sub.2 10 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 15 0.4 3layer layer C.sub.2 H.sub.2 10 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm H.sub.2 300 2nd SiH.sub.4 200 250 15 0.4 20 layer C.sub.2 H.sub.2 10.fwdarw.20* region NO 1 3rd SiH.sub.4 300 250 15 0.5 10 layer H.sub.2 300 region__________________________________________________________________________
TABLE 309__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 He 10 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.01 .mu.m) 200.fwdarw.30** (UL-side:0.01 .mu.m) 30.fwdarw.10** SiF.sub.4 10 CH.sub.4 10 PH.sub.3 (against SiH.sub.4) 100 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer CH.sub.4 region (LL-side:2 .mu.m) 20 (U .multidot. 2nd LR-side:1 .mu.m) 20.fwdarw.0** PH.sub.3 (against SiH.sub.4) 800 ppm H.sub.2 100 SiF.sub.4 10 2nd SiH.sub. 4 100 300 15 0.4 20 layer CH.sub.4 100 region SiF.sub.4 10 3rd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region SiF.sub.4 20 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region SiF.sub.4 5__________________________________________________________________________
TABLE 310__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He) 300 5 0.4 0.2 5.fwdarw.10* SiH.sub.4 10.fwdarw.100* SnH.sub.4 1.fwdarw.10* NO 1.fwdarw.10* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.15 .mu.m) 40.fwdarw.10** Mg(C.sub.5 H.sub.5).sub.2 /He 8Upper 1st SiH.sub.4 100 300 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side:2 .mu.m) 5 (U .multidot. 2nd LR-side:1 .mu.m) 5.fwdarw.0** H.sub.2 100 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.2 50 region 3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 10 0.4 0.3 layer NH.sub.3 50 region__________________________________________________________________________
TABLE 311__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1.fwdarw.10* CH.sub.4 2.fwdarw.20* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.15 .mu.m) 40.fwdarw.10** PH.sub.3 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer CH.sub.4 20 region PH.sub.3 (against SiH.sub.4) 1000 ppm H.sub.2 100 SiF.sub.4 10 2nd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm SiF.sub.4 10 3rd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 600 region SiF.sub.4 5__________________________________________________________________________
TABLE 312__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10.fwdarw.3** C.sub.2 H.sub.2 5 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer C.sub.2 H.sub.2 10 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm H.sub.2 300 2nd SiH.sub.4 300 330 20 0.4 30 layer Cphd 2 H.sub.2 50 region B.sub.2 H.sub.6 (against SiH.sub.4) (U .multidot. 1st LR-side:1 .mu.m) 0.fwdarw.100 ppm* (U .multidot. 3rd LR-side:29 .mu.m) 100 ppm 3rd Si.sub.2 H.sub.6 200 300 10 0.5 10 layer H.sub.2 200 region 4th SiH.sub.4 200 330 10 0.4 1 layer C.sub.2 H.sub.2 200 region__________________________________________________________________________
TABLE 313__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 NO 1.fwdarw.10* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.15 .mu.m) 40.fwdarw.10** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 20.fwdarw.5**Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer PH.sub.3 (against SiH.sub.4) 800 ppm region NO (LL-side:2 .mu.m) 10 (U .multidot. 2nd LR-side:1 .mu.m) 10.fwdarw.0** H.sub.2 100 2nd SiH.sub.4 300 300 15 0.4 25 layer NH.sub.3 30.fwdarw.50* region PH.sub.3 (against SiH.sub.4) 50 ppm3rd SiH.sub.4 100 300 5 0.2 8 layer H.sub.2 300 region 4th SiH.sub.4 100 300 5 0.4 0.7 layer NH.sub.3 80.fwdarw.100* region B.sub.2 H.sub.6 (against SiH.sub.4) 500 ppm__________________________________________________________________________
