Patent Grant
10059118
The entire disclosure of Japanese Patent Application No.: 2016-094100, filed May 9, 2016; Japanese Patent Application No.: 2016-017936, filed Feb. 2, 2016 and Japanese Patent Application No.: 2016-170967, filed Sep. 1, 2016 are expressly incorporated by reference herein.
1. Technical Field
The present invention relates to a liquid ejecting unit that ejects liquid from nozzles, a driving method of the liquid ejecting unit, and a liquid ejecting apparatus including the liquid ejecting unit.
2. Related Art
A liquid ejecting unit ejects liquid such as ink or the like that is supplied from a liquid storage unit such as an ink tank or the like from a plurality of nozzles by the pressure change of a pressure generating unit, as a droplet. In the related art, a configuration in which a pressure adjustment valve that is opened by the pressure of the flow path at the downstream side in the middle being a negative pressure is provided such that the liquid such as ink or the like supplied from the liquid storage unit is supplied to the liquid ejecting unit at a predetermined pressure, has been proposed (for example, refer to JP-A-2012-111044).
In JP-A-2012-111044, a configuration in which a pressing mechanism that opens a valve by pressing the valve from the outside regardless of the pressure of the flow path at the downstream side is provided is disclosed.
In addition, a configuration in which a fluid such as air or the like is pressurized and supplied and thus a valve is opened by pressing a pressure adjustment valve using the pressurized fluid is disclosed (for example, refer to JP-A-2015-189201).
However, when many connection ports for pressurization and depressurization are provided in addition to the connection port for supplying liquid, the number of joints increases, and thus there is a problem that attachment and detachment of the liquid ejecting unit becomes complicated.
An advantage of some aspects of the invention is to provide a liquid ejecting unit that can be easily attached and detached by reducing the number of joints when attaching and detaching, a driving method of the liquid ejecting unit, and a liquid ejecting apparatus including the liquid ejecting unit.
According to an aspect of the invention, there is provided a ejecting unit for ejecting a first fluid from nozzles, including: a first connection port to flow the first fluid; a second connection port to flow a second fluid; a driving portion configured to eject the first fluid in a flow path which communicates with the first connection port and the nozzles, from the nozzles; first chamber that communicates with the second connection port; and a second chamber that communicates with the second connection port.
According to this aspect, it is possible to easily attach and detach the ejecting unit by reducing the number of the connection ports to which the first fluid used for ejection and the second fluid used for pressurization and depressurization are supplied. In addition, it is possible to realize a high-performance ejecting unit by pressurizing and depressurizing the inside of the ejecting unit, if the first chamber is pressurized via the second connection port and the second chamber is depressurized via the second connection port.
In the ejecting unit, preferably, the first chamber is configured to change the volume of the flow path, and the second chamber is configured to store an air in the flow path. According to this aspect, it is possible to realize a high-performance flow path by changing the volume using pressurization. Further, it is possible to suck and remove the air bubble by depressurization.
Preferably, the ejecting unit further includes a film that is biased to the first chamber by pressurization to the first chamber, and a buffer chamber that is provided between the first chamber and the film and does not communicate with the first chamber and the second chamber in the ejecting unit. According to this aspect, even when the first chamber is depressurized due to the depressurization of the second chamber, the buffer chamber is provided, and thus it is possible to suppress an influence on the film.
In the ejecting unit, preferably, the buffer chamber is opened to the atmosphere. According to this aspect, it is possible to suppress an influence on the film with the buffer chamber being opened to the atmosphere with a simple configuration, and thus the cost can be reduced.
In the ejecting unit, preferably, a portion at which the first chamber and the film are in contact with each other is roughened. According to this aspect, it is possible to prevent the movable film and the wall surface of the first chamber from sticking together by condensation or the like. At least one of the first chamber and the movable film may be roughened.
Preferably, the ejecting unit further includes a gas-permeable film that is disposed between the second chamber and the flow path, and a zigzag path that applies diffusion resistance between the second chamber and the second connection port. Preferably, the air in the flow path is moved to the inside of the second chamber by depressurizing the inside of the second chamber. According to this aspect, even when the moisture of the liquid is evaporated via the gas-permeable film, diffusion resistance is applied by the zigzag path, and thus it is possible to suppress the evaporation of the moisture of the liquid. Further, since the zigzag path is provided between the second connection port and the second chamber, it is possible to use a low-pressure pump for depressurization compared to a case where the zigzag path is provided at all portions of the second connection port and the second chamber, and it is possible to shorten the operating time of the pump.
Preferably, the ejecting unit further includes a gas-permeable film that is provided between the second chamber and the flow path, and a depressurization maintaining unit in communication with the second connection port. According to this aspect, it is possible to perform degassing by the gas-permeable film, and maintain the depressurization state of the degassing space by the depressurization maintaining unit. If a bidirectional valve is provided at the outside of the second connection port, then it is possible to reduce the size of the liquid ejecting unit.
Preferably, the ejecting unit further includes a one-way valve that is provided between the second chamber and the second connection port so as to allow the flow from the second chamber to the second connection port. According to this aspect, the one-way valve is provided, and thus it is possible to effectively pressurize the first chamber by preventing the second chamber from pressurizing when the first chamber is pressurized.
Preferably, the ejecting unit further includes at least one regulating portion that regulates the expansion and the contraction of the volume of the second chamber. According to this aspect, it is possible to suppress the expansion of the second chamber when the first chamber is pressurized. In addition, it is possible to suppress the contraction of the second chamber when the second chamber is depressurized. Therefore, it is possible to suppress the damage of the member, for example, the gas-permeable film or the like that constitutes the wall surface of the second chamber. One of the plurality of the regulating portions may regulate the expansion of the volume of the second chamber, and the other may regulate the contraction of the volume of the second chamber.
Preferably, the ejecting unit further includes a regulating portion that regulates the contraction of the volume of the first chamber. According to this aspect, it is possible to suppress the damage of the member that constitutes the wall surface of the first chamber by contracting the volume of the first chamber.
In the ejecting unit, preferably, at least a portion of the first chamber and at least a portion of the second chamber are formed by a different member. According to this aspect, it possible to realize the respective functions of the first chamber and the second chamber.
In the liquid ejecting unit, preferably, any one of the first chamber and the second chamber is adjacent to the flow path of the first fluid, and the other of the first chamber and the second chamber is not adjacent to the flow path of the first fluid. According to this aspect, it possible to realize the respective functions of the first chamber and the second chamber easily.
According to another aspect of the invention, there is provided an ejecting apparatus, including: the ejecting unit according to the aspect; and a pressure adjuster configured to pressurize the first chamber via the second connection port and depressurize the second chamber via the second connection port.
