Number | Name | Date | Kind |
---|---|---|---|
4869278 | Bran | Sep 1989 | |
5090432 | Bran | Feb 1992 | |
5379785 | Ohmori et al. | Jan 1995 | |
5383484 | Thomas et al. | Jan 1995 | |
5672212 | Manos | Sep 1997 |
Number | Date | Country |
---|---|---|
0 860 860 A2 | Aug 1998 | EPX |
04049619 | Feb 1992 | JPX |
09075874 | Mar 1997 | JPX |
Entry |
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STEAG Electronic Systems CMP--"STEAG announces the Trident 300 Post-CMP Cleaner". |