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4-170510 | Jun 1992 | JPX |
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4388342 | Suzuki et al. | Jun 1983 | |
4419381 | Yamazaki | Dec 1983 | |
4436674 | McMenamin | Mar 1984 | |
4436770 | Nishizawa et al. | Mar 1984 | |
4576836 | Colmet et al. | Mar 1986 | |
4640221 | Barbee et al. | Feb 1987 | |
4668530 | Reif et al. | May 1987 | |
4761269 | Conger et al. | Aug 1988 | |
5069930 | Hussia et al. | Dec 1991 | |
5080928 | Klinedinst et al. | Jan 1992 | |
5190913 | Higashiqama et al. | Mar 1993 | |
5203925 | Shibuya et al. | Apr 1993 | |
5336356 | Ban et al. | Aug 1994 |
Number | Date | Country |
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222472 | Jan 1990 | JPX |
Entry |
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Silicon Processing for the VLSI Era, Stanley Wolf and Richard N. Tauber, vol. 1, pp. 164-166, (1986). |