Semiconductor wafers

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CPC
G01N21/9501

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N21/00Investigating or analysing materials by the use of optical means

Current Industry

G01N21/9501Semiconductor wafers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Automatic optical inspection system and method
- Patent number 12,367,569
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- I-Hsuan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology system and method for determining a characteristic of one...
- Patent number 12,366,811
- Issue date Jul 22, 2025
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G01 - MEASURING TESTING
Information Patent Grant
Wafer taping apparatus and method
- Patent number 12,368,063
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Yi Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Phase retrieval
- Patent number 12,366,525
- Issue date Jul 22, 2025
- Applied Materials Israel Ltd.
- Benny Kirshner
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 12,366,538
- Issue date Jul 22, 2025
- HITACHI HIGH-TECH CORPORATION
- Toshifumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid metrology method and system
- Patent number 12,366,533
- Issue date Jul 22, 2025
- Gilad Barak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface inspection device
- Patent number 12,366,539
- Issue date Jul 22, 2025
- HITACHI HIGH-TECH CORPORATION
- Katsuhiko Kimura
- G01 - MEASURING TESTING
Information Patent Grant
Reconstruction of a distorted image of an array of structural eleme...
- Patent number 12,361,526
- Issue date Jul 15, 2025
- Applied Materials Israel Ltd.
- Yehuda Cohen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor apparatus examination method and semiconductor appara...
- Patent number 12,360,056
- Issue date Jul 15, 2025
- Hamamatsu Photonics K.K.
- Tomochika Takeshima
- G01 - MEASURING TESTING
Information Patent Grant
Finding semiconductor defects using convolutional context attributes
- Patent number 12,353,970
- Issue date Jul 8, 2025
- KLA Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ellipsometer and apparatus for inspecting semiconductor device incl...
- Patent number 12,345,626
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Large-particle monitoring with laser power control for defect inspe...
- Patent number 12,345,658
- Issue date Jul 1, 2025
- KLA Corporation
- Anatoly Romanovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simultaneous back and/or front and/or bulk defect detection
- Patent number 12,339,235
- Issue date Jun 24, 2025
- Onto Innovation Inc.
- Felix Moellmann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dual resolution spectrometer, and spectrometric measurement apparat...
- Patent number 12,332,164
- Issue date Jun 17, 2025
- Samsung Electronics Co., Ltd.
- Sunhong Jun
- G01 - MEASURING TESTING
Information Patent Grant
Dual lens inspection device
- Patent number 12,332,181
- Issue date Jun 17, 2025
- Sun Yang Optics Development Co., Ltd.
- Sheng Che Wu
- G01 - MEASURING TESTING
Information Patent Grant
Dark field illumination based on laser illuminated phosphor
- Patent number 12,332,176
- Issue date Jun 17, 2025
- Camtek Ltd.
- Amnon Menachem
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for inspecting semiconductor wafer and method of...
- Patent number 12,332,186
- Issue date Jun 17, 2025
- Samsung Electronics Co., Ltd.
- Q-Han Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System for automatic diagnostics and monitoring of semiconductor de...
- Patent number 12,332,182
- Issue date Jun 17, 2025
- KLA Corporation
- David W. Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ apparatus for detecting abnormality in process tube
- Patent number 12,326,397
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Jen Yang
- G01 - MEASURING TESTING
Information Patent Grant
Abnormality detecting device and abnormality detecting method
- Patent number 12,327,186
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- Takuro Tsutsui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus to determine a patterning process parameter
- Patent number 12,322,660
- Issue date Jun 3, 2025
- ASML Netherlands B.V.
- Adriaan Johan Van Leest
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for detecting contamination of thin-films
- Patent number 12,320,755
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reflective waveplates for pupil polarization filtering
- Patent number 12,322,620
- Issue date Jun 3, 2025
- KLA Corporation
- Chong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pixel classification of film non-uniformity based on processing of...
- Patent number 12,322,659
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Dominic J. Benvegnu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 12,313,566
- Issue date May 27, 2025
- HITACHI HIGH-TECH CORPORATION
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Substrate inspection apparatus, substrate inspection method, and re...
- Patent number 12,306,113
- Issue date May 20, 2025
- Tokyo Electron Limited
- Takahiro Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Imaging spectropolarimeter and sample characterization methodology...
- Patent number 12,306,092
- Issue date May 20, 2025
- BRUKER NANO, INC.
- Mazen Zawaideh
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for detecting defects in semiconductor systems
- Patent number 12,306,112
- Issue date May 20, 2025
- AXIOMATIQUE TECHNOLOGIES, INC.
- Trevor A. Norman
- G01 - MEASURING TESTING
Information Patent Grant
Wearable device such as for glucose measurement
- Patent number 12,307,731
- Issue date May 20, 2025
- Emcode Photonics LLC
- Shrenik Deliwala
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Inspection condition presentation apparatus, surface inspection app...
- Patent number 12,306,109
- Issue date May 20, 2025
- Resonac Corporation
- Katsuhisa Yoshida
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20250237615