According to this aspect, it is possible to easily attach and detach the ejecting unit by reducing the number of the connection ports to which the first fluid used for ejection and the second fluid used for pressurization and depressurization are supplied. In addition, it is possible to realize a high-performance ejecting unit by pressurizing and depressurizing the inside of the ejecting unit, if the first chamber is pressurized via the second connection port and the second chamber is depressurized via the second connection port.
According to still another aspect of the invention, there is provided a driving method of a ejecting unit, the ejecting unit including: a first connection port to flow a first fluid, a second connection port to flow a second fluid, a driving portion configured to eject the first fluid in a flow path which communicates with the first connection port from nozzles, a first chamber that communicates with the second connection port, and a second chamber that communicates with the second connection port, the method including: pressurizing the first chamber from the second connection port; and depressurizing the second chamber from the second connection port.
According to this aspect, it is possible to realize a high-performance ejecting unit by pressurizing and depressurizing the inside of the liquid ejecting unit.
The invention will be described with reference to the accompanying drawings, wherein like numbers reference like elements.
As illustrated in
The liquid ejecting apparatus 100 according to the first embodiment includes a movement mechanism 26. The movement mechanism 26 is a mechanism that reciprocates the liquid ejecting head 24 to an X-direction under the control by the control unit 20. The X-direction in which the liquid ejecting head 24 is reciprocated is a direction that intersects (typically is orthogonal to) the Y-direction in which the medium 12 is transported. The movement mechanism 26 according to the first embodiment includes a transport body 262 and a transport belt 264. The transport body 262 is a substantially box-shaped structure (carriage) that supports the liquid ejecting head 24, and fixed to the transport belt 264. The transport belt 264 is an endless belt that is placed along the X-direction. The transport belt 264 is rotated under the control of the control unit 20, and thus the liquid ejecting head 24 is reciprocated along the X-direction together with the transport body 262. The liquid container 14 may be mounted to the transport body 262 together with the liquid ejecting head 24.
The liquid ejecting head 24 ejects the ink supplied from the liquid container 14 onto the medium 12 under the control of the control unit 20. The liquid ejecting head 24 ejects the ink onto the medium 12 during a period for which the transport of the medium 12 by the transport mechanism 22 and the transport of the liquid ejecting head 24 by the movement mechanism 26 are executed, and thus a desired image is formed on the medium 12. In the following description, a direction perpendicular to an X-Y plane is referred to as a Z-direction. The ink ejected from the liquid ejecting head 24 proceeds to the positive side of the Z-direction and is landed on the surface of the medium 12.
As illustrated in
The liquid ejecting portion 44 of the liquid ejecting unit 40 ejects the ink from a plurality of nozzles. The flow path unit 42 is a structure in which the flow path for supplying the ink passed through the valve mechanism unit 41 to the liquid ejecting portion 44 is formed therein. On the top surface of the liquid ejecting unit 40 (specifically, the top surface of the flow path unit 42), a connection portion 384 that electrically connects the liquid ejecting unit 40 to the driving substrate 326 of the connection unit 32 is provided. The coupling unit 50 is a structure that connects the liquid ejecting unit 40 to the second support body 34. The transmission line 56 illustrated in
The first relay body 52 is a structure that is fixed to the liquid ejecting unit 40, and includes a housing body 522 and a wiring substrate 524 (an example of a second wiring substrate). The housing body 522 is a substantially box-shaped housing. As illustrated in
The second relay body 54 is a structure that fixes the liquid ejecting module 38 to the second support body 34 and electrically connects the liquid ejecting module 38 to the driving substrate 326, and includes a mounting substrate 542 and a wiring substrate 544 (an example of a first wiring substrate). The mounting substrate 542 is a plate-shaped member that is fixed to the second support body 34. As illustrated in
As illustrated in
The wiring substrate 544 is a plate-shaped member that is fixed to the surface of the mounting substrate 542 on the side opposite to the first relay body 52. A connection portion 546 (an example of a first connection portion) is provided on the surface of the wiring substrate 544 at the connection unit 32 side (negative Z-direction side). In other words, the connection portion 546 is fixed to the second support body 34 via the wiring substrate 544 and the mounting substrate 542. The connection portion 546 is a connector for electrical connection (board-to-board connector). Specifically, in a state where the second support body 34 is fixed to the connection unit 32, the connection portion 546 of the wiring substrate 544 is detachably coupled to the connection portion 328 of the connection unit 32. In other words, the connection portion 328 of the connection unit 32 can be attached and detached to and from the connection portion 546 from the side opposite to the liquid ejecting unit 40 (negative Z-direction side).
As illustrated in
As can be understood from the above description, the driving substrate 326 of the connection unit 32 is electrically connected to the connection portion 384 of the liquid ejecting unit 40 via the connection portion 328, the connection portion 546, the wiring substrate 544, the transmission line 56, the wiring substrate 524, and the connection portion 526. Therefore, the electrical signal generated in the driving substrate 326 (driving signal, control signal) and the power supply voltage are supplied to the liquid ejecting unit 40 via the connection portion 328, the connection portion 546, the transmission line 56, and the connection portion 526.
However, for example, in a case where the position of each of the plurality of connection portions 546 is determined by the relative relationship between the connection portions 546 and the position of each of the plurality of liquid ejecting units 40 is determined by the relative relationship between the liquid ejecting units 40, there is a case where a position error between the connection portion 546 and the liquid ejecting unit 40 occurs. In the first embodiment, the transmission line 56 is a flexible member, and can be easily deformed. Thus, the position error between the connection portion 546 and the liquid ejecting unit 40 is absorbed by the deformation of the transmission line 56. In other words, the transmission line 56 according to the first embodiment functions as a connector body for coupling the connection portion 546 and the liquid ejecting unit 40 so as to absorb the position error between the connection portion 546 and the liquid ejecting unit 40.
According to the above configuration, in a step of attaching and detaching the connection portion 328 of the connection unit 32 to and from the connection portion 546, the stress that is applied from the connection portion 546 to the liquid ejecting unit 40 is reduced. Therefore, it is possible to easily assemble or disassemble the liquid ejecting head 24 without considering the stress that is applied from the connection portion 546 to the liquid ejecting unit 40 (further the position deviation of the liquid ejecting unit 40). In the first embodiment, as described above, since the transmission line 56 is bent between the connection portion 546 and the liquid ejecting unit 40, the effect that can absorb the position error between the connection portion 546 and the liquid ejecting unit 40 is particularly remarkable.
