The present invention relates to high pulse powered electrical equipment and other high voltage electrical equipment which is segregated into modules which in turn are positioned relatively close to each other, e.g., in a cabinet, e.g., housing other equipment, e.g., the optics, laser chambers and associated other equipment for a very high power very high pulse rate excimer laser.
In high pulse powered electrical equipment and other high voltage electrical equipment which is segregated into modules which in turn are positioned relatively close to each other, e.g., in a cabinet, e.g., housing other equipment, e.g., the optics, laser chambers and associated other equipment for a very high power very high pulse rate excimer laser, there is a need for conservation of space. At the same time it is necessary interconnection of modules with high voltage over a relatively robust and therefore also relatively inflexible high voltage cable, e.g., a coaxial cable, formed, e.g., of an internal high voltage connection wire, e.g., copper wire, surrounded by a relatively thick sheath of relatively inflexible insulating material, e.g., Polyethylene, surrounded by a relatively flexible ground connection formed, e.g., of a woven mesh of conductor material, e.g., copper mesh, which is in turn surrounded by an also relatively inflexible outer sheath of insulating material, e.g., plastic or synthetic or actual rubber, e.g., neoprene. In certain applications, e.g., generation of very finely tuned very short wavelength and narrow band width light for applications, e.g., semiconductor manufacturing lithography applications, interconnecting cables with unwanted loops or even perhaps bending of the cabling can cause undesired electrical effects, e.g., unwanted and/or misplaced inductances. For both ease of installation and ease of removal for maintenance of for interchange there is a need for the ability to interconnect such modules with such relatively inflexible cabling without significantly bending, twisting, crimping, looping or the like of the cabling, which can cause the above mentioned ill effects or perhaps also damage component parts within the modules during an installation or removal process.
An apparatus and method for electrically connecting two closely positioned high voltage modules with little or no bend and without any loops in an electrical interconnecting coaxial cable, is disclosed, which may comprise a high voltage connector attached to at least a portion of the cable on at least one end of the cable; a push through high voltage connector receptor within one module; and a disconnection mechanism within the one module adapted to move the high voltage connector and the at least a portion of cable to which the high voltage connector is attached through the connector receptor from a contact position to a housed position in a direction away from the other module to which high voltage connection is to be made. The high voltage connector receptor may comprise an open cylindrical connector with a contacting surface contained on the interior wall of the cylindrical connector. The apparatus may further comprise an interlock mechanism in operative connection with the disconnection mechanism and adapted to provide an indication of the high voltage connector being in a position other than in the contact position relative to the connector receptor, and an engaging mechanism engaging the cable and holding the cable in a fixed position relative to the disconnection mechanism as the high voltage connector moves between the contact position and the housed position. The apparatus may further comprise a clamping mechanism in cooperative connection with the disconnection mechanism when the high voltage connector is in the contact position and cooperative with the clamping mechanism to prevent the high voltage connector from moving from the contact position. The invention may also include a retractable connector within a second module moveable toward the first module from a retracted position into an extended position, in which extended position electrical contact is made with the second high voltage connector.
Turning now to
Contained on the module 20 may also be a magnetic inductive reactor element 38, which may be contained in, e.g., a housing 39. The magnetic inductive reactor element 38 may have an inductive reactor input contact plate 40 in electrical contact with an element (not shown) forming a portion of, e.g., a first turn around a magnetic core (not shown), both contained within the housing 39. The high voltage connector receptor 34 may be attached by screws 41 to front capacitor bank input contact plate 42. The front capacitor input contact plate 42 may also be connected electrically to the inductive reactor input plate 40 by a plurality of standoffs 46. The reactor input plate 40 may also be connected electrically to a rear capacitor input contact plate 44 by another plurality of standoffs 46.
Each of a plurality of front capacitor bank bottom capacitors 60 may be connected electrically to the front capacitor bank input connector plate 42 and also to the module base 22, which may be maintained at a common or ground potential. Each of a plurality of front capacitor bank upper capacitors 62 may be connected electrically to the front capacitor bank input plate 42 and to a front to capacitor ground plate 50, which may be connected electrically to the base 22 by a plurality of standoffs 70. Each of a plurality of rear capacitor bank bottom capacitors 64 may be electrically connected to the rear capacitor bank input plate 44 and to the base 22. Each of a plurality of rear capacitor bank top capacitors 66 may be connected to the rear capacitor bank input connector plate 44 and to a rear capacitor bank top capacitor ground plate 52, which may be connected to the base 22 by another plurality of standoffs 70.
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Inserted within the interior of the elongated cylindrical section 82 for slideable motion within the base tube 80 may be a high voltage input assembly center tube 110, also shown in perspective view in
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In this position of the high voltage connector assembly 30, the clamping protrusion 148 of the high voltage input connector clamp 140 is engaging the annular groove 130 in the inner tube 110, preventing the high voltage connector 32 from moving out from within the opening 178 in the high voltage connector receptor 32. In addition, a micro-switch 160 contact 162, extending through the window 98 in the base tube 80 engages the tapered outer surface 124_of the center tube 110.
