Hydrogenation or deuterisation

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H01L21/3003

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3003Hydrogenation or deuterisation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Hydrogen-passivated topological materials, devices, and methods
- Patent number 12,205,821
- Issue date Jan 21, 2025
- The United States of America as represented by the Secretary of the Army
- Patrick J. Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical tunneling field-effect transistor with enhanced current co...
- Patent number 12,199,171
- Issue date Jan 14, 2025
- National Technology & Engineering Solutions of Sandia, LLC
- Tzu-Ming Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
- Patent number 12,131,910
- Issue date Oct 29, 2024
- Kioxia Corporation
- Motoki Fujii
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Selective silicon dioxide removal using low pressure low bias deute...
- Patent number 12,057,319
- Issue date Aug 6, 2024
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,040,161
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Yasutoshi Tsubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 11,955,340
- Issue date Apr 9, 2024
- SK hynix Inc.
- Dae Hee Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,935,745
- Issue date Mar 19, 2024
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for radical and thermal processing of substrates
- Patent number 11,823,901
- Issue date Nov 21, 2023
- Applied Materials Inc.
- Xinming Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for the treatment of workpieces
- Patent number 11,791,181
- Issue date Oct 17, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective oxidation and simplified pre-clean
- Patent number 11,776,805
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for increasing germanium concentration of surfaces of a sil...
- Patent number 11,721,745
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Che-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 11,710,639
- Issue date Jul 25, 2023
- SK hynix Inc.
- Dae Hee Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and systems for substrate processing for lowering contact...
- Patent number 11,670,513
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Yueh Sheng Ow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,640,907
- Issue date May 2, 2023
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for radical and thermal processing of substrates
- Patent number 11,587,789
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Xinming Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deuterium-containing films
- Patent number 11,508,584
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 11,462,545
- Issue date Oct 4, 2022
- SK Hynix Inc.
- Il-Sik Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for forming dielectric isolated FinFET with im...
- Patent number 11,430,879
- Issue date Aug 30, 2022
- Tessera, Inc.
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, apparatuses and systems for substrate processing for lower...
- Patent number 11,328,929
- Issue date May 10, 2022
- Applied Materials, Inc.
- Yueh Sheng Ow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivation of nonlinear optical crystals
- Patent number 11,227,770
- Issue date Jan 18, 2022
- KLA Corporation
- Yung-Ho Alex Chuang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,107,687
- Issue date Aug 31, 2021
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap fill deposition process
- Patent number 11,101,174
- Issue date Aug 24, 2021
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deuterium-based passivation of non-planar transistor interfaces
- Patent number 11,094,785
- Issue date Aug 17, 2021
- Intel Corporation
- Prashant Majhi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,094,810
- Issue date Aug 17, 2021
- Fuji Electric Co., Ltd.
- Tatsuya Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Array substrate, manufacturing method thereof and display device us...
- Patent number 11,069,724
- Issue date Jul 20, 2021
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Lei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment of silicon or silicon germanium surfaces using or...
- Patent number 11,062,910
- Issue date Jul 13, 2021
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for increasing germanium concentration of FIN and resulting...
- Patent number 11,011,623
- Issue date May 18, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Che-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structures, systems and methods for electrical charge transport acr...
- Patent number 10,985,204
- Issue date Apr 20, 2021
- G-ray Switzerland SA
- Hans Von Känel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for etching a structure for semiconductor applications
- Patent number 10,957,533
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment of carbon containing films using organic radicals
- Patent number 10,910,228
- Issue date Feb 2, 2021
- Mattson Technolgoy, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...
- Publication number 20240355636
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES
- Publication number 20240087889
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Xinming ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR INCREASING GERMANIUM CONCENTRATION OF SURFACES OF A SIL...
- Publication number 20230343858
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230317461
- Publication date Oct 5, 2023
- SK HYNIX INC.
- Dae Hee HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20230187212
- Publication date Jun 15, 2023
- SK HYNIX INC.
- Se Ra HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL MEMORY DEVICE AND FABRICATION METHOD FOR ENHANCED...
- Publication number 20230139782
- Publication date May 4, 2023
- Yangtze Memory Technologies Co., Ltd.
- Qiguang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230111002
- Publication date Apr 13, 2023
- Mitsubishi Electric Corporation
- Tomohiro TAMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230081402
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Hwanyeol PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20230037450
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN-PASSIVATED TOPOLOGICAL MATERIALS, DEVICES, AND METHODS
- Publication number 20220375754
- Publication date Nov 24, 2022
- U.S. Army DEVCOM, Army Research Laboratory
- Patrick J. Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20220270885
- Publication date Aug 25, 2022
- KIOXIA Corporation
- Motoki FUJII
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20220059356
- Publication date Feb 24, 2022
- SK HYNIX INC.
- Dae Hee HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220005673
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...
- Publication number 20210358755
- Publication date Nov 18, 2021
- SUMCO CORPORATION
- Ryosuke OKUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE OXIDATION AND SIMPLIFIED PRE-CLEAN
- Publication number 20210287898
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES
- Publication number 20210280428
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Xinming ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Increasing Germanium Concentration of Fin and Resulting...
- Publication number 20210273080
- Publication date Sep 2, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEMS FOR SUBSTRATE PROCESSING FOR LOWERING CONTACT...
- Publication number 20210233773
- Publication date Jul 29, 2021
- Applied Materials, Inc.
- YUEH SHENG OW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAP FILL DEPOSITION PROCESS
- Publication number 20210111067
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Hao JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND STRUCTURE FOR FORMING DIELECTRIC ISOLATED FINFET WITH IM...
- Publication number 20210104620
- Publication date Apr 8, 2021
- Tessera, Inc.
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR THE TREATMENT OF WORKPIECES
- Publication number 20210082724
- Publication date Mar 18, 2021
- Mattson Technology, Inc.
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20200395218
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20200373418
- Publication date Nov 26, 2020
- Fuji Electric Co., Ltd.
- Tatsuya NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEUTERIUM-BASED PASSIVATION OF NON-PLANAR TRANSISTOR INTERFACES
- Publication number 20200286996
- Publication date Sep 10, 2020
- Intel Corporation
- PRASHANT MAJHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR CHANNEL HAVING VERTICALLY STACKED NANOSHEETS COUPLED BY...
- Publication number 20200274000
- Publication date Aug 27, 2020
- International Business Machines Corporation
- RUILONG XIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR ETCHING A STRUCTURE FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20200135459
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Hao JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROSILYLATION IN SEMICONDUCTOR PROCESSING
- Publication number 20200075340
- Publication date Mar 5, 2020
- Micron Technology, Inc.
- Matthew S. Thorum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ION FILTERING IN A MULTIPURPOSE CHAMBER
- Publication number 20200066491
- Publication date Feb 27, 2020
- International Business Machines Corporation
- Lawrence A. Clevenger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE MANUFACTURING METHOD AND DISPLAY DEVICE MANUFACTURIN...
- Publication number 20200058507
- Publication date Feb 20, 2020
- Ming-jen LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20200006530
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS

