Lower heat insulating cylinder for manufacturing semiconductor wafers

Information

  • Patent Grant
  • D574792
  • Patent Number
    D574,792
  • Date Filed
    Tuesday, February 20, 2007
    17 years ago
  • Date Issued
    Tuesday, August 12, 2008
    16 years ago
Abstract
Description


FIG. 1 is a perspective view of the design for a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;



FIG. 2 is a front view thereof;



FIG. 3 is a left side view thereof;



FIG. 4 is a right side view thereof;



FIG. 5 is a rear view thereof;



FIG. 6 is a top view thereof;



FIG. 7 is a bottom view thereof;



FIG. 8 is another top view thereof which shows sectional line 99;



FIG. 9 is a sectional view thereof along line 99 of FIG. 8; and,



FIG. 10 shows a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention in use wherein the broken line showing of the environment is for illustrative purpose only and forms no part of the claimed design.


Claims
  • The ornamental design for a lower heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
Priority Claims (1)
Number Date Country Kind
2006-022201 Aug 2006 JP national
US Referenced Citations (8)
Number Name Date Kind
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D405428 Ishii Feb 1999 S
6033215 Ohsawa Mar 2000 A
6171400 Wingo Jan 2001 B1
20020092815 Kim et al. Jul 2002 A1
20040069732 Huang et al. Apr 2004 A1
20050145584 Buckley et al. Jul 2005 A1