Claims
- 1. A method of fabricating a thin film of a layered superlattice material, said method comprising the steps of:
- (a) providing a liquid precursor including: a plurality of metal moieties in effective amounts for forming a layered superlattice material; and hexamethyl-disilazane;
- (b) placing a substrate inside an enclosed deposition chamber;
- (c) producing a mist of said liquid precursor;
- (d) flowing said mist through said deposition chamber to form a layer of the precursor liquid on said substrate; and
- (e) treating the liquid layer deposited on said substrate to form a solid film of said layered superlattice material.
- 2. A method as in claim 1 wherein said step of flowing is performed while maintaining said deposition chamber at ambient temperature.
- 3. The method of claim 1 wherein said layered superlattice material comprises a material selected from the group consisting of strontium bismuth tantalate, strontium bismuth niobate, and strontium bismuth tantalum niobate.
- 4. The method of claim 1 wherein said metals include a metal selected from the group consisting of strontium, calcium, barium, bismuth, cadmium, lead, titanium, tantalum, hafnium, tungsten, niobium, zirconium, scandium, yttrium, lanthanum, antimony, chromium, and thallium.
Parent Case Info
This application is a division of application Ser. No. 08/714,774, filed 16 Sep. 1996, now allowed.
Divisions (1)
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Number |
Date |
Country |
Parent |
714774 |
Sep 1996 |
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