Hydrogenation or deuterisation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Hydrogen-passivated topological materials, devices, and methods

Vertical tunneling field-effect transistor with enhanced current co...

Semiconductor manufacturing apparatus and method of manufacturing s...

Selective silicon dioxide removal using low pressure low bias deute...

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device and method of manufacturing the same

Semiconductor epitaxial wafer and method of producing semiconductor...

System and method for radical and thermal processing of substrates

Methods for the treatment of workpieces

Selective oxidation and simplified pre-clean

Methods for increasing germanium concentration of surfaces of a sil...

Semiconductor device and method of manufacturing the same

Apparatus and systems for substrate processing for lowering contact...

Semiconductor epitaxial wafer and method of producing semiconductor...

System and method for radical and thermal processing of substrates

Deuterium-containing films

Semiconductor device and method for fabricating the same

Method and structure for forming dielectric isolated FinFET with im...

Methods, apparatuses and systems for substrate processing for lower...

Passivation of nonlinear optical crystals

Semiconductor epitaxial wafer and method of producing semiconductor...

Gap fill deposition process

Deuterium-based passivation of non-planar transistor interfaces

Semiconductor device and manufacturing method of semiconductor device

Array substrate, manufacturing method thereof and display device us...

Surface treatment of silicon or silicon germanium surfaces using or...

Method for increasing germanium concentration of FIN and resulting...

Structures, systems and methods for electrical charge transport acr...

Methods for etching a structure for semiconductor applications

Surface treatment of carbon containing films using organic radicals

Patents Applicationslast 30 patents

SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...

SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES

METHODS FOR INCREASING GERMANIUM CONCENTRATION OF SURFACES OF A SIL...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

THREE-DIMENSIONAL MEMORY DEVICE AND FABRICATION METHOD FOR ENHANCED...

SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

DEUTERIUM-CONTAINING FILMS

HYDROGEN-PASSIVATED TOPOLOGICAL MATERIALS, DEVICES, AND METHODS

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING SEMICONDUCTOR...

SELECTIVE OXIDATION AND SIMPLIFIED PRE-CLEAN

SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES

Method for Increasing Germanium Concentration of Fin and Resulting...

APPARATUS AND SYSTEMS FOR SUBSTRATE PROCESSING FOR LOWERING CONTACT...

GAP FILL DEPOSITION PROCESS

METHOD AND STRUCTURE FOR FORMING DIELECTRIC ISOLATED FINFET WITH IM...

METHODS FOR THE TREATMENT OF WORKPIECES

DEUTERIUM-CONTAINING FILMS

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

DEUTERIUM-BASED PASSIVATION OF NON-PLANAR TRANSISTOR INTERFACES

TRANSISTOR CHANNEL HAVING VERTICALLY STACKED NANOSHEETS COUPLED BY...

METHODS FOR ETCHING A STRUCTURE FOR SEMICONDUCTOR APPLICATIONS

HYDROSILYLATION IN SEMICONDUCTOR PROCESSING

SELECTIVE ION FILTERING IN A MULTIPURPOSE CHAMBER

DISPLAY DEVICE MANUFACTURING METHOD AND DISPLAY DEVICE MANUFACTURIN...

Semiconductor Device and Method