TABLE 314__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200 AlCl.sub.3 /He (S-side:0.01 .mu.m) 200.fwdarw.30** (UL-side:0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 1 Mg (C.sub.2 H.sub.5).sub.2 /He 5 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer He 300 region NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm 2nd SiH.sub.4 300 250 25 0.6 25 layer He 600 region 3rd SiH.sub.4 50 250 10 0.4 1 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 315__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.15 .mu.m) 40.fwdarw.10** CH.sub.4 5.fwdarw.25* SiF.sub.4 1 NO 0.5 Cu (C.sub.4 H.sub.7 .sub.2 O.sub.2).sub.2 /He 10.fwdarw.0.5** B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 300 10 0.4 3layer layer CH.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 100 SiF.sub.4 1 Cu (C.sub.4 H.sub.7 N.sub. 2 O.sub.2).sub.2 /He 0.5 AlCl.sub.3 /He 0.4 NO 0.5 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm CH.sub.4 1 NO 0.1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 SiF.sub.4 0.2 AlCl.sub.3 /He 0.1 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 SiF.sub.4 0.3 AlCl.sub.3 /He 0.2 NO 0.2 4th SiH.sub.4 40 300 10 0.4 0.1 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 2 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 SiF.sub.4 1 AlCl.sub.3 /He 1 NO 0.5__________________________________________________________________________
TABLE 316__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.200* 250 5 0.4 0.2 CH.sub.4 2.fwdarw.20* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.15 .mu.m) 40.fwdarw.10** SiF.sub.4 10 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5 NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppmUpper 1st SiH.sub.4 100 250 10 0.4 3layer layer CH.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 100 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 SiF.sub.4 10 AlCl.sub.3 /He 0.4 NO 0.5 2nd SiH.sub.4 100 300 3 0.5 3 layer SiF.sub.4 5 region H.sub.2 200 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.3 CH.sub.4 1 AlCl.sub.3 /He 0.6 NO 0.5 3rd SiH.sub.4 100 300 15 0.4 30 layer CH.sub.4 100 region PH.sub.3 (against SiH.sub.4) 50 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 SiF.sub.4 5 AlCl.sub.3 /He 0.1 NO 0.1 4th SiH.sub. 4 50 300 10 0.4 0.5 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 1 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 SiF.sub.4 3 AlCl.sub.3 /He 1 NO 0.5__________________________________________________________________________
TABLE 317__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 NO 5 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He 120.fwdarw.40** Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 250 10 0.5 3layer layer C.sub.2 H.sub.2 10 region B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm NO (LL-side:2 .mu.m) 3 (U .multidot. 2nd LR-side:1 .mu.m) 3.fwdarw.0** H.sub.2 300 2nd SiH.sub.4 100 250 15 0.5 25 layer C.sub.2 H.sub.2 10 region H.sub.2 300 B.sub.2 H.sub.6 (against SiH.sub.4) 50 ppm 3rd SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 318__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.01 .mu.m) 200.fwdarw.30** (UL-side:0.01 .mu.m) 30.fwdarw.10** Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5.fwdarw.1** NO 5 C.sub.2 H.sub.2 5 PH.sub.3 10 ppmUpper 1st SiH.sub.4 100 250 10 0.5 3layer layer C.sub.2 H.sub.2 10 region PH.sub.3 (against SiH.sub.4) 1500 ppm NO (LL-side:2 .mu.m) 3 (U .multidot. 2nd LR-side:1 .mu.m) 3.fwdarw.0** H.sub.2 300 2nd SiH.sub.4 100 250 15 0.5 20 layer C.sub.2 H.sub.2 15 region H.sub.2 300 PH.sub.3 (against SiH.sub.4) 40 ppm 3rd SiH.sub.4 100 250 15 0.5 3 layer C.sub.2 H.sub.2 10 region H.sub.2 150 4th SiH.sub.4 60 250 10 0.4 0.5 layer C.sub.2 H.sub.2 60 region H.sub.2 50__________________________________________________________________________
