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G03F1/84
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F1/00
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof
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G03F1/84
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Patents Grants
last 30 patents
Information
Patent Grant
Reflective mask blank, and reflective mask
Patent number
12,353,121
Issue date
Jul 8, 2025
Shin-Etsu Chemical Co., Ltd.
Taiga Ogose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for qualifying a mask of a lithography system
Patent number
12,353,126
Issue date
Jul 8, 2025
Carl Zeiss SMT GmbH
Asad Rasool
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask including fiducial mark and method of making a photomask
Patent number
12,339,582
Issue date
Jun 24, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Hsin-Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for computational metrology and inspection for patterns to b...
Patent number
12,340,495
Issue date
Jun 24, 2025
D2S, Inc.
Linyong Pang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mask inspection apparatus and method for inspecting a mask having f...
Patent number
12,333,706
Issue date
Jun 17, 2025
Samsung Display Co., Ltd.
Dae Won Baek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
12,326,407
Issue date
Jun 10, 2025
ASML Netherlands B.V.
Nitish Kumar
G01 - MEASURING TESTING
Information
Patent Grant
Advanced load port for photolithography mask inspection tool
Patent number
12,298,664
Issue date
May 13, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Tung-Jung Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Structure and method of reticle pod having inspection window
Patent number
12,248,245
Issue date
Mar 11, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Wang Cheng Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Storage environment monitoring system and methods of operation
Patent number
12,174,528
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Wei Lu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process variability aware adaptive inspection and metrology
Patent number
12,092,965
Issue date
Sep 17, 2024
ASML Netherlands B.V.
Venugopal Vellanki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photomask inspection method and apparatus thereof
Patent number
12,072,621
Issue date
Aug 27, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Wei Wen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduction or elimination of pattern placement error in metrology me...
Patent number
12,013,634
Issue date
Jun 18, 2024
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology targets
Patent number
11,982,946
Issue date
May 14, 2024
ASML Netherlands B.V.
Nikhil Mehta
G01 - MEASURING TESTING
Information
Patent Grant
Debris removal from high aspect structures
Patent number
11,964,310
Issue date
Apr 23, 2024
Bruker Nano, Inc.
Tod Evan Robinson
B08 - CLEANING
Information
Patent Grant
EUV mask defect tool apparatus
Patent number
11,960,202
Issue date
Apr 16, 2024
EUV TECH, INC.
Chami N Perera
G01 - MEASURING TESTING
Information
Patent Grant
Advanced load port for photolithography mask inspection tool
Patent number
11,921,431
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tung-Jung Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for determining an effect of one or more pixel...
Patent number
11,914,289
Issue date
Feb 27, 2024
Carl Zeiss SMS Ltd.
Joachim Welte
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for extreme ultraviolet lithography mask treatment
Patent number
11,906,897
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring photomasks
Patent number
11,899,358
Issue date
Feb 13, 2024
Carl Zeiss SMT GmbH
Dmitry Simakov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for detecting an object structure and apparatus for carrying...
Patent number
11,892,769
Issue date
Feb 6, 2024
Carl Zeiss SMT GmbH
Beat Marco Mout
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for removing a single particulate from a subst...
Patent number
11,886,126
Issue date
Jan 30, 2024
Carl Zeiss SMT GmbH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for measuring a substrate for semiconductor lithography
Patent number
11,880,145
Issue date
Jan 23, 2024
Carl Zeiss SMT GmbH
Sven Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stochastic optical proximity corrections
Patent number
11,874,597
Issue date
Jan 16, 2024
Synopsys, Inc.
Zachary Levinson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection device for masks for semiconductor lithography and method
Patent number
11,867,642
Issue date
Jan 9, 2024
Carl Zeiss SMT GmbH
Holger Seitz
G01 - MEASURING TESTING
Information
Patent Grant
Photomask including fiducial mark and method of making a semiconduc...
Patent number
11,860,532
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsin-Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing reflective mask blank, reflective mask bla...
Patent number
11,852,964
Issue date
Dec 26, 2023
Hoya Corporation
Tsutomu Shoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
Patent number
11,852,583
Issue date
Dec 26, 2023
Samsung Electronics Co., Ltd.
Jongju Park
G01 - MEASURING TESTING
Information
Patent Grant
Image pickup apparatus and focus adjustment method using bending co...
Patent number
11,822,233
Issue date
Nov 21, 2023
Lasertec Corporation
Hiroki Miyai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement tool and methods for EUV lithography masks
Patent number
11,815,810
Issue date
Nov 14, 2023
Intel Corporation
Yoshihiro Tezuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contaminant detection metrology system, lithographic apparatus, and...
Patent number
11,803,119
Issue date
Oct 31, 2023
ASML Holding N.V.
Michal Emanuel Pawlowski
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
COMPREHENSIVE INSPECTION EQUIPMENT FOR EUV EXPOSURE PROCESS
Publication number
20250231494
Publication date
Jul 17, 2025
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
Jinho AHN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR INSPECTING A SURFACE
Publication number
20250224325
Publication date
Jul 10, 2025
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Antonius Martinus Cornelis Petrus DE JONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANK MASK AND METHOD OF FABRICATING THE SAME
Publication number
20250216768
Publication date
Jul 3, 2025
SK enpulse Co., Ltd.
