Liner for plasma processing apparatus

Information

  • Patent Grant
  • D658691
  • Patent Number
    D658,691
  • Date Filed
    Tuesday, August 30, 2011
    13 years ago
  • Date Issued
    Tuesday, May 1, 2012
    12 years ago
  • US Classifications
    Field of Search
    • US
    • D07 501
    • D07 5536
    • D07 586
    • D07 587
    • D07 6004
    • D08 70
    • D08 74
    • D09 445
    • D09 454
    • D09 456
    • D15 133
    • D15 138
    • D15 1441
    • D15 199
    • 118 697000
    • 118 715000
    • 118 719000
    • 148 222000
    • 156 345290
    • 156 345330
    • 156 345380
    • 156 345410
    • 156 345420
    • 156 345430
    • 156 345460
    • 205 050000
    • 216 067000
    • 216 069000
    • 216 070000
    • 219 121360
    • 219 121430
    • 423 335000
    • 427 569000
    • 427 575000
    • 438 439000
    • 438 772000
    • 438 777000
    • 438 786000
  • International Classifications
    • 1509
    • Term of Grant
      14Years
Abstract
Description


FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;



FIG. 2 is a rear view thereof;



FIG. 3 is a top plan view thereof;



FIG. 4 is a bottom plan view thereof;



FIG. 5 is a right side view thereof;



FIG. 6 is a left side view thereof;



FIG. 7 is a sectional view taken along line 7-7 of FIG. 1 thereof;



FIG. 8 is a sectional view taken along line 8-8 of FIG. 1 thereof; and,



FIG. 9 is a perspective view thereof.


Claims
  • The ornamental design for a liner for plasma processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2011-007264 Mar 2011 JP national
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