TABLE 319__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 CH.sub.4 2.fwdarw.25* H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.15 .mu.m) 40.fwdarw.10** Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5 NO 0.5 SiF.sub.4 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 S (against SiH.sub.4) 0.6 ppmUpper 1st SiH.sub.4 100 300 10 0.4 3layer layer CH.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 1000 ppm H.sub.2 100 SiF.sub.4 0.5 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 AlCl.sub.3 /He 0.4 NO 0.4 H.sub.2 S (against SiH.sub.4) 0.5 ppm 2nd SiH.sub.4 300 300 20 0.5 20 layer H.sub.2 500 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm CH.sub.4 1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 SiF.sub.4 0.3 AlCl.sub.3 /He 0.1 NO 0.2 H.sub.2 S (against SiH.sub.4) 0.3 ppm 3rd SiH.sub.4 100 300 15 0.4 7 layer CH.sub.4 600 region PH.sub.3 (against SiH.sub.4) 3000 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 SiF.sub.4 0.3 AlCl.sub.3 /He 0.2 NO 0.1 4th SiH.sub.4 40 300 10 0.4 0.1 layer C.sub.4 600 region PH.sub.3 (against SiH.sub.4) 1.5 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 SiF.sub.4 5 NO 1 AlCl.sub.3 /He 1 H.sub.2 S (against SiH.sub.4) 1 ppm__________________________________________________________________________
TABLE 320__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.01 .mu.m) 200.fwdarw.30** (UL-side:0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm C.sub.2 H.sub.2 1 NO 5 SiF.sub.4 1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.5 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region C.sub.2 H.sub.2 0.1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.3 NO 0.1 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm AlCl.sub.3 /He 0.2 SiF.sub.4 0.5 NO 0.2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 SiF.sub.4 0.5 NO 1__________________________________________________________________________
TABLE 321__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 145 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.01 .mu.m) 200.fwdarw.30** (UL-side:0.01 .mu.m) 30.fwdarw.10** B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10.fwdarw.5** C.sub.2 H.sub.2 3 NO 1 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.3 and SiH.sub.4 300 300 20 0.5 7 layer H.sub.2 300 region NO 2 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm SiF.sub.4 0.4 AlCl.sub.3 /He 0.2 C.sub.2 H.sub.2 0.3 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0 ppm SiF.sub.4 0.3 AlCl.sub.3 /He 0.1 NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 1 NO 0.5__________________________________________________________________________
TABLE 322__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.01 .mu.m) 200.fwdarw.30** (UL-side:0.01 .mu.m) 30.fwdarw.10** Mg (C.sub.2 H.sub.5).sub.2 /He 5 C.sub.2 H.sub.2 3 NO 5 SiF.sub.4 5 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 3Upper 1st Mg (C.sub.2 H.sub.5).sub.2 /He 0.5 300 10 0.35 3layer layer SiH.sub.4 100 region H.sub.2 150 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.3 NO 10 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.3 2nd SiH.sub.4 300 300 20 0.5 3 layer C.sub.2 H.sub.2 0.5.fwdarw.2* region H.sub.2 300 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.3 Mg (C.sub.2 H.sub.5).sub.2 /He 0.2 AlCl.sub.3 /He 0.2 NO 0.3 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 0.3 AlCl.sub.3 /He 0.1 NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 1 AlCl.sub.3 /He 1 NO 0.5 Mg (C.sub.2 H.sub.5).sub.2 /He 0.5__________________________________________________________________________
TABLE 323__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 1 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side:0.05 .mu.m) 200.fwdarw.40** (UL-side:0.05 .mu.m) 40.fwdarw.10** NO 5 C.sub.2 H.sub.2 1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10.fwdarw.0.5** SiF.sub.4 1Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.5 AlCl.sub.3 /He 0.5 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 2nd SiH.sub.4 300 300 20 0.5 8 layer H.sub.2 300 region AlCl.sub.3 /He 0.3 SiF.sub.4 0.3 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.3 C.sub.2 H.sub.2 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 5.fwdarw.0.3 ppm** NO 0.3 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 15 region SiF.sub.4 0.5 AlCl.sub.3 /He 0.1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 SiF.sub.4 1 Cu (C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1__________________________________________________________________________
