Claims
- 1. An apparatus for agitating a workpiece in a high pressure environment comprising:a. a workpiece holder comprising a region for holding the workpiece and protrusions; b. a bearing coupled to the workpiece holder; c. a pressure chamber housing coupled to the bearing; and d. a nozzle coupled to the pressure chamber housing such that in operation a fluid exits the nozzle and impinges the protrusions of the workpiece holder causing the workpiece holder to rotate.
- 2. The apparatus of claim 1 wherein the workpiece holder comprises a semiconductor substrate holder.
- 3. The apparatus of claim 1 wherein the protrusions comprise edge protrusions.
- 4. The apparatus of claim 1 wherein the bearing comprises a spindle bearing.
- 5. The apparatus of claim 1 wherein the bearing comprises a roller bearing.
- 6. The apparatus of claim 1 wherein the bearing comprises a ball bearing.
- 7. The apparatus of claim 1 wherein the bearing comprises a journal bearing.
- 8. The apparatus of claim 1 further comprising a light source and a sensor such that in operation the light source and the sensor provide a measurement of rotation speed of the workpiece holder.
- 9. The apparatus of claim 8 further comprising a first sight glass, the first sight glass optically coupling the light source to the workpiece holder.
- 10. The apparatus of claim 8 further comprising a second sight glass, the second sight glass optically coupling the sensor to the workpiece holder.
- 11. An apparatus for agitating a workpiece in a high pressure environment comprising:a. a semiconductor substrate holder comprising a region for holding the semiconductor substrate and edge protrusions; b. a spindle bearing coupled to the workpiece semiconductor substrate holder; c. a pressure chamber housing coupled to the spindle bearing; and d. a nozzle coupled to the pressure chamber housing such that in operation a fluid exits the nozzle and impinges the edge protrusions of the semiconductor substrate holder causing the semiconductor substrate holder to rotate.
- 12. A method of agitating a workpiece within a high pressure chamber comprising the steps of:a. placing the workpiece on a rotatable workpiece holder; and b. impinging fluid on protrusions of the rotatable workpiece holder to rotate the rotatable workpiece holder and agitate the workpiece.
RELATED APPLICATIONS
This application claims priority from U.S. Provisional Patent Application No. 60/202,835, filed on May 8, 2000, which is incorporated by reference.
US Referenced Citations (9)
Foreign Referenced Citations (5)
Number |
Date |
Country |
36 08 783 |
Sep 1987 |
DE |
10-144757 |
May 1998 |
JP |
WO 9112629 |
Aug 1991 |
WO |
WO 9918603 |
Apr 1999 |
WO |
WO 0036635 |
Jun 2000 |
WO |
Provisional Applications (1)
|
Number |
Date |
Country |
|
60/202835 |
May 2000 |
US |