Number | Name | Date | Kind |
---|---|---|---|
3589949 | Nelson | Jun 1971 | |
3982967 | Ku et al. | Sep 1976 | |
4047976 | Bledsoe et al. | Sep 1977 | |
4113514 | Pankove et al. | Sep 1978 | |
4266986 | Benton et al. | May 1981 | |
4364779 | Kamgar et al. | Dec 1982 | |
4368083 | Bruel et al. | Jan 1983 |
Entry |
---|
Ohmura et al., Phys. Stat. Sol., 15a (1973) 93. |
IEEE Transactions on Electron Devices, vol. ED-22, No. 8, Aug. 1975, Current Gain Recovery in Silicon Nitride Passivated Planar Transistors by Hydrogen Implantation-Walter Kellner and Adolf Goetzberger. |
Journal of Vacuum Science Technology, 20(3), Mar. 1982, Passivation of Grain Boundaries in Silicon-C. H. Seager, D. J. Sharp, and J. K. G. Panitz. |