Claims
- 1. A mass spectrometer system comprising:
- an inductively coupled plasma ion source for generating ions in an ionization region;
- a vacuum chamber disposed in proximity to said ion source, said vacuum chamber having at least a pair of vacuum regions with a progressively reduced pressure from a front region to a back region of said pair, wherein the front region is adjacent to said ion source;
- an ion sampling device comprising an inlet and an outlet opening with a narrow passage therebetween, said passage defining a central axis of said device for transporting ions contained in gas from the ionization region to said vacuum chamber;
- a radio-frequency ion guide for passing ions to said back region, said ion guide positioned along a main axis within an intermediate region between the front and back regions and being adjacent to said outlet opening of said sampling device, wherein a space between the outlet opening of said ion sampling device and an entrance of said radio-frequency ion guide is defined an aerodynamic jet region; said aerodynamic jet region having a pressure in a range of about 10-10.sup.-4 torr; the central axis of said ion sampling device being tilted toward the main axis of said radio-frequency ion guide, whereby a trajectory of ion flow is altered by said ion guide and ions are directed along the main axis;
- means for introducing a buffer gas into a region adjacent to said radio-frequency ion guide; and
- mass analyzer for analyzing ions received from said radio-frequency ion guide, said mass analyzer positioned within the back region of said vacuum chamber.
- 2. The mass spectrometer system of claim 1, wherein the central axis of said ion sampling device approaches the main axis of said radio-frequency ion guide within the entrance of said ion source.
- 3. The mass spectrometer system of claim 1, wherein said ions source is an inductively coupled plasma ion source.
- 4. The mass spectrometer system of claim 3, further comprising a lens and a restrictor, said lens and restrictor are concentrically aligned for ion injection into said radio-frequency ion guide.
- 5. The mass spectrometer system of claim 4, wherein said restrictor is a skimmer.
- 6. The mass spectrometer system of claim 1, wherein said ion optical system further comprises a restrictor which is positioned in proximity to an entrance of said radio-frequency ion guide.
- 7. The mass spectrometer system of claim 1, wherein said buffer gas is an inert gas.
- 8. The mass spectrometer system of claim 7, wherein said inert gas is He.
- 9. The mass spectrometer system of claim 1, wherein said buffer gas is a chemically reacting gas.
- 10. The mass spectrometer system of claim 1, wherein said adjacent region is defined by an enclosure which surrounds at least a portion of said radio-frequently ion guide.
- 11. A mass spectrometer system comprising:
- an inductively coupled plasma ion source for generating ions in an ionization region;
- a vacuum chamber disposed in proximity to said ion source along a central axis, said vacuum chamber having at least a pair of vacuum regions with a progressively reduced pressure from a front region to a back region of said pair, wherein the front region is adjacent to said ion source;
- a nozzle for transporting ions contained in gas from the ionization region to the front region, said nozzle positioned along a central axis between said ion source and said vacuum chamber and having an ion sampling orifice;
- a radio-frequency ion guide for passing ions to said back region, said radio-frequency ion guide positioned along a main axis within an intermediate region between the front and back regions and being adjacent to said nozzle, wherein a space between said nozzle and an entrance of said ion guide defines an aerodynamic jet region, said aerodynamic jet region having a pressure in a range of about 10-10-4 torr; the central axis of said nozzle being positioned at an angle with respect to the main axis, whereby the trajectory of ion flow is altered by said guide and ions are guided along the main axis;
- means for introducing a buffer gas into a region adjacent to said radio-frequency ion guide; and
- mass analyzer for analyzing ions received from said radio-frequency ion guide, said mass analyzer positioned to receive ions from said ion guide within the back region of said vacuum chamber.
- 12. The mass spectrometer system of claim 11, further comprising a restrictor which is positioned in proximity to an entrance of said radio-frequency ion guide.
Parent Case Info
This is a divisional of the U.S. application Ser. No. 08/605,346 filed Feb. 16, 1996, now U.S. Pat. No. 5,672,868.
US Referenced Citations (2)
| Number |
Name |
Date |
Kind |
|
5481107 |
Takada et al. |
Jan 1996 |
|
|
5672868 |
Mordehai et al. |
Sep 1997 |
|
Foreign Referenced Citations (1)
| Number |
Date |
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| 0237259 |
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EPX |
Divisions (1)
|
Number |
Date |
Country |
| Parent |
605346 |
Feb 1996 |
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