characterised by the method of coating

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CPC
C23C16/44

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/44characterised by the method of coating

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for coating short fibres
- Patent number 12,269,780
- Issue date Apr 8, 2025
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate retaining apparatus, system including the apparatus, and...
- Patent number 12,270,106
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber component and method of forming a surface texture
- Patent number 12,269,095
- Issue date Apr 8, 2025
- Cleanpart Group GmbH
- Olivier Marchand
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Formation of SiOC thin films
- Patent number 12,272,546
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer coatings of component parts for a work piece processing...
- Patent number 12,266,509
- Issue date Apr 1, 2025
- Lam Researh Corporation
- Paul Konkola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor delivery systems, precursor supply packages, and related...
- Patent number 12,258,662
- Issue date Mar 25, 2025
- Entegris, Inc.
- Paolo Moreschini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing oxide film and display appara...
- Patent number 12,258,663
- Issue date Mar 25, 2025
- LG Display Co., Ltd.
- Jaeyoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning quartz epitaxial chambers
- Patent number 12,252,785
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Gregory Deye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and substrate processing apparatus
- Patent number 12,252,786
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated cleaning process for substrate etching
- Patent number 12,255,055
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Yi Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to eliminate of deposition on wafer bevel and backside
- Patent number 12,255,054
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,246,963
- Issue date Mar 11, 2025
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Film-forming method and raw material solution
- Patent number 12,247,285
- Issue date Mar 11, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takahiro Sakatsume
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film using surface protection material
- Patent number 12,247,289
- Issue date Mar 11, 2025
- EGTM CO., LTD.
- Geun Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow control method using plasma system
- Patent number 12,247,290
- Issue date Mar 11, 2025
- Samsung Electronics Co., Ltd.
- Suncheul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum gauge protector for deposition systems
- Patent number 12,247,890
- Issue date Mar 11, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for cleaning a pre-clean process chamber
- Patent number 12,241,157
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ting Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber with stop-gapped vacuum seal
- Patent number 12,242,205
- Issue date Mar 4, 2025
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for large-scale production of graphene
- Patent number 12,240,761
- Issue date Mar 4, 2025
- CealTech AS
- Jon Are Beukes
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Particle remover and method
- Patent number 12,233,368
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Hao Cheng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of in situ ceramic coating deposition
- Patent number 12,234,549
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube preparation system
- Patent number 12,234,551
- Issue date Feb 25, 2025
- SUZHOU JERNANO CARBON CO., LTD.
- Zhenzhong Yong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Vaporizer, processing apparatus and method of manufacturing semicon...
- Patent number 12,234,550
- Issue date Feb 25, 2025
- Kokusai Electric Corporation
- Gen Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM
- Publication number 20250114740
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Ryan T. DOWNEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR THE PREPARATION OF A MATERIAL COMPRISING SILICON NANOWIR...
- Publication number 20250115988
- Publication date Apr 10, 2025
- ENWIRES
- Florian D'ACCRISCIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250116002
- Publication date Apr 10, 2025
- MICO CERAMICS LTD.
- Hyosung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOBLE METAL VAPOR DEPOSITION MATERIAL
- Publication number 20250115990
- Publication date Apr 10, 2025
- MATSUDA SANGYO COMPANY LIMITED
- Takahiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, METHOD OF MANUFACT...
- Publication number 20250115993
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Abatement System Having an Injector with a Liquid Membrane
- Publication number 20250115994
- Publication date Apr 10, 2025
- Neil Stephen IDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS...
- Publication number 20250115995
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Iordan Iordanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD OF MANUFACTURING SiC EPITAXIAL WAFER
- Publication number 20250109526
- Publication date Apr 3, 2025
- Resonac Corporation
- Kensho TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE PREPARATION OF SILICON-CONTAINING COMPOSITE PARTICLES
- Publication number 20250109027
- Publication date Apr 3, 2025
- Nexeon Limited
- Jose MEDRANO CATALAN
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CHEMICAL VAPOR DEPOSITION SYSTEM WITH HOT-WALL HYBRID FLOW REACTOR...
- Publication number 20250109493
- Publication date Apr 3, 2025
- VEECO INSTRUMENTS INC.
- Johannes Kaeppeler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...
- Publication number 20250109497
- Publication date Apr 3, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu CHAMPAGNE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE CLEANING, MODIFICATION AND DOPING OF ARGYRODITE TYPE SOLID...
- Publication number 20250112266
- Publication date Apr 3, 2025
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION METHOD AND DEVICE FOR BATTERY COMPONENTS, SECONDARY BATT...
- Publication number 20250112345
- Publication date Apr 3, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
- B60 - VEHICLES IN GENERAL
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING A METAL SULFIDE LAYER
- Publication number 20250109492
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Patricio Eduardo Romero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PREVENTIVE MAINTENANCE OF SEMICONDUCTOR PRO...
- Publication number 20250109494
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Kenneth Honniball
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...
- Publication number 20250109495
- Publication date Apr 3, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...
- Publication number 20250106944
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- THOMAS W. PILTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105000
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250105007
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Yugo ORIHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...
- Publication number 20250101580
- Publication date Mar 27, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE
- Publication number 20250101582
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Seung Jin YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE FORMED FROM SEMI-CONTINOUS AND MULTI-STEP PROCESS
- Publication number 20250101584
- Publication date Mar 27, 2025
- Hemlock Semiconductor Operations LLC
- Junbing YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE-FUNCTIONALIZED CYCLOTRISILAZANES AS PRECURSORS FOR DEPOSITIO...
- Publication number 20250101586
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...
- Publication number 20250101581
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250101583
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A DOPED HAFNIUM ZIRCONIUM OXIDE LAYER ON A SUBS...
- Publication number 20250101579
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Alessandra Leonhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20250101585
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Ryohei TAKAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105001
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVING IMPURITIES FROM PRECURSORS
- Publication number 20250090975
- Publication date Mar 20, 2025
- Entegris, Inc.
- Michael Watson
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20250092522
- Publication date Mar 20, 2025
- Samsung Electronics Co., Ltd.
- Jinbum Kim
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the method of coating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for coating short fibres

