characterised by the mechanical construction of the susceptor, stage or support

Industry

CPC
H01L21/68785

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68785characterised by the mechanical construction of the susceptor, stage or support

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing chamber to accommodate parasitic plasma fo...
- Patent number 12,205,845
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Khokan Chandra Paul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Vision-based wafer pre-alignment platform and alignment method
- Patent number 12,205,325
- Issue date Jan 21, 2025
- WUXI XIVI SCIENCE AND TECHNOLOGY CO., LTD.
- Minjie Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Batch curing chamber with gas distribution and individual pumping
- Patent number 12,203,171
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Adib Khan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber
- Patent number 12,198,972
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yancheng Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover plate for covering the susceptor side facing the process cham...
- Patent number 12,180,590
- Issue date Dec 31, 2024
- Aixtron SE
- Benjamin David Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotatable thermal processing chamber
- Patent number 12,176,242
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate bonding apparatus and substrate bonding method
- Patent number 12,165,902
- Issue date Dec 10, 2024
- Nikon Corporation
- Hajime Mitsuishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for rotating substrates
- Patent number 12,165,907
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Giridhar Kamesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method of controlling vacuum proces...
- Patent number 12,165,908
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Screwless semiconductor processing chambers
- Patent number 12,165,909
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bo-Ru Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor for high-temperature use having shaft with low thermal co...
- Patent number 12,154,799
- Issue date Nov 26, 2024
- MiCo Ceramics Ltd.
- Jung Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for etching the periphery edge of a substrate comprising sub...
- Patent number 12,148,634
- Issue date Nov 19, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment with high temperature resistant...
- Patent number 12,128,494
- Issue date Oct 29, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Carrier device
- Patent number 12,131,941
- Issue date Oct 29, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Lei Zhao
- B08 - CLEANING
Information Patent Grant
Substrate drying device and method of drying substrate using the sa...
- Patent number 12,119,240
- Issue date Oct 15, 2024
- Samsung Electronics Co., Ltd.
- Ansook Sul
- B08 - CLEANING
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone semiconductor substrate supports
- Patent number 12,112,971
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Ian Bensco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, non-tr...
- Patent number 12,106,998
- Issue date Oct 1, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 12,106,994
- Issue date Oct 1, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method for dechucking wafer in the...
- Patent number 12,106,942
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Yi Rop Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbomolecular pump and cathode assembly for etching reactor
- Patent number 12,106,946
- Issue date Oct 1, 2024
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone azimuthal heater
- Patent number 12,100,603
- Issue date Sep 24, 2024
- Watlow Electric Manufacturing Company
- Kevin Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protection mechanism and method for protecting wafer and pin
- Patent number 12,094,755
- Issue date Sep 17, 2024
- PIOTECH INC.
- Huaqiang Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,087,609
- Issue date Sep 10, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 12,057,352
- Issue date Aug 6, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro Kitazawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WIDE-COVERAGE EDGE RING FOR ENHANCED SHIELDING IN SUBSTRATE PROCESS...
- Publication number 20250022691
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Shang-I CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VA...
- Publication number 20250019829
- Publication date Jan 16, 2025
- PlayNitride Display Co., Ltd.
- Yen-Lin LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250014939
- Publication date Jan 9, 2025
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250006473
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Yuki ONODERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CONTROLLING SUBSTRATE PRO...
- Publication number 20250006517
- Publication date Jan 2, 2025
- SEMES CO., LTD.
- Sang Min LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER
- Publication number 20250006546
- Publication date Jan 2, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER
- Publication number 20240426938
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...
- Publication number 20240426939
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240429068
- Publication date Dec 26, 2024
- Tokyo Electron Limited
- Yosuke KAWABUCHI
- B08 - CLEANING
Information Patent Application
ADJUSTABLE EDGE RING TILT FOR EDGE OF WAFER SKEW COMPENSATION
- Publication number 20240429089
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Peter MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...
- Publication number 20240420971
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240412999
- Publication date Dec 12, 2024
- MICO CERAMICS LTD.
- Junghyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
- Publication number 20240412984
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Ansook Sul
- B08 - CLEANING
Information Patent Application
MULTI-ZONE AZIMUTHAL HEATER
- Publication number 20240412988
- Publication date Dec 12, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Kevin SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK
- Publication number 20240412992
- Publication date Dec 12, 2024
- KLA Corporation
- Jaime Poris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID-STATE BONDING METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR CHU...
- Publication number 20240404869
- Publication date Dec 5, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Jason STEPHENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STANDING WAFER HOLDER
- Publication number 20240404868
- Publication date Dec 5, 2024
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Zhengting ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO-LED DISPLAY MANUFACTURING APPARATUS
- Publication number 20240395577
- Publication date Nov 28, 2024
- LG ELECTRONICS INC.
- Junghun RHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF SUBSTRATE SUPPORT DEVICES USING INORGANIC DIELECTRIC...
- Publication number 20240395591
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVE GRAVITY COMPENSATOR FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20240395596
- Publication date Nov 28, 2024
- ETEL S.A.
- Manish MITTAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKS WITH HYBRID PUCKS TO IMPROVE THERMAL PERFORMAN...
- Publication number 20240387224
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Yogananda Sarode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...
- Publication number 20240387234
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- JUNHYUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER BORE HOLE PLUG
- Publication number 20240387236
- Publication date Nov 21, 2024
- SCHUNK XYCARB TECHNOLOGY B.V.
- Moritz WIPPERLING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLET FOR PICKUP A SEMICONDUCTOR CHIP
- Publication number 20240387231
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Jungho PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING CHAMBER FOR METAL OXIDE REMOVAL
- Publication number 20240371685
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOCKABLE SUBSTRATE PROCESSING PEDESTAL FOR USE IN SEMICONDUCTOR FA...
- Publication number 20240371679
- Publication date Nov 7, 2024
- LAM RESEARCH CORPORATION
- Sky MULLENAUX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
- Publication number 20240355596
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLIPPING APPARATUS
- Publication number 20240347361
- Publication date Oct 17, 2024
- ACM RESEARCH (SHANGHAI), INC.
- He Wang
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the mechanical construction of the susceptor, stage or support

