Claims
- 1. An apparatus for an active energy beam irradiation, comprising:
an irradiating chamber for irradiating a target object with an active energy beam, the irradiating chamber including a transport inlet for transporting the target object into the irradiating chamber and a transport outlet for transporting the target object out of the irradiating chamber; an irradiating apparatus for irradiating the target object with an active energy beam within the irradiating chamber; and a gas supply mechanism for supplying one of an inert gas and a reactive gas into the irradiating chamber to thereby set up one of an inert gas atmosphere and a reactive gas atmosphere within the irradiating chamber, wherein the irradiating chamber includes an irradiating section for irradiating the target object with the active energy beam emitted from the irradiating apparatus, and a transport duct having a gas flow resistor to set up a condition of X/Y≧1, where X represents a gas amount passing through the transport inlet and Y represents a gas amount passing through the transport outlet, wherein the transport duct includes a transport roll and a roll cover at least partially covering the transport roll, both arranged on one side of one of a front surface and a back surface of the target object passing through the transport duct, and wherein the gas flow resistor is arranged on the other side, wherein the gas flow resistor is selected from the group consisting of the structure having at least one partition wall, the structure having a cover arranged to conform with the shape of the transport roll and covering the target object and the transport roll, and the structure including a nip roll and a roll cover covering the nip roll.
- 2. The active energy beam irradiating apparatus according to claim 1, further comprising a doctor blade to shield gas entry, arranged between the transport roll and the roll cover or between the nip roll and the roll cover covering the nip roll.
- 3. An apparatus for an active energy beam irradiation of a target object, comprising:
an irradiating chamber including a transport inlet for transporting the target object into the irradiating chamber and a transport outlet for transporting the target object out of the irradiating chamber; an irradiating apparatus for irradiating the target object with an active energy beam within the irradiating chamber; and a gas supply mechanism for supplying one of an inert gas and a reactive gas into the irradiating chamber to thereby set up one of an inert gas atmosphere and a reactive gas atmosphere within the irradiating chamber, wherein the irradiating chamber includes:
an irradiating section for irradiating the target object with the active energy beam emitted from the irradiating apparatus; a first transport duct arranged on the side of the transport inlet; and a second transport duct arranged on the side of the transport outlet, wherein a gas flow resistance of the second transport duct is equal to or higher than a gas flow resistance of the first transport duct wherein one of the first transport duct and the second transport duct includes a transport roll and a roll cover at least partially covering the transport roll, both arranged on a first side of one of a front surface and a back surface of the target object passing through the transport ducts, and wherein a gas flow resistor is arranged on a second side, and wherein the gas flow resistor is selected from the group consisting of the structure having at least one partition wall, the structure having a cover arranged to conform with the shape of the transport roll and covering the target object and the transport roll, and the structure including a nip roll and a roll cover covering the nip roll.
- 4. The active energy beam irradiating apparatus according to claim 3, further comprising a doctor blade to shield gas entry, arranged between the transport roll and the roll cover or between the nip roll and the roll cover covering the nip roll.
- 5. An apparatus for an active energy beam irradiation of a target object, comprising:
an irradiating chamber including a transport inlet for transporting the target object into the irradiating chamber and a transport outlet for transporting the target object out of the irradiating chamber; an irradiating apparatus for irradiating the target object with an active energy beam within the irradiating chamber; and a gas supply mechanism for supplying one of an inert gas and a reactive gas into the irradiating chamber to thereby set up one of an inert gas atmosphere and a reactive gas atmosphere within the irradiating chamber, wherein the irradiating chamber includes:
an irradiating section for irradiating the target object with the active energy beam emitted from the irradiating apparatus; a first transport duct arranged on the side of the transport inlet; and a second transport duct arranged on the side of the transport outlet, wherein a gas flow resistance of the second transport duct is equal to or higher than a gas flow resistance of the first transport duct wherein one of the first transport duct and the second transport duct includes a transport roll and a roll cover at least partially covering the transport roll, both arranged on a first side of one of a front surface and a back surface of the target object passing through the transport ducts, and wherein a gas flow resistor is arranged on a second side, and wherein the first transport duct differs in structure from the second transport duct.