TABLE 324__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 1 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** NO 5 SiF.sub.4 1 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 C.sub.2 H.sub.2 1Upper 1st Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 300 10 0.35 3layer layer SiH.sub.4 100 region H.sub.2 150 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.4 2nd AlCl.sub.3 /He 0.3 300 20 0.5 5 layer SiH.sub.4 300 region SiF.sub.4 0.3 H.sub.2 300 NO 0.2 C.sub.2 H.sub.2 0.2 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm 3rd Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.3 region AlCl.sub.3 /He 0.1 SiH.sub.4 100 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 1 .mu.m) 0.1.fwdarw.15* (U .multidot. 4th LR-side: 19 .mu.m) 15 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region SiF.sub.4 1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 NO 1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 325__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 250 1 0.4 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** C.sub.2 H.sub.2 5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5 NO 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 NO 10 C.sub.2 H.sub.2 0.5 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 2nd SiH.sub.4 300 300 20 0.5 2 layer H.sub.2 300 region NO 0.2 C.sub.2 H.sub.2 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 3rd SiH.sub.4 100 300 15 0.4 20 layer C.sub.2 H.sub.2 region (U .multidot. 2nd LR-side: 5 .mu.m) 0.1.fwdarw.13* (U .multidot. 4th LR-side: 15 .mu.m) 13.fwdarw.17* NO 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm SiF.sub.4 0.1 AlCl.sub.3 /He 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 1 B.sub.2 H.sub.6 (against SiH.sub.4) 2 ppm SiF.sub.4 1 AlCl.sub.3 He 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 326__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.02 H.sub.2 5.fwdarw.20* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 3 C.sub.2 H.sub.2 3 SiF.sub.4 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.3 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 2nd SiH.sub.4 300 300 20 0.5 5 layer H.sub.2 300 region NO 0.1 C.sub.2 H.sub.2 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.3 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 3rd SiH.sub.4 300 15 0.4 20 layer (U .multidot. 2nd LR-side: 19 .mu.m) 100 region (U .multidot. 4th LR-side: 1 .mu.m) 100.fwdarw.50** SiF.sub.4 0.3 AlCl.sub.3 /He 0.1 NO 0.1 C.sub.2 H.sub.2 (U .multidot. 2nd LR-side: 19 .mu.m) 15 (U .multidot. 4th LR-side: 1 .mu.m) 15.fwdarw.30** B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm NO 1 SiF.sub.4 0.5 AlCl.sub.3 /He 0.7 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 327__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.05 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm NO 5 C.sub.2 H.sub.2 10 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He 200.fwdarw.20** SiF.sub.4 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10.fwdarw.5**Upper 1st Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 300 10 0.35 3layer layer SiH.sub.4 100 region H.sub.2 150 B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.4 2nd AlCl.sub.3 /He 0.2 300 20 0.5 5 layer SiF.sub.4 0.2 region SiH.sub.4 300 H.sub.2 300 NO 0.2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm 3rd SiF.sub.4 0.3 300 15 0.4 20 layer SiH.sub.4 100 region AlCl.sub.3 /He 0.1 C.sub.2 H.sub.2 15 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 328__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 20 300 0.3 0.2 0.02 NO 2 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 80.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 C.sub.2 H.sub.2 1 SiF.sub.4 3Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.5 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.4 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 2nd AlCl.sub.3 /He 0.1 300 20 0.5 6 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm 3rd SiF.sub.4 0.2 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.1 ppm** NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 1 AlCl.sub.3 /He 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.7__________________________________________________________________________
