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TORSION SPRING ELEMENT
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Publication date Jul 13, 2023
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NORTHROP GRUMMAN LITEF GMBH
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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3-AXIS ANGULAR ACCELEROMETER
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Publication date May 19, 2022
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Analog Devices, Inc.
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LIDAR MODULE AND METHODS THEREOF
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Publication date Dec 16, 2021
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Intel Corporation
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Yuval P. SHAPIRA
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS AND METHOD OF MANUFACTURING THE SAME
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Publication number 20210371270
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Publication date Dec 2, 2021
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Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
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Shanshan GU-STOPPEL
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MOTION CONTROL STRUCTURE AND ACTUATOR
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Publication number 20210002125
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Publication date Jan 7, 2021
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AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
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Ze Tao
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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3-AXIS ANGULAR ACCELEROMETER
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Publication number 20200241036
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Publication date Jul 30, 2020
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Analog Devices, Inc.
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Xin Zhang
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIBRATION GYROSCOPE
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Publication number 20200191571
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Publication date Jun 18, 2020
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DENSO CORPORATION
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Motohiro FUJIYOSHI
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ULTRASONIC SENSOR
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Publication number 20200182834
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Publication date Jun 11, 2020
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DAI-ICHI SEIKO CO., LTD.
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Kenji OGATA
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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LIGHT MODULE
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Publication number 20200049974
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Publication date Feb 13, 2020
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Hamamatsu Photonics K.K.
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Tatsuya SUGIMOTO
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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OUT-OF-PLANE-ACCELEROMETER
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Publication number 20180164339
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Publication date Jun 14, 2018
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Safran Colibrys SA
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Pascal Zwahlen
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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