This application claims benefit of Provisional Appln. 60/063,902 filed Oct. 31, 1997.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4566781 | Kuehnle | Jan 1986 | |
| 4686936 | Chow | Aug 1987 | |
| 5028964 | Landa et al. | Jul 1991 | |
| 5255058 | Pinhas et al. | Oct 1993 | |
| 5409557 | Mammino et al. | Apr 1995 | |
| 5424813 | Schlueter et al. | Jun 1995 | |
| 5559588 | Larson et al. | Sep 1996 | |
| 5655192 | Denton et al. | Aug 1997 | |
| 5708937 | Lestrange et al. | Jan 1998 | |
| 5758237 | Abramsohn | May 1998 | |
| 5815779 | Abramsohn | Sep 1998 | |
| 5835826 | Okada et al. | Nov 1998 |
| Number | Date | Country |
|---|---|---|
| 8-044120 | Feb 1996 | JPX |
| Entry |
|---|
| U.S. Provisional Patent Application 60/063937, filed Oct. 31, 1997, now patent application 09/092,512, filed Jun. 5, 1998, entitled "Liquid Immersion Development Machine Having a Multiple Zone Image Development and Conditioning Apparatus." |