Claims
- 1. A liquid precursor for forming a metal oxide, said precursor comprising: a plurality of metal moieties in effective amounts for forming a layered superlattice material upon application said precursor to a substrate and heating; and a solvent comprising hexamethyl-disilazane.
- 2. A liquid precursor as in claim 1 wherein said solvent further includes a liquid selected from the group consisting of methyl ethyl ketone, isopropanal, methanol, tetrahydrofuran, xylene, n-butyl acetate, octane and 2-methoxyethanol.
Parent Case Info
This application is a division of application Ser. No. 08/714,774, filed 16 Sep. 1996.
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
5423285 |
Paz De Araujo et al. |
Jun 1995 |
|
5429673 |
Peterson et al. |
Jul 1995 |
|
5456945 |
McMillian et al. |
Oct 1995 |
|
Divisions (1)
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Number |
Date |
Country |
Parent |
714774 |
Sep 1996 |
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