Substrate supporting plate, thin film deposition apparatus includin...

Substrate retaining apparatus, system including the apparatus, and...

Process chamber component and method of forming a surface texture

Formation of SiOC thin films

Multilayer coatings of component parts for a work piece processing...

Chemical vapor infiltration densification method using single-pile...

Substrate processing apparatus, method of manufacturing semiconduct...

Precursor delivery systems, precursor supply packages, and related...

Apparatus and method of manufacturing oxide film and display appara...

Substrate processing apparatus and stage cleaning method

Methods and systems for depositing a layer

Method for cleaning quartz epitaxial chambers

Cleaning method and substrate processing apparatus

Integrated cleaning process for substrate etching

Methods to eliminate of deposition on wafer bevel and backside

Hydrogen recycle system and hydrogen recycle method

Film-forming method and raw material solution

Apparatus for performing film forming process on substrate and meth...

Method for forming thin film using surface protection material

Flow control method using plasma system

Vacuum gauge protector for deposition systems

Combination CVD/ALD method, source and pulse profile modification

System and method for cleaning a pre-clean process chamber

Reaction chamber with stop-gapped vacuum seal

Device for large-scale production of graphene

Particle remover and method

Method of in situ ceramic coating deposition

Carbon nanotube preparation system

Vaporizer, processing apparatus and method of manufacturing semicon...

Patents Applicationslast 30 patents

COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM

METHOD FOR THE PREPARATION OF A MATERIAL COMPRISING SILICON NANOWIR...

CERAMIC SUSCEPTOR

NOBLE METAL VAPOR DEPOSITION MATERIAL

SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, METHOD OF MANUFACT...

Abatement System Having an Injector with a Liquid Membrane

MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS...

SiC EPITAXIAL WAFER AND METHOD OF MANUFACTURING SiC EPITAXIAL WAFER

PROCESS FOR THE PREPARATION OF SILICON-CONTAINING COMPOSITE PARTICLES

CHEMICAL VAPOR DEPOSITION SYSTEM WITH HOT-WALL HYBRID FLOW REACTOR...

CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...

SURFACE CLEANING, MODIFICATION AND DOPING OF ARGYRODITE TYPE SOLID...

PROTECTION METHOD AND DEVICE FOR BATTERY COMPONENTS, SECONDARY BATT...

METHOD, SYSTEM AND APPARATUS FOR FORMING A METAL SULFIDE LAYER

METHODS AND SYSTEMS FOR PREVENTIVE MAINTENANCE OF SEMICONDUCTOR PRO...

FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...

MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...

APPARATUS FOR TREATING SUBSTRATE

COMPOSITE FORMED FROM SEMI-CONTINOUS AND MULTI-STEP PROCESS

HALIDE-FUNCTIONALIZED CYCLOTRISILAZANES AS PRECURSORS FOR DEPOSITIO...

APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

METHODS FOR FORMING A DOPED HAFNIUM ZIRCONIUM OXIDE LAYER ON A SUBS...

FILM FORMING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

REMOVING IMPURITIES FROM PRECURSORS

SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...