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G01N21/9501
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PHYSICS
G01
Measuring instruments
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N21/00
Investigating or analysing materials by the use of optical means
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G01N21/9501
Semiconductor wafers
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for detecting placement of wafers in wafer cassette
Patent number
12,217,988
Issue date
Feb 4, 2025
Hon Hai Precision Industry Co., Ltd.
Yu-Ting Chou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
ULED chip, uLED substrate and method for manufacturing the same, el...
Patent number
12,218,273
Issue date
Feb 4, 2025
BOE Technology Group Co., Ltd.
Yuju Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-contact apparatus for measuring wafer thickness
Patent number
12,209,853
Issue date
Jan 28, 2025
Fujikoshi Machinery Corp.
Chihiro Miyagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge defect detection via image analytics
Patent number
12,211,195
Issue date
Jan 28, 2025
Applied Materials, Inc.
Yash Chhabra
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement system and measurement method
Patent number
12,203,870
Issue date
Jan 21, 2025
Skyverse Technology Co., Ltd.
Lu Chen
G01 - MEASURING TESTING
Information
Patent Grant
Process tool for analyzing bonded workpiece interface
Patent number
12,205,855
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Hau-Yi Hsiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection device and pattern inspection method
Patent number
12,205,272
Issue date
Jan 21, 2025
NuFlare Technology, Inc.
Hiromu Inoue
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ingot evaluation method and detecting apparatus
Patent number
12,203,871
Issue date
Jan 21, 2025
GlobalWafers Co., Ltd.
Hsiu Chi Liang
G01 - MEASURING TESTING
Information
Patent Grant
Method for inspecting pattern defects
Patent number
12,196,687
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ju-Ying Chen
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and method of inspecting wafer
Patent number
12,196,669
Issue date
Jan 14, 2025
Samsung Electronics Co., Ltd.
Martin Priwisch
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and defect inspection method
Patent number
12,196,673
Issue date
Jan 14, 2025
HITACHI HIGH-TECH CORPORATION
Takeru Utsugi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for efficient high harmonic generation
Patent number
12,196,688
Issue date
Jan 14, 2025
ASML Netherlands B.V.
Petrus Wilhelmus Smorenburg
G01 - MEASURING TESTING
Information
Patent Grant
System and method for determining post bonding overlay
Patent number
12,197,137
Issue date
Jan 14, 2025
KLA Corporation
Franz Zach
G01 - MEASURING TESTING
Information
Patent Grant
Method and system of surface topography measurement for lithography
Patent number
12,189,306
Issue date
Jan 7, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Yung-Yao Lee
G01 - MEASURING TESTING
Information
Patent Grant
Method of calibrating coordinate position identification accuracy o...
Patent number
12,188,880
Issue date
Jan 7, 2025
Sumco Corporation
Keiichiro Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspecting apparatus
Patent number
12,181,691
Issue date
Dec 31, 2024
Disco Corporation
Nobuyuki Kimura
G01 - MEASURING TESTING
Information
Patent Grant
Photoresist characteristics analysis method and characteristics ana...
Patent number
12,174,113
Issue date
Dec 24, 2024
FEMTO DEPLOYMENTS INC.
Akira Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High resolution multispectral multi-field-of-view imaging system fo...
Patent number
12,174,128
Issue date
Dec 24, 2024
Onto Innovation Inc.
John A Tejada
G01 - MEASURING TESTING
Information
Patent Grant
Mapping device and a loadport having the same
Patent number
12,174,127
Issue date
Dec 24, 2024
Hiwin Technologies Corp.
Jonus Liu
G01 - MEASURING TESTING
Information
Patent Grant
IC fabrication flow with dynamic sampling for measurement
Patent number
12,169,178
Issue date
Dec 17, 2024
Texas Instruments Incorporated
Jonas Hoehenberger
G01 - MEASURING TESTING
Information
Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
Patent number
12,165,937
Issue date
Dec 10, 2024
Tokyo Electron Limited
Yan Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology method and apparatus for of determining a complex-valued...