- Publication date Jul 24, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuta URANO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL AND X-RAY METROLOGY METHODS FOR PATTERNED SEMICONDUCTOR STR...
- Publication number 20250237619
- Publication date Jul 24, 2025
- KLA Corporation
- Daniel James Haxton
- G01 - MEASURING TESTING
Information Patent Application
INSTRUMENTAL ERROR TRACKING AND IDENTIFICATION METHOD, INSTRUMENTAL...
- Publication number 20250237548
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- JAN HAU CHANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR OBSERVING SURFACE
- Publication number 20250231116
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Shin OOWADA
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION METHOD
- Publication number 20250231121
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Doyoung Yoon
- G01 - MEASURING TESTING
Information Patent Application
IMAGING METHOD AND METROLOGY DEVICE
- Publication number 20250231498
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Willem Marie Julia Marcel COENE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL-TYPE FOREIGN MATTER INSPECTION DEVICE
- Publication number 20250224342
- Publication date Jul 10, 2025
- Hitachi High-Tech Corporation
- Tomoharu NAGASHIMA
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION APPARATUS AND WAFER INSPECTION SYSTEM INCLUDING TH...
- Publication number 20250224345
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Jun Taek OH
- G01 - MEASURING TESTING
Information Patent Application
SPECTROSCOPIC ELLIPSOMETER AND SUBSTRATE ANALYSIS METHOD USING THE...
- Publication number 20250224326
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Jaeho KIM
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OFFSET CORRECTION FOR EXAMINATION OF SEMICONDUCTOR SPECIMENS
- Publication number 20250224343
- Publication date Jul 10, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Albert KAO
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR MEASURING SEMICONDUCTORS
- Publication number 20250224328
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Sangwoo BAE
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR MEASUREMENT METHOD
- Publication number 20250225674
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Inho SHIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measurements Of Semiconductor Structures Based On Data Collected At...
- Publication number 20250224344
- Publication date Jul 10, 2025
- KLA Corporation
- Houssam Chouaib
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MICRO LED DETECTION DEVICE
- Publication number 20250216338
- Publication date Jul 3, 2025
- BUENO OPTICS CO., LTD.
- KUAN-HAN CHEN
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20250216339
- Publication date Jul 3, 2025
- BRIGHTEST TECHNOLOGY TAIWAN CO., LTD.
- ZHONG-HUA DONG
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20250216341
- Publication date Jul 3, 2025
- Mitsubishi Electric Corporation
- Hiroshi UEDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection Layer to Improve The Detection of Defects Through Optica...
- Publication number 20250216342
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FAULT DETECTION AND CLASSIFICATION (FDC) FOR ENDPOINT DETECTION (EP...
- Publication number 20250216336
- Publication date Jul 3, 2025
- TOKYO ELECTRON LIMITED
- Colin PILCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SPECTRUM DETECTION BY DEFECT SCATTERING CA...
- Publication number 20250216255
- Publication date Jul 3, 2025
- NANJING INSTITUTE OF ASTRONOMICAL OPTICS & TECHNOLOGY, CHINESE ACADEMY OF SCI...
- Jinping HE
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE
- Publication number 20250216340
- Publication date Jul 3, 2025
- CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.
- CHIN-YU LIU
- G01 - MEASURING TESTING
Information Patent Application
METHODS, APPARATUS, AND ARTICLES OF MANUFACTURE TO DETECT TRANSPARE...
- Publication number 20250208060
- Publication date Jun 26, 2025
- Intel Corporation
- Fatemeh Rahimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAULT ISOLATION FOR SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20250208061
- Publication date Jun 26, 2025
- Intel Corporation
- Megan KNAPP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIRROR-BASED RELAY FOR AN OPTICAL INSPECTION SYSTEM
- Publication number 20250208059
- Publication date Jun 26, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Boris GOLBERG
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE INSPECTION DEVICE AND SEMICONDUCTOR DEVICE INS...
- Publication number 20250210387
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Soon Kyu HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR INSPECTION APPARATUS
- Publication number 20250198945
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Junho Shin
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE ABNORMALITY DETECTION METHOD
- Publication number 20250201606
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Ryu NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER ALIGNMENT, CLEANLINESS, AND SURFACE QUALITY VERIFICATION USIN...
- Publication number 20250198946
- Publication date Jun 19, 2025
- Axcelis Technologies, Inc.
- Phillip Geissbuhler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD, RESIN SOLUTION, RESIST COMPOSITION OR THERMOSETT...
- Publication number 20250189903
- Publication date Jun 12, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Komei HIRAHARA
- G01 - MEASURING TESTING
Information Patent Application
SECOND HARMONIC GENERATION (SHG) MEASUREMENT DEVICE AND MEASUREMENT...
- Publication number 20250189295
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Hidaka Yasuhiro
- G01 - MEASURING TESTING
Information Patent Application
RADIATION EMITTER AND MEASUREMENT SYSTEM
- Publication number 20250189444
- Publication date Jun 12, 2025
- Industrial Technology Research Institute
- Karthickraj Muthuramalingam
- G01 - MEASURING TESTING

