Patent Application
20250029867
The present disclosure claims priority to and the benefit of Chinese Patent Application No. 202222866915.3, filed in the China National Intellectual Property Administration on Oct. 30, 2022, the disclosure of which is hereby incorporated by reference in its entirety.
The present disclosure relates to a technical field of silicon wafer transport, and in particular to a material frame unlocking device.
In a production process of silicon wafer, a silicon rod is first cut into a silicon wafer by a wire sawing machine, and the silicon wafer is attached to a crystal tray by a resin plate at this time. To realize automatic degumming of the wire-sawed silicon wafer, the crystal tray and the silicon wafer on the crystal tray need to be conveyed to the degumming machine for degumming, so that the silicon wafer is separated from the crystal tray, and then the separated silicon wafer is conveyed to the wafer inserting machine for separation and insertion of the wafer. In the above-described production process, it is necessary to transfer the silicon wafers through the silicon wafer turnover mechanism for a plurality of times, and the silicon wafers are always clamped by the clamping assembly in the material frame of the silicon wafer turnover mechanism, thereby preventing the silicon wafers from being toppled. However, in the wafer separation process, it is necessary to release the silicon wafer, and unclamp the silicon wafer from the clamping assembly. When unlocking of the material frame is performed manually, it is difficult to position, it takes a lot of time, and unlocking also needs constant force support, which is too demanding for workers.
In view of the above, a material frame unlocking device includes a material frame and an insert slot, a clamping mechanism for clamping a silicon wafer is arranged on the material frame, and an unlocking mechanism for fitting the clamping mechanism is arranged on the insert slot; the clamping mechanism includes two clamping rods capable of opening and closing movements, an end of each of the two clamping rods is provided with a connecting rod, a middle portion of the connecting rod is provided with a hinge point, and an elastic assembly is arranged at one end of the connecting rod away from respective clamping rod, when the elastic assembly is controlled by the unlocking mechanism, the connecting rod rotates around the hinge point, and the two clamping rods are opened to separate the two clamping rods from each other.
In some embodiments of the present disclosure, the elastic assembly includes: a movable rod hinged to the connecting rod, a fixing block provided on the material frame, wherein the fixing block is provided with a through hole and the movable rod passes through the through hole; and a spring sleeved on the movable rod, wherein one end of the spring abuts against the connecting rod and another end of the spring abuts against the fixing block.
In some embodiments of the present disclosure, the unlocking mechanism includes two unlocking latches capable of moving relative to each other, and a pushing assembly for driving the two unlocking latches to move, and when the pushing assembly drives the two unlocking latches to move toward each other, each of the two unlocking latches pushes one end of respective connecting rod away from the respective clamping rod, and the two clamping rods are opened.
In some embodiments of the present disclosure, the pushing assembly includes: a fixing plate; two racks arranged in parallel on the fixing plate; a plurality of rotating gears arranged between the two racks and meshed with the two racks, wherein the plurality of rotating gears are rotatably arranged on the fixing plate; and a driver for driving the two racks to move and arranged on the insert slot, wherein each of the two racks is provided with a positioning rod, and each of the two unlocking latches is arranged on respective positioning rod.
In some embodiments of the present disclosure, the driver includes an air cylinder fixed to the insert slot, and a piston rod protruding from the air cylinder is fixedly connected to one of the two racks.
In some embodiments of the present disclosure, a cover plate for protecting the racks and the rotating gears is disposed above the fixing plate.
In some embodiments of the present disclosure, each of two opposite ends of the each of the two clamping rods is provided with the connecting rod.
The technical solution in the embodiments of the present disclosure will be clearly and completely described with reference to the accompanying drawings.
The innovation of the present disclosure is that the opening and closing of the clamping rods is controlled by the unlocking mechanism, which does not require manual unlocking, with a high degree of automation and high unlocking efficiency.
As shown in
In operation, the clamping rods 3.1 clamp the silicon wafer due to the elastic force generated by the deformation of the spring 3.43, the piston rod of the air cylinder 4.261 drives one rack 4.22 to retract, the rack 4.22 drives the rotating gears 4.23 to rotate, and the other rack 4.22 is driven by the rotating gears 4.23 to move, the two racks 4.22 move toward each other synchronously, the two unlocking latches 4.1 move toward each other, the unlocking latches 4.1 push the connecting rods 3.2, the clamping rods 3.1 are opened to release the silicon wafer, and the piston rod of the air cylinder 4.261 is extended. Similarly, the unlocking latches 4.1 retract, the compressed spring 3.43 recovers, and the clamping rod 3.1 closes.
The technical solution of the present disclosure has the following advantages:
The described embodiments are only a part of the embodiments of the present disclosure, and not all of the embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without involving any inventive effort are within the scope of the present disclosure.
| Number | Date | Country | Kind |
|---|---|---|---|
| 202222866915.3 | Oct 2022 | CN | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2023/110426 | 7/31/2023 | WO |
