Number | Date | Country | Kind |
---|---|---|---|
6-182899 | Jul 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4720395 | Foster | Jan 1988 | |
4726963 | Ishihara et al. | Feb 1988 | |
4992306 | Hochberg et al. | Feb 1991 | |
5043224 | Jaccodine et al. | Aug 1991 | |
5231057 | Ooki et al. | Jul 1993 | |
5264396 | Thakur et al. | Nov 1993 |
Entry |
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Billy, Michel, "Nitrogens Compounds of Silicon Formed by the Reaction of Ammonium Halides with the Imide SiN.sub.2 H.sub.2 ", Compt. Rend., 248, 807-10 (1959). |
Billy, Michel, "Preparation and Definition of a Silicon Nitride", Ann. Chim. (Paris) [13], 4, 795-851 (1959). |