Gyeongse JEONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Inspecting Mask
Publication number
20250216773
Publication date
Jul 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Hsun CHEN
G01 - MEASURING TESTING
Information
Patent Application
MANUFACTURING METHOD FOR CONDUCTIVE FILM, MANUFACTURING METHOD FOR...
Publication number
20250208500
Publication date
Jun 26, 2025
MITSUBISHI CHEMICAL CORPORATION
Shunsuke KANAME
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM AND METHOD FOR OPERATING THEREOF
Publication number
20250199398
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chao-Ting CHEN
G01 - MEASURING TESTING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20250193992
Publication date
Jun 12, 2025
Gigaphoton Inc.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
STRUCTURE AND METHOD OF RETICLE POD HAVING INSPECTION WINDOW
Publication number
20250180984
Publication date
Jun 5, 2025
Taiwan Semiconductor Manufacturing company Ltd.
WANG CHENG SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND APPARATUS TO IMPROVE DETECTION OF DEFECTS IN PHOTOMASK...
Publication number
20250164871
Publication date
May 22, 2025
Intel Corporation
Yoshihiro Tezuka
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR STRUCTURE INSPECTION METHOD, EXTREME ULTRAVIOLET (EUV...
Publication number
20250164872
Publication date
May 22, 2025
Samsung Electronics Co., Ltd.
Jiho PARK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL MEMBER AND PRODUCTION METHOD THEREFOR
Publication number
20250155796
Publication date
May 15, 2025
NIPPON LIGHT METAL COMPANY, LTD.
Takeshi OSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR EXAMINING A BLANK OF A MICROLITHOGRAPHIC PHOTOMASK
Publication number
20250147412
Publication date
May 8, 2025
Carl Zeiss SMT GMBH
Christof Baur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM TO FOR RAPID INSPECTION OF PHOTOLITHOGRAPHY RETICLE
Publication number
20250123555
Publication date
Apr 17, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Jia-Lin SYU
G01 - MEASURING TESTING
Information
Patent Application
LEARNING-BASED DIE-TO-DIE MASK INSPECTION APPARATUS AND METHOD
Publication number
20250117948
Publication date
Apr 10, 2025
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
Hye Jin KIM
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LIGHT SOURCE APPARATUS, INSPECTION APPARATUS, EXPOSURE APPARATUS, L...
Publication number
20250102445
Publication date
Mar 27, 2025
Lasertec Corporation
Ko GONDAIRA
G01 - MEASURING TESTING
Information
Patent Application
CONTROL DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20250093768
Publication date
Mar 20, 2025
SEMES CO., LTD.
Jin Yeong SUNG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ILLUMINATION OPTICAL UNIT FOR A MASK INSPECTION SYSTEM
Publication number
20250093770
Publication date
Mar 20, 2025
Carl Zeiss SMT GMBH
Sören Schmidt
G01 - MEASURING TESTING
Information
Patent Application
MASK QUALITY MANAGEMENT SYSTEM
Publication number
20250093769
Publication date
Mar 20, 2025
SAMSUNG DISPLAY CO., LTD.
SUNGMIN HUR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE, EXPOSURE ORIGINAL PLATE, EXPOSURE APPARATUS, METHOD FOR P...
Publication number
20250085624
Publication date
Mar 13, 2025
MITSUI CHEMICALS, INC.
Ryo TANAKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HANDLING SYSTEM FOR MICROLITHOGRAPHIC PHOTOMASKS, INSPECTION SYSTEM...
Publication number
20250076773
Publication date
Mar 6, 2025
Carl Zeiss SMT GMBH
Johann Irnstetter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PUPIL FILTER WITH SPATIALLY-VARYING TRANSMISSION
Publication number
20250044679
Publication date
Feb 6, 2025
KLA Corporation
Alexander Pokrovskiy
G01 - MEASURING TESTING
Information
Patent Application
MASK INSPECTION DEVICE FOR PHOTOMASKS OF EUV LITHOGRAPHY AND CARRIE...
Publication number
20250044680
Publication date
Feb 6, 2025
Carl Zeiss SMT GMBH
Markus Koch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AUTO PARAMETER TUNING FOR CHARGED PARTICLE INSPECTION IMAGE ALIGNMENT
Publication number
20250036030
Publication date
Jan 30, 2025
ASML NETHERLANDS B.V.
Haoyi LIANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BASEPLATE FOR SUPPORTING A RETICLE AND RELATED SYSTEMS AND METHODS
Publication number
20250028239
Publication date
Jan 23, 2025
Entegris, Inc.
Huaping Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTODETECTOR
Publication number
20240402592
Publication date
Dec 5, 2024
Lasertec Corporation
Keita SAITO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
Publication number
20240377727
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Wei LU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHOTOMASK AND METHOD FOR INSPECTING PHOTOMASK
Publication number
20240377728
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
CHIEN-HUNG LAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
Publication number
20240361684
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-WEI WEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASURING DEVICE AND METHOD FOR INSPECTING PHOTOMASKS INTENDED FOR...
Publication number
20240353768
Publication date
Oct 24, 2024
Carl Zeiss SMT GMBH
Lutz Brekerbohm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR EVALUATING REFERENCE MARK FORMED ON EUV MASK BLANK
Publication number
20240345474
Publication date
Oct 17, 2024
Shin-Etsu Chemical Co., Ltd.
Takahiro KISHITA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY