Patent Application
20080309190
The present invention relates to micro-electro mechanical systems in general and more specifically motion control and generation for micro-electro mechanical systems (MEMS).
Motion plates may be used in various optical applications instead of, or in addition to, conventional optoelectronic devices. It is desirable to have capability to move the motion plates by rotation and translation with very fine control.
Since the micro-electro mechanical systems (MEMS) were developed, many applications in MEMS have been developed and used. Micro actuator is the main part of the research and applications in MEMS field. Devices and application using MEMS actuators are developed and used in various fields such as optical communication, display, motion sensor, and medical devices. As the applications of MEMS actuators grow rapidly, the demand on controlling motion plate device increases. It is desirable to have the motion control of the MEMS actuator with many degrees of freedom and simple driving method. Usually, electrostatic, magnetic, piezo, and thermal actuations are widely used in the MEMS industry.
A translational motion only MEMS actuator has been used for phase-only piston-style motion and deformable mirrors. These applications are mainly used for phase adaptive optics applications. A rotational motion of MEMS actuator is also developed for light modulation and MEMS device movements. Most of these motion plates have been controlled to have continuous displacements, which are determined at the equilibrium between electrostatic force and elastic force.
As an example, U.S. Pat. No. 7,036,312 is a good example of thermally controlled MEMS actuator device. Two cantilever actuator by thermally controlled make motion of actuation. Also U.S. Pat. No. 6,914,710 shows an example of electrostatic comb actuators. Comb actuator is one of the most widely used electrostatic actuators. Capacitive force of two different plates with different voltages makes strong attraction force. The electro capacitive force is a source of the force of the electrostatic MEMS actuator. Also, U.S. Pat. No. 6,858,911 shows an example of electromagnetic MEMS actuator. The electromagnetic MEMS actuator comprises a magnetic material, and an electrically conductive coil about the magnetic coil. The coil and the magnetic core can be arranged to generate a magnetic field to move the actuation element. But these actuators have a complicated driving mechanism and control method.
Therefore, the demand on the simple control of the MEMS actuator with higher degrees of freedom and precision has been increased in MEMS industry. The present invention is intended to provide a MEMS actuator device with multiple motions, variable degrees of freedom, low driving voltage, and simple activation mechanism. The MEMS actuator of the present invention can have one degree of freedom rotational motion, one degree of freedom translational motion, one degree of freedom rotational and one degree of freedom translational motion, two degrees of freedom rotational motion, and two degrees of freedom rotational motion and one degree of freedom translational motion, depending on its system configuration.
The present invention addresses the problems of the prior art and provides a MEMS actuator with discretely controlled multiple motions having the fine and simple control of rotation and translation.
The MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions of the present invention comprises a bottom layer having control circuitry, at least one stepper plate, at least one support, wherein each support is geometrically coupled to the corresponding stepper plate to define motion, and a motion plate having pre-determined multiple motions supported by the stepper plates and the supports.
The motions of the motion plate are pre-programmed by the supports and the stepper plates and each of the pre-programmed motions of the motion plate is provided by actuating a predetermined set of stepper plates.
Each support in the present invention is geometrically coupled to the corresponding stepper plate to define motion and the motion plate has pre-determined multiple motions supported by the stepper plates and the supports;
The control circuitry of the present invention is coupled with the stepper plate electrodes and selectively activates the stepper plate electrodes. The control circuitry is wire structure directly connected with the stepper plate electrodes to supply voltages. By selectively applying voltages to the stepper plate electrodes through the wire structures, the motion of the motion plate can be discretely controlled.
The control circuitry can be an electrical addressing circuitry. Also the electrical addressing circuitry comprises a plurality of memory type cell forming a memory addressing array. The memory addressing array comprises SRAM circuits to activate the stepper plate electrodes. The memory addressing array comprises DRAM circuits to activate the stepper plate electrodes.
The control circuitry comprises a MOS-type or CMOS-type circuitry on the bottom layer. By controlling the MOS-type or CMOS-type circuitry on the bottom layer, the stepper plate electrodes can be selectively activated thus the motion of the motion plate can have multiple motions.
