Number | Name | Date | Kind |
---|---|---|---|
4619038 | Pintchovski | Oct 1986 | |
4650698 | Moriya et al. | Mar 1987 | |
4668530 | Reif et al. | May 1987 | |
4923715 | Matsuda et al. | May 1990 | |
5091219 | Monowski et a. | Feb 1992 | |
5421957 | Carlson et al. | Jun 1995 |
Entry |
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Pierson, Handbook of Chemical Vapor Deposition, Noyes Publications, Park Ridge, New Jersey, pp. 246-247 (no month), 1992. |