Other objects, features, embodiments and advantages will occur to those skilled in the art from the following description of preferred embodiments and the accompanying drawings, in which:
a and 1b are cross-sectional diagrams of conventional supply vessel systems with heating features positioned adjacent to the outer vessel wall.
Known techniques in the field of low vapor pressure high purity gas delivery systems fail to recognize that the key liquid level will vary depending on whether pressure degradation, vessel wall temperature increase or water level increase is most important. In the example cited in U.S. Pat. No. 6,025,576, allowing the liquid level to fall below the heater would cause the pressure to degrade and the water level to increase before the vessel is removed from service. The '576 patent also fails to recognize that the key liquid level will vary depending on equipment and operational parameters, such as heater configuration and vapor draw rate.
Co-pending and commonly assigned U.S. patent application Ser. No. 11/476,042, filed Jun. 28, 2006 describes, according to certain embodiments, a means for attaching heaters to the lower portion of a supply vessel containing low vapor pressure gas. This application states that known low vapor pressure gas supply systems can produce “hot spots” and vigorous low vapor pressure gas boiling, which can result in the delivery of contaminants to the customer. This application further describes the accumulation of moisture due to simple vapor/liquid equilibrium, and that, because of this equilibrium based moisture accumulation, a percentage of the low vapor pressure gas must be discarded (typically 10%-20%). The contents of this co-pending and commonly-assigned U.S. patent application are incorporated by reference in its entirety herein, as if made a part of the present application.
As a result, in known systems, the supply vessel is likely to be removed from service too early (i.e. prior to the on set of the challenges listed above) or too late (after the supply vessel wall temperature, water level or have exceeded acceptable limits). If the supply vessel is removed from service too early, some of the low vapor pressure gas that could be utilized will be wasted. If the supply vessel is removed from service too late, one of the key parameters could exceed acceptable limits. For example, the water level could become too high, which would have an adverse effect on the semiconductor, LED, LCD or solar cell manufacturer process, resulting in poor product quality or product loss. Allowing the water level to exceed acceptable limits could also increase the cost of ammonia purification downstream of the supply vessel at those sites where ammonia purification systems are utilized.
According to one embodiment of the present invention, the systems and apparatuses of the present invention recognize and use these variations to maximize low vapor pressure product utilization without negatively impacting the semiconductor, LCD, LED or solar cell manufacturing process.
It is difficult for conventional low vapor pressure gas supply systems to consistently meet semiconductor, LED, LCD and solar cell manufacturer requirements. For example, heat transfer becomes ineffective when a significant portion of the heat is applied to that portion of the supply vessel wall that is not in contact with liquid phase low vapor pressure gas. Experiments were conducted to determine the ability to transfer heat to liquid phase ammonia as the liquid level falls, causing the portion of the supply vessel wall that is in contact with liquid phase ammonia to decrease. While ammonia was selected for illustrative purposes, the methods and apparatuses of the present invention also lend significant advantage to the processing of gases including, but not limited to boron trichloride, carbon dioxide, chlorine, dichlorosilane, halocarbons, hydrogen bromide, hydrogen chloride, hydrogen fluoride, methylsilane, nitrous oxide, nitrogen trifluoride, trichlorosilane, and mixtures thereof. As depicted in
The key liquid level will also vary from system to system based on, for example, vapor draw rate, heater configuration, heater temperature and contact intimacy between the heater and supply vessel wall. For example, at low vapor draw rates, the key pressure liquid level will be lower than at high vapor draw rates, since the heater area required to maintain supply vessel pressure is lower at low vapor draw rates.
The supply vessel wall temperature may increase beyond design limits locally when a significant portion of the heat is applied to that portion of the supply vessel wall that is not in contact with liquid phase low vapor pressure gas. Experiments were conducted to determine the effect of liquid level on supply vessel wall temperature. The results are shown in
The low-volatility contaminant level in the vapor phase substantially exceeds equilibrium levels when a significant portion of the heat is applied to that portion of the supply vessel wall that is not in contact with liquid phase low vapor pressure gas. Because they do not evaporate readily, low-volatility contaminants preferentially remain in the liquid phase as vapor phase low vapor pressure gas is withdrawn from the supply vessel. As a result, as explained above, the low-volatility contaminant concentration in both the vapor and liquid phases increases with time.
The low-volatility contaminant level resulting from this phenomenon is referred to as the equilibrium contaminant level. Experiments were conducted to determine the low-volatility contaminant level observed in vapor ammonia drawn from the supply vessel as liquid level falls, causing the portion of the supply vessel that is in contact with liquid phase ammonia to decrease. In these experiments, the low-volatility contaminant was water. The results are shown in
As stated above, previously known systems fail to recognize that the key liquid level will vary depending on whether pressure degradation, vessel wall temperature increase or water level increase is most important. Allowing the liquid level to fall below the heater would cause the pressure to degrade and the water level to increase before the vessel is removed from service. Previous systems also fail to recognize that the key liquid level will vary depending on equipment and operational parameters, such as heater configuration and vapor draw rate. According to one preferred embodiment, the present invention recognizes and uses these variations to maximize low vapor pressure product utilization without negatively impacting the semiconductor, LCD, LED or solar cell manufacturing process.