TABLE 329__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 1 0.3 0.02 NO 5 C.sub.2 H.sub.2 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 S (against SiH.sub.4) 10 ppm H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** SiF.sub.4 5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 1 NO 10 H.sub.2 S (against SiH.sub.4) 0.3 ppm C.sub.2 H.sub.2 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 H.sub.2 S (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 C.sub.2 H.sub.2 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm 3rd SiF.sub.4 0.1 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm PH.sub.3 (against SiH.sub.4) 8 ppm H.sub.2 S (against SiH.sub.4) 0.1 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 0.5 H.sub.2 S (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 PH.sub.3 (against SiH.sub.4) 1 ppm__________________________________________________________________________
TABLE 330__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 NO 5 SiF.sub.4 5 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10.fwdarw.5** C.sub.2 H.sub.2 0.1Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.5 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm 3rd SiF.sub.4 0.2 300 15 0.4 20 layer AlCl.sub.3 /He 0.2 region SiH.sub.4 100 C.sub.2 H.sub.2 15 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm PH.sub.3 (against SiH.sub.4) 10.fwdarw.1 ppm** NO 0.1 4th SiH.sub.4 50 300 15 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 SiF.sub.4 0.5 NO 0.5 AlCl.sub.3 /He 0.1 PH.sub.3 (against SiH.sub.4) 1 ppm__________________________________________________________________________
TABLE 331__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 5 0.4 0.02 NO 5 C.sub.2 H.sub.2 0.5 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.10** (UL-side: 0.01 .mu.m) 10 H.sub.2 S (against SiH.sub.4) 1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 3 SiF.sub.4 3Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.4 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 H.sub.2 S (against SiH.sub.4) 0.5 ppm 2nd AlCl.sub. 3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm H.sub.2 S (against SiH.sub.4) 0.1 ppm 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.2 region SiH.sub.4 100 C.sub.2 H.sub.2 15 NO 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 H.sub.2 S(against SiH.sub.4) 0.1 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 1 H.sub. 2 S (against SiH.sub.4) 1 ppm__________________________________________________________________________
TABLE 332__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 NO 5 SiF.sub.4 1 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 8 C.sub.2 H.sub.2 0.5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.5 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm 3rd SiF.sub.4 0.5 300 15 0.4 10 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm NO 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 1 AlCl.sub.3 /He 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.8__________________________________________________________________________
TABLE 333__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 150 0.5 0.3 0.02 NO 5 .dwnarw. .dwnarw. SiF.sub.4 1 300 1.5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 10 30.fwdarw.10** C.sub.2 H.sub.2 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 2 Mg(C.sub.5 H.sub.5).sub.2 /He 3Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.3 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.4 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 C.sub.2 H.sub.2 0.1 NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiF.sub.4 0.2 300 15 0.4 30 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 C.sub.2 H.sub.2 15 NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub. 4) 1 ppm SiF.sub.4 0.5 AlCl.sub.3 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.5__________________________________________________________________________
