Metallurgical or chemical aspects of target preparation

Industry

CPC
C23C14/3414

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3414Metallurgical or chemical aspects of target preparation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Preparation device and preparation method for alloy targets
- Patent number 12,227,833
- Issue date Feb 18, 2025
- Supermag Technology (Shanghai) Co., Ltd.
- Guangyu Jiang
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Yttrium ingot and sputtering target in which the yttrium ingot is used
- Patent number 12,227,830
- Issue date Feb 18, 2025
- Tosoh Corporation
- Yuya Tsuchida
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Powder metallurgy sputtering targets and methods of producing same
- Patent number 12,221,678
- Issue date Feb 11, 2025
- GLOBAL ADVANCED METALS USA, INC.
- Craig M. Sungail
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Composition, methods for its production, and its use
- Patent number 12,202,738
- Issue date Jan 21, 2025
- Ilika Technologies Limited
- Laura Perkins
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Silicon sputtering target with special surface treatment and good p...
- Patent number 12,205,804
- Issue date Jan 21, 2025
- Tosoh SMD, Inc.
- Yongwen Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonmagnetic material-dispersed Fe-Pt based sputtering target
- Patent number 12,198,911
- Issue date Jan 14, 2025
- JX Advanced Metals Corporation
- Atsushi Sato
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Potassium sodium niobate sputtering target and production method th...
- Patent number 12,188,118
- Issue date Jan 7, 2025
- JX Advanced Metals Corporation
- Ryosuke Sakashita
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
RF sputtering apparatus for controlling atomic layer of thin film
- Patent number 12,180,578
- Issue date Dec 31, 2024
- Pusan National University Industry-University Cooperation Foundation
- Se Young Jeong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium sputtering target, production method therefor, and method...
- Patent number 12,180,577
- Issue date Dec 31, 2024
- JX Advanced Metals Corporation
- Shuhei Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cr—Si sintered body, sputtering target, and method for producing th...
- Patent number 12,173,398
- Issue date Dec 24, 2024
- Tosoh Corporation
- Hiroyuki Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant and low embrittlement aluminum alloy coatings o...
- Patent number 12,134,817
- Issue date Nov 5, 2024
- The Boeing Company
- Stephen P. Gaydos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for casting sputtering targets
- Patent number 12,134,125
- Issue date Nov 5, 2024
- Junora LTD
- Dean Plaisted
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Oxide semiconductor sputtering target and method of fabricating thi...
- Patent number 12,119,225
- Issue date Oct 15, 2024
- KV Materials Co., Ltd.
- Shinhyuk Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and method for manufacturing sputtering target
- Patent number 12,106,949
- Issue date Oct 1, 2024
- JX Advanced Metals Corporation
- Yuki Furuya
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Metal oxide film, semiconductor device, and display device
- Patent number 12,098,458
- Issue date Sep 24, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxide thin film, organic electroluminescence element includin...
- Patent number 12,100,529
- Issue date Sep 24, 2024
- Japan Science and Technology Agency
- Hideo Hosono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of making nanopowders, nanoceramic materials and nanocerami...
- Patent number 12,098,107
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Hexagonal 6H barium germanium oxide, method for producing same, sin...
- Patent number 12,091,325
- Issue date Sep 17, 2024
- National Institute for Materials Science
- Hitoshi Yusa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target, manufacturing method therefor, and manufacturing...
- Patent number 12,091,743
- Issue date Sep 17, 2024
- JX Advanced Metals Corporation
- Yasuyuki Iwabuchi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Sputtering target product and method for producing recycled sputter...
- Patent number 12,054,822
- Issue date Aug 6, 2024
- JX Advanced Metals Corporation
- Kengo Kaminaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing molybdenum alloy targets
- Patent number 12,043,892
- Issue date Jul 23, 2024
- Jiangsu CISRI HIPEX Technology Co., Ltd.
- Zhanfang Wu
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Erbium-doped bismuth oxide film
- Patent number 12,012,649
- Issue date Jun 18, 2024
- Nippon Telegraph and Telephone Corporation
- Hosei Akazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and method of producing sputtering target
- Patent number 12,012,650
- Issue date Jun 18, 2024
- Ulvac, Inc.
- Kentarou Takesue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite tungsten oxide film and method for producing same, and fi...
- Patent number 12,006,566
- Issue date Jun 11, 2024
- Sumitomo Metal Mining Co., Ltd.
- Keiichi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Garnet compound, sintered body and sputtering target containing same
- Patent number 11,987,504
- Issue date May 21, 2024
- Idemitsu Kosan Co., Ltd.
- Kazuyoshi Inoue
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
- Patent number 11,967,505
- Issue date Apr 23, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cr—Si sintered body
- Patent number 11,967,493
- Issue date Apr 23, 2024
- Tosoh Corporation
- Hiroyuki Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target including carbon-doped GST and method for fabrica...
- Patent number 11,968,912
- Issue date Apr 23, 2024
- SK Hynix Inc.
- Jun Ku Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device comprising oxide semiconductor film
- Patent number 11,959,165
- Issue date Apr 16, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chalcogenide sputtering target and method of making the same
- Patent number 11,946,132
- Issue date Apr 2, 2024
- Honeywell International Inc.