Further, presently known methods and systems do not describe a means to maximize low vapor pressure gas utilization by maintaining a supply vessel in service until the moisture level, wall temperature or pressure exceed some value, and further fail to provide a means to identify the appropriate time to remove a supply vessel from service.
When the water concentration or supply vessel surface temperature exceeds a specified value or when the low vapor pressure fluid pressure falls below a specified value, the supply vessel is removed from service by discontinuing vapor flow from the first supply vessel and initiating vapor flow from a second supply vessel. The liquid level at which this occurs is located near the plane determined by the upper edges of the heaters.
According to one embodiment, the present invention provides a means to maximize low vapor pressure gas utilization without supply vessel pressure degradation, supply vessel overheating or high water level product delivery to the semiconductor, LCD, LED or solar cell manufacturer. Supply vessel overheating is an issue with respect to safe operation. Pressure degradation and high moisture level are an issue with respect to semiconductor, LCD, LED or solar cell yield.
As vapor phase ammonia is withdrawn from supply vessel 20 or 30, the supply vessel pressure is maintained using one or more heater systems 22 and 32 and a closed loop heater control means. Typically, a pressure transducer 23 or 33 monitors the supply vessel pressure and sends a signal to a programmable logic controller 24 or 34, where the signal is compared to a set point value. Based on the difference between these values, the energy delivered to supply vessel 20 or 30 from heater system 22 or 32 is adjusted. This facilitates vaporization of ammonia to sustain the required supply vessel pressure.
Although a number of heater types may be employed, a common heater type is a silicone rubber blanket heater. This silicone rubber blanket heater may be affixed to the vessel in a variety of ways. A typical silicon rubber heater is that available from Watlow Electric Manufacturing Company (St. Louis, Mo.). The heater preferably is installed so that its heat is evenly distributed to the bottom of the vessel and such that it does not rise to too high a level on the vessel. According to one embodiment of the present invention, a method for discontinuing flow from the vessel is used. If the heater rises to too high a level on the vessel, a significant portion of the ammonia will be wasted. The heater typically covers from about 5% to about 50% of the vessel circumference, preferably from about 10% to about 40% of the vessel circumference and most preferably from about 20% to about 35% of the vessel circumference. The silicone rubber heater typically operates at a temperature ranging from about 100 to about 500° F., preferably from about 120 to about 300° F. and most preferably from about 130 to about 200° F. Such a heating configuration is preferably used with a number of supply vessel types. For example, a horizontally mounted Y-cylinder, which initially contains approximately 500 lbs of ammonia, could be used.
Ammonia is withdrawn from supply vessel 20 or 30 until the mass remaining drops to from about 10% to about 30% of the original level. When this level is reached, the supply vessel is removed from service and the remaining liquid, which is referred to as the heel, is discarded. The heel is enriched in contaminants that have a lower vapor pressure than ammonia, such as water.
Preferred embodiments of the present invention are depicted in
The proposed control mechanisms can be applied to any size vessel, such as a T-cylinder, a Y-cylinder (ton container) or an ISO container, tube trailer or tanker that contains any desired liquid or two phase low vapor pressure gas, such as, for example, ammonia, thereby producing a vapor phase low vapor pressure gas stream. For example, ton containers are typically horizontally oriented and made from 4130X alloy steel and can contain, for example, 510 pounds of ammonia when filled to capacity. The vessels may be pre-filled and self-contained, or may be fillable from a source as would be readily understood by one skilled in the field of gas delivery systems.
A number of heater types may be used for delivering heat to the larger vessel. The most common are electrical resistance heaters, including blanket heaters, heating bars, cables and coils, band heaters, and heating wires. Heaters are preferably installed at the lower portion of the vessel and a heater controller preferably regulates the amount of heat delivered to the low vapor pressure gas maintaining the vapor output. Other potentially useful heater types include, for example, bath heaters, inductive heaters, heat exchangers that contain a heat transfer medium (such as, for example, silicone oil), etc.
Vapor low vapor pressure non-air gas leaving the second vessel may be further purified by, for example, adsorption, filtration or distillation means to further improve purity. It is further contemplated that the gas stream could be sent to a mist eliminator to remove any liquid phase low vapor pressure gas droplets that carry over from the supply vessel due to vigorous boiling. These droplets would be collected by a mist eliminator, and could be returned to the supply vessel by suitable delivery means, such as, for example, by gravity.
While the invention has been described in detail with reference to specific embodiments thereof, it will be apparent to one skilled in the field that various changes, modifications and substitutions can be made, and equivalents employed without departing from, and are intended to be included within, the scope of the claims.