Patent number
12,164,233
Issue date
Dec 10, 2024
ASML Netherlands B.V.
Alexander Prasetya Konijnenberg
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Coded LED or other light for target imaging or analysis
Patent number
12,165,372
Issue date
Dec 10, 2024
Emcode Photonics LLC
Shrenik Deliwala
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor substrate processing apparatus and semiconductor subs...
Patent number
12,165,933
Issue date
Dec 10, 2024
Samsung Electronics Co., Ltd.
Inkeun Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for optical inspection of a substrate using same or differen...
Patent number
12,163,899
Issue date
Dec 10, 2024
UNITY SEMICONDUCTOR
Mayeul Durand de Gevigney
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting abnormal growth of graphene
Patent number
12,163,898
Issue date
Dec 10, 2024
Tokyo Electron Limited
Ryota Ifuku
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Broadband wafer defect detection
Patent number
12,158,434
Issue date
Dec 3, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Nai-Han Cheng
G01 - MEASURING TESTING
Information
Patent Grant
Monitoring system and method for verifying measurements in patterne...
Patent number
12,152,869
Issue date
Nov 26, 2024
Nova Ltd.
Boaz Brill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Passivation of nonlinear optical crystals
Patent number
12,152,316
Issue date
Nov 26, 2024
KLA Corporation
Yung-Ho Alex Chuang
C30 - CRYSTAL GROWTH
Information
Patent Grant
Defect inspection device
Patent number
12,146,840
Issue date
Nov 19, 2024
HITACHI HIGH-TECH CORPORATION
Eiji Arima
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION APPARATUS, LINEARLY MOVABLE BEAM DISPLACER, AND METHOD
Publication number
20250044236
Publication date
Feb 6, 2025
ASML NETHERLANDS B.V.
Douglas C. CAPPELLI
G01 - MEASURING TESTING
Information
Patent Application
THIN FILM THICKNESS ADJUSTMENTS FOR THREE-DIMENSIONAL INTERFEROMETR...
Publication number
20250044073
Publication date
Feb 6, 2025
ORBOTECH LTD.
Yulia Lovsky
G01 - MEASURING TESTING
Information
Patent Application
Surface Inspection Device
Publication number
20250044240
Publication date
Feb 6, 2025
Hitachi High-Tech Corporation
Ayumi TOMIYAMA
G01 - MEASURING TESTING
Information
Patent Application
EDGE DEFECT DETECTION VIA IMAGE ANALYTICS
Publication number
20250045900
Publication date
Feb 6, 2025
Applied Materials, Inc.
Yash Chhabra
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR INSPECTING A SUBSTRATE
Publication number
20250027887
Publication date
Jan 23, 2025
Applied Materials, Inc.
Srikanth V. Racherla
G01 - MEASURING TESTING
Information
Patent Application
DEVICE OF INSPECTING DEFECTS OF WAFER DICED OR ALIGNED
Publication number
20250027885
Publication date
Jan 23, 2025
YAYATECH CO., LTD.
Chien-Cheng CHEN
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION SYSTEM
Publication number
20250027886
Publication date
Jan 23, 2025
Taiwan Semiconductor Manufacturing company Ltd.
SHAO-CHIEN CHIU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEEP LEARNING BASED MODE SELECTION FOR INSPECTION
Publication number
20250020598
Publication date
Jan 16, 2025
KLA Corporation
Rajkumar Theagarajan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF OPTIMIZING OVERLAY MEASUREMENT CONDITION AND OVERLAY MEAS...
Publication number
20250012736
Publication date
Jan 9, 2025
Samsung Electronics Co., Ltd.
Dohun Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Multiple Pass Optical Measurements Of Semiconductor Structures
Publication number
20250012734
Publication date
Jan 9, 2025
KLA Corporation
Zhengquan Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL METROLOGY WITH INFLUENCE MAP OF UNKNOWN SECTION
Publication number
20250012737
Publication date
Jan 9, 2025
ONTO INNOVATION INC.
Yiliang LIU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHOTO RESPONSE NON-UNIFORMITY CORRECTION DURING SEMICONDUCTOR INSPE...