- 6. The active energy beam irradiating apparatus according to claim 5, wherein the transport duct on the side of the transport inlet has any of the structures selected from the group consisting of the structure having at least one partition wall, the structure having a cover arranged to conform with the shape of the transport roll and covering the target object and the transport roll, and the structure including a nip roll and a roll cover covering the nip roll, and the transport duct on the side of the transport outlet has any of the structures selected from the group consisting of the structures having at least one partition wall, the structure having a cover arranged to conform with the shape of the transport roll and covering the target object and the transport roll, and the structure including a nip roll and a roll cover covering the nip roll, the first transport duct differing from the second transport duct.
- 7. An apparatus for an active energy beam irradiation, comprising:
an irradiating chamber including a transport inlet for transporting the target object into the irradiating chamber and a transport outlet for transporting the target object out of the irradiating chamber; an irradiating apparatus for irradiating the target object with an active energy beam within the irradiating chamber; and a gas supply mechanism for supplying an inert gas or a reactive gas into the irradiating chamber thereby to set up an inert gas atmosphere or a reactive gas atmosphere within the irradiating chamber, wherein the irradiating chamber includes an irradiating section for irradiating the target object with the active energy beam emitted from the irradiating apparatus; a transport duct arranged on the side of the transport inlet port; and a transport duct arranged on the side of the transport outlet port, and wherein the transport duct on the side of the transport inlet includes a transport roll and a roll cover covering at least partially the transport roll, both arranged on one side of any of the front surface and the back surface of the target object passing through the transport duct, and includes a gas flow resistor arranged on the other side and having at least one partition wall or a cover arranged to conform with the shape of the transport roll and constructed to cover the target object and the transport roll; the transport duct on the side of the transport outlet includes a transport roll and a roll cover covering at least partially the transport roll, both arranged on one side of any of the front surface and the back surface of the target object passing through the transport duct, and includes a gas flow resistor arranged on the other side and having a nip roll and a nip roll cover covering the nip roll; and the gas flow resistance of the transport duct on the side of the transport outlet is higher than the gas flow resistance of the transport duct on the side of the transport inlet.
- 8. A transport duct for an apparatus for an active energy beam irradiation, comprising:
a transport roll and a roll cover covering at least partially the transport roll, both arranged on one side of any of the front surface and the back surface of a target object passing through the transport duct; and a gas flow resistor arranged on the other side and having at least one partition wall.
- 9. A transport duct for an apparatus for an active energy beam irradiation, comprising:
a transport roll and a roll cover covering at least partially the transport roll, both arranged on one side of any of the front surface and the back surface of a target object passing through the transport duct; and a gas flow resistor arranged on the other side and having a cover shaped to conform with the shape of the transport roll and constructed to cover the target object and the transport roll.
- 10. A transport duct for an apparatus for an active energy beam irradiation, comprising:
a transport roll and a roll cover covering at least partially the transport roll, both arranged on one side of any of the front surface and the back surface of a target object passing through the transport duct; and a gas flow resistor arranged on the other side and having a nip roll and a roll cover covering the nip roll.
- 11. The transport duct according to claim 8, further comprising a doctor blade serving to prevent a gas entry and arranged between the transport roll and the roll cover.
- 12. The transport duct according to claim 9, further comprising a doctor blade serving to prevent a gas entry and arranged between the transport roll and the roll cover.
- 13. The transport duct according to claim 10, further comprising a doctor blade serving to prevent a gas entry and arranged between the transport roll and the roll cover.
- 14. A method for an active energy beam irradiation, in which an inert gas or a reactive gas is introduced into an irradiating chamber for irradiating an active energy beam thereby to set up an inert gas atmosphere or a reactive gas atmosphere within the irradiating chamber, a target object to be irradiated is introduced into the irradiating chamber through a transport inlet of the irradiating chamber for irradiation with the active energy beam in an active energy irradiating section of the irradiating chamber and, then, the target object is transported out of the irradiating chamber through a transport outlet,
wherein the pressures both inside and outside the irradiating chamber are measured and the supply of the inert gas or the reactive gas into the irradiating chamber is controlled on the basis of the differential pressure between the pressure inside the irradiating chamber and the pressure outside the irradiating chamber.
