Number | Date | Country | Kind |
---|---|---|---|
5-148470 | May 1993 | JPX | |
5-273051 | Oct 1993 | JPX |
Number | Name | Date | Kind |
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4322253 | Pankove et al. | Mar 1982 | |
4943837 | Konishi et al. | Jul 1990 | |
5214002 | Hayashi et al. | May 1993 | |
5236850 | Zhang | Aug 1993 | |
5296405 | Yamazaki et al. | Mar 1994 | |
5308998 | Yamazaki et al. | May 1994 | |
5512494 | Tanabe | Apr 1996 | |
5529630 | Imahashi et al. | Jun 1996 |
Number | Date | Country |
---|---|---|
61-105869 | May 1986 | JPX |
1-51626 | Feb 1989 | JPX |
2-208942 | Aug 1990 | JPX |
2-263799 | Oct 1990 | JPX |
3-6028 | Jan 1991 | JPX |
3-289140 | Dec 1991 | JPX |
Entry |
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Sera et al., "High-Performance TFT's Fabricated by XeCl Excimer Laser Annealing of Hydrogenated Amorphous-Silicon Film", IEEE Transaction on Electron Devices, vol. 36, No. 12, Dec. 1989, pp. 2868-2872. |