Semiconductor wafers

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CPC
G01N21/9501

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N21/00Investigating or analysing materials by the use of optical means

Current Industry

G01N21/9501Semiconductor wafers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Laser processing device and laser processing method
- Patent number 12,269,125
- Issue date Apr 8, 2025
- Hamamatsu Photonics K.K.
- Takafumi Ogiwara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection device and processing system
- Patent number 12,272,577
- Issue date Apr 8, 2025
- Hamamatsu Photonics K.K.
- Takeshi Sakamoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method to detect a defect on a lithographic sample and metrology sy...
- Patent number 12,271,115
- Issue date Apr 8, 2025
- Carl Zeiss SMT GmbH
- Toufic Jabbour
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection system and a method of use thereof
- Patent number 12,258,665
- Issue date Mar 25, 2025
- JNK TECH
- Youngjin Choi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mitigation of undesired spectral effects in optical metrology
- Patent number 12,259,338
- Issue date Mar 25, 2025
- Onto Innovation Inc.
- Petar Žuvela
- G01 - MEASURING TESTING
Information Patent Grant
Methods for manufacturing semiconductor devices using MOIRÉ patterns
- Patent number 12,259,662
- Issue date Mar 25, 2025
- Samsung Electronics Co., Ltd.
- Woohyeok Jeong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method of measuring uniformity based on pupil image a...
- Patent number 12,260,539
- Issue date Mar 25, 2025
- Samsung Electronics Co., Ltd.
- Minho Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scatterometry overlay metrology with orthogonal fine-pitch segmenta...
- Patent number 12,253,805
- Issue date Mar 18, 2025
- KLA Corporation
- Vladimir Levinski
- G01 - MEASURING TESTING
Information Patent Grant
System and method for detecting a defect in a specimen
- Patent number 12,253,472
- Issue date Mar 18, 2025
- GLOBALFOUNDRIES U.S. Inc.
- Richard Paul Good
- G01 - MEASURING TESTING
Information Patent Grant
Method of evaluating semiconductor wafer
- Patent number 12,247,927
- Issue date Mar 11, 2025
- Sumco Corporation
- Motoi Kurokami
- G01 - MEASURING TESTING
Information Patent Grant
Detection apparatus, detection method, exposure apparatus, exposure...
- Patent number 12,241,846
- Issue date Mar 4, 2025
- Canon Kabushiki Kaisha
- Kazuya Kijima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer metrology technologies
- Patent number 12,241,924
- Issue date Mar 4, 2025
- FemtoMetrix, Inc.
- Viktor Koldiaev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and setup for detecting surface haze of materials
- Patent number 12,241,845
- Issue date Mar 4, 2025
- Beijing Tongmei Xtal Technology Co., Ltd.
- Wei Gao
- G01 - MEASURING TESTING
Information Patent Grant
Method for defect inspection, system, and computer-readable medium
- Patent number 12,235,223
- Issue date Feb 25, 2025
- HITACHI HIGH-TECH CORPORATION
- Takanori Kondo
- G01 - MEASURING TESTING
Information Patent Grant
Wafer storage devices configured to measure physical properties of...
- Patent number 12,237,189
- Issue date Feb 25, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pupil ellipsometry measurement apparatus and method and method of f...
- Patent number 12,228,499
- Issue date Feb 18, 2025
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Inspection substrate
- Patent number 12,220,839
- Issue date Feb 11, 2025
- Disco Corporation
- Yoshikatsu Soejima
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Method and device for detecting placement of wafers in wafer cassette
- Patent number 12,217,988
- Issue date Feb 4, 2025
- Hon Hai Precision Industry Co., Ltd.
- Yu-Ting Chou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
ULED chip, uLED substrate and method for manufacturing the same, el...
- Patent number 12,218,273
- Issue date Feb 4, 2025
- BOE Technology Group Co., Ltd.