As illustrated in
As illustrated in
As illustrated in
As illustrated in
As can be understood from
An engagement hole hA is formed in the projection portion 446 of each liquid ejecting portion 44, and an engagement hole hB is formed in the protruding portion 444 together with a through-hole into which the fastener TC2 is inserted. The engagement hole hA and the engagement hole hB are through-holes that engage with the projections provided on the surface of the first support body 242 (an example of a positioning portion). The projections of the surface of the first support body 242 engage with each of the engagement hole hA and the engagement hole hB, and thus the position of the liquid ejecting portion 44 in the X-Y plane is determined. That is, the alignment of the liquid ejecting portion 44 with respect to the first support body 242 is realized. As illustrated in
As described above, in the first embodiment, the beam-shaped portion 62 is formed between the two opening portions 60 that are adjacent in the Y-direction, and thus there is an advantage in that the size of the first support body 242 in the X-direction can be reduced. In addition, in the first embodiment, the intermediate portion 623 is formed in the beam-shaped portion 62, and thus it is possible to maintain the mechanical strength of the first support body 242, compared to the configuration in which the opening portions 60 that expose the ejecting face J of the liquid ejecting portion 44 are continuous over the plurality of liquid ejecting portions 44 (configuration in which the beam-shaped portion 62 is not formed). In the configuration in which the second portion P2 and the third portion P3 of the ejecting face J pass through the center line y (hereinafter, referred to as a “comparative example”), in order to dispose the plurality of liquid ejecting portions 44 at the positions that are close enough in the Y-direction, as illustrated in
As illustrated in
In step ST3 after step ST1 and step ST2 are executed, for each of the plurality of liquid ejecting modules 38, the liquid ejecting module 38 is inserted from the side opposite to the first support body 242 to the opening portion 346 of the second support body 34, and the liquid ejecting unit 40 is fixed to the first support body 242 by the fastener TC1 and the fastener TC2 (ST3). In the process in which the liquid ejecting module 38 is inserted to the opening portion 346 and brought close to the first support body 242, the valve mechanism unit 41 and the distribution flow path 36 communicate with each other. In step ST4 after step ST3 is executed, for each of the plurality of liquid ejecting modules 38, the second relay body 54 of the coupling unit 50 is fixed to the second support body 34 by the fasteners TB. Step ST4 may be executed before step ST3 is executed.
In step ST5 after step ST3 and step ST4 are executed, the connection unit 32 is brought close to each of the liquid ejecting modules 38 interposing the coupling unit 50, from the side opposite to the liquid ejecting unit 40 (negative Z-direction). The connection portion 546 and the connection portion 328 of the connection unit 32 are collectively and detachably connected to the plurality of liquid ejecting modules 38.
According to the above steps (ST1 to ST5), one assembly 244 including the connection unit 32, the second support body 34, the distribution flow path 36, and the plurality of liquid ejecting modules 38 is provided on the first support body 242. The plurality of assemblies 244 are fixed to the first support body 242 by repeating the same step, and thus the liquid ejecting head 24 illustrated in
As can be understood from the above description, step ST3 is a step of fixing the liquid ejecting unit 40 to the first support body 242, and step ST4 is a step of fixing the coupling unit 50 to the second support body 34. Step ST5 is a step of detachably connecting the connection portion 546 and the connection portion 328 by bring the connection unit 32 close to the plurality of liquid ejecting modules 38. The manufacturing method of the liquid ejecting head 24 is not limited to the method described above.
The specific configuration of the liquid ejecting unit 40 described above will be described.
As illustrated in
In the flow path substrate 481, an opening portion 481A, a branch flow path (throttle flow path) 481B, and a communication flow path 481C are formed. The branch flow path 481B and the communication flow path 481C are a through-hole that is formed for each of the nozzles N, and the opening portion 481A is an opening that is continuous across the plurality of nozzles N. The buffer plate 488 is a flat plate member which is provided on the surface of the flow path substrate 481 that is opposite to the pressure chamber substrate 482 and closes the opening portion 481A (a compliance substrate). The pressure variation in the opening portion 481A is absorbed by the buffer plate 488.
In the housing portion 485, a common liquid chamber (reservoir) SR that communicates with the opening portion 481A of the flow path substrate 481 is formed. The common liquid chamber SR is a space for storing the ink to be supplied to the plurality of nozzles N that constitute one of the first column G1 and the second column G2, and is continuous across the plurality of nozzles N. An inflow port Rin into which the ink supplied from the upstream side flows is formed in the common liquid chamber SR.
An opening portion 482A is formed in the pressure chamber substrate 482 for each of the nozzles N. The vibration plate 483 is a flat plate member which is elastically deformable and provided on the surface of the pressure chamber substrate 482 that is opposite to the flow path substrate 481. The space that is interposed between the vibration plate 483 and the flow path substrate 481 at the inside of the opening portion 482A of the pressure chamber substrate 482 functions as a pressure chamber SC (cavity) in which the ink supplied through the branch flow path 481B from the common liquid chamber SR is filled. Each pressure chamber SC communicates with the nozzles N through the communication flow path 481C of the flow path substrate 481.
The piezoelectric element 484 is formed on the surface of the vibration plate 483 that is opposite to the pressure chamber substrate 482 for each of the nozzles N. Each piezoelectric element 484 is a driving element in which a piezoelectric body is interposed between electrodes that are opposite to each other. When the piezoelectric element 484 is deformed by the supply of the driving signal and thus the vibration plate 483 is vibrated, the pressure in the pressure chamber SC varies, and thus the ink in the pressure chamber SC is ejected from the nozzles N. The sealing body 486 protects each piezoelectric element 484.
The valve body 722 according to the first embodiment includes a base portion 725, a valve shaft 726, and a sealing portion (seal) 727. The valve shaft 726 projects vertically from the surface of the base portion 725, and the ring-shaped sealing portion 727 that surrounds the valve shaft 726 in a plan view is provided on the surface of the base portion 725. The valve body 722 is disposed within the space R1 in the state where the valve shaft 726 is inserted into the communication hole HA, and biased to the valve seat 721 side by the spring 724. A gap is formed between the outer peripheral surface of the valve shaft 726 and the inner peripheral surface of the communication hole HA.
As illustrated in
In the state where the bag-shaped body 73 is contracted, in a case where the pressure in the space R2 is maintained within a predetermined range, the valve body 722 is biased by the spring 724, and thus the sealing portion 727 is brought to close contact with the surface of the valve seat 721. Therefore, the space R1 and the space R2 are separated from each other. On the other hand, when the pressure in the space R2 is lowered to a value less than a predetermined threshold value due to the ejection of the ink by the liquid ejecting portion 44 or the suction of the ink from the outside, the movable film 71 is displaced to the valve seat 721 side, and thus the pressure receiving plate 723 pressurize the valve shaft 726. As a result, the valve body 722 is moved against biasing by the spring 724, and thus the sealing portion 727 is separated from the valve seat 721. Therefore, the space R1 and the space R2 communicate with each other via the communication hole HA.
When the bag-shaped body 73 expands due to the pressurization by the pressure adjustment mechanism 18, the movable film 71 is displaced to the valve seat 721 side due to the pressurization by the bag-shaped body 73. Therefore, the valve body 722 is moved due to the pressurization by the pressure receiving plate 723, and thus the opening/closing valve B[1] is opened. In other words, regardless of the level of the pressure in the space R2, it is possible to forcibly open the opening/closing valve B[1] by the pressurization by the pressure adjustment mechanism 18.