Publication number
20250003888
Publication date
Jan 2, 2025
Onto Innovation Inc.
John M. Thornell
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
HYBRID METROLOGY METHOD AND SYSTEM
Publication number
20250003882
Publication date
Jan 2, 2025
NOVA LTD
GILAD BARAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MONITORING INFLUENCE OF DEFECTS IN FEW-LAYER TWO-DIMENSI...
Publication number
20250003893
Publication date
Jan 2, 2025
Tsinghua University
Dameng Liu
G01 - MEASURING TESTING
Information
Patent Application
FOCUS-LESS INSPECTION APPARATUS AND METHOD
Publication number
20240426766
Publication date
Dec 26, 2024
KOH YOUNG TECHNOLOGY INC.
Chan Kwon LEE
G01 - MEASURING TESTING
Information
Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
Publication number
20240418633
Publication date
Dec 19, 2024
KLA Corporation
Shova Subedi
G01 - MEASURING TESTING
Information
Patent Application
OVERLAY MEASUREMENT APPARATUS AND OVERLAY MEASUREMENT METHOD
Publication number
20240410835
Publication date
Dec 12, 2024
AUROS Technology, Inc.
Seong Yun CHOI
G01 - MEASURING TESTING
Information
Patent Application
AUTOFOCUS ASSISTANCE METHOD, AUTOFOCUS ASSISTANCE DEVICE, AND AUTOF...
Publication number
20240402092
Publication date
Dec 5, 2024
Hamamatsu Photonics K.K.
Akira SHIMASE
G02 - OPTICS
Information
Patent Application
SINGLE GRAB PUPIL LANDSCAPE VIA BROADBAND ILLUMINATION
Publication number
20240402615
Publication date
Dec 5, 2024
KLA Corporation
Yaniv Weiss
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INSPECTION SYSTEM AND METHOD FOR ANALYZING FAULTS
Publication number
20240393258
Publication date
Nov 28, 2024
WICKON HIGHTECH GMBH
Roman WIESER
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING WAFERS
Publication number
20240393261
Publication date
Nov 28, 2024
PRECITEC OPTRONIK GMBH
Tobias Beck
G01 - MEASURING TESTING
Information
Patent Application
PROCESS TOOL FOR ANALYZING BONDED WORKPIECE INTERFACE
Publication number
20240379468
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hau-Yi Hsiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR INSPECTION OF SEMICONDUCTOR SUBSTRATES
Publication number
20240379463
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Sheng He HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATED OPTICAL INSPECTION TOOL
Publication number
20240377334
Publication date
Nov 14, 2024
Applied Materials, Inc.
Mark Anthony Lee
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND SYSTEMS FOR MEASURING SEMICONDUCTOR DEVICES
Publication number
20240371706
Publication date
Nov 7, 2024
Lodestar Licensing Group LLC
Anilkumar Chandolu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WEARABLE DEVICE PROVIDING GLUCOSE MEASUREMENT
Publication number
20240362883
Publication date
Oct 31, 2024
Emcode Photonics LLC
Shrenik Deliwala
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20240361244
Publication date
Oct 31, 2024
HAMAMATSU PHOTONICS K. K.
Tomonori Nakamura
G01 - MEASURING TESTING
Information
Patent Application
HOLOGRAPHIC MICROSCOPE AND MANUFACTURING METHOD OF SEMICONDUCTOR DE...
Publication number
20240353795
Publication date
Oct 24, 2024
Samsung Electronics Co., Ltd.
Seungbeom Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER ABNORMALITY DETECTION METHOD AND A SEMICONDUCTOR DEVICE MANUF...
Publication number
20240353350
Publication date
Oct 24, 2024
Samsung Electronics Co., Ltd.
Kihong CHUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Clinical Methods and Pharmaceutical Compositions Employing AMPA Rec...
Publication number
20240355686
Publication date
Oct 24, 2024
Daniel Pierce RADIN
H01 - BASIC ELECTRIC ELEMENTS