- Yuju Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact apparatus for measuring wafer thickness
- Patent number 12,209,853
- Issue date Jan 28, 2025
- Fujikoshi Machinery Corp.
- Chihiro Miyagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge defect detection via image analytics
- Patent number 12,211,195
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Yash Chhabra
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement system and measurement method
- Patent number 12,203,870
- Issue date Jan 21, 2025
- Skyverse Technology Co., Ltd.
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Grant
Process tool for analyzing bonded workpiece interface
- Patent number 12,205,855
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hau-Yi Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 12,205,272
- Issue date Jan 21, 2025
- NuFlare Technology, Inc.
- Hiromu Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ingot evaluation method and detecting apparatus
- Patent number 12,203,871
- Issue date Jan 21, 2025
- GlobalWafers Co., Ltd.
- Hsiu Chi Liang
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting pattern defects
- Patent number 12,196,687
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ju-Ying Chen
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and method of inspecting wafer
- Patent number 12,196,669
- Issue date Jan 14, 2025
- Samsung Electronics Co., Ltd.
- Martin Priwisch
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 12,196,673
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Takeru Utsugi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for efficient high harmonic generation
- Patent number 12,196,688
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G01 - MEASURING TESTING
Information Patent Grant
System and method for determining post bonding overlay
- Patent number 12,197,137
- Issue date Jan 14, 2025
- KLA Corporation
- Franz Zach
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR MONITORING DEFECT OF SEMICONDUCTOR STRUCTURE
- Publication number 20250116612
- Publication date Apr 10, 2025
- UNIVERSITY-INDUSTRY FOUNDATION(UIF), YONSEI UNIVERSITY
- Mann Ho CHO
- G01 - MEASURING TESTING
Information Patent Application
ENHANCED MODES FOR SCANNING ACOUSTIC MICROSCOPE INSPECTION IN SEMIC...
- Publication number 20250116598
- Publication date Apr 10, 2025
- KLA Corporation
- Daniel Ivanov Kavaldjiev
- G01 - MEASURING TESTING
Information Patent Application
MODEL-BASED ACOUSTO-OPTIC DEPTH-METROLOGY OF SPECIMENS
- Publication number 20250116597
- Publication date Apr 10, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Guy Shwartz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
THIN FILM MONITORING METHOD AND DEVICE
- Publication number 20250116613
- Publication date Apr 10, 2025
- UNIVERSITY-INDUSTRY FOUNDATION(UIF), YONSEI UNIVERSITY
- Mann Ho CHO
- G01 - MEASURING TESTING
Information Patent Application
MULTI-PHASE INTERFEROMETER FOR 3D METROLOGY
- Publication number 20250109934
- Publication date Apr 3, 2025
- ORBOTECH LTD.
- Yuri Paskover
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEMS AND METHODS OF PROVIDING A COUPLING MIRROR TO AN OP...
- Publication number 20250102446
- Publication date Mar 27, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Menachem LAPID
- G01 - MEASURING TESTING
Information Patent Application
ULTRABROADBAND PHOTOCONDUCTION METHOD AND APPARATUS FOR DEFECT DENS...
- Publication number 20250102448
- Publication date Mar 27, 2025
- Oregon State University
- Kyle Timothy Vogt
- G01 - MEASURING TESTING
Information Patent Application
BLUR REDUCTION TECHNIQUES FOR SEMICONDUCTOR INSPECTION
- Publication number 20250102822
- Publication date Mar 27, 2025
- ONTO INNOVATION INC.
- Jian Ding
- G01 - MEASURING TESTING
Information Patent Application
Electrical Performance Prediction Based On Structural Measurements...
- Publication number 20250105064
- Publication date Mar 27, 2025
- KLA Corporation
- Zhengquan Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR PARSING MATERIAL PROPERTIES FROM WITHIN SHG SIGNALS