By proper configuration of the control circuitry, the control circuitry can be operated by digital voltage. Thus the motion of the motion plate can be controlled by the digital voltage.
The control circuitry supplies discrete control voltage to the stepper plate electrodes. The discretely controlled voltage to the stepper plate electrodes can control the motion of the motion plate.
Each stepper plate is configured to have pre-programmed rotations about multiple axes by activating predetermined sets of the stepper plate electrodes and each support is configured to define a motion of the motion plate when the stepper plate is actuated.
The support is a motion plate bottom support located under the motion plate and each of the motion plate bottom supports is geometrically coupled to the stepper plate and one end is disposed on the bottom side of the motion plate and the other end is configured to contact the stepper plate when the stepper plate is actuated.
The motion of the motion plate is defined by the contact points of the motion plate bottom support and the stepper plate top side. The support is a stepper plate top support located on the stepper plate. Each of the stepper plate top supports is geometrically coupled to the motion plate and one end is disposed on the top side of the stepper plate and the other end is configured to contact the motion plate bottom side when the stepper plate is actuated. The motion of the motion plate is defined by the contact points of the stepper plate top support and the motion plate bottom side.
The support is a stepper plate bottom support located under the stepper plate and each of the stepper plate bottom supports is geometrically coupled to the bottom layer and one end is disposed on the bottom side of the stepper plate and the other end is configured to contact the bottom layer when the stepper plate is actuated.
The inclination angle of the stepper plate is defined the contact points of the stepper plate bottom support and the bottom layer. The motion of the motion plate is defined by the contact points of the stepper plate and the motion plate and the inclination angle of the stepper plate. The contact points of the stepper plate and the motion plate are determined by the stepper plate top support. The contact points of the stepper plate and the motion plate are determined by the motion plate bottom support.
The support is a bottom layer support located on the bottom layer. Each of the bottom layer supports is geometrically coupled to the stepper plate and one end is disposed on the top side of the bottom layer and the other end is configured to contact the bottom side of the stepper plate when the stepper plate is actuated. The inclination angle of the stepper plate is defined the contact points of the bottom layer support and the stepper plate.
The motion of the motion plate is defined by the contact points of the stepper plate and the motion plate and the inclination angle of the stepper plate. The contact points of the stepper plate and the motion plate are determined by the stepper plate top support. The contact points of the stepper plate and the motion plate are determined by the motion plate bottom support.
The support is a stepper plate inner support and the stepper plate inner support is disposed on the bottom layer and is configured to contact the bottom side of the stepper plate when the stepper plate is actuated. The inclination angle of the stepper plate is defined the contact points of the stepper plate and the stepper plate inner support.
The motion of the motion plate is defined by the contact points of the stepper plate and the motion plate and the inclination angle of the stepper plate. The rotation of the stepper plate is pre-programmed by position of the stepper plate inner support. The rotation of the stepper plate is pre-programmed by height of the stepper plate inner support, wherein the stepper plate inner support has variation in height.
The stepper plate has at least one stepper plate tip, configured to contact the bottom layer including landing structures for reducing the contact area of the actuated stepper plate with the bottom layer.
The motion of the motion plate is defined by the height of the support.
The motion plate can further comprise at least one motion plate electrode, disposed on the bottom layer, configured to pull the motion plate down toward the bottom layer to make contact between the motion plate and the actuated stepper plate. The stepper plate is actuated by electrostatic force induced by the stepper plate electrodes.
The driving voltage of the motion plate is reduced by using multiple stepper plate electrodes to actuate the stepper plate.
Each stepper plate has at least one landing structure, disposed on the bottom layer, configured to stop the rotation of the stepper plate by contacting the actuated stepper plate.
The motion plate can have various degrees of freedom motions. The motion plate has one rotational degree of freedom motion. The motion plate has two rotational degrees of freedom motion. The motion plate has two translational degrees of freedom motion. The motion plate has one rotational degree of freedom motion and one translational degree of freedom motion. The motion plate has two rotational degrees of freedom motion and one translational degree of freedom motion.