TABLE 334__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 NO 5 SiF.sub.4 0.5 H.sub.2 S (against SiH.sub.4) 10 ppm H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** NH.sub.3 0.5 C.sub.2 H.sub.2 0.8 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.4 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.4 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.3 H.sub.2 S (against SiH.sub.4) ppm NH.sub.3 0.3 2nd AlCl.sub.3 /He 0.1 300 20 0.5 5 layer SiF.sub.4 0.1 region SiH.sub.4 300 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm H.sub.2 S (against SiH.sub.4) 0.1 ppm NH.sub.3 0.1 3rd SiF.sub.4 0.5 300 15 0.4 20 layer AlCl.sub.3 /He 0.1 region SiH.sub.4 100 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.2 ppm NH.sub.3 100 H.sub.2 S (against SiH.sub.4) 0.1 ppm 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm SiF.sub.4 1 AlCl.sub. 3 /He 1 H.sub.2 S (against SiH.sub.4) 1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1.5__________________________________________________________________________
TABLE 335__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 250 5 0.4 0.2 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.40** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 2 NO 5.fwdarw.20* SiF.sub.4 2 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.5 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 2nd AlCl.sub.3 /He 0.1 300 20 0.5 10 layer H.sub.2 300 region SiF.sub.4 20 SiH.sub.4 300 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 3rd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 10 region SiH.sub.4 100 N.sub.2 500 NO 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 SiF.sub.4 3 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1 NO 1__________________________________________________________________________
TABLE 336__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 25 300 0.5 0.2 0.02 H.sub.2 5.fwdarw.100* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 100.fwdarw.15** (UL-side: 0.01 .mu.m) 15.fwdarw.5** C.sub.2 H.sub.2 1 NO 3 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm SiF.sub.4 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 2Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.5 AlCl.sub.3 /He 0.4 NO 10 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 2nd SiF.sub.4 0.5 300 15 0.4 20 layer SiH.sub. 4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.1 NO 0.1 SnH.sub.4 0.3 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 3rd SiF.sub.4 0.5 300 20 0.5 5 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 SnH.sub.4 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 1 SiF.sub.4 1 NO 0.5 SnH.sub.4 1.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 337__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.3 0.02 H.sub.2 5.fwdarw.200* AlCl.sub.3 /He (S-side: 0.01 .mu.m) 200.fwdarw.30** (UL-side: 0.01 .mu.m) 30.fwdarw.10** C.sub.2 H.sub.2 1 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 2 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm C.sub.2 H.sub.2 0.4 AlCl.sub.3 /He 0.3 NO 10 SiF.sub.4 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 2nd SiF.sub.4 0.3 300 15 0.4 20 layer SiH.sub.4 100 region C.sub.2 H.sub.2 15 AlCl.sub.3 /He 0.2 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 10 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd SiF.sub.4 0.2 300 20 0.5 4 layer SiH.sub.4 300 region H.sub.2 300 C.sub.2 H.sub.2 0.1 AlCl.sub.3 /He 0.1 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region AlCl.sub.3 /He 0.1 SiF.sub.4 0.5 NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.3 ppm Cu(C.sub.4 H.sub.7 N.sub. 2 O.sub.2).sub.2 /He 1 Mg(C.sub.5 H.sub.5).sub.2 /He 5__________________________________________________________________________
