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Entry |
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U.S. patent application Ser. No. 09/540,385 Method and Apparatus for Chemically-Mechanically Polishing Semiconductor Wafers—Inventors: Travis et al., Filing Date: Mar. 31, 2000 Attorney Docket No. 7103-123. |
U.S. patent application Ser. No. 09/540,810 Fixed Abrasive Linear Polishing Belt and System—Inventors: Zhao et al. Filing Date: Mar. 31, 2000 Attorney Docket No. 7103-135. |
U.S. patent application Ser. No. 09/541,144 Method and Apparatus for Chemical Mechanical Planarization and Polishing of Semiconductor Wafers Using a Continuous Polishing Member Feed—Inventors: Moork. |
U.S. patent application Ser. No. 09/386,741 Unsupported Chemical Mechanical Polishing Belt—Invertors: Xu et al. Filing Date: Aug. 31, 1999 Attorney Docket No. 7103/83. |
Inaba, S., Katsuyama, T., Tanaka, M., “Study of CMP Polishing pad Control Method”, Feb. 19-20, 1998 CMP MIC Conference, 1998 IMIC-300P/98/0444. |