While the MEMS actuator with discretely controlled multiple motions of the present invention combined as an array, the array of the MEMS actuator with discretely controlled multiple motions comprises the motion plates with various degrees of freedom rotation or translation which are controlled independently. In order to do this, each motion plate must have capability to control object on the motion plate to a desired direction by controls of respective degrees of freedom rotation or translation.
This MEMS actuator with discretely controlled multiple motions can be applied to the motion control of the micromirror device. The general principle, structure and methods for making the discrete motion control of MEMS device including micromirrors are disclosed in U.S. patent application Ser. No. 10/872,241 filed Jun. 18, 2004, U.S. patent application Ser. No. 11/072,597 filed Mar. 4, 2005, U.S. patent application Ser. No. 11/347,590 filed Feb. 4, 2006, U.S. patent application Ser. No. 11/369,797 filed Mar. 6, 2006, U.S. patent application Ser. No. 11/426,565 filed Jun. 26, 2006, U.S. patent application Ser. No. 11/463,875 filed Aug. 10, 2006, U.S. patent application Ser. No. 11/534,613 filed Sep. 22, 2006, U.S. patent application Ser. No. 11/534,620 filed Sep. 22, 2006, U.S. patent application Ser. No. 11/549,954 filed Oct. 16, 2006, U.S. patent application Ser. No. 11/609,882 filed Dec. 12, 2006, U.S. patent application Ser. No. 11/685,119 filed Mar. 12, 2007, U.S. patent application Ser. No. 11/693,698 filed Mar. 29, 2007, and U.S. patent application Ser. No. 11/742,510 filed Apr. 30, 2007, all of which are incorporated herein by references.
While used as an array with micromirrors, the motion of the micromirrors can be controlled independently and the micromirror array can be built as an optical device such as a spatial light modulator and a Micromirror Array Lens. The general principle and methods for making the Micromirror Array Lens are disclosed in U.S. Pat. No. 6,970,284 issued Nov. 29, 2005 to Kim, U.S. Pat. No. 7,031,046 issued Apr. 18, 2006 to Kim, U.S. Pat. No. 6,934,072 issued Aug. 23, 2005 to Kim, U.S. Pat. No. 6,934,073 issued Aug. 23, 2005 to Kim, U.S. Pat. No. 7,161,729 issued Jan. 9, 2007, U.S. Pat. No. 6,999,226 issued Feb. 14, 2006 to Kim, U.S. Pat. No. 7,095,548 issued Aug. 22, 2006 to Cho, U.S. patent application Ser. No. 10/893,039 filed Jul. 16, 2004, U.S. patent application Ser. No. 10/983,353 filed Nov. 8, 2004, U.S. patent application Ser. No. 11/076,616 filed Mar. 10, 2005, U.S. patent application Ser. No. 11/426,565 filed Jun. 26, 2006, and U.S. patent application Ser. No. 11/743,664 filed May 2, 2007, all of which are incorporated herein by references.
The MEMS actuator with discretely controlled multiple motions of the present invention has advantages including: (1) the MEMS actuator provides multiple motions; (2) the MEMS actuator can be controlled in a low driving voltage; (3) simple motion control is achieved by applying digital control; (4) the MEMS actuator has a fine motion control of the motion plate using multiple supports and electrodes; (5) only single voltage is needed for driving the control circuitry; and (6) the motion plate is controlled discretely.
Although the present invention is briefly summarized, the full understanding of the invention can be obtained by the following drawings, detailed description, and appended claims.
These and other features, aspects and advantages of the present invention will become better understood with reference to the accompanying drawings, wherein:
a-1c shows schematic diagram of the MEMS actuator with discretely controlled multiple motions of the present invention;
a-3c show schematically how various types of supports can affect the motion of a motion plate;
a-4b are a three-dimensional schematic perspective diagram of the MEMS actuator of the present invention with discretely controlled multiple motions showing various types of supports and various shapes of stepper plates from different points of view;
a-6c are a schematic illustration of the MEMS actuator of the present invention showing how motion of the motion plate is controlled using an octagonal shaped stepper plate and eight motion plate bottom supports from different points of view;
a-7b are a schematic illustration of the MEMS actuator of the present invention having motion plate bottom supports with different heights from different points of view;
a-8b are a schematic illustration of the MEMS actuator of the present invention showing how motion of the motion plate is controlled using a hexagonal shaped stepper plate and six stepper plate top supports from different points of view;
a-9b show a variation of the configuration of the stepper plate top supports from different points of view.
