Patent Application
20220168677
The present invention is related to mask machines, and in particular to a mask machine protection frame device with function of air filtering.
In the manufacturing process of semiconductor, mask machines are necessary devices. In operation of mask machine, clean air is an important factor so as to cause generated masks to be perfect and to be safely used in manufacturing of the semiconductor products.
In the prior art mask manufacturing environment, the mask machine is located in an opened space. Although air is filtered as the air is sucked from outer environment, but the air is not perfectly cleaned. As a result, the produced masks are not as pure as to be used in manufacturing of semiconductor safely.
Furthermore, a mask machine has complicated structure and the cost is high. If it is destroyed due to outer environment, the cost for repairing or buying a new one is great. Therefore, it is necessary to provide proper protection to the operation processes of the mask machine, such as fire proof or anti-electric statics. However, currently there are no environment which can provide these protection mechanisms to the operation of the mask machine.
Thus, it is the object of the present invention to provides a newly device which can provide a protect frame to the mask machine with the function of air filter, fire protection and anti-electric statics.
Accordingly, for improving above mentioned defects in the prior art, the object of the present invention is to provide a mask machine protection frame device with function of air filtering, wherein the outer frame is installed with air filter which serves to provide pure clean air of the mask machine. Outer sides of the outer frame are equipped with fire proof plates for preventing fire and increasing high temperature in the environment. Furthermore the fire proof plate is installed with an anti-electric static layer which has the function of preventing generation of static electrons so that the mask machine is not affected by static electrons. Therefore, the present invention provides a preferred environment to the operation of the mask machine.
To achieve above object, the present invention provides a mask machine protection frame device with function of air filtering including an outer frame being a hollow frame for receiving a mask machine therein; an outlook of the outer frame; and at least one air filter installed at an upper side of the outer frame for sucking outer air into the outer frame; the air filter including at least one fan and at least one filter device; the fan serving to suck outer air into the filter device for air filtering so as to flow out clean air; and the clean air then flowing to the mask machine. The outer frame can be installed with at least one fire proof plate and a surface of the fire proof plate is coated with an anti-electric static layer.
In order that those skilled in the art can further understand the present invention, a description will be provided in the following in details. However, these descriptions and the appended drawings are only used to cause those skilled in the art to understand the objects, features, and characteristics of the present invention, but not to be used to confine the scope and spirit of the present invention defined in the appended claims.
With reference to
An outer frame 10 is a hollow frame. An internal of the outer frame 10 serves for receiving a mask machine 100, as illustrated in
In the present invention, as illustrated in
As illustrated in
As shown in
As shown in
A door 50 is installed on the outer frame 10, preferably, on the front opening 21 of the outer frame 10. The door 50 includes two door plates 51. Each door plate 51 has a door opening 52 each of which is sealed by a fire proof plate 30. Therefore, when the door 50 is closed, it can seal an opening or at least one part of the outer frame 10. In this drawing, a lower side of the front opening 21 of the outer frame 10 is sealed by the door 50.
Surfaces of the fire proof plates 30 of the door 50 are coated with respective anti-electric static layers 40. The material of the fire proof plates 30 are made of fire proof material with functions of high temperature preventing and fire proof. The anti-electric static layers 40 of the fire proof plates 40 of the door 50 are made of anti-electric static material.
At least one air filter 60 is installed at an upper side of the outer frame 10 for sucking outer air into the outer frame 10. The air filter 60 includes at least one fan 61 and at least one filter device 62. The fan 61 serves to suck outer air into the filter device 62 for air filtering so as to flow out clean air. The clean air then flows to the mask machine. One example of the filtering device 60 is that it is an air filtering net which matches to the requirement of ULPA or HEPA.
At least one air filter 60 seals the upper opening 25 of the outer frame 10. The clean air flows through the mask machine 100 and then flow out from other openings of the outer frame 10.
In the embodiment of
As illustrated in
Advantages of the present invention are that the outer frame is installed with air filter which serves to provide pure clean air of the mask machine. Outer sides of the outer frame are equipped with fire proof plates for preventing fire and increasing high temperature in the environment. Furthermore the fire proof plate is installed with an anti-electric static layer which has the function of preventing generation of static electrons so that the mask machine is not affected by static electrons. Therefore, the present invention provides a preferred environment to the operation of the mask machine.
The present invention is thus described, it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the present invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.