Semiconductor wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automatic optical inspection system and method

Metrology system and method for determining a characteristic of one...

Wafer taping apparatus and method

Phase retrieval

Defect inspection apparatus and defect inspection method

Hybrid metrology method and system

Surface inspection device

Reconstruction of a distorted image of an array of structural eleme...

Semiconductor apparatus examination method and semiconductor appara...

Finding semiconductor defects using convolutional context attributes

Ellipsometer and apparatus for inspecting semiconductor device incl...

Large-particle monitoring with laser power control for defect inspe...

Simultaneous back and/or front and/or bulk defect detection

Dual resolution spectrometer, and spectrometric measurement apparat...

Dual lens inspection device

Dark field illumination based on laser illuminated phosphor

Method and system for inspecting semiconductor wafer and method of...

System for automatic diagnostics and monitoring of semiconductor de...

In-situ apparatus for detecting abnormality in process tube

Abnormality detecting device and abnormality detecting method

Method and apparatus to determine a patterning process parameter

System and method for detecting contamination of thin-films

Reflective waveplates for pupil polarization filtering

Pixel classification of film non-uniformity based on processing of...

Defect inspection device and defect inspection method

Substrate inspection apparatus, substrate inspection method, and re...

Imaging spectropolarimeter and sample characterization methodology...

Methods and apparatus for detecting defects in semiconductor systems

Wearable device such as for glucose measurement

Inspection condition presentation apparatus, surface inspection app...

Patents Applicationslast 30 patents

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

OPTICAL AND X-RAY METROLOGY METHODS FOR PATTERNED SEMICONDUCTOR STR...

INSTRUMENTAL ERROR TRACKING AND IDENTIFICATION METHOD, INSTRUMENTAL...

METHOD FOR OBSERVING SURFACE

WAFER INSPECTION METHOD

IMAGING METHOD AND METROLOGY DEVICE

OPTICAL-TYPE FOREIGN MATTER INSPECTION DEVICE

WAFER INSPECTION APPARATUS AND WAFER INSPECTION SYSTEM INCLUDING TH...

SPECTROSCOPIC ELLIPSOMETER AND SUBSTRATE ANALYSIS METHOD USING THE...

DEFECT OFFSET CORRECTION FOR EXAMINATION OF SEMICONDUCTOR SPECIMENS

DEVICE FOR MEASURING SEMICONDUCTORS

SEMICONDUCTOR MEASUREMENT METHOD

Measurements Of Semiconductor Structures Based On Data Collected At...

MICRO LED DETECTION DEVICE

WAFER INSPECTION SYSTEM

INSPECTION APPARATUS AND INSPECTION METHOD

Inspection Layer to Improve The Detection of Defects Through Optica...

FAULT DETECTION AND CLASSIFICATION (FDC) FOR ENDPOINT DETECTION (EP...

APPARATUS AND METHOD FOR SPECTRUM DETECTION BY DEFECT SCATTERING CA...

METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE

METHODS, APPARATUS, AND ARTICLES OF MANUFACTURE TO DETECT TRANSPARE...

FAULT ISOLATION FOR SEMICONDUCTOR DEVICE MANUFACTURING

MIRROR-BASED RELAY FOR AN OPTICAL INSPECTION SYSTEM

SEMICONDUCTOR DEVICE INSPECTION DEVICE AND SEMICONDUCTOR DEVICE INS...

SEMICONDUCTOR INSPECTION APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE ABNORMALITY DETECTION METHOD

WAFER ALIGNMENT, CLEANLINESS, AND SURFACE QUALITY VERIFICATION USIN...

INSPECTION METHOD, RESIN SOLUTION, RESIST COMPOSITION OR THERMOSETT...

SECOND HARMONIC GENERATION (SHG) MEASUREMENT DEVICE AND MEASUREMENT...

RADIATION EMITTER AND MEASUREMENT SYSTEM