Devices moving in two or more dimensions

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B81B3/0062

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0062Devices moving in two or more dimensions

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-electro-mechanical system (MEMS) micro-mirror array (MMA) ste...
- Patent number 12,360,358
- Issue date Jul 15, 2025
- Raytheon Company
- Benn H. Gleason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
LIDAR module and methods thereof
- Patent number 12,313,785
- Issue date May 27, 2025
- Intel Corporation
- Yuval P. Shapira
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device having a structure tiltable by piezoe...
- Patent number 12,222,492
- Issue date Feb 11, 2025
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator system
- Patent number 12,135,437
- Issue date Nov 5, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxial strain engineering of defect doped materials
- Patent number 12,077,428
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device
- Patent number 12,007,556
- Issue date Jun 11, 2024
- Stanley Electric Co., Ltd.
- Atsuhiko Chikaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Motion control structure and actuator
- Patent number 11,891,297
- Issue date Feb 6, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Ze Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertically-shifting electrostatic actuator and optical scanner empl...
- Patent number 11,789,254
- Issue date Oct 17, 2023
- KOREA OPTRON CORP.
- Yun Goo Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multidirectional translating and tilting platform using bending act...
- Patent number 11,697,584
- Issue date Jul 11, 2023
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-axis MEMS mirror parking
- Patent number 11,693,187
- Issue date Jul 4, 2023
- Google LLC
- Hsing Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical non-uniformity correction (NUC) for active mode imaging sen...
- Patent number 11,650,412
- Issue date May 16, 2023
- Raytheon Company
- Gerald P. Uyeno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator, optical scanning device, and manufacturing methods
- Patent number 11,635,615
- Issue date Apr 25, 2023
- Mitsumi Electric Co., Ltd.
- Kensuke Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light module
- Patent number 11,561,388
- Issue date Jan 24, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration gyroscope
- Patent number 11,397,084
- Issue date Jul 26, 2022
- Denso Corporation
- Motohiro Fujiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for characterizing fluid composition and proces...
- Patent number 11,360,014
- Issue date Jun 14, 2022
- MULTI-CHEM GROUP, LLC
- Dale E. Jamison
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronically steered inter-satellite optical communication system...
- Patent number 11,333,879
- Issue date May 17, 2022
- Raytheon Company
- Gerald P. Uyeno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 11,313,876
- Issue date Apr 26, 2022
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mobile device for grasping and active release of objects
- Patent number 11,285,599
- Issue date Mar 29, 2022
- The Governing Council of the University of Toronto
- Eric Diller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical or/and nanoelectromechanical device with out...
- Patent number 11,156,459
- Issue date Oct 26, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Federico Maspero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic sensor
- Patent number 11,067,541
- Issue date Jul 20, 2021
- Dai-Ichi Seiko Co., Ltd.
- Kenji Ogata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multidirectional artificial muscles from nylon
- Patent number 10,935,008
- Issue date Mar 2, 2021
- Massachusetts Institute of Technology
- Seyed M. Mirvakili
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Autofocus system
- Patent number 10,830,982
- Issue date Nov 10, 2020
- Forster Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with multiple hinges
- Patent number 10,723,618
- Issue date Jul 28, 2020
- Hewlett-Packard Development Company, L.P.
- Richard B. Irwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Four degrees of freedom piston-tube electrostatic actuator
- Patent number 10,608,557
- Issue date Mar 31, 2020
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Out-of plane-accelerometer
- Patent number 10,598,689
- Issue date Mar 24, 2020
- SAFRAN COLIBRYS SA
- Pascal Zwahlen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 10,585,111
- Issue date Mar 10, 2020
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
- Publication number 20250208405
- Publication date Jun 26, 2025
- FUJIFILM CORPORATION
- Keisuke AOSHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
- Publication number 20250178885
- Publication date Jun 5, 2025
- STMicroelectronics International N.V.
- Massimiliano PESATURO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB STRUCTURE FOR MEMS ACCELEROMETER
- Publication number 20250138044
- Publication date May 1, 2025
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMAGE CAPTURE AT VARYING OPTICAL POWERS
- Publication number 20250085514
- Publication date Mar 13, 2025
- Meta Platforms Technologies, LLC
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
- Publication number 20250083949
- Publication date Mar 13, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor
- Publication number 20240425357
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Yuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION A...
- Publication number 20230408808
- Publication date Dec 21, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...
- Publication number 20230358975
- Publication date Nov 9, 2023
- NIHARIKA KOHLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIAXIAL MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACT...
- Publication number 20230288696
- Publication date Sep 14, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TORSION SPRING ELEMENT
- Publication number 20230219805
- Publication date Jul 13, 2023
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel Rende
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STE...
- Publication number 20220342201
- Publication date Oct 27, 2022
- Raytheon Company
- Benn H. Gleason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3-AXIS ANGULAR ACCELEROMETER
- Publication number 20220155336
- Publication date May 19, 2022
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE BY PIEZOE...
- Publication number 20220099960
- Publication date Mar 31, 2022
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS
- Publication number 20220063986
- Publication date Mar 3, 2022
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIDAR MODULE AND METHODS THEREOF
- Publication number 20210389431
- Publication date Dec 16, 2021
- Intel Corporation
- Yuval P. SHAPIRA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210371270
- Publication date Dec 2, 2021
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Shanshan GU-STOPPEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-Axis MEMS Mirror Parking
- Publication number 20210255399
- Publication date Aug 19, 2021
- Google LLC
- Hsing Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20210239966
- Publication date Aug 5, 2021
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVIN...
- Publication number 20210139316
- Publication date May 13, 2021
- Innovative Interface Laboratory Corp.
- Yu-Wen Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICALLY-SHIFTING ELECTROSTATIC ACTUATOR AND OPTICAL SCANNER EMPL...
- Publication number 20210132370
- Publication date May 6, 2021
- KOREA OPTRON CORP.
- Yun Goo Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL NON-UNIFORMITY CORRECTION (NUC) FOR ACTIVE MODE IMAGING SEN...
- Publication number 20210092260
- Publication date Mar 25, 2021
- Raytheon Company
- Gerald P. Uyeno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOTION CONTROL STRUCTURE AND ACTUATOR
- Publication number 20210002125
- Publication date Jan 7, 2021
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- Ze Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3-AXIS ANGULAR ACCELEROMETER
- Publication number 20200241036
- Publication date Jul 30, 2020
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION GYROSCOPE
- Publication number 20200191571
- Publication date Jun 18, 2020
- DENSO CORPORATION
- Motohiro FUJIYOSHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIDIRECTIONAL TRANSLATING AND TILTING PLATFORM USING BENDING ACT...
- Publication number 20200189907
- Publication date Jun 18, 2020
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Matthieu GAUDET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRASONIC SENSOR
- Publication number 20200182834
- Publication date Jun 11, 2020
- DAI-ICHI SEIKO CO., LTD.
- Kenji OGATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR PACKAGE ARCHITECTURE
- Publication number 20200144936
- Publication date May 7, 2020
- MEMS DRIVE, INC.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Devices moving in two or more dimensions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electro-mechanical system (MEMS) micro-mirror array (MMA) ste...