As illustrated in
The filter F[1] is provided so as to cross the internal flow path for supplying the ink to the liquid ejecting portion 44, and collects air bubbles or foreign matters mixed into the ink. Specifically, the filter F[1] is provided so as to partition the space RF1 and the space RF2. The space RF1 at the upstream side communicates with the space R2 of the valve mechanism unit 41, and the space RF2 at the downstream side communicates with the vertical space RV.
A gas-permeable film MC (an example of a second gas-permeable film) is interposed between the space RF1 and the degassing space Q. Specifically, the ceiling surface of the space RF1 is configured with the gas-permeable film MC. The gas-permeable film MC is a gas-permeable film body that transmits gas (air) and does not transmit liquid such as ink or the like (gas-liquid separation film), and is formed with, for example, a known polymer material. The air bubble collected by the filter F[1] reaches the ceiling surface of the space RF1 due to the rise by buoyancy, passes through the gas-permeable film MC, and is discharged to the degassing space Q. In other words, the air bubble mixed into the ink is separated.
The vertical space RV is a space for temporarily storing the ink. In the vertical space RV according to the first embodiment, an inflow port Vin into which the ink passed through the filter F[1] flows from the space RF2, and outflow ports Vout through which the ink flows out to the nozzles N side are formed. In other words, the ink in the space RF2 flows into the vertical space RV via the inflow port Vin, and the ink in the vertical space RV flows into the liquid ejecting portion 44 (common liquid chamber SR) via the outflow ports Vout. As illustrated in
A gas-permeable film MA (an example of a first gas-permeable film) is interposed between the vertical space RV and the degassing space Q. Specifically, the ceiling surface of the vertical space RV is configured with the gas-permeable film MA. The gas-permeable film MA is a gas-permeable film body that is similar to the gas-permeable film MC described above. Accordingly, the air bubble that passed through the filter F[1] and entered into the vertical space RV rises by the buoyancy, passes through the gas-permeable film MA of the ceiling surface of the vertical space RV, and is discharged to the degassing space Q. As described above, the inflow port Vin is positioned at the position at the position higher than the outflow ports Vout in the vertical direction, and thus the air bubble can effectively reach the gas-permeable film MA of the ceiling surface using the buoyancy in the vertical space RV.
In the common liquid chamber SR of the liquid ejecting portion 44, as described above, the inflow port Rin into which the ink supplied from the outflow port Vout of the vertical space RV flows is formed. In other words, the ink that flowed out from the outflow port Vout of the vertical space RV flows into the common liquid chamber SR via the inflow port Rin, and is supplied to each pressure chamber SC through the opening portion 481A. In the common liquid chamber SR according to the first embodiment, a discharge port Rout is formed. The discharge port Rout is a flow path that is formed on the ceiling surface 49 of the common liquid chamber SR. As illustrated in
A gas-permeable film MB (an example of a first gas-permeable film) is interposed between the common liquid chamber SR and the degassing space Q. The gas-permeable film MB is a gas-permeable film body that is similar to the gas-permeable film MA or the gas-permeable film MC. Therefore, the air bubble that is entered from the common liquid chamber SR to the discharge port Rout rises by the buoyancy, passes through the gas-permeable film MB, and is discharged to the degassing space Q. As described above, the air bubble in the common liquid chamber SR is guided to the discharge port Rout along the ceiling surface 49, and thus it is possible to effectively discharge the air bubble in the common liquid chamber SR, compared to a configuration in which, for example, the ceiling surface 49 of the common liquid chamber SR is a horizontal plane. The gas-permeable film MA, the gas-permeable film MB, and the gas-permeable film MC may be formed with a single film body.
As described above, in the first embodiment, the gas-permeable film MA is interposed between the vertical space RV and the degassing space Q, the gas-permeable film MB is interposed between the common liquid chamber SR and the degassing space Q, and the gas-permeable film MC is interposed between the space RF1 and the degassing space Q. In other words, the air bubbles that passed through each of the gas-permeable film MA, the gas-permeable film MB, and the gas-permeable film MC reach the common degassing space Q. Therefore, there is an advantage in that the structure for discharging the air bubbles is simplified, compared to a configuration in which the air bubbles extracted in each unit of the liquid ejecting unit 40 are supplied to each individual space.
As illustrated in
The degassing path 75 according to the first embodiment is connected to the path for coupling the pressure adjustment mechanism 18 and the control chamber RC of the valve mechanism unit 41. In other words, the path connected to the pressure adjustment mechanism 18 is branched into two systems, and one of the two systems is connected to the control chamber RC and the other of the two systems is connected to the degassing path 75.
As illustrated in
The end of the discharge path 76 that is opposite to the liquid ejecting unit 40 is connected to a closing valve 78. The position at which the closing valve 78 is provided is arbitrary, but the configuration in which the closing valve 78 is provided in the distribution flow path 36 is illustrated in
The operation of the liquid ejecting unit 40 will be described focusing on the discharge of the air bubble from the internal flow path. As illustrated in
In the above state, the liquid pressure feed mechanism 16 pressure-feeds the ink stored in the liquid container 14 to the internal flow path of the liquid ejecting unit 40. Specifically, the ink that is pressure-fed from the liquid pressure feed mechanism 16 is supplied to the vertical space RV via the opening/closing valve B[1] in the open state, and supplied from the vertical space RV to the common liquid chamber SR and each pressure chamber SC. As described above, since the closing valve 78 is opened, the air that is present in the internal flow path before the execution of the initial filling passes through the discharge path 76 and the closing valve 78, and is discharged to the outside of the apparatus, at the same timing of filling the internal flow path and the discharge path 76 with the ink. Therefore, the entire internal flow path including the common liquid chamber SR and each pressure chamber SC of the liquid ejecting unit 40 is filled with the ink, and thus the nozzles N can eject the ink by the operation of the piezoelectric element 484. As described above, in the first embodiment, the closing valve 78 is opened when the ink is pressure-fed from the liquid pressure feed mechanism 16 to the liquid ejecting unit 40, and thus it is possible to efficiently fill the internal flow path of the liquid ejecting unit 40 with the ink. When the initial filling described above is completed, the pressurization operation by the pressure adjustment mechanism 18 is stopped, and the closing valve 78 is closed.
As illustrated in
In the operating state illustrated in
When the degassing path 75 is depressurized, the valve body 742 of the check valve 74 is separated from the valve seat 741 against biasing by the spring 743, and the degassing space Q and the degassing path 75 communicate with each other via the communication hole HB. Therefore, the air in the degassing space Q is discharged to the outside of the apparatus via the degassing path 75. On the other hand, although the bag-shaped body 73 contracts by depressurization in the internal space, there is no influence on the pressure in the control chamber RC (further the movable film 71), and thus the opening/closing valve B[1] is maintained in a state of being closed.
