Number | Name | Date | Kind |
---|---|---|---|
4127861 | Deneuville | Nov 1978 | |
4128670 | Gaensslen | Dec 1978 | |
4316209 | Ho et al. | Feb 1982 |
Entry |
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Tu et al., J. Appl. Phys. Suppl. 2, Pt. 1, 1974, Proc. 6th Int. Vacuum Congr. 1974, pp. 669-672. |
Tung et al., Thin Solid Films, 93 (1982). |