TABLE 338__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 250 1 0.4 0.02 NO 5 SiF.sub.4 1 H.sub.2 10.fwdarw.200* AlCl.sub.3 /He 120.fwdarw.40** Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 10 C.sub.2 H.sub.2 0.8 Mg(C.sub.5 H.sub.5).sub.2 /He 5.fwdarw.0.2*Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.5 SiF.sub.4 0.5 NO 10 C.sub.2 H.sub.2 0.3 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 2nd AlCl.sub.3 /He 0.2 300 15 0.4 20 layer SiF.sub.4 0.5 region SiH.sub.4 100 C.sub.2 H.sub.2 15 NO 0.1 PH.sub.3 (against SiH.sub.4) 8 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 3rd AlCl.sub.3 /He 0.1 300 20 0.5 6 layer SiH.sub.4 300 region SiF.sub.4 0.5 H.sub.2 300 NO 0.1 C.sub.2 H.sub.2 0.1 PH.sub.3 (against SiH.sub.4) 0.1 ppm B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 4th SiH.sub.4 50 300 10 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm AlCl.sub.3 /He 1 SiF.sub.4 1 PH.sub.3 (against SiH.sub.4) 1 ppm Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 339__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 10.fwdarw.100* 300 10 0.4 0.2 NO 5.fwdarw.20* H.sub.2 5.fwdarw.200* B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm AlCl.sub.3 /He (S-side: 0.05 .mu.m) 200.fwdarw.0** (UL-side: 0.15 .mu.m) 40.fwdarw.10** C.sub.2 H.sub.2 1 SiF.sub.4 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 5Upper 1st SiH.sub.4 100 300 10 0.35 3layer layer H.sub.2 150 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm AlCl.sub.3 /He 0.3 NO 10 SiF.sub.4 0.5 C.sub.2 H.sub.2 0.4 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.4 2nd AlCl.sub.3 /He 0.1 300 15 0.4 20 layer SiF.sub.4 0.2 region SiH.sub.4 100 C.sub.2 H.sub.2 15 B.sub.2 H.sub.6 (against SiH.sub.4) 12.fwdarw.0.1 ppm** NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 3rd AlCl.sub.3 /He 0.1 300 20 0.5 3 layer SiF.sub.4 0.2 region SiH.sub.4 300 H.sub.2 300 NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 C.sub.2 H.sub.2 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm 4th SiH.sub.4 50 300 15 0.4 0.5 layer C.sub.2 H.sub.2 30 region NO 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm AlCl.sub.3 /He 1 SiF.sub.4 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 1__________________________________________________________________________
TABLE 340__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 50 300 2 0.3 0.05 H.sub.2 5.fwdarw.200* Al(CH.sub.3)He (S-side: 0.03 .mu.m) 200.fwdarw.50** (UL-side: 0.02 .mu.m) 50.fwdarw.5** SiF.sub.4 1 NO 5 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppm CH.sub.4 1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 20.fwdarw.2** Mg(C.sub.5 H.sub.5).sub.2 /He 5.fwdarw.1**Upper 1st SiH.sub.4 100 300 10 0.4 10layer layer H.sub.2 100 region Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.6 B.sub.2 H.sub.6 (against SiH.sub.4) 1500 ppm CH.sub.4 5 SiF.sub.4 5 Al(CH.sub.3)He 0.3 Mg(C.sub.5 H.sub.5).sub.2 /He 0.3 NO (LL-side: 9 .mu.m) 5 (U .multidot. 2nd LR-side: 1 .mu.m) 5.fwdarw.0.1** 2nd SiH.sub.4 300 300 25 0.5 25 layer H.sub.2 300 region NO 0.1 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.1 B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm CH.sub.4 1 SiF.sub.4 1 Al(CH.sub.3)He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.1 3rd SiH.sub.4 200 300 15 0.4 5 layer H.sub.2 200 region Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.2 B.sub.2 H.sub.6 (against SiH.sub.4) 0.1 ppm PH.sub.3 (against SiH.sub.4) 1000 ppm SiF.sub.4 1 Al(CH.sub.3)He 0.1 Mg(C.sub.5 H.sub.5).sub.2 /He 0.2 NO 0.1 CH.sub.4 (U .multidot. 2nd LR-side: 1 .mu.m) 1.fwdarw.600* (U .multidot. 4th LR-side: 4 .mu.m) 600 4th H.sub.2 200 300 10 0.4 0.3 layer SiF.sub.4 5 region Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He 0.5 B.sub.2 H.sub.6 (against SiH.sub.4) 1 ppm PH.sub.3 (against SiH.sub.4) 5 ppm NO 0.5 CH.sub.4 600 Al(CH.sub.3)He 0.5 Mg(C.sub.5 H.sub.5).sub.2 /He 0.5 SiH.sub.4 (U .multidot. 3rd LR-side: 0.03 .mu.m) 200.fwdarw.20** (FS-side: 0.27 .mu.m) 20__________________________________________________________________________