a-10b show various configurations of the stepper plate inner support;
a-11b show a three-dimensional perspective view of the MEMS actuator of the present invention providing three degrees of freedom motion using motion plate bottom supports when the stepper plates are on and off;
a-1c shows schematic diagram of the MEMS actuator with discretely controlled multiple motions of the present invention.
The MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions of the present invention comprises a bottom layer 11 having control circuitry, at least one stepper plate 13, at least one support, wherein each support 14 is geometrically coupled to the corresponding stepper plate 13 to define motion, and a motion plate 12 having pre-determined multiple motions supported by the stepper plates 13 and the supports 14.
The motions of the motion plate 12 can be pre-programmed by the supports 14 and the stepper plates 13 and each of the pre-programmed motions of the motion plate 12 is provided by actuating a predetermined set of stepper plates 13. Each support 14 in the present invention is geometrically coupled to the corresponding stepper plate 13 to define motion and the motion plate 12 has pre-determined multiple motions supported by the stepper plates 13 and the supports 14. The stepper tip structure 15 is applied to reduce the stiction problem of the structures.
The MEMS actuator of the present invention has simpler control system. Once the motion is defined and programmed in the motion plate structure, the control is just applying the on/off voltage for desired channel with respect to the desired motion. No feedback is required and the motion is reproducible regardless of the environment. Also multiple step-wise voltages can be applied to the desired channel for optimized motion and voltage.
In
The stepper plate 23 is configured to have pre-programmed rotations about multiple axes by activating predetermined sets of the stepper plate electrodes 24 using the control circuitry. Motion of the motion plate 22 can be pre-programmed by the positions and geometries of these stepper plates 23. The positions and geometries of the stepper plates 23 are selected during the design process of the MEMS actuator in order to provide the required motions of the motion plate 22 and fabricated accordingly. The stepper plates 23 are actuated by electrostatic force induced by the stepper plate electrodes 24.
The motion plate 22 can be configured to be pulled down to the actuated stepper plates to provide the required motion. In order to do this, the MEMS actuator of the present invention can further comprise at least one motion plate electrode 26, disposed on the bottom layer 21. The motion plate electrodes 26 are configured to pull the motion plate 22 down toward the bottom layer 21 to make the motion plate 22 contact the actuated stepper plates 23.
The MEMS actuator of the present invention can further comprise at least one landing structure 27 in order to reduce a possible stiction problem. The landing structure 27 is disposed on the bottom layer 21, isolated electronically, and configured to stop the rotation of the stepper plate 23 by contacting the actuated stepper plate 23. In addition, the stepper plate 23 can have at least one stepper plate tip 23A, configured to contact the bottom layer 21 or landing structure 27 for reducing the contact area of the actuated stepper plate 23 with the bottom layer 21 or landing structure 27 to reduce the stiction problem.
The motion range of the motion plate 22 can be increased by using various supports 25 that are geometrically coupled to the motion plate 22 directly or indirectly through the stepper plates 23. The required motions of the motion plate 22 can be precisely pre-programmed by properly choosing the positions and geometries of these supports 25. The positions and geometries of the supports are selected in the design process of the MEMS actuator in order to provide the required motions of the motion plate 22 and fabricated accordingly.
The supports can be motion plate bottom supports 25A located under the motion plate 22. Each of the motion plate bottom supports 25A is geometrically coupled to the stepper plate 23, and configured to define motion of the motion plate 22, wherein one end is disposed on the bottom side of the motion plate 22 and the other end is configured to contact the stepper plate 23 when the stepper plate 23 is actuated.