- Michael R. Pinter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for Producing a Substoichiometric Layer of Titanium, Vanadiu...
- Publication number 20250051906
- Publication date Feb 13, 2025
- SOCIETE DES CERAMIQUES TECHNIQUES
- Aimée SAVOUREY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Target material structure and manufacturing method thereof
- Publication number 20250034696
- Publication date Jan 30, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Yongbo Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUOROCARBON/PALLADIUM/MAGNESIUM-SCANDIUM HYDROGEN-CHROMIC FILM AND...
- Publication number 20250027192
- Publication date Jan 23, 2025
- SHANGHAI JIAO TONG UNIVERSITY
- Juan CHEN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METAL OXIDE FILM, SEMICONDUCTOR DEVICE, AND DISPLAY DEVICE
- Publication number 20250011916
- Publication date Jan 9, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS TRANSPARENT CONDUCTIVE OXIDE FILMS AND METHODS OF FABRICA...
- Publication number 20250003056
- Publication date Jan 2, 2025
- Corning Incorporated
- Paulo Clovis Dainese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Target And Method For Manufacturing The Same
- Publication number 20240417845
- Publication date Dec 19, 2024
- Yusuke Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fe-Pt-C-BASED SPUTTERING TARGET MEMBER, SPUTTERING TARGET ASSEMBLY,...
- Publication number 20240417846
- Publication date Dec 19, 2024
- JX Metals Corporation
- Takashi Kosho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN SINTERED SPUTTERING TARGET
- Publication number 20240408671
- Publication date Dec 12, 2024
- JX NIPPON MINING & METALS CORPORATION
- Ryo Suzuki
- B22 - CASTING POWDER METALLURGY
Information Patent Application
P-TYPE GALLIUM OXIDE FILM, AND PREPARATION METHOD AND APPLICATION T...
- Publication number 20240410047
- Publication date Dec 12, 2024
- HUBEI UNIVERSITY
- Yunbin HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUC...
- Publication number 20240410049
- Publication date Dec 12, 2024
- TOSOH CORPORATION
- Daiki SHONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMI...
- Publication number 20240400461
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY
Information Patent Application
COATED ARTICLE WITH ENHANCED OXIDATION RESISTANCE PROPERTIES
- Publication number 20240392429
- Publication date Nov 28, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Thomas GLECHNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...
- Publication number 20240384394
- Publication date Nov 21, 2024
- Tosoh SMD, Inc.
- Eduardo del Rio Perez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...
- Publication number 20240384395
- Publication date Nov 21, 2024
- Tosoh SMD, Inc.
- Eduardo del Rio Perez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARATION DEVICE AND PREPARATION METHOD FOR ALLOY TARGETS
- Publication number 20240360544
- Publication date Oct 31, 2024
- Supermag Technology (Shanghai) Co., Ltd.
- Guangyu JIANG
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Superalloy Target
- Publication number 20240287649
- Publication date Aug 29, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Peter POLCIK
- B22 - CASTING POWDER METALLURGY
Information Patent Application
CONDUCTIVE SILICON SPUTTERING TARGETS
- Publication number 20240271270
- Publication date Aug 15, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240263296
- Publication date Aug 8, 2024
- Chao Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...
- Publication number 20240254616
- Publication date Aug 1, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED TOOL
- Publication number 20240227041
- Publication date Jul 11, 2024
- MOLDINO Tool Engineering, Ltd.
- Tomoya Sasaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DIFFUSION BONDED TUNGSTEN CONTAINING TARGET TO COPPER ALLOY BACKING...
- Publication number 20240229225
- Publication date Jul 11, 2024
- Honeywell International Inc.
- Xiaodan Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN SUBOXIDE CERAMIC TARGET
- Publication number 20240229226
- Publication date Jul 11, 2024
- SOLERAS ADVANCED COATINGS BV
- Ignacio CARETTI GIANGASPRO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING MULTILAYER STRUCTURE
- Publication number 20240200185
- Publication date Jun 20, 2024
- Korea Institute of Science and Technology
- Hyung-jun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM ALLOYS AND PROCESSES FOR MAKING ALUMINUM -SCANDIUM SPUTTER...
- Publication number 20240194463
- Publication date Jun 13, 2024
- MATERION CORPORATION
- Vitaliy V. Myasnikov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER TARGETS FOR SELF-DOPED SOURCE AND DRAIN CONTACTS
- Publication number 20240186127
- Publication date Jun 6, 2024
- Intel Corporation
- Ilya V. Karpov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIEZOELECTRIC STACK, METHOD OF MANUFACTURING PIEZOELECTRIC STACK, S...
- Publication number 20240183024
- Publication date Jun 6, 2024
- Sumitomo Chemical Company, Limited
- Toshiaki KURODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT-ROLLED COPPER ALLOY SHEET AND SPUTTERING TARGET
- Publication number 20240183009
- Publication date Jun 6, 2024
- MITSUBISHI MATERIALS CORPORATION
- Yosuke NAKASATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPARENT CONDUCTIVE FILM, METHOD FOR PRODUCING TRANSPARENT CONDU...
- Publication number 20240177883
- Publication date May 30, 2024
- Sumitomo Metal Mining Co., Ltd.
- Kenji ADACHI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
- Publication number 20240166555
- Publication date May 23, 2024
- Sumitomo Metal Mining Co., Ltd.
- Hideharu Okami
- G02 - OPTICS
Information Patent Application
METHOD OF MANUFACTURING ORDERED ARRANGEMENT OF GRAPHENE-CARBON NANO...
- Publication number 20240150887
- Publication date May 9, 2024
- TRUSVAL TECHNOLOGY CO., LTD.
- SHIH-PAO CHIEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Metallurgical or chemical aspects of target preparation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Preparation device and preparation method for alloy targets

