Liquefied Chemical Gas Delivery System

Abstract

Disclosed herein is an apparatus for providing a chemical gas comprising a fabrication plant, a first vessel having a volume and proximate to the fabrication plant, the first vessel adapted to receive a liquefied chemical gas and to communicate a vaporized chemical gas to the fabrication plant, a source container located at a distance from the fabrication plant, the source container having a volume and adapted to communicate a liquefied chemical gas to the first vessel, and wherein the source container volume is substantially larger than the first vessel volume. Other embodiments and methods are described herein.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

For a more detailed description of preferred embodiments of the present invention, reference will now be made to the accompanying drawings, wherein:

FIG. 1 is a schematic illustration of a system for storing, vaporizing and delivering chemical gases to an end user in accordance with an embodiment of the invention;

FIG. 2 is a schematic illustration of an alternative embodiment of the system of FIG. 1;

FIG. 3 is a schematic illustration of an alternative embodiment of the system of FIG. 1;

FIG. 4 is a schematic illustration of an alternative embodiment of the system of FIG. 1; and

FIG. 5 is a flow diagram for a process for storing and delivering chemical gases to an end user in accordance with an embodiment of the invention.

Claims

1. An apparatus for providing a chemical gas comprising: a fabrication plant;a first vessel having a volume and proximate to the fabrication plant, the first vessel adapted to receive a liquefied chemical gas and to communicate a vaporized chemical gas to the fabrication plant;a source container located at a distance from the fabrication plant, the source container having a volume and adapted to communicate a liquefied chemical gas to the first vessel; andwherein the source container volume is substantially larger than the first vessel volume.

2. The apparatus of claim 1 wherein the source container volume is at least ten times larger than the first vessel volume.

3. The apparatus of claim 1 wherein the source container volume is approximately 17,000 liters and the first vessel volume is approximately 950 liters.

4. The apparatus of claim 1 wherein the source container is located at least 1 kilometer from the fabrication plant.

5. The apparatus of claim 1 wherein the fabrication plant, the first vessel, and the source container are connected in series.

6. The apparatus of claim 1 further comprising a vaporizer adapted to pressurize the source container and provide a substantially liquefied delivery of gas to the first vessel.

7. The apparatus of claim 1 further comprising a second vessel in parallel fluid communication with the first vessel, the second vessel having a volume and adapted to receive a liquefied chemical gas from the source container and to communicate a vaporized chemical gas to the fabrication plant, and wherein the second vessel volume is substantially smaller than the source container volume.

8. The apparatus of claim 1 further comprising a liquid purge vessel in parallel fluid communication with the first vessel.

9. The apparatus of claim 1 further comprising a vaporizer in parallel fluid communication with the first vessel.

10. The apparatus of claim 1 further comprising a buffer tank disposed in the fabrication plant and adapted to receive the vaporized chemical gas from the first vessel.

11. The apparatus of claim 1 further comprising: a plurality of vessels adapted to receive the liquefied chemical gas from the source container; anda plurality of fabrication plants, wherein each vessel is located proximate to one of the fabrication plants.

12. The apparatus of claim 11 further comprising: a plurality of fabrication tools located within each of the fabrication plants.

13. An apparatus for providing a chemical gas comprising: a fabrication plant;a source container circuit having a source container and a vaporizer;a vaporization circuit proximate to the fabrication plant and having at least two vessels connected in parallel, each of the vessels having means for delivering a chemical gas to the fabrication plant; anda supply line adapted to communicate a substantially liquid phase chemical gas between the source container circuit and the vaporization circuit, the supply line adapted to connect the source container at a significant distance from the fabrication plant.

14. The apparatus of claim 13 wherein the vaporization circuit further comprise means for selectively collecting a contaminated liquid phase chemical gas.

15. The apparatus of claim 13 further comprising means for selectively delivering the chemical gas from only one of the at least two vessels.

16. An apparatus for providing a chemical gas comprising: a fabrication plant;a source container circuit having a source container and a vaporizer;a vaporization circuit proximate to the fabrication plant and having a ton vessel connected in parallel with a second vaporizer, the ton vessel and the second vaporizer both having means for delivering a chemical gas to the fabrication plant; anda supply line adapted to communicate a substantially liquid phase chemical gas between the source container circuit and the vaporization circuit, the supply line adapted to connect the source container at a significant distance from the fabrication plant.

17. The apparatus of claim 16 wherein the vaporization circuit further comprise means for selectively collecting a contaminated liquid phase chemical gas.

18. A method of providing a chemical gas comprising: storing a first volume of liquefied chemical gas in a first vessel adjacent a fabrication plant;vaporizing a portion of the first volume of liquefied chemical gas in response to an end user demand;providing a source container having a volume significantly larger than the first vessel volume;delivering a liquid phase chemical gas from the source container to the first vessel at a significant distance from the fabrication plant in response to an increased end user demand; andincreasing the vaporization rate of the first volume of liquefied chemical gas.

19. The method of claim 18 further comprising: purging the first volume of liquefied chemical gas of a contaminated liquid; anddisposing of the contaminated liquid.

20. The method of claim 18 further comprising: providing a second vessel in parallel with the first vessel; andselectively delivering the liquid phase chemical gas from the source container to the second vessel.

21. The method of claim 18 further comprising: delivering the liquid phase chemical gas from the source container to a plurality of vessels; anddelivering the vaporized chemical gas from the plurality of vessels to a plurality of fabrication plants, each fabrication plant having a plurality of fabrication tools.