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Entry |
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Michael P. Schlax et al., “Stress mapping techniques for the SCALPEL mask membrane system”, 1999 SPIE Symposium on Emerging Lithographic Tech., vol. 3676, pp. 152-161, 1999. |
M.P. Schlax et al., “Thin film stress mapping using an integrated sensor”, J. Vac. Sci. Technologies, B 17(6), Nov./Dec. 1999, pp. 2714-2718. |