The supports can be stepper plate inner supports 25B. The stepper plate inner support 25B is disposed on the bottom layer 21 and is configured to contact the stepper plate 23 to form a pivotal point for rotation of the stepper plate 23 when the stepper plate 23 is actuated. Also, the stepper plate inner support 25B can be configured to support the stepper plate 23.
The supports can be stepper plate top supports 25C. Each of the stepper plate top supports 25C is configured to define motion of the motion plate 22, wherein one end is disposed on the top side of the stepper plate 23 and the other end is configured to contact the bottom side of the motion plate 22 when the stepper plate 23 is actuated.
The supports can be stepper plate bottom supports 25D. Each of the stepper plate bottom supports 25D is configured to define the rotation of the stepper plate 23, wherein one end is disposed on the bottom side of the stepper plate 23 and the other end is configured to contact the bottom layer 21, landing structures 27, or the stepper plate inner support 25B when the stepper plate 23 is actuated.
The supports can be bottom layer supports 25E. Each of the bottom layer supports 25E is configured to define rotation of the stepper plate 23, wherein one end is disposed on the bottom layer 21 and the other end is configured to contact the stepper plate 23 when the stepper plate 23 is actuated.
Supports defining rotation of the stepper plate 23 such as stepper plate bottom support 25D, stepper plate inner support 25B, and bottom layer supports 25E define the motion of the motion plate 22 indirectly while supports such as the motion plate bottom support 25A and the stepper plate top supports 25C define the motion of the motion plate directly.
The MEMS actuator of the present invention can use one only type of supports 25 to pre-program the required motions of the motion plate 22. Also, The MEMS actuator of the present invention can use various types of supports 25 together to pre-program the required motions of motion plate 22 with proper combinations.
The MEMS actuator with discretely controlled multiple motions further comprises at least one stepper plate spring 28, wherein each of the stepper plate spring 28 is configured to provide elastic restoring force to the stepper plate 23 and connect the stepper plate 23 with the bottom layer 21 or the stepper plate inner support 25B. One end of the stepper plate spring 28 is attached to the stepper plate 23 or a stepper plate spring post (not shown) disposed on the stepper plate 23. The other end of the stepper plate spring 28 can be attached to the bottom layer 21 or a stepper plate spring post 28A disposed on the bottom layer 21. Also, the other end of the stepper plate spring 28 can be attached to the stepper plate inner support 25B or a stepper plate spring post (not shown) disposed on the stepper plate inner support 25B.
The MEMS actuator with discretely controlled multiple motions further comprises at least one motion plate spring 29, wherein each of the motion plate springs 29 is configured to provide elastic restoring force to the motion plate 22 and connect the motion plate 22 with the bottom layer 21. One end of the motion plate spring 29 is be attached to the bottom side of the motion plate 22 or a first motion plate spring post (not shown) disposed on the bottom side of the motion plate 22. The other end of the motion plate spring 29 can be attached to the bottom layer 21 or a second motion plate spring post 29A disposed on the bottom layer 21.
a-3c show schematically how various types of supports can affect the motion of a motion plate 31.
having motion plate bottom supports 32A, 32B. The stepper plates 33A, 33B are inclined by a pre-programmed angle when a driving voltage is applied to the stepper plate electrodes 34A, 34B. The motion plate bottom supports 32A, 32B are upheld by the actuated stepper plates 33A, 33B and the motion plate 31 has a motion defined by the contacting positions of the motion plate bottom support 32A, 32B with the stepper plate 33A, 33B. Motion plate electrodes 35A can be used to pull down the motion plate 31 toward a bottom layer 35 in order to make the motion plate bottom supports 32A, 32B to be rested on the stepper plates 33A, 33B. The motion of the motion plate 31 is defined by the geometry of the MEMS actuator of the present invention including positions and heights of the motion plate bottom supports 32A, 32B.
b shows stepper plates 33A, 33B having stepper plate top supports 36A, 36B. The stepper plates 33A, 33B are inclined by a pre-programmed angle when a driving voltage is applied to the stepper plate electrodes 34A, 34B. The stepper plate top supports 36A, 36B uphold the motion plate 31 and the motion plate 31 has a motion defined by the contacting positions of the motion plate 31 with the stepper plate top supports 36A, 36B. Motion plate electrodes 35A can be used to pull down the motion plate 31 toward a bottom layer 35 in order to make the motion plate 31 to be rested on the stepper plate top supports 36A, 36B. The motion of the motion plate 31 is defined by the geometry of the MEMS actuator of the present invention including positions and heights of the stepper plate top supports 36A, 36B that uphold the motion plate 31.