TABLE 341__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 30 330 1 0.01 0.05 H.sub.2 5.fwdarw.100* Ar 100Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm region NO (LL-side: 2 .mu.m) 10 (U .multidot. 2nd LR-side: 1 .mu.m) 10.fwdarw.0** H.sub.2 100 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 342__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 5.fwdarw.50* 250 5 0.4 0.05 H.sub.2 10.fwdarw.200* Al(CH.sub.3).sub.3 /He 120.fwdarw.40** NaNH.sub.2 /He 10Upper 1st SiH.sub.4 100 250 10 0.4 3layer layer B.sub.2 H.sub.6 (against SiH.sub.4) 500 ppm region NO 5 H.sub.2 100 2nd SiH.sub.4 300 250 15 0.5 20 layer H.sub.2 300 region 3rd SiH.sub.4 50 250 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 343__________________________________________________________________________ Comparative Example 2 Example 1 Example 2__________________________________________________________________________Al(CH.sub.3).sub.3 /He 120.fwdarw.10** 120.fwdarw.20** 120.fwdarw.40** 120.fwdarw.60** 120.fwdarw.80**Flow rates(sccm)Content of Al 9 14 21 27 35(atomic %)Ratio of film 22 10 1 0.95 0.93peeling-off(Example 1 = 1)__________________________________________________________________________
TABLE 344______________________________________Order of lamination Gases and their flow rates (sccm)______________________________________Lower layer SiF.sub.4 3 NO 3 CH.sub.4 2 B.sub.2 H.sub.6 (against SiH.sub.4) 100 ppmUpper 1st layer region CH.sub.4 2layer SiF.sub.4 1 Zn(C.sub.2 H.sub.5).sub.2 /He 1 2nd layer region B.sub.2 H.sub.6 (against SiH.sub.4) 0.5 ppm NO 0.1 CH.sub.4 1 SiF.sub.4 0.2 Zn(C.sub.2 H.sub.5).sub.2 /He 0.3 3rd layer region SiF.sub.4 1 B.sub.2 H.sub.6 (against SiH.sub.4) 2 ppm NO 0.5 Al(CH.sub.3).sub.3 /He 0.5 Zn(C.sub.2 H.sub.5).sub.2 /He 1______________________________________
TABLE 345__________________________________________________________________________Order of Gases and Substrate RF discharging Inner Layerlamination their flow rates temperature power pressure thickness(layer name) (SCCM) (.degree.C.) (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 5.fwdarw.50* 300 5 0.4 0.05 H.sub.2 10.fwdarw.200* Al(CH.sub.3).sub.3 /He 120.fwdarw.40** Y(oi-C.sub.3 H.sub.7 ).sub.3 /He 10Upper 1st SiH.sub.4 200 300 30 0.5 5layer layer C.sub.2 H.sub.2 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 800 ppm H.sub.2 500 2nd SiH.sub.4 200 300 30 0.5 5 layer C.sub.2 H.sub.2 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 5 ppm H.sub.2 300 3rd SiH.sub.4 300 300 15 0.5 5 layer H.sub.2 300 region 4th SiH.sub.4 50 300 10 0.4 0.5 layer CH.sub.4 500 region__________________________________________________________________________
TABLE 346__________________________________________________________________________Order of Gases and Substrate .mu.W Inner Layerlamination their flow rates temperature discharging pressure thickness(layer name) (SCCM) (.degree.C.) power (mW/cm.sup.3) (Torr) (.mu.m)__________________________________________________________________________Lower layer SiH.sub.4 15.fwdarw.150* 250 0.5 0.6 0.07 SiF.sub.4 10.fwdarw.20* H.sub.2 20.fwdarw.300* Al(CH.sub.3).sub.3 /He 400.fwdarw.50** NaNH.sub.2 /He 20Upper 1st SiH.sub.4 230 250 0.5 0.5 3layer layer SiF.sub.4 20 region B.sub.2 H.sub.6 (against SiH.sub.4) 150 ppm NO 10 H.sub.2 150 2nd SiH.sub.4 700 250 0.5 0.5 20 layer SiF.sub.4 30 region H.sub.2 500 3rd SiH.sub.4 150 250 0.5 0.3 1 layer CH.sub.4 500 region__________________________________________________________________________

Number	Date	Country
62-101022	Apr 1987	JPX
62-107013	Apr 1987	JPX
62-111623	May 1987	JPX
62-112160	May 1987	JPX
62-161539	Jun 1987	JPX
62-196567	Aug 1987	JPX
62-197830	Aug 1987	JPX
62-317417	Dec 1987	JPX

Number	Name	Date	Kind
4460669	Ogawa et al.	Jul 1984
4501807	Shirai et al.	Feb 1985

Number	Date	Country
59-28162	Mar 1984	JPX
59-86056	May 1984	JPX
61-48865	Mar 1986	JPX

Light receiving member having a multilayered light receiving layer composed of a lower layer made of aluminum-containing inorganic material and an upper layer made of a non-single-crystal silicon material

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Divisions (1)