As described above, in the first embodiment, the pressure adjustment mechanism 18 is commonly used in the opening/closing of the opening/closing valve B[1] and the opening/closing of the check valve 74, and thus there is an advantage in that the configuration for controlling the opening/closing valve B[1] and the check valve 74 is simplified, compared to a configuration in which the opening/closing valve B[1] and the check valve 74 are controlled by each individual mechanism.
The specific configuration of the closing valve 78 in the first embodiment will be described.
The sealing portion 783 is a ring-shaped member that is formed with an elastic material such as rubber or the like, and is provided at one end side of the internal space of the communication tube 781 so as to be concentrical with the communication tube 781. The moving object 782 is a member that is movable in the direction of the center axis of the communication tube 781 in the inside of the communication tube 781. As illustrated in
In the stage of the initial filling illustrated in
In the stage of the initial filling, as illustrated in
As described above with reference to
In the first embodiment, the portion between the outer peripheral surface of the valve opening unit 80 and the inner peripheral surface of the discharge path 76 (the inner peripheral surface of the communication tube 781) is sealed by the sealing portion 783, and thus it is possible to reduce the possibility that the ink leaks via the gap between the outer peripheral surface of the valve opening unit 80 and the inner peripheral surface of the discharge path 76. In addition, in the first embodiment, the sealing portion 783 is commonly used in the sealing between the outer peripheral surface of the valve opening unit 80 and the inner peripheral surface of the discharge path 76, and in the sealing between the moving object 782 and the inner peripheral surface of the discharge path 76. Therefore, there is an advantage in that the structure of the closing valve 78 is simplified, compared to a configuration in which each individual member is used in both sealing.
A second embodiment according to the invention will be described. In each configuration to be described below, elements having the same operation or function as that of the first embodiment are denoted by the same reference numerals used in the description of the first embodiment, and the detailed description thereof will not be appropriately repeated.
As in the first embodiment, in the configuration in which the transmission line 56 is bonded to the surface that is opposite to the connection portion 546 and the surface that is opposite to the connection portion 526, there is a need to form a conduction hole (via hole) for electrically connecting the connection portion 546 and the transmission line 56 on the wiring substrate 544, and form a conduction hole for electrically connecting the connection portion 526 and the transmission line 56 on the wiring substrate 524. In the second embodiment, one end of the transmission line 56 is bonded to the surface of the wiring substrate 544 that is at the connection portion 546 side, and the other end of the transmission line 56 is bonded to the surface of the wiring substrate 524 that is at the connection portion 526 side. Thus, there is an advantage in that there is no need to form the conduction holes on the surface of the wiring substrate 544 and on the surface of the wiring substrate 524.
As can be understood from the above description, the transmission line 56 in the first embodiment and the second embodiment and the connection portion 58 in the third embodiment are generically expressed as the connector body that is provided between the connection portion 546 and the liquid ejecting unit 40 so as to absorb the error in the position between the connection portion 546 and the liquid ejecting unit 40, and that couples the connection portion 546 and the liquid ejecting unit 40.
In the process of the initial filling, the control unit 20 according to the fourth embodiment controls the pressure-feed by the liquid pressure feed mechanism 16 according to the detection result by the liquid level sensor 92. Specifically, in a case where the liquid level detected by the liquid level sensor 92 is lower than a predetermined reference position, the liquid pressure feed mechanism 16 continues the pressure-feed of the ink to the liquid ejecting unit 40. On the other hand, in a case where the liquid level detected by the liquid level sensor 92 is higher than the reference position, the liquid pressure feed mechanism 16 stops the pressure-feed of the ink to the liquid ejecting unit 40.
In the fourth embodiment, the pressure-feed of the ink by the liquid pressure feed mechanism 16 is controlled according to the detection result of the liquid level in the communication flow path 822 by the liquid level sensor 92, and thus it is possible to suppress excessive supply of the ink to the liquid ejecting unit 40.
In a fifth embodiment, a configuration that controls the operation of the liquid pressure feed mechanism 16 according to the detection result of the liquid level in the communication flow path 822 is illustrated. In the process of the initial filling illustrated in
In the fifth embodiment, the pressure-feed of the ink by the liquid pressure feed mechanism 16 is controlled according to the detection result of the ink discharged from the nozzles of the liquid ejecting unit 40, and thus it is possible to suppress excessive supply of the ink to the liquid ejecting unit 40.
Each embodiment described above may be variously modified. The specific modification forms will be described below. Two or more forms that are arbitrarily selected from the following examples may be appropriately combined with each other within a range in which the forms are not inconsistent with each other.
(1) It is also possible to discharge the air bubble from the nozzles N by sucking the ink of the internal flow path of the liquid ejecting head 24 from the nozzles N side, in addition to the discharge of the air bubble via the degassing path 75 and the discharge path 76. More specifically, the air bubble is discharged from the nozzles N together with the ink by sealing the ejecting face J with a cap and depressurizing the space between the ejecting face J and the cap. The discharge via the degassing path 75 and the discharge path 76 illustrated in each embodiment described above is effective for the air bubble that is present in the internal flow path of the flow path structure which is configured with the valve mechanism unit 41, the flow path unit 42, and the housing portion 485 of the liquid ejecting portion 44. The discharge by the suction from the nozzles N side is effective for the air bubble that is present in the flow path of the liquid ejecting portion 44 from the branch flow path 481B to the nozzles N.
(2) In each embodiment described above, although the configuration in which the ejecting face J includes the first portion P1, the second portion P2, and the third portion P3 is illustrated, one of the second portion P2 and the third portion P3 may be omitted. In each embodiment described above, although the configuration in which the second portion P2 is positioned at the opposite side of the third portion P3 interposing the center line y is illustrated, the second portion P2 and the third portion P3 may be positioned at the same side with respect to the center line y.
(3) The shape of the beam-shaped portion 62 (or the shape of the opening portion 60) in the first support body 242 is not limited to the shape illustrated in each embodiment described above. For example, in each embodiment described above, although the beam-shaped portion 62 having the shape in which the first support portion 621, the second support portion 622, and the intermediate portion 623 are coupled with each other is illustrated, the beam-shaped portion 62 having the shape in which the intermediate portion 623 is omitted (shape in which the first support portion 621 and the second support portion 622 are separated from each other) may be formed in the first support body 242.
(4) In each embodiment described above, although the serial-type liquid ejecting apparatus 100 in which the transport body 262 equipped with the liquid ejecting head 24 is moved in the X-direction is illustrated, the invention may be applied to the line-type liquid ejecting apparatus in which the plurality of nozzles N of the liquid ejecting head 24 are distributed over the entire width of the medium 12. In the line-type liquid ejecting apparatus, the movement mechanism 26 illustrated in each embodiment described above may be omitted.