When the module 20 is first to be installed and/or the operator desires to remove the module, the cable 36 and the high voltage connector assembly 30 will be in the position/or moved into the position shown in
During such an engaging step, after the module 20 has been inserted or re-inserted, the inner tube 110 may be withdrawn through the base tube 80 in which it is snuggly fit and frictionally engaging, but still slideably engaging the base tube, to a position where the clamp 140 again is in engagement with the annular groove 130 and the high voltage connector in turn is within the opening 178 of the high voltage connector receptor 32.
It will be understood that the limit switches 146 and 160 may provide interlocking and safety inputs to a controller (not shown) to permit connecting high voltage to the cable 36 when the high voltage connector 32 is in the operating position and to not permit such application of high voltage when the high voltage connector 32 is in any other position, including the “housed” position. The connector 32 and connector receptor 34, therefore, form a “push-through” high voltage connector, i.e., the connector 32 and the cable 37 to which it is attached, including at least that part of the cable forming the high voltage connection wire 37 and a surrounding insulation cladding, moves through the connector receptor from a contact position to a housed position in a direction away from the neighboring module to which high voltage connection is desired when the cable 36 is moved from the housed position to the connecting position moving the cable 36 in the opposite direction, i.e., toward the neighboring module.
It will be understood that an adjacent module, e.g., a commutator module may have an essentially identical arrangement as that shown in
In this manner a relatively thick and inflexible cable 37 may be used to interconnect two high voltage modules in relatively close proximity without bends of loops in the cable 37 which can lead to unwanted inductances and at the same time may be connected and disconnected from each other with relative ease with the modules installed in a cabinet having relatively close proximity and little flexibility of relative movement for purposes of connecting/disconnecting the cable ends to the respective module(s).
To add even more flexibility to the connecting/disconnecting process another embodiment of the present invention may be utilized, e.g., as shown in
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The inner tube 200 may also contain a high voltage cable wire 212 which may be surrounded by insulating material 210, e.g., plastic, such as Teflon, which may be attached to the interior wall surface of the inner tube 200, e.g., by adhesive, which also may be formed into an elongated cylinder surrounding and coaxial with the high voltage contact wire 212. Attached to the end of the insulating material 210 and in electrical connection with the wire 212, e.g., through an end cap 208 may be a donut-shaped high voltage connector 214. The end cap 208 may be inserted into the central opening 209 of the donut-shaped connector 214 and the donut-shaped connector 214 may be attached to the insulating material 210 by any suitable means, e.g., by tapping the interior surface of the hole 209 and threading the outer surface of the end cap 208. Alternatively, the end cap 208 could be soldered to the connector 214.
In the other end of the inner tube 200 may be formed an opening 216 for receiving and locking a coaxial cable connector 240 (shown in
The wider portion 216 of the opening 204 may be internally threaded to receive threads (not shown) formed externally on a coaxial cable connector locking plug 250 forming a portion of a coaxial cable connector 240. The locking plug 250 may have an internal passage through which may be inserted the coaxial cable, with a portion of the outer insulator stripped away in order to make ground connection through the locking plug, made of a suitable electrically conductive material, e.g., brass, and the wall of the inner tube 210 in contact with the base tube 190 and the wall 184 of the grounded commutator module 182 wall 184. As can be seen in
In operation, the retractable connector 180, when not in use may be in the housed position as shown, e.g., in
At this point, the coaxial cable 37 and connector 32 may be moved into engagement with the connector receiver 34 in the other module, extending the connector plug 250 toward the opening 204 in the extended retractable connector 180 allowing the connector plug 250 to be threaded into the receiving opening 216 to made the banana plug 246 with the banana plug receptor 224, establishing high voltage electrical connection between the modules with a minimum of relatively inflexible cable between the two, with a minimum bending or flexing of the cable during connection and with a minimum of bend and an elimination of loops in the interconnecting high voltage cable, e.g., reducing to a minimum any stray inductance.
Those skilled in the art will appreciate that the present embodiment described of the present invention is for illustrative purposes only and that may modifications and changes well within the understanding and skill of those in the art may be made to the presently disclosed embodiment(s) without departing from the spirit and scope of the appended claims. The present invention, therefore, should not be considered to be limited to the presently preferred embodiment(s) as disclosed and should be considered to be of an extend covered by the appended claims and their equivalents.
Number | Name | Date | Kind |
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4795356 | Pauza | Jan 1989 | A |
5149275 | Pitta | Sep 1992 | A |
5857868 | Findon et al. | Jan 1999 | A |
5890926 | Pauza et al. | Apr 1999 | A |
6237690 | Nicholson | May 2001 | B1 |
6283781 | Mori | Sep 2001 | B1 |
Number | Date | Country | |
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20040266235 A1 | Dec 2004 | US |