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor processing chamber to accommodate parasitic plasma fo...

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Vision-based wafer pre-alignment platform and alignment method

Batch curing chamber with gas distribution and individual pumping

Process chamber

Substrate processing chamber, substrate processing system including...

Cover plate for covering the susceptor side facing the process cham...

Rotatable thermal processing chamber

Substrate bonding apparatus and substrate bonding method

Apparatus for rotating substrates

Vacuum processing apparatus and method of controlling vacuum proces...

Multi zone spot heating in EPI

Screwless semiconductor processing chambers

Susceptor for high-temperature use having shaft with low thermal co...

Device for etching the periphery edge of a substrate comprising sub...

Semiconductor processing equipment with high temperature resistant...

Carrier device

Substrate drying device and method of drying substrate using the sa...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Susceptor arrangement of a CVD reactor

Multi-zone semiconductor substrate supports

Substrate processing apparatus, substrate processing method, non-tr...

Electrostatic chuck

Plasma processing apparatus and method for dechucking wafer in the...

Turbomolecular pump and cathode assembly for etching reactor

Multi-zone azimuthal heater

Protection mechanism and method for protecting wafer and pin

Wafer placement table

Permanent secondary erosion containment for electrostatic chuck bonds

Heat treatment method and heat treatment apparatus of light irradia...

Patents Applicationslast 30 patents

WIDE-COVERAGE EDGE RING FOR ENHANCED SHIELDING IN SUBSTRATE PROCESS...

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...

SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VA...

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF CONTROLLING SUBSTRATE PRO...

PROCESS CHAMBER

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ADJUSTABLE EDGE RING TILT FOR EDGE OF WAFER SKEW COMPENSATION

VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING THE SAME

SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME

MULTI-ZONE AZIMUTHAL HEATER

SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK

SOLID-STATE BONDING METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR CHU...

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

STANDING WAFER HOLDER

MICRO-LED DISPLAY MANUFACTURING APPARATUS

FABRICATION OF SUBSTRATE SUPPORT DEVICES USING INORGANIC DIELECTRIC...

PASSIVE GRAVITY COMPENSATOR FOR SEMICONDUCTOR EQUIPMENT

ELECTROSTATIC CHUCKS WITH HYBRID PUCKS TO IMPROVE THERMAL PERFORMAN...

SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...

SUBSTRATE CARRIER BORE HOLE PLUG

COLLET FOR PICKUP A SEMICONDUCTOR CHIP

CLEANING CHAMBER FOR METAL OXIDE REMOVAL

CLOCKABLE SUBSTRATE PROCESSING PEDESTAL FOR USE IN SEMICONDUCTOR FA...

TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR

FLIPPING APPARATUS