c shows how the motion of a motion plate 31 is defined by stepper plate bottom supports 37, bottom layer supports 38, and stepper plate inner support 39A, 39B. A mechanical stop is applied to the MEMS actuator of the present invention to determine the amounts of the rotational angle of the stepper plate 33A, 33B. In this example, one stepper plate 33A has the stepper plate bottom supports 37 while the other stepper plate 33B has the bottom layer supports 38. The amounts of the rotation angles of the stepper plates 33A, 33B are determined by positions and heights of the stepper plate bottom supports 37, the bottom layer supports 38, and the stepper plate inner supports 39A, 39B or even the existence thereof. The actuated stepper plates 33A, 33B uphold the motion plate 31 and determine the motion of the motion plate 31. These supports limit or extend the rotation of the stepper plates 33A, 33B to provide the required motions of the motion plate 31.
The motion of the motion plate 31 can be defined by various combinations of these supports including motion plate bottom supports 32, stepper plate top supports 36, stepper plate bottom supports 37, bottom layer supports 38, and stepper plate inner supports 39. Any combination of these supports can be used to pre-program the required motions of the motion plate 31 even though
a-4b are three-dimensional schematic perspective diagrams of the MEMS actuator of the present invention showing various types of supports and various shapes of stepper plates. The MEMS actuator of the present invention shown in
The MEMS actuator of the present invention in
a-6c are a schematic illustration of the MEMS actuator of the present invention from the different points of view showing how the motion of a motion plate 66 is controlled using an octagonal shaped stepper plate and eight motion plate bottom supports 62 for providing multiple motions of the motion plate.
While the motion plate bottom supports shown in
a-8b are a schematic illustration of the MEMS actuator of the present invention showing how the motion of a motion plate is controlled using a hexagonal shaped stepper plate and six stepper plate top supports for providing multiple motions of the motion plate. The hexagonal shaped stepper plate 81 has six stepper plate top supports 82 disposed on the top side of the stepper plate 81 and six stepper plate electrodes 83. The stepper plate 81 is configured to have at least six pre-programmed rotations by activating predetermined sets of stepper plate electrodes 83. When a predetermined set of stepper plate electrodes 83 are activated, the stepper plate 81 is actuated to have a pre-programmed rotation. Then, the actuated stepper plate 81 is rotated and snapped down to the direction of the activated stepper plate electrodes 83. The stepper plate tip 84 of the actuated stepper plate 81 contacts the bottom layer 89 or a landing structure and one of the stepper plate top supports 82 disposed on the top side of the stepper plate 81 contacts the bottom side of the motion plate 85. The contact point between the motion plate 85 and the contacted stepper plate top support 82 is indicated as asterisk. The motion of the motion plate 85 depends on the position and height of the contacted stepper plate top support 82. The positions and the heights of the stepper plate top supports 82 are determined to provide the required motions of the motion plate 85 during the design process and fabrication process of the motion plate device.
b also shows another exemplary configuration of a stepper plate inner support. The stepper plate 81 can be supported by a flexible structure such as stepper plate springs 86 and suspended over the stepper plate inner support 88 before the stepper plate 81 is actuated. When the stepper plate 81 is actuated, the stepper plate inner support 88 contacts the actuated stepper plate 81 to form a pivotal point for rotation of the actuated stepper plate 81. The rotation of the actuated stepper plate 81 is pre-programmed by position and height of the stepper plate inner support 88. The positions and geometries of the stepper plate inner supports 88 are selected in the design process of the MEMS actuator in order to provide the required motions of the motion plate 85 and fabricated accordingly.