- Publication number 20250093277
- Publication date Mar 20, 2025
- FemtoMetrix, Inc.
- Viktor Koldiaev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING PATTERN DEFECTS
- Publication number 20250093278
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ju-Ying CHEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM OF SURFACE TOPOGRAPHY MEASUREMENT FOR LITHOGRAPHY
- Publication number 20250093787
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- YUNG-YAO LEE
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM WITH MULTIWAVELENGTH LIGHT SOURCE AND METHOD
- Publication number 20250085215
- Publication date Mar 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G01 - MEASURING TESTING
Information Patent Application
Testing Apparatus and Testing Method
- Publication number 20250076215
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
MULTIDIRECTIONAL ILLUMINATION FOR HYBRID BONDING DEFECT DETECTION
- Publication number 20250076212
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Venkatakaushik VOLETI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ENHANCED INSPECTION OF SURFACES WITH SPECULAR...
- Publication number 20250076183
- Publication date Mar 6, 2025
- ORBOTECH LTD.
- Haim Chayet
- G01 - MEASURING TESTING
Information Patent Application
FOREIGN SUBSTANCE INSPECTION METHOD, FOREIGN SUBSTANCE INSPECTION A...
- Publication number 20250076213
- Publication date Mar 6, 2025
- Canon Kabushiki Kaisha
- TOSHIKI ITO
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF INSPECTING A MARK ENGRAVED ON A SEMICONDUCTOR PACKAGE
- Publication number 20250078249
- Publication date Mar 6, 2025
- SAMSUNG ELECTRONICS CO., LTD.
- Minwoo JEON
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SPECTRAL ANGULAR METROLOGY
- Publication number 20250076208
- Publication date Mar 6, 2025
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION LIGHT SOURCE AND SUBSTRATE INSPECTION APPARATUS INCLUD...
- Publication number 20250067680
- Publication date Feb 27, 2025
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Dong Hoon SONG
- G01 - MEASURING TESTING
Information Patent Application
DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067664
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING PARAMETERS OF PATTERNED STRUCTURE...
- Publication number 20250067683
- Publication date Feb 27, 2025
- NOVA LTD
- Amir Shayari
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DURATION-BASED SAMPLE PATH ADJUSTMENT
- Publication number 20250060317
- Publication date Feb 20, 2025
- KLA Corporation
- Arthur Kalman
- G01 - MEASURING TESTING
Information Patent Application
HYBRID X-RAY AND OPTICAL METROLOGY AND NAVIGATION
- Publication number 20250060324
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Francisco Machuca
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL MEASUREMENT APPARATUS AND OPTICAL MEASUREMENT METHOD
- Publication number 20250052667
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CO., LTD.
- Jooyoun KANG
- G01 - MEASURING TESTING
Information Patent Application
DUAL LENS INSPECTION DEVICE
- Publication number 20250052690
- Publication date Feb 13, 2025
- SUN YANG OPTICS DEVELOPMENT CO., LTD.
- SHENG CHE WU
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, LINEARLY MOVABLE BEAM DISPLACER, AND METHOD
- Publication number 20250044236
- Publication date Feb 6, 2025
- ASML NETHERLANDS B.V.
- Douglas C. CAPPELLI
- G01 - MEASURING TESTING
Information Patent Application
Surface Inspection Device
- Publication number 20250044240
- Publication date Feb 6, 2025
- Hitachi High-Tech Corporation
- Ayumi TOMIYAMA
- G01 - MEASURING TESTING
Information Patent Application
EDGE DEFECT DETECTION VIA IMAGE ANALYTICS
- Publication number 20250045900
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Yash Chhabra
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
THIN FILM THICKNESS ADJUSTMENTS FOR THREE-DIMENSIONAL INTERFEROMETR...
- Publication number 20250044073
- Publication date Feb 6, 2025
- ORBOTECH LTD.
- Yulia Lovsky
- G01 - MEASURING TESTING

