characterised by the method of coating

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CPC
C23C16/44

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/44characterised by the method of coating

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,246,963
- Issue date Mar 11, 2025
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Film-forming method and raw material solution
- Patent number 12,247,285
- Issue date Mar 11, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takahiro Sakatsume
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film using surface protection material
- Patent number 12,247,289
- Issue date Mar 11, 2025
- EGTM CO., LTD.
- Geun Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow control method using plasma system
- Patent number 12,247,290
- Issue date Mar 11, 2025
- Samsung Electronics Co., Ltd.
- Suncheul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum gauge protector for deposition systems
- Patent number 12,247,890
- Issue date Mar 11, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for cleaning a pre-clean process chamber
- Patent number 12,241,157
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ting Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber with stop-gapped vacuum seal
- Patent number 12,242,205
- Issue date Mar 4, 2025
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for large-scale production of graphene
- Patent number 12,240,761
- Issue date Mar 4, 2025
- CealTech AS
- Jon Are Beukes
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of in situ ceramic coating deposition
- Patent number 12,234,549
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube preparation system
- Patent number 12,234,551
- Issue date Feb 25, 2025
- SUZHOU JERNANO CARBON CO., LTD.
- Zhenzhong Yong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Particle remover and method
- Patent number 12,233,368
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Hao Cheng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Vapor phase coating technology for pharmaceutical abuse deterrent f...
- Patent number 12,233,169
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Colin C. Neikirk
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Showerhead device for semiconductor processing system
- Patent number 12,237,182
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, processing apparatus and method of manufacturing semicon...
- Patent number 12,234,550
- Issue date Feb 25, 2025
- Kokusai Electric Corporation
- Gen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing article comprising metal coating, method of making and meth...
- Patent number 12,227,839
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peng-Cheng Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,227,837
- Issue date Feb 18, 2025
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 12,227,838
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Ban Seok You
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,224,185
- Issue date Feb 11, 2025
- Kokusai Electric Corporation
- Hideharu Itatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,221,696
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Paddle configuration for a particle coating reactor
- Patent number 12,220,678
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Govindraj Desai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stress reducing method
- Patent number 12,221,693
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takuya Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioning of a processing chamber
- Patent number 12,221,694
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Pramit Manna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of forming a semiconductor layer
- Patent number 12,224,175
- Issue date Feb 11, 2025
- Infineon Technologies AG
- Olaf Fiedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and method for oriented deposition
- Patent number 12,215,418
- Issue date Feb 4, 2025
- Canatu Finland Oy
- Ilkka Varjos
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas manifold for simultaneous gas property control in deposition sy...
- Patent number 12,215,423
- Issue date Feb 4, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,215,417
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Satoshi Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONNECTOR WITH PRESSURIZED SEALING CHAMBER FOR PROCESS TUBE OF A PR...
- Publication number 20250075796
- Publication date Mar 6, 2025
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Didier ARL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR REMOVING COLLATERAL DEPOSITIONS FROM WITHIN...
- Publication number 20250075317
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Gregory Deye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE
- Publication number 20250075322
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Takuya HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF SUPPRESSING OXYGEN INC...
- Publication number 20250075319
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20250075320
- Publication date Mar 6, 2025
- Soulbrain Co., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning a reaction chamber
- Publication number 20250075318
- Publication date Mar 6, 2025
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITROGEN-BASED OXYGEN-FREE DIPOLES, RELATED DEVICES, RELATED SYSTEM...
- Publication number 20250079156
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Giuseppe Alessio Verni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...
- Publication number 20250066911
- Publication date Feb 27, 2025
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250066920
- Publication date Feb 27, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAINTENANCE SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250066908
- Publication date Feb 27, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAL STRUCTURE, CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20250066909
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS
- Publication number 20250066910
- Publication date Feb 27, 2025
- Micron Technology, Inc.
- John Hopkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...
- Publication number 20250066912
- Publication date Feb 27, 2025
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...
- Publication number 20250059645
- Publication date Feb 20, 2025
- Duck Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN-CONTAINING PRECURSORS FOR DEPOSITION OF TIN-CONTAINING THIN FIL...
- Publication number 20250059643
- Publication date Feb 20, 2025
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Masato HIRAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...
- Publication number 20250059642
- Publication date Feb 20, 2025
- Tanaka Kikinzoku Kogyo K.K.
- Kazuharu SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM, A SEMICONDUCTOR PRECURSOR STORAGE...
- Publication number 20250059644
- Publication date Feb 20, 2025
- ASM IP HOLDING B.V.
- Dieter Pierreux
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA CLEAN (RPC) DELIVERY INLET ADAPTER
- Publication number 20250062106
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Danae Nicole Kay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY
- Publication number 20250051910
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Shinichi OKI
- B08 - CLEANING
Information Patent Application
HIGH-PRESSURE SUBSTRATE PROCESSING APPARATUS AND HIGH-PRESSURE CHEM...
- Publication number 20250051916
- Publication date Feb 13, 2025
- HPSP Co., Ltd.
- Sung Kil CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...
- Publication number 20250051959
- Publication date Feb 13, 2025
- SUMCO CORPORATION
- Masayuki TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD PULSE SEQUENCE ENGINEERING FOR IMPROVED CONFORMALITY FOR LOW TE...
- Publication number 20250054751
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION DEVICE WITH ADHERENCE DISRUPTION FEATURE...
- Publication number 20250051913
- Publication date Feb 13, 2025
- VitriVax, Inc.
- Hans Heinrich Funke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20250051911
- Publication date Feb 13, 2025
- AIR WATER INC.
- Fumio KAWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...
- Publication number 20250051914
- Publication date Feb 13, 2025
- Merck Patent GmbH
- Byeong-IL Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFIGURABLE SOURCE
- Publication number 20250043417
- Publication date Feb 6, 2025
- ULTRA CLEAN HOLDINGS, INC
- Michael RAMACCIOTTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20250043424
- Publication date Feb 6, 2025
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTED METALLIC COMPONENTS, REACTION CHAMBERS INCLUDING PROTECTE...
- Publication number 20250043416
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Iordan Iordanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS WITH HEATED FILTER AND OPERATION METHOD OF THE SAME
- Publication number 20250046584
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Lun LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method of coating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Hydrogen recycle system and hydrogen recycle method