a-9b show a variation of the configuration of the stepper plate top supports from the different points of view. In stead of using individually separated stepper plate top supports, the same function can be accomplished by using one bodied stepper plate top support structure. For example, the six stepper plate top supports 82 in
a-9b also show another exemplary configuration of stepper plate spring. The stepper plate 93 has the stepper plate spring 94 disposed under the stepper plate 93. The stepper plate spring 94 is configured to provide elastic restoring force to the stepper plate 93 and connect the stepper plate 93 with the bottom layer 95 or the stepper plate inner support (not shown). In this example, one end of the stepper plate spring 94 is attached to a stepper plate spring post 96 disposed on the bottom side of the stepper plate 93. The other end of the stepper plate spring 94 is attached to a stepper plate spring post 97 disposed on the bottom layer 95.
a-10b show various configurations of stepper plate inner supports. The stepper plate 101A can be supported by a flexible structure such as stepper plate springs 102 and suspended over the stepper plate inner support 103 before the stepper plate 101A is actuated as shown in
a-11b show a three-dimensional perspective view of a MEMS actuator of the present invention providing three degrees of freedom motion using motion plate bottom supports. The motion of the motion plate 111 is provided with two degrees of freedom rotation 112, 113 and one degree of freedom translation 114 as shown in
If the motion plate is built as a mirror for reflecting light, the array of the MEMS actuator with motion plates can be used as an arrayed spatial light modulator. The motion plates 132 in array of the MEMS actuator have independently controlled motions to make an optical phase modulator. The one translational degree of freedom motion of the MEMS actuator 131 with motion plate is controlled to retract or elevate the motion plate 132 to remove the phase aberration of an optical system.
The motion plates 132 in array of the MEMS actuator with motion plates have independently controlled motions to form a spatial light modulator. The one translational degree of freedom motion of the motion plate 132 with motion plate is controlled to retract or elevate the motion plate 132 to remove the phase aberration of an optical system. The one or two rotational degrees of freedom motion of the motion plate 132 with motion plate is controlled to control light intensity and/or to scan a field of regard. By using both rotational degree of freedom motion and translational degree of freedom motion of the motion plate 132, a fine spatial light modulator can be provided.
As a special example of the arrayed motion plates, Micromirror Array Lens is a good example. The general properties of the Micromirror Array Lens are disclosed in U.S. Pat. No. 7,057,826 issued Jun. 6, 2006 to Cho, U.S. Pat. No. 7,173,653 issued Feb. 06, 2007, U.S. Pat. No. 7,215,882 issued May 8, 2007 to Cho, U.S. patent application Ser. No. 10/979,568 filed Nov. 2, 2004, U.S. patent application Ser. No. 11/218,814 filed Sep. 2, 2005, U.S. patent application Ser. No. 11/359,121 filed Feb. 21, 2006, U.S. patent application Ser. No. 11/382,273 filed May 9, 2006, and U.S. patent application Ser. No. 11/429,034 filed May 5, 2006, and its application are disclosed in U.S. Pat. No. 7,077,523 issued Jul. 18, 2006 to Seo, U.S. Pat. No. 7,068,416 issued Jun. 27, 2006 to Gim, U.S. patent application Ser. No. 10/914,474 filed Aug. 9, 2004, U.S. patent application Ser. No. 10/934,133 filed Sep. 3, 2004, U.S. patent application Ser. No. 10/979,619 filed Nov. 2, 2004, U.S. patent application Ser. No. 10/979,624 filed Nov. 2, 2004, U.S. patent application Ser. No. 11/076,688 filed Mar. 10, 2005, U.S. patent application Ser. No. 11/208,114 filed Aug. 19, 2005, U.S. patent application Ser. No. 11/208,115 filed Aug. 19, 2005, U.S. patent application Ser. No. 11/382,707 filed May 11, 2006, U.S. patent application Ser. No. 11/419,480 filed May 19, 2006, and U.S. patent application Ser. No. 11/423,333 filed Jun. 9, 2006, all of which are incorporated herein by references.
While the invention has been shown and described with reference to different embodiments thereof, it will be appreciated by those skills in the art that variations in form, detail, compositions and operation may be made without departing from the spirit and scope of the present invention as defined by the accompanying claims.
