Number | Name | Date | Kind |
---|---|---|---|
3121619 | Scholte | Feb 1964 | |
3630684 | Keller | Dec 1971 | |
3644097 | Knudsen | Feb 1972 | |
3681033 | Bleil | Aug 1972 | |
3759671 | Bleil | Sep 1973 | |
4563976 | Foell et al. | Jan 1986 | |
4563979 | Falchenberg et al. | Jan 1986 | |
4578143 | Arai | Mar 1986 | |
4749438 | Bleil | Jul 1988 | |
4775443 | Bleil | Oct 1988 | |
4873063 | Bleil | Oct 1989 |
Entry |
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Thomas et al., "Rate Limits in Silicon Sheet Growth: The Connections Between Vertical and Horizontal Methods", Journal of CrystalGrowth 82 (1987) pp. 1 to 9. |