Film-forming method and raw material solution

Apparatus for performing film forming process on substrate and meth...

Method for forming thin film using surface protection material

Flow control method using plasma system

Vacuum gauge protector for deposition systems

Combination CVD/ALD method, source and pulse profile modification

System and method for cleaning a pre-clean process chamber

Reaction chamber with stop-gapped vacuum seal

Device for large-scale production of graphene

Method of in situ ceramic coating deposition

Carbon nanotube preparation system

Particle remover and method

Vapor phase coating technology for pharmaceutical abuse deterrent f...

Showerhead device for semiconductor processing system

Vaporizer, processing apparatus and method of manufacturing semicon...

Vapor accumulator for corrosive gases with purging

Substrate support with varying depths of areas between mesas and co...

Sealing article comprising metal coating, method of making and meth...

Ex situ coating of chamber components for semiconductor processing

Substrate processing apparatus and substrate processing method usin...

Method of manufacturing semiconductor device

Process kits and related methods for processing chambers to facilit...

Paddle configuration for a particle coating reactor

Stress reducing method

Conditioning of a processing chamber

Apparatus and method of forming a semiconductor layer

Apparatuses and method for oriented deposition

Gas manifold for simultaneous gas property control in deposition sy...

Substrate processing method and substrate processing device

Patents Applicationslast 30 patents

CONNECTOR WITH PRESSURIZED SEALING CHAMBER FOR PROCESS TUBE OF A PR...

SYSTEMS AND METHODS FOR REMOVING COLLATERAL DEPOSITIONS FROM WITHIN...

METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF SUPPRESSING OXYGEN INC...

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

Method and apparatus for cleaning a reaction chamber

NITROGEN-BASED OXYGEN-FREE DIPOLES, RELATED DEVICES, RELATED SYSTEM...

METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...

SUBSTRATE PROCESSING APPARATUS

MAINTENANCE SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

SEAL STRUCTURE, CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS

METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...

SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...

TIN-CONTAINING PRECURSORS FOR DEPOSITION OF TIN-CONTAINING THIN FIL...

RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...

SEMICONDUCTOR PROCESSING SYSTEM, A SEMICONDUCTOR PRECURSOR STORAGE...

REMOTE PLASMA CLEAN (RPC) DELIVERY INLET ADAPTER

CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY

HIGH-PRESSURE SUBSTRATE PROCESSING APPARATUS AND HIGH-PRESSURE CHEM...

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...

ALD PULSE SEQUENCE ENGINEERING FOR IMPROVED CONFORMALITY FOR LOW TE...

CHEMICAL VAPOR DEPOSITION DEVICE WITH ADHERENCE DISRUPTION FEATURE...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

FILM FORMING METHOD

SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...

CONFIGURABLE SOURCE

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

PROTECTED METALLIC COMPONENTS, REACTION CHAMBERS INCLUDING PROTECTE...

APPARATUS WITH HEATED FILTER AND OPERATION METHOD OF THE SAME