Semiconductor wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser processing device and laser processing method

Inspection device and processing system

Method to detect a defect on a lithographic sample and metrology sy...

Substrate inspection system and a method of use thereof

Mitigation of undesired spectral effects in optical metrology

Methods for manufacturing semiconductor devices using MOIRÉ patterns

Apparatus and method of measuring uniformity based on pupil image a...

Scatterometry overlay metrology with orthogonal fine-pitch segmenta...

System and method for detecting a defect in a specimen

Method of evaluating semiconductor wafer

Detection apparatus, detection method, exposure apparatus, exposure...

Wafer metrology technologies

Method and setup for detecting surface haze of materials

Method for defect inspection, system, and computer-readable medium

Wafer storage devices configured to measure physical properties of...

Pupil ellipsometry measurement apparatus and method and method of f...

Inspection substrate

Method and device for detecting placement of wafers in wafer cassette

ULED chip, uLED substrate and method for manufacturing the same, el...

Non-contact apparatus for measuring wafer thickness

Edge defect detection via image analytics

Measurement system and measurement method

Process tool for analyzing bonded workpiece interface

Pattern inspection device and pattern inspection method

Ingot evaluation method and detecting apparatus

Method for inspecting pattern defects

Inspection apparatus and method of inspecting wafer

Defect inspection apparatus and defect inspection method

Method and apparatus for efficient high harmonic generation

System and method for determining post bonding overlay

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR MONITORING DEFECT OF SEMICONDUCTOR STRUCTURE

ENHANCED MODES FOR SCANNING ACOUSTIC MICROSCOPE INSPECTION IN SEMIC...

MODEL-BASED ACOUSTO-OPTIC DEPTH-METROLOGY OF SPECIMENS

THIN FILM MONITORING METHOD AND DEVICE

MULTI-PHASE INTERFEROMETER FOR 3D METROLOGY

OPTICAL SYSTEMS AND METHODS OF PROVIDING A COUPLING MIRROR TO AN OP...

ULTRABROADBAND PHOTOCONDUCTION METHOD AND APPARATUS FOR DEFECT DENS...

BLUR REDUCTION TECHNIQUES FOR SEMICONDUCTOR INSPECTION

Electrical Performance Prediction Based On Structural Measurements...

SYSTEMS FOR PARSING MATERIAL PROPERTIES FROM WITHIN SHG SIGNALS

METHOD FOR INSPECTING PATTERN DEFECTS

METHOD AND SYSTEM OF SURFACE TOPOGRAPHY MEASUREMENT FOR LITHOGRAPHY

INSPECTION SYSTEM WITH MULTIWAVELENGTH LIGHT SOURCE AND METHOD

Testing Apparatus and Testing Method

MULTIDIRECTIONAL ILLUMINATION FOR HYBRID BONDING DEFECT DETECTION

SYSTEM AND METHOD FOR ENHANCED INSPECTION OF SURFACES WITH SPECULAR...

FOREIGN SUBSTANCE INSPECTION METHOD, FOREIGN SUBSTANCE INSPECTION A...

METHOD OF INSPECTING A MARK ENGRAVED ON A SEMICONDUCTOR PACKAGE

SPECTRAL ANGULAR METROLOGY

ILLUMINATION LIGHT SOURCE AND SUBSTRATE INSPECTION APPARATUS INCLUD...

DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS

SYSTEM AND METHOD FOR DETERMINING PARAMETERS OF PATTERNED STRUCTURE...

SYSTEM AND METHOD FOR DURATION-BASED SAMPLE PATH ADJUSTMENT

HYBRID X-RAY AND OPTICAL METROLOGY AND NAVIGATION

OPTICAL MEASUREMENT APPARATUS AND OPTICAL MEASUREMENT METHOD

DUAL LENS INSPECTION DEVICE

INSPECTION APPARATUS, LINEARLY MOVABLE BEAM DISPLACER, AND METHOD

Surface Inspection Device

EDGE DEFECT DETECTION VIA IMAGE ANALYTICS

THIN FILM THICKNESS ADJUSTMENTS FOR THREE-DIMENSIONAL INTERFEROMETR...