(5) The element that applies pressure to the inside of the pressure chamber SC (driving element) is not limited to the piezoelectric element 484 illustrated in each embodiment described above. For example, a heating element that changes pressure by generating air bubbles to the inside of the pressure chamber SC by heating may be used as the driving element. As can be understood from the above description, the driving element is generically expressed as the element for ejecting liquid (typically, the element that applies pressure to the inside of the pressure chamber SC), and the operating type (piezoelectric type/heating type) and the specific configuration do not matter.
(6) In each embodiment described above, although the connection portions (328, 384, 526, 546) used for electrical connection are illustrated, the invention may be applied to the connection portion for connecting the flow paths through which liquid such as ink or the like circulates. In other words, the connector body according to the invention includes an element that connects the flow path of the first connection portion and the flow path of the liquid ejecting unit (for example, a tube that is formed with an elastic material), in addition to the element that electrically connects the first connection portion and the liquid ejecting unit (for example, the transmission line 56).
A sixth embodiment according to the invention will be described. The same members as those of the embodiments described above are denoted by the same reference numerals and the description thereof will not be repeated.
Further, similarly to the first embodiment, the degassing path 75 is branched in the middle, and commonly communicates with the inside of the bag-shaped body 73 provided in the control chamber RC and the degassing space Q. In other words, a branch point 75a at which the degassing path 75 is branched is provided in the degassing path 75. The branch point 75a and the inside of the bag-shaped body 73 provided in the control chamber RC are provided so as to communicate with each other, and the branch point 75a and the degassing space Q are provided so as to communicate with each other. In the present embodiment, the inside of the bag-shaped body 73 that communicates with the branch point 75a corresponds to a first chamber, and the degassing space Q corresponds to a second chamber.
The branch point 75a of the degassing path 75 is connected to the pressure adjustment mechanism 18 via the distribution flow path 36 that is connected to a second connection port 75b. In other words, the pressure adjustment mechanism 18 is connected to the second connection port 75b via the distribution flow path 36, the second connection port 75b being a connection port of one flow path before the degassing path 75 is branched into two.
As described above, the pressure adjustment mechanism 18 can select the pressurization operation (pressurization mode) and the depressurization operation (depressurization mode) according to the instruction from the control unit 20 as a control unit, the pressurization operation for supplying the second fluid such as air or the like to the degassing path 75 which is connected to the pressure adjustment mechanism 18, and the depressurization operation for depressurizing by the suction of the second fluid such as air or the like from the degassing path 75.
The internal space of the bag-shaped body 73 as a first chamber and the degassing path 75 are pressurized by the pressurization operation of the pressure adjustment mechanism 18. Therefore, the bag-shaped body 73 in the control chamber RC expands, and thus the bag-shaped body 73 presses the movable film 71. As a result, the valve body 722 is moved, and thus the space R1 and the space R2 communicate with each other. At this time, the check valve 74 according to the first embodiment is not provided between the degassing space Q and the degassing path 75, and thus the degassing space Q is also pressurized at the same time. However, the gas-permeable films MA and MB are provided between the degassing space Q and the vertical space RV and between the degassing space Q and the space RF1, and only the gas that passed through the gas-permeable films MA and MB is held in the degassing space Q, the vertical space RV and the space RF1 being the flow path of the ink. The pressurization operation of the pressure adjustment mechanism 18 is performed in a shorter time than the depressurization operation. For this reason, when the pressurization of the internal space of the bag-shaped body 73 as the first chamber is performed, even though the gas in the degassing space Q as the second chamber is pressurized, the gas of the second chamber is difficult to pass through the gas-permeable films MA and MB. Thus, the gas of the second chamber is difficult to enter into the vertical space RV and the space RF1 that are the flow paths of the ink.
The degassing space Q as the second chamber is depressurized by the depressurization operation of the pressure adjustment mechanism 18. As a result, the gas that is held in the degassing space Q is discharged via the degassing path 75. The second fluid in the first chamber is also depressurized by the depressurization operation of the pressure adjustment mechanism 18, and thus the bag-shaped body 73 contracts, that is, the volume of the bag-shaped body 73 contracts. Even though the bag-shaped body 73 contracts, there is no influence on the pressure in the control chamber RC, and thus the opening/closing valve B[1] is maintained in the closed state. The control chamber RC is opened to the atmosphere although not particularly illustrated, and thus, the state of the bag-shaped body 73, that is, the pressure in the control chamber RC by the expansion or the contraction does not change. In other words, the control chamber RC becomes a buffer chamber that does not communicate with the internal space of the bag-shaped body 73 as the first chamber and the degassing space Q as the second chamber. In a case where the control chamber RC as the buffer chamber is not provided, it is possible to suppress a change in the characteristics of the opening/closing valve B[1] without influencing the movable film 71 by the contraction of the bag-shaped body 73. Further, by the simple configuration in which the control chamber RC is opened to the atmosphere, it is possible to suppress a change in the characteristics of the opening/closing valve B[1] by the contraction of the bag-shaped body 73. Thus, a complicated configuration is not necessary, and it is possible to reduce the cost.
On the other hand, the flow path 79 to which the ink as the first fluid is supplied is connected to the liquid pressure feed mechanism 16 via the distribution flow path 36 connected to the first connection port 79a. In other words, the ink that is pressure-fed from the liquid pressure feed mechanism 16 via the first connection port 79a is supplied to the vertical space RV via the opening/closing valve B[1] in the opened state, and supplied to the common liquid chamber SR and each pressure chamber SC from the vertical space RV.
In this way, the pressurization of the internal space of the bag-shaped body 73 as the first chamber and the depressurization of the degassing space Q as the second chamber are performed by the single pressure adjustment mechanism 18 connected to the second connection port 75b. Therefore, when the liquid ejecting unit 40 is attached and detached, it is possible to easily attach and detach the liquid ejecting unit 40 only by connecting the liquid pressure feed mechanism 16 to the first connection port 79a for circulating the ink as the first fluid, and connecting the pressure adjustment mechanism 18 to the second connection port 75b for circulating the second fluid. In other words, only by connecting two of the first connection port 79a and the second connection port 75b, it is possible to attach and detach the liquid ejecting unit 40, thereby simplifying the attaching and detaching operations. In a case where the connection port to which a pressurization unit that pressurizes the first chamber is connected and the connection port to which a depressurization unit that depressurizes the second chamber is connected are individually provided, the connection of the total of three connection ports including the first connection port 79a should be performed, and thus the operation of attaching and detaching the connection ports becomes complicated. Further, in a case where the connection port for pressurization and the connection port for depressurization are individually provided, the pressurization unit such as a pressurization pump or the like and the depressurization unit such as a depressurization pump or the like should be provided for each connection port, and thus the cost becomes higher. In the present embodiment, the pressurization and the depressurization can be performed by the common second connection port 75b. Thus, it is possible to reduce the cost by only providing one pressure adjustment mechanism 18 that performs both of the pressurization and the depressurization.
