Number | Name | Date | Kind |
---|---|---|---|
4312732 | Degenkolb et al. | Jan 1982 | A |
4377436 | Donnelly et al. | Mar 1983 | A |
4462863 | Nishimatsu et al. | Jul 1984 | A |
4482424 | Katzir et al. | Nov 1984 | A |
4586822 | Tanimoto | May 1986 | A |
4609428 | Fujimura | Sep 1986 | A |
4659413 | Davis et al. | Apr 1987 | A |
4800282 | Nishimura | Jan 1989 | A |
4846920 | Keller et al. | Jul 1989 | A |
5162867 | Kohno | Nov 1992 | A |
5176790 | Arleo et al. | Jan 1993 | A |
5257047 | Haneda et al. | Oct 1993 | A |
5264328 | DellaGuardia et al. | Nov 1993 | A |
5312717 | Sachdev et al. | May 1994 | A |
5350236 | Thakur et al. | Sep 1994 | A |
5362356 | Schoenborn | Nov 1994 | A |
5397431 | Kadomura | Mar 1995 | A |
5434026 | Takatsu et al. | Jul 1995 | A |
5447598 | Mihara et al. | Sep 1995 | A |
5483568 | Yano et al. | Jan 1996 | A |
5489362 | Steinhardt et al. | Feb 1996 | A |
5552016 | Ghanayem | Sep 1996 | A |
5567268 | Kadomura | Oct 1996 | A |
5654237 | Suguro et al. | Aug 1997 | A |
5672091 | Takahashi et al. | Sep 1997 | A |
5729348 | Romano | Mar 1998 | A |
5780857 | Harju et al. | Jul 1998 | A |
Number | Date | Country |
---|---|---|
62171127 | Jul 1987 | JP |
01222070 | Sep 1989 | JP |
Entry |
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IBM Technical Disclosure Bulletin, Mar. 1983, vol. 25, No. 10, pp. 5356-5357. |
IBM Tech. Disc. Bulletin, “Monitor Wafer for Etch End Point Detection,” vol. 23, No. 8, pp. 3755-3756 (Jan. 1. 1981). |