Claims
- 1. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing said lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to distribute said lubricant.
- 2. The method of claim 1, further comprising the step of:filtering said mixture using a Teflon filter having 1.0 micron pores.
- 3. The method of claim 1, further comprising the step of:curing said lubricant and solvent mixture to remove the majority of said solvent.
- 4. The method of claim 3, said curing step comprising the step of:heating said mixture to between 40 and 50° C.
- 5. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing a carboxylic acid lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to distribute said lubricant.
- 6. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing a perfluoroalkanoic acid lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to distribute said lubricant.
- 7. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing perfluorodecanoic acid lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to distribute said lubricant.
- 8. The method of claim 1, further comprising the step of:mixing a lubricant with an ethereal solvent.
- 9. The method of claim 1, further comprising the step of:mixing a lubricant with tetrahydrofuran.
- 10. The method of claim 1, further comprising the step of:mixing a lubricant with tert-butyl methyl ether.
- 11. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing a perfluoroalkanoic acid lubricant with an ethereal solvent; applying said lubricant and solvent mixture to an interior package surface; curing said lubricant and solvent mixture to remove at least some of said solvent; and sealing said micromechanical device package.
- 12. The method of claim 11, further comprising the step of:baking said sealed micromechanical device package to distribute said lubricant.
- 13. The method of claim 11, further comprising the step of:baking said sealed micromechanical device package to evaporate said lubricant.
- 14. A method applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing said lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to evaporate said lubricant.
- 15. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing a carboxylic acid lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to evaporate said lubricant.
- 16. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing a perfluoroalkanoic acid lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to evaporate said lubricant.
- 17. A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:mixing perfluorodecanoic acid lubricant with a suitable solvent; applying said lubricant and solvent mixture to an interior surface of said micromechanical device package; sealing said micromechanical device package; and baking said sealed micromechanical device package to evaporate said lubricant.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority under 35 USC 119(e)1 of provisional application No. 60/108,619 filed Nov. 16, 1998.
The following patents and/or commonly assigned patent applications are hereby incorporated herein by reference:
US Referenced Citations (5)
Foreign Referenced Citations (1)
Number |
Date |
Country |
0 845 301 A1 |
Jun 1998 |
EP |
Provisional Applications (1)
|
Number |
Date |
Country |
|
60/108619 |
Nov 1998 |
US |