Yttrium ingot and sputtering target in which the yttrium ingot is used

Powder metallurgy sputtering targets and methods of producing same

Composition, methods for its production, and its use

Silicon sputtering target with special surface treatment and good p...

Nonmagnetic material-dispersed Fe-Pt based sputtering target

Potassium sodium niobate sputtering target and production method th...

RF sputtering apparatus for controlling atomic layer of thin film

Titanium sputtering target, production method therefor, and method...

Cr—Si sintered body, sputtering target, and method for producing th...

Corrosion resistant and low embrittlement aluminum alloy coatings o...

Systems and methods for casting sputtering targets

Oxide semiconductor sputtering target and method of fabricating thi...

Sputtering target and method for manufacturing sputtering target

Metal oxide film, semiconductor device, and display device

Metal oxide thin film, organic electroluminescence element includin...

Methods of making nanopowders, nanoceramic materials and nanocerami...

Hexagonal 6H barium germanium oxide, method for producing same, sin...

Sputtering target, manufacturing method therefor, and manufacturing...

Sputtering target product and method for producing recycled sputter...

Method for producing molybdenum alloy targets

Erbium-doped bismuth oxide film

Sputtering target and method of producing sputtering target

Composite tungsten oxide film and method for producing same, and fi...

Garnet compound, sintered body and sputtering target containing same

Method for manufacturing sputtering target, method for forming oxid...

Cr—Si sintered body

Sputtering target including carbon-doped GST and method for fabrica...

Semiconductor device comprising oxide semiconductor film

Chalcogenide sputtering target and method of making the same

Patents Applicationslast 30 patents

Method for Producing a Substoichiometric Layer of Titanium, Vanadiu...

Target material structure and manufacturing method thereof

FLUOROCARBON/PALLADIUM/MAGNESIUM-SCANDIUM HYDROGEN-CHROMIC FILM AND...

METAL OXIDE FILM, SEMICONDUCTOR DEVICE, AND DISPLAY DEVICE

AMORPHOUS TRANSPARENT CONDUCTIVE OXIDE FILMS AND METHODS OF FABRICA...

Sputtering Target And Method For Manufacturing The Same

Fe-Pt-C-BASED SPUTTERING TARGET MEMBER, SPUTTERING TARGET ASSEMBLY,...

TUNGSTEN SINTERED SPUTTERING TARGET

P-TYPE GALLIUM OXIDE FILM, AND PREPARATION METHOD AND APPLICATION T...

SPUTTERING TARGET, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUC...

METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMI...

COATED ARTICLE WITH ENHANCED OXIDATION RESISTANCE PROPERTIES

LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...

LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...

PREPARATION DEVICE AND PREPARATION METHOD FOR ALLOY TARGETS

Superalloy Target

CONDUCTIVE SILICON SPUTTERING TARGETS

SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME

SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...

COATED TOOL

DIFFUSION BONDED TUNGSTEN CONTAINING TARGET TO COPPER ALLOY BACKING...

TUNGSTEN SUBOXIDE CERAMIC TARGET

METHOD FOR MANUFACTURING MULTILAYER STRUCTURE

ALUMINUM ALLOYS AND PROCESSES FOR MAKING ALUMINUM -SCANDIUM SPUTTER...

SPUTTER TARGETS FOR SELF-DOPED SOURCE AND DRAIN CONTACTS

PIEZOELECTRIC STACK, METHOD OF MANUFACTURING PIEZOELECTRIC STACK, S...

HOT-ROLLED COPPER ALLOY SHEET AND SPUTTERING TARGET

TRANSPARENT CONDUCTIVE FILM, METHOD FOR PRODUCING TRANSPARENT CONDU...

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

METHOD OF MANUFACTURING ORDERED ARRANGEMENT OF GRAPHENE-CARBON NANO...