LIDAR module and methods thereof

Microelectromechanical device having a structure tiltable by piezoe...

MEMS and method of manufacturing the same

3-axis angular accelerometer

MEMS actuator system

MEMS actuator package architecture

Multiaxial strain engineering of defect doped materials

Self-aligned vertical comb drive assembly

Light deflection device

Motion control structure and actuator

Vertically-shifting electrostatic actuator and optical scanner empl...

Multidirectional translating and tilting platform using bending act...

Multi-axis MEMS mirror parking

Optical non-uniformity correction (NUC) for active mode imaging sen...

Actuator, optical scanning device, and manufacturing methods

Light module

Vibration gyroscope

Methods and systems for characterizing fluid composition and proces...

Electronically steered inter-satellite optical communication system...

3-axis angular accelerometer

Mobile device for grasping and active release of objects

Microelectromechanical or/and nanoelectromechanical device with out...

Ultrasonic sensor

Multidirectional artificial muscles from nylon

Autofocus system

Microelectromechanical device with multiple hinges

Four degrees of freedom piston-tube electrostatic actuator

Out-of plane-accelerometer

3-axis angular accelerometer

Patents Applicationslast 30 patents

ACCELERATION SENSOR

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS

COMB STRUCTURE FOR MEMS ACCELEROMETER

IMAGE CAPTURE AT VARYING OPTICAL POWERS

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...

Inertial Sensor

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION A...

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...

BIAXIAL MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACT...

TORSION SPRING ELEMENT

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STE...

3-AXIS ANGULAR ACCELEROMETER

MICROELECTROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE BY PIEZOE...

MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS

LIDAR MODULE AND METHODS THEREOF

MEMS AND METHOD OF MANUFACTURING THE SAME

Multi-Axis MEMS Mirror Parking

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVIN...

VERTICALLY-SHIFTING ELECTROSTATIC ACTUATOR AND OPTICAL SCANNER EMPL...

OPTICAL NON-UNIFORMITY CORRECTION (NUC) FOR ACTIVE MODE IMAGING SEN...

MOTION CONTROL STRUCTURE AND ACTUATOR

3-AXIS ANGULAR ACCELEROMETER

VIBRATION GYROSCOPE

MULTIDIRECTIONAL TRANSLATING AND TILTING PLATFORM USING BENDING ACT...

ULTRASONIC SENSOR

MEMS ACTUATOR PACKAGE ARCHITECTURE