In the present embodiment, although air as the second fluid is illustrated, the second fluid is not particularly limited thereto. As the second fluid, inert gas, liquid used for ink, liquid other than ink, or the like may be used. In the other embodiment in this specification are also similar.
In the present embodiment, although the opening/closing valve B[1] is opened by pressurizing the first chamber and expanding the bag-shaped body 73, the use of pressurizing the first chamber is particularly not limited thereto. For example, a so-called pressurization wiping that pressurizes the ink in the flow path by pressurizing the first chamber and wipes the ejecting face while the ink exudes from the nozzles N may be performed. In addition, by changing the volume of the damper chamber for absorbing the pressure variation in the flow path due to the pressurization of the first chamber, the characteristics of the damper chamber may be changed. In other words, the pressurization of the first chamber may be used for the purpose of changing the volume of the flow path through which the ink passes. Of course, the first chamber may also be used for another use other than for changing the volume of the flow path through which the ink passes. As another use, for example, the first chamber may be used to blow away the dust attached to the vicinity of the nozzles N by the second fluid, by opening the first chamber so as to face the nozzles N and blowing the second fluid from the opening using the pressurization of the first chamber.
Although the air bubble in the degassing space Q as the second chamber is removed by depressurizing the second chamber, the use of depressurizing the second chamber is particularly not limited thereto. For example, the second chamber may be used to collect the ink in the flow path together with the air bubble, by communicating with the flow path through which the ink passes via a one-way valve and opening the one-way valve at the time of depressurizing the second chamber. In other words, the second chamber may be used for the purpose of collecting the air bubble included in the ink. Of course, the second chamber may also be used for another use other than the purpose of collecting the air bubble included in the ink. As another use, for example, by changing the volume of the damper chamber for absorbing the pressure variation in the flow path due to the pressurization of the second chamber, the characteristics of the damper chamber may be changed. Furthermore, the second chamber may be used to remove the dust attached to the vicinity of the nozzles N by suction, by opening the second chamber so as to face the nozzles N and depressurizing the second chamber.
Further, the portion at which the first chamber and the movable film 71 are in contact with each other, that is, the portion at which the bag-shaped body 73 that includes the first chamber therein and the movable film 71 are in contact with each other, is preferably roughened. The portion at which the bag-shaped body 73 and the movable film 71 are in contact with each other being roughened means that at least one of the portion at which the bag-shaped body 73 is in contact with the movable film 71 and the portion at which the movable film 71 is in contact with the bag-shaped body 73 is roughened. Being roughened means that, for example, the abutting surface obtained by dry etching, blasting, wet etching, or the like is processed to have a rough surface or a film having a rough surface is formed. In this way, the portion at which the bag-shaped body 73 and the movable film 71 are in contact with each other is roughened, and thus it is possible to prevent the bag-shaped body 73 and the movable film 71 from sticking together by condensation or the like.
A seventh embodiment according to the invention will be described. The same members as those of the embodiments described above are denoted by the same reference numerals and the description thereof will not be repeated.
The bidirectional valve 18a is made of, for example, an electromagnetic valve or the like, and controlled so as to close the flow path at a predetermined timing by the control unit 20. Here, the timing at which the flow path is closed by the bidirectional valve 18a is a timing after the depressurization operation is performed by the pressure adjustment mechanism 18. In other words, the flow path is closed by the bidirectional valve 18a after the depressurization operation is performed by the pressure adjustment mechanism 18, and thus the depressurization state of the degassing path 75 and the degassing space Q is maintained.
In this way, even though the pressure adjustment mechanism 18 is not continuously driven, it is possible to maintain the depressurization state of the degassing space Q and the degassing path 75 by providing the bidirectional valve 18a. The depressurization state of the degassing space Q is maintained. Thus, the air bubble in the space RF1 is discharged to the degassing space Q via the gas-permeable film MC, and the air bubble in the vertical space RV is discharged to the degassing space Q via the gas-permeable film MA. After the depressurization state is maintained, the depressurization by the pressure adjustment mechanism 18 is performed and the bidirectional valve 18a is opened at a predetermined timing. Thus, the air bubble discharged to the degassing space Q is discharged to the outside from the second connection port 75b via the degassing path 75, that is, to the outside from the bidirectional valve 18a which is connected to the second connection port 75b and the pressure adjustment mechanism 18.
As described above, the depressurization maintaining unit that includes the bidirectional valve 18a and the pressure adjustment mechanism 18 is provided, and thus the depressurization state of the degassing space Q is maintained. Therefore, degassing of the air bubble included in the ink to the degassing space Q can be reliably performed over a long period of time. Further, since the depressurization state of the degassing space Q is maintained, there is no need to drive the pressure adjustment mechanism 18 all the time, and thus it is possible to reduce the power consumption.
In the present embodiment, the bidirectional valve 18a is connected to the second connection port 75b, that is, the bidirectional valve 18a is provided at the outside of the liquid ejecting unit 40, and thus it is possible to reduce the size of the liquid ejecting unit 40. The position at which the bidirectional valve 18a is provided is not particularly limited thereto. For example, the bidirectional valve 18a may be provided at the distribution flow path 36, and the bidirectional valve 18a may be provided at the valve mechanism unit 41, the flow path unit 42, or the like.
In the present embodiment, although the bidirectional valve 18a and the pressure adjustment mechanism 18 are provided as the depressurization maintaining unit, the depressurization maintaining unit is not particularly limited thereto. For example, the depressurization state of the degassing space Q as the second chamber may be maintained by constantly or intermittently driving the pressure adjustment mechanism 18 without providing the bidirectional valve 18a. In addition, similar to the first embodiment, the depressurization state of the degassing space Q as the second chamber may be maintained by providing the check valve 74 that is an one-way valve which allows only the flow from the degassing space Q to the degassing path 75 between the degassing space Q and the degassing path 75, and using the check valve 74. Here, as described above, the check valve 74 illustrated in
An eighth embodiment according to the invention will be described. The same members as those of the embodiments described above are denoted by the same reference numerals and the description thereof will not be repeated.
In the present embodiment, the zigzag path 75c is provided at the degassing path 75 between the branch point 75a and the degassing space Q as the second chamber. Thus, it is possible to perform the pressurization operation and the depressurization operation by the pressure adjustment mechanism 18 at a low pressure, compared to a configuration in which the entire degassing path 75 is configured by the zigzag path 75c. In other words, when all of the degassing path 75 is configured by the zigzag path 75c, since the path length of the degassing path 75 becomes longer, there is a need to perform the pressurization operation and the depressurization operation by the pressure adjustment mechanism 18 at a high pressure, or drive the pressure adjustment mechanism 18 at a low pressure over a long period of time. In order to output such a high pressure, the size and the cost of the pressure adjustment mechanism 18 increases. In a case where the pressure adjustment mechanism 18 is driven at a low pressure over a long period of time, since it takes some time for the pressurization operation and the depressurization operation, there is a problem that the print waiting time becomes longer or the like. In the present embodiment, only the degassing path 75 between the branch point 75a and the degassing space Q as the second chamber is configured by the zigzag path 75c, and thus it is possible to perform the pressurization operation and the depressurization operation by the pressure adjustment mechanism 18 at a low pressure in a short period of time. Therefore, it is possible to suppress the increase in size and cost and shorten the print waiting time by shortening the time for the pressurization operation and the depressurization operation. Of course, the degassing path 75 between the branch point 75a and the second connection port 75b may be configured by the zigzag path, and all of the degassing path 75 may be configured by the zigzag path.
