Number | Name | Date | Kind |
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3841762 | Pettersson | Oct 1974 | |
4057719 | Lewis | Nov 1977 | |
4231663 | Phillippi | Nov 1980 | |
4275296 | Adolfsson | Jun 1981 | |
4461537 | Raymer, II et al. | Jul 1984 | |
4559452 | Igaki et al. | Dec 1985 | |
4573760 | Fan et al. | Mar 1986 | |
4602154 | Taniguchi | Jul 1986 | |
4694690 | Jones et al. | Sep 1987 | |
4728187 | Dubroeucq et al. | Mar 1988 | |
4744626 | Mery | May 1988 |
Entry |
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Practical Method for Edge Detection and Focusing for Linewidth Measurements on Wafers by Diana Nyyssone, Optical Engineering, Jan. 1987, vol. 26, No. 1, 081-085. |