Number | Date | Country | Kind |
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56-131921 | Aug 1981 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
2338129 | Moore | Jan 1944 | |
3974678 | Rooney et al. | Aug 1976 |
Entry |
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Puryayev et al., "An Interferometer for Monitoring Layer Thickness . . . " Sov. J. Optical Tech., vol. 40, No. 3, pp. 162-164, Mar. 1973. |