Claims
- 1. A material measure in the form of an amplitude grating, comprising:
a first reflecting layer; a second transparent layer; and a third layer, which is partially transparent to light, said third layer comprising a measuring graduation, wherein said second layer is arranged between said first layer and said third layer.
- 2. The material measure in accordance with claim 1, wherein said first layer is applied to a base layer.
- 3. The material measure in accordance with claim 1, wherein said first layer comprises gold.
- 4. The material measure in accordance with claim 1, wherein said second layer comprises SiO2.
- 5. The material measure in accordance with claim 3, wherein said second layer comprises SiO2.
- 6. The material measure in accordance with claim 1, wherein said third layer comprises chromium.
- 7. The material measure in accordance with claim 3, wherein said third layer comprises chromium.
- 8. The material measure in accordance with claim 4, wherein said third layer comprises chromium.
- 9. The material measure in accordance with claim 5, wherein said third layer comprises chromium.
- 10. The material measure in accordance with claim 1, wherein said third layer has a thickness d2 of less than 10 nm.
- 11. The material measure in accordance with claim 10, wherein said third layer has a thickness d2 of less than 5 nm.
- 12. The material measure in accordance with claim 1, wherein said third layer has a degree of reflection of less than 50%.
- 13. The material measure in accordance with claim 1, wherein said second layer has refractive index n and a thickness d2 that fits the inequality
d2<λ/(4·n), wherein λ is the wavelength of light that impinges upon said material measure.
- 14. A position measuring system, comprising:
a light source that generates light of a wavelength λ; and a material measure in the form of an amplitude grating that receives said light, wherein said material measure comprises:
a first reflecting layer; a second transparent layer having a refractive index n and a thickness d2; and a third layer, which is partially transparent to said light and said third layer comprises a measuring graduation, wherein said second layer is arranged between said first layer and said third layer and said thickness d2 fits the inequality d2<λ/(4·n).
- 15. The position measuring system in accordance with claim 14, wherein said first layer is applied to a base layer.
- 16. The position measuring system in accordance with claim 14, wherein said first layer comprises gold.
- 17. The position measuring system in accordance with claim 14, wherein said second layer comprises SiO2.
- 18. The position measuring system in accordance with claim 16, wherein said second layer comprises SiO2.
- 19. The position measuring system in accordance with claim 14, wherein said third layer comprises chromium.
- 20. The position measuring system in accordance with claim 16, wherein said third layer comprises chromium.
- 21. The position measuring system in accordance with claim 17, wherein said third layer comprises chromium.
- 22. The position measuring system in accordance with claim 18, wherein said third layer comprises chromium.
- 23. The position measuring system in accordance with claim 14, wherein said third layer has a thickness d2 of less than 10 nm.
- 24. The position measuring system in accordance with claim 23, wherein said third layer has a thickness d2 of less than 5 nm.
- 25. The position measuring system in accordance with claim 14, wherein said third layer has a degree of reflection of less than 50%.
Priority Claims (1)
Number |
Date |
Country |
Kind |
102 36 788.4 |
Aug 2002 |
DE |
|
Parent Case Info
[0001] Applicants claim, under 35 U.S.C. §119, the benefit of priority of the filing date of Aug. 10, 2002 of a German patent application, copy attached, Serial Number 102 36 788.4, filed on the aforementioned date, the entire contents of which is incorporated herein by reference.