A ninth embodiment according to the invention will be described. The same members as those of the embodiments described above are denoted by the same reference numerals and the description thereof will not be repeated.
In this way, the first regulating portions 42a are provided, and thus, when the degassing space Q as the second chamber is depressurized, the deformation of the gas-permeable films MA and MC to the degassing space Q side is regulated. Therefore, it is possible to suppress the decrease of the volume of the degassing space Q.
In addition, the second regulating portions 42b are provided, and thus, when the degassing space Q as the second chamber is pressurized, the deformation of the gas-permeable films MA and MC to the side that is opposite to the degassing space Q is regulated. Therefore, it is possible to suppress an increase in the volume of the degassing space Q.
In other words, the plurality of beam-shaped first regulating portions 42a and the plurality of beam-shaped second regulating portions 42b are provided, and thus the deformation of the gas-permeable films MA and MC is regulated by the first regulating portions 42a and the second regulating portions 42b, without inhibiting the gas from passing through the gas-permeable films MA and MC by the first regulating portions 42a and the second regulating portions 42b. Therefore, it is possible to prevent the gas-permeable films MA and MC from being damaged due to the deformation of the gas-permeable films MA and MC.
The first regulating portions 42a and the second regulating portions 42b are not limited to those described above, as long as the first regulating portions 42a and the second regulating portions 42b can suppress the expansion and the contraction of the degassing space Q as the second chamber. The first regulating portions 42a and the second regulating portions 42b may be one in which a plurality of beam-shaped regulating portions are combined with each other in a grid shape, that is, one in which a plurality of beam-shaped regulating portions are provided in a mesh shape. The first regulating portions 42a and the second regulating portions 42b may be convex portions or the like protruding from the wall surfaces that faces the gas-permeable films MA and MC.
A tenth embodiment according to the invention will be described. The same members as those of the embodiments described above are denoted by the same reference numerals and the description thereof will not be repeated.
A third regulating portion 42c protruding toward the bag-shaped body 73 is provided on the surface of the degassing path 75 that faces the bag-shaped body 73. The third regulating portion 42c is provided, and thus, when the degassing path 75 is depressurized, it is possible to regulate the deformation of the bag-shaped body 73 to the side that is opposite to the movable film 71. As described above, in a case where the bag-shaped body 73 is deformed in a bag shape, although the first chamber is the internal space of the bag-shaped body 73, since the bag-shaped body 73 has a plate shape in a normal use, the first chamber becomes the degassing path 75. When the degassing path 75 is depressurized, the third regulating portion 42c regulates the decrease of the volume of the degassing path 75 as the first chamber.
In this way, since the third regulating portion 42c is provided on the side of the bag-shaped body 73 that is opposite to the movable film 71, the third regulating portion 42c does not inhibit the bag-shaped body 73 from being deformed during pressurization, and the third regulating portion 42c regulates the deformation of the bag-shaped body 73 during depressurization. Therefore, it is possible to prevent the bag-shaped body 73 from being damaged due to the deformation of the bag-shaped body 73. As in the first regulating portion 42a and the second regulating portion 42b, the third regulating portion 42c may be one in which regulating portions are provided in a beam shape.
As described above, in a case where the first chamber is used in order to open the opening/closing valve B[1] by the pressurization to the first chamber, perform a so-called pressure wiping, or change the characteristics of the damper chamber, at least a portion of the first chamber is preferably formed by a flexible member such as rubber, elastomer, or the like. In a case where a flexible member is used for a portion of the first chamber, the other portion of the first chamber may be formed by a thermosetting resin, metal, or the like. In a case where the first chamber is used in order to blow away the dust attached to the vicinity of the nozzles N by the second fluid using the pressurization to the first chamber, the first chamber is preferably formed by a thermosetting resin, metal, or the like.
In a case where the second chamber is used in order to remove the air bubble in the degassing space Q by the depressurization of the second chamber, at least a portion of the second chamber is preferably formed by a sheet-shaped gas-permeable member (for example, a thin film of polyacetal, polypropylene, polyphenylene ether, or the like), or a rigid wall having a thickness enough to exhibit gas permeability (for example, a rigid wall obtained by forming the flow path unit 42 including gas-permeable partitions with a plastic material such as POM (polyacetal), m-PPE (modified polyphenylene ether), PP (polypropylene), or the like, or alloys of these materials, and typically making the thickness of the rigid wall to approximately 0.5 mm). Alternatively, in a case where the room that communicates with the room formed by the sheet-shaped member or the rigid wall via a valve corresponds to the second chamber, the second chamber may be formed by a thermosetting resin, metal, or the like. In a case where the second chamber is used in order to remove the dust attached to the vicinity of the nozzles N by suction using the depressurization to the second chamber, the second chamber is preferably formed by a thermosetting resin, metal, or the like. That is, it is preferable that at least a portion of the first chamber and at least a portion of the second chamber are formed by a different member.
As described above, in a case where the first chamber is used in order to open the opening/closing valve B[1] by the pressurization to the first chamber, perform a so-called pressure wiping, or change the characteristics of the damper chamber, the first chamber is preferably adjacent to the flow path of the first fluid. In a case where the first chamber is used in order to blow away the dust attached to the vicinity of the nozzles N by the second fluid using the pressurization to the first chamber, the first chamber may not be adjacent to the flow path of the first fluid. Hereupon if changing a pressure in the first chamber results in changing a pressure in the flow path of the first fluid, both of them may be alleged to be adjacent to each other. When both of them are adjacent to each other, it is possible to transmit effectively the pressure change in the first chamber through the flow path of the first fluid.
In a case where the second chamber is used in order to remove the air bubble in the degassing space Q by the depressurization of the second chamber, the second chamber is preferably adjacent to the flow path of the first fluid. In a case where the second chamber is used in order to remove the dust attached to the vicinity of the nozzles N by suction using the depressurization to the second chamber, the second chamber may not be adjacent to the flow path of the first fluid. Hereupon if changing a pressure in the second chamber results in changing a pressure in the flow path of the first fluid, both of them may be alleged to be adjacent to each other. When both of them are adjacent to each other, it is possible to transmit effectively the pressure change in the second chamber through the flow path of the first fluid.
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