- 15. The method for an active energy beam irradiation according to claim 14, wherein an inert gas or a reactive gas is supplied such that the differential pressure is maintained constant.
- 16. The method for an active energy beam irradiation according to claim 14, wherein the active energy beam is an electron beam, and a nitrogen gas is supplied into the irradiating chamber.
- 17. A method for an active energy beam irradiation, in which an inert gas or a reactive gas is introduced into an irradiating chamber for irradiating an active energy beam thereby to set up an inert gas atmosphere or a reactive gas atmosphere within the irradiating chamber, a target object to be irradiated is introduced into the irradiating chamber through a transport inlet of the irradiating chamber for irradiation with the active energy beam in an active energy irradiating section of the irradiating chamber and, then, the target object is transported out of the irradiating chamber through a transport outlet,
wherein the pressures both inside and outside the irradiating chamber are measured and the size of the opening in the transport inlet and/or the transport outlet is controlled on the basis of the differential pressure between the pressure inside the irradiating chamber and the pressure outside the irradiating chamber.
- 18. The method for an active energy beam irradiation according to claim 17, wherein the size of the opening of the transport inlet and/or the transport outlet is controlled to maintain constant the differential pressure.
- 19. An apparatus for an active energy beam irradiation, comprising:
an irradiating chamber for irradiating a target object with an active energy beam including a transport inlet for transporting the target object into the irradiating chamber and a transport outlet for transporting the target object out of the irradiating chamber; an irradiating apparatus for irradiating the target object with the active energy beam within the irradiating chamber; a transport mechanism for transporting the target object; a gas supply mechanism for supplying an inert gas or a reactive gas into the irradiating chamber; a differential pressure measuring apparatus for measuring the differential pressure between the pressure inside the irradiating chamber and the pressure outside the irradiating chamber; and a control mechanism for controlling at least one of (a) the supply of the inert gas, (b) the size of the opening in the transport inlet and/or the transport outlet, and (c) the transport speed of the target object, on the basis of the differential pressure measured by the differential pressure measuring apparatus.
- 20. An apparatus for an active energy beam irradiation, comprising:
an irradiating chamber for irradiating a target object with an active energy beam including a transport inlet for transporting the target object into the irradiating chamber and a transport outlet for transporting the target object out of the irradiating chamber; an irradiating apparatus for irradiating the target object with the active energy beam within the irradiating chamber; a transport mechanism for transporting the target object; a gas supply mechanism for supplying an inert gas or a reactive gas into the irradiating chamber; a differential pressure measuring apparatus for measuring the differential pressure between the pressure inside the irradiating chamber and the pressure outside the irradiating chamber; a supply amount control mechanism for controlling the supply amount of the inert gas or the reactive gas; an opening control mechanism for controlling the size of the opening of the transport inlet and/or the transport outlet; and a speed control mechanism for controlling the transport speed of the target object, wherein at least one of the supply amount control mechanism, the opening control mechanism, and the speed control mechanism is controlled on the basis of the differential pressure measured by the differential pressure measuring apparatus.
- 21. The apparatus for an active energy beam irradiation according to claim 20, wherein the opening control mechanism includes a roll
- 22. The apparatus for an active energy beam irradiation according to claim 20, further comprising a control mechanism for controlling at least one of the supply amount control mechanism, the opening control mechanism, and the speed control mechanism on the basis of the differential pressure measured by the differential pressure measuring apparatus.
- 23. The apparatus for an active energy beam irradiation according to claim 19, wherein the active energy beam is an electron beam, and the gas supply mechanism supplies a nitrogen gas.
- 24. The apparatus for an active energy beam irradiation according to claim 20, wherein the active energy beam is an electron beam, and the gas supply mechanism supplies a nitrogen gas.
Priority Claims (2)
Number |
Date |
Country |
Kind |
11-288934 |
Oct 1999 |
JP |
|
2000-289726 |
Sep 2000 |
JP |
|
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is a Divisional of U.S. application Ser. No. 09/857,367 filed Jun. 4, 2001, which is a U.S. National Phase Application under 35 USC 371 of International Application PCT/JP00/007052(not published in English) filed Oct. 11, 2000.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09857367 |
Jun 2001 |
US |
Child |
10794672 |
Mar 2004 |
US |