Claims
- 1. A process for producing a light-transmitting electromagnetic wave filter comprising a transparent substrate having on one side thereof a light-transmitting electromagnetic wave shield film comprising 2n+1 (n≧1) layers in which at least two dielectric layers comprising an antistatic metal oxide layer and at least one silver layer are alternately laminated with each other with the dielectric layer being the first to be provided on the transparent substrate,wherein said silver layer is formed by sputtering using silver as a target, and said antistatic metal oxide layer is formed by sputtering using, as a target, a metal oxide whose sheet resistance is 50 Ω/or less, and further wherein (i) a barrier layer is provided as an intermediate layer of a metal oxide layer, or (ii) a barrier layer is provided as an intermediate layer of a metal oxide layer and a barrier layer is provided on an outer side of a metal oxide layer constituting an outermost dielectric layer.
- 2. The process for producing a light transmitting electromagnetic wave filter as claimed in claim 1, wherein the sputtering for forming the antistatic metal oxide layer is carried out in such a manner that a sintered body of a metal oxide powder is set on a pair of adjacent magnetron cathodes, and a negative voltage is applied to each cathode while alternately reversing the polarities of the targets at a frequency of 10 Hz to 1 MHz to generate glow discharge plasma thereby to sputter the target.
- 3. The process for producing a light-transmitting electromagnetic wave filter as claimed in claim 1, wherein the barrier layer is one of silicon nitride and silicon oxynitride.
- 4. The process for producing a light-transmitting electromagnetic wave filter as claimed in claim 1, wherein the outermost dielectric layer is a laminate comprising an antistatic metal oxide layer and a barrier layer.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11-98785 |
Apr 1999 |
JP |
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Parent Case Info
This is a divisional of application Ser. No. 09/541,599 filed Apr. 3, 2000 now abandoned, the disclosure of which is incorporated herein by reference.
US Referenced Citations (11)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0 751 099 |
Jan 1997 |
EP |
0 852 266 |
Jul 1998 |
EP |
WO 9905546 |
Feb 1999 |
EP |
Non-Patent Literature Citations (3)
Entry |
European Patent Office Patent Abstract of Japan, vol. 1996, No. 8 (1996) (JP 08 104547) (Apr. 23). |
European Patent Office Patent Abstract of Japan, vol. 18, No. 517 (1994) (JP 06 172994